WO2000054030A3 - Integrated calorimetric spectrometer - Google Patents

Integrated calorimetric spectrometer Download PDF

Info

Publication number
WO2000054030A3
WO2000054030A3 PCT/US2000/006075 US0006075W WO0054030A3 WO 2000054030 A3 WO2000054030 A3 WO 2000054030A3 US 0006075 W US0006075 W US 0006075W WO 0054030 A3 WO0054030 A3 WO 0054030A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor layer
substrate
waveguide
polychromatic radiation
thermal detectors
Prior art date
Application number
PCT/US2000/006075
Other languages
French (fr)
Other versions
WO2000054030A2 (en
Inventor
Slobodan Rajic
Panagiotis George Datskos
Marybeth Egert
Original Assignee
Lockheed Martin Energy Res Cor
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lockheed Martin Energy Res Cor filed Critical Lockheed Martin Energy Res Cor
Priority to AU51219/00A priority Critical patent/AU5121900A/en
Publication of WO2000054030A2 publication Critical patent/WO2000054030A2/en
Publication of WO2000054030A3 publication Critical patent/WO2000054030A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/38—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids
    • G01J5/40—Radiation pyrometry, e.g. infrared or optical thermometry using extension or expansion of solids or fluids using bimaterial elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/171—Systems in which incident light is modified in accordance with the properties of the material investigated with calorimetric detection, e.g. with thermal lens detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/601—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using spectral scanning

Abstract

A micro-instrument for detecting a chemical is formed on a coin-sized semiconductor substrate. A waveguide is formed by a semiconductor layer disposed on the substrate. The waveguide semiconductor layer has a groove forming an entrance aperture for receiving polychromatic radiation. An infrared emitter is disposed in the groove for generating the polychromatic radiation. An array of micro-mechanical thermal detectors can be formed integrally with the substrate. Each of the thermal dectectors has a measurable characteristic physical parameter and each of the thermal detectors has a coating exhibiting a preferential adsorption of at least one chemical to be sensed. A self focusing reflection grating is formed integrally with the waveguide semiconductor layer for directing a monochromatic spectrum onto the array responsive to the polychromatic radiation, such that each of the thermal detectors receives different wavelengths of the monochromatic spectrum.
PCT/US2000/006075 1999-03-12 2000-03-09 Integrated calorimetric spectrometer WO2000054030A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU51219/00A AU5121900A (en) 1999-03-12 2000-03-09 Integrated calorimetric spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26729299A 1999-03-12 1999-03-12
US09/267,292 1999-03-12

Publications (2)

Publication Number Publication Date
WO2000054030A2 WO2000054030A2 (en) 2000-09-14
WO2000054030A3 true WO2000054030A3 (en) 2001-02-15

Family

ID=23018175

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/006075 WO2000054030A2 (en) 1999-03-12 2000-03-09 Integrated calorimetric spectrometer

Country Status (2)

Country Link
AU (1) AU5121900A (en)
WO (1) WO2000054030A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100492074C (en) * 2006-12-01 2009-05-27 中国科学院半导体研究所 Isolator silicon back-etching total reflection perpendicular coupling structure and manufacture method
WO2011134156A1 (en) * 2010-04-29 2011-11-03 晶兆科技股份有限公司 Optomechanical module of micro-spectrometer with conical slit and slit structure thereof
TWI525308B (en) 2012-11-16 2016-03-11 台灣超微光學股份有限公司 Spectrometer, assembling method thereof, and assembling system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0254879A2 (en) * 1986-07-28 1988-02-03 Kernforschungszentrum Karlsruhe Gmbh Multicomponent process-analysis system
US4950077A (en) * 1988-04-28 1990-08-21 Olympus Optical Co., Ltd. Photoelectric measuring apparatus for use in automatic analyzer
US5512490A (en) * 1994-08-11 1996-04-30 Trustees Of Tufts College Optical sensor, optical sensing apparatus, and methods for detecting an analyte of interest using spectral recognition patterns
US5623561A (en) * 1995-09-29 1997-04-22 Georgia Tech Research Corporation Integrated optic interferometric sensor
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US5923421A (en) * 1997-07-24 1999-07-13 Lockheed Martin Energy Research Corporation Chemical detection using calorimetric spectroscopy

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0254879A2 (en) * 1986-07-28 1988-02-03 Kernforschungszentrum Karlsruhe Gmbh Multicomponent process-analysis system
US4950077A (en) * 1988-04-28 1990-08-21 Olympus Optical Co., Ltd. Photoelectric measuring apparatus for use in automatic analyzer
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US5512490A (en) * 1994-08-11 1996-04-30 Trustees Of Tufts College Optical sensor, optical sensing apparatus, and methods for detecting an analyte of interest using spectral recognition patterns
US5623561A (en) * 1995-09-29 1997-04-22 Georgia Tech Research Corporation Integrated optic interferometric sensor
US5923421A (en) * 1997-07-24 1999-07-13 Lockheed Martin Energy Research Corporation Chemical detection using calorimetric spectroscopy

Also Published As

Publication number Publication date
AU5121900A (en) 2000-09-28
WO2000054030A2 (en) 2000-09-14

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