WO2000058759A3 - Active probe for an atomic force microscope and method of use thereof - Google Patents

Active probe for an atomic force microscope and method of use thereof Download PDF

Info

Publication number
WO2000058759A3
WO2000058759A3 PCT/US2000/005450 US0005450W WO0058759A3 WO 2000058759 A3 WO2000058759 A3 WO 2000058759A3 US 0005450 W US0005450 W US 0005450W WO 0058759 A3 WO0058759 A3 WO 0058759A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
feedback circuit
self
afm
control signal
Prior art date
Application number
PCT/US2000/005450
Other languages
French (fr)
Other versions
WO2000058759A2 (en
Inventor
Dennis M Adderton
Stephen C Minne
Original Assignee
Nanodevices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanodevices Inc filed Critical Nanodevices Inc
Priority to JP2000608203A priority Critical patent/JP4595041B2/en
Priority to DE10084431T priority patent/DE10084431B4/en
Priority to AU35101/00A priority patent/AU3510100A/en
Publication of WO2000058759A2 publication Critical patent/WO2000058759A2/en
Publication of WO2000058759A3 publication Critical patent/WO2000058759A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem

Abstract

An AFM (10) that combines an AFM Z position actuator (16) and a self-actuated Z-position cantilever (20) (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z-position measurements. The self-actuated cantilever (20) includes a Z-positioning element (36) integrated therewith and an oscillator that oscillates the cantilever (20) at a resonant frequency and at an oscillation amplitude equal to a setpoint value. The AFM includes a first feedback circuit (12) nested within a second feedback circuit (14), wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever (20) during a scanning operation, and the second feedback circuit (14) is responsive to the cantilever control signal to generate a position control signal.
PCT/US2000/005450 1999-03-29 2000-03-03 Active probe for an atomic force microscope and method of use thereof WO2000058759A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000608203A JP4595041B2 (en) 1999-03-29 2000-03-03 Active probe for atomic force microscope and method of using the same
DE10084431T DE10084431B4 (en) 1999-03-29 2000-03-03 Active probe for atomic resolution atomic force microscope and method of using same
AU35101/00A AU3510100A (en) 1999-03-29 2000-03-03 Active probe for an atomic force microscope and method of use thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/280,160 US6189374B1 (en) 1999-03-29 1999-03-29 Active probe for an atomic force microscope and method of use thereof
US09/280,160 1999-03-29

Publications (2)

Publication Number Publication Date
WO2000058759A2 WO2000058759A2 (en) 2000-10-05
WO2000058759A3 true WO2000058759A3 (en) 2001-07-12

Family

ID=23071940

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/005450 WO2000058759A2 (en) 1999-03-29 2000-03-03 Active probe for an atomic force microscope and method of use thereof

Country Status (6)

Country Link
US (4) US6189374B1 (en)
JP (1) JP4595041B2 (en)
KR (1) KR100732254B1 (en)
AU (1) AU3510100A (en)
DE (1) DE10084431B4 (en)
WO (1) WO2000058759A2 (en)

Families Citing this family (114)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6672144B2 (en) * 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US7987006B2 (en) * 2007-08-29 2011-07-26 Agilent Technologies, Inc. Automatic generation of PID parameters for a scanning probe microscope
DE10003693A1 (en) * 2000-01-28 2001-08-02 Zeiss Carl Scanning system with deflectable probe tip
JP2002188988A (en) * 2000-10-11 2002-07-05 Seiko Instruments Inc Scanning type probe microscope
US20020092340A1 (en) * 2000-10-30 2002-07-18 Veeco Instruments Inc. Cantilever array sensor system
JP3817466B2 (en) * 2000-11-29 2006-09-06 キヤノン株式会社 Non-contact atomic force microscope and observation method using the same
US6873163B2 (en) * 2001-01-18 2005-03-29 The Trustees Of The University Of Pennsylvania Spatially resolved electromagnetic property measurement
US6612160B2 (en) 2001-03-09 2003-09-02 Veeco Instruments, Inc. Apparatus and method for isolating and measuring movement in metrology apparatus
US6862921B2 (en) 2001-03-09 2005-03-08 Veeco Instruments Inc. Method and apparatus for manipulating a sample
WO2002079719A2 (en) * 2001-03-29 2002-10-10 Georgia Tech Research Corporation Microinterferometers with performance optimization
US7247895B2 (en) * 2001-07-26 2007-07-24 The Board Of Trustees Of The University Of Illinois Electrostatic nanolithography probe actuation device and method
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US20030075992A1 (en) * 2001-10-19 2003-04-24 Kouns Heath Elliot Utilizing feedback for control of switch actuators
US6941823B1 (en) * 2001-11-07 2005-09-13 Veeco Instruments Inc. Apparatus and method to compensate for stress in a microcantilever
WO2003081171A1 (en) * 2002-03-21 2003-10-02 Leica Microsystems Lithography Gmbh Device and method for maskless afm microlithography
JP3828030B2 (en) * 2002-03-25 2006-09-27 エスアイアイ・ナノテクノロジー株式会社 Temperature measuring probe and temperature measuring device
US7440117B2 (en) * 2002-03-29 2008-10-21 Georgia Tech Research Corp. Highly-sensitive displacement-measuring optical device
US7518737B2 (en) * 2002-03-29 2009-04-14 Georgia Tech Research Corp. Displacement-measuring optical device with orifice
US7116430B2 (en) 2002-03-29 2006-10-03 Georgia Technology Research Corporation Highly-sensitive displacement-measuring optical device
ES2194608B1 (en) * 2002-05-03 2005-03-16 Consejo Sup. Investig. Cientificas THE METHOD OF CONTINUOUS TEMPORARY EVOLUTION AND ITS IMPLEMENTATION TO OPTIMIZE THE FREQUENCY RESPONSE OF A FORCE MICROSCOPE.
ES2194607B1 (en) * 2002-05-03 2005-03-16 Consejo Superior Investigaciones Cientificas A CONTROL DEVICE FOR AN EXCITATION SIGNAL OF A RESONANT MECHANICAL OSCILLATING ELEMENT, A MEASUREMENT DEVICE, A METHOD FOR CONTROLLING THE EXCITATION SIGNAL, A METHOD FOR PERFORMING MEASUREMENTS, A COMPUTER PROGRAM AND A STORAGE DEVICE.
DE50201728D1 (en) * 2002-05-03 2005-01-13 Nanoworld Ag Neuchatel SPM sensor and method for its production
JP4190936B2 (en) * 2002-09-17 2008-12-03 エスアイアイ・ナノテクノロジー株式会社 Scanning probe microscope and its operation method
KR100501893B1 (en) * 2002-11-14 2005-07-25 한국전자통신연구원 Non-contact scanning apparatus using frequency response separation scheme and scanning method thereof
US6780664B1 (en) 2002-12-20 2004-08-24 Advanced Micro Devices, Inc. Nanotube tip for atomic force microscope
US6886395B2 (en) 2003-01-16 2005-05-03 Veeco Instruments Inc. Method of fabricating a surface probing device and probing device produced thereby
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
US7022976B1 (en) 2003-04-02 2006-04-04 Advanced Micro Devices, Inc. Dynamically adjustable probe tips
KR101195729B1 (en) * 2003-07-15 2012-10-29 더 유니버시티 오브 브리스톨 Probe for an atomic force microscope and a method of its use
US7055378B2 (en) * 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
US7165445B2 (en) 2003-08-25 2007-01-23 Asylum Research Corporation Digital control of quality factor in resonant systems including cantilever based instruments
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
JP2005321758A (en) * 2004-04-09 2005-11-17 Sii Nanotechnology Inc Scanning probe device, and processing method by scanning probe
JP2007532916A (en) * 2004-04-14 2007-11-15 ビーコ インストルメンツ インコーポレイテッド Method and apparatus for obtaining quantitative measurements using a probe-based instrument
US7385411B2 (en) * 2004-08-31 2008-06-10 Formfactor, Inc. Method of designing a probe card apparatus with desired compliance characteristics
US7111504B2 (en) * 2004-09-30 2006-09-26 Lucent Technologies Inc. Atomic force microscope
GB2437753B8 (en) 2004-10-01 2009-05-20 Nevada System Of Higher Education Cantilevered probe detector with piezoelectric element
US7485847B2 (en) * 2004-12-08 2009-02-03 Georgia Tech Research Corporation Displacement sensor employing discrete light pulse detection
JP4995466B2 (en) * 2005-03-08 2012-08-08 エスアイアイ・ナノテクノロジー株式会社 Processing method with scanning probe
FR2885446B1 (en) * 2005-05-09 2007-07-20 St Microelectronics Sa COAXIAL PROBE, METHOD FOR MANUFACTURING SAME, AND ELECTROMAGNETIC CLAY MEASURING DEVICE ON SUBMICROMETRIC DISTANCE SYSTEMS
JP5164147B2 (en) * 2005-05-31 2013-03-13 国立大学法人金沢大学 Scanning probe microscope and cantilever drive device
US8220318B2 (en) * 2005-06-17 2012-07-17 Georgia Tech Research Corporation Fast microscale actuators for probe microscopy
US7513142B2 (en) * 2005-08-12 2009-04-07 Veeco Instruments Inc. Tracking qualification and self-optimizing probe microscope and method
EP1755137A1 (en) 2005-08-18 2007-02-21 University of Teheran A method of forming a carbon nanotube emitter, carbon nanotube emitter with applications in nano-printing and use thereof
EP1938040B1 (en) * 2005-09-29 2018-11-21 Bruker Nano, Inc. Method and apparatus of high speed property mapping
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
US7752898B2 (en) * 2005-10-28 2010-07-13 Georgia Tech Research Corporation Devices for probe microscopy
US7647965B2 (en) * 2005-10-31 2010-01-19 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
US20070144244A1 (en) * 2005-12-28 2007-06-28 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
US8302456B2 (en) 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
US7607342B2 (en) * 2006-04-26 2009-10-27 Vecco Instruments, Inc. Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
FR2901601B1 (en) * 2006-05-24 2008-12-19 Univ Grenoble 1 ASSISTED ATOMIC STRENGTH MICROSCOPE
CA2654233A1 (en) * 2006-06-12 2007-12-21 Trefford Simpson Method of calibrating a biometric device
US7748260B2 (en) * 2006-07-12 2010-07-06 Veeco Instruments Inc. Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US7568381B2 (en) * 2006-08-02 2009-08-04 University Of North Carolina At Charlotte Apparatus and method for surface property measurement with in-process compensation for instrument frame distortion
US7797757B2 (en) * 2006-08-15 2010-09-14 Georgia Tech Research Corporation Cantilevers with integrated actuators for probe microscopy
EP2063250B1 (en) * 2006-09-04 2018-09-05 National University Corporation Kanazawa University Atomic force microscope
EP2060901B1 (en) * 2006-09-06 2019-12-18 National University Corporation Kanazawa University Scan type probe microscope and active damping drive control device
US7770439B2 (en) * 2006-10-17 2010-08-10 Veeco Instruments Inc. Method and apparatus of scanning a sample using a scanning probe microscope
US7853067B2 (en) * 2006-10-27 2010-12-14 Asml Holding N.V. Systems and methods for lithographic reticle inspection
US7574327B2 (en) * 2006-12-12 2009-08-11 Sc Solutions All-digital cantilever controller
US8248750B2 (en) * 2007-12-13 2012-08-21 Bayer Materialscience Ag Electroactive polymer transducers
EP1950764A1 (en) * 2007-01-23 2008-07-30 Nambition GmbH Fluid cell for raster scanning probe microscopy or force spectroscopy
US7745206B2 (en) * 2007-01-29 2010-06-29 Arizona State University AFM for simultaneous recognition of multiple factors
US8168120B1 (en) 2007-03-06 2012-05-01 The Research Foundation Of State University Of New York Reliable switch that is triggered by the detection of a specific gas or substance
US7721587B2 (en) * 2007-03-12 2010-05-25 Purdue Research Foundation System and method for improving the precision of nanoscale force and displacement measurements
US8429954B2 (en) * 2007-03-12 2013-04-30 Purdue Research Foundation Monolithic comb drive system and method for large-deflection multi-DOF microtransduction
US8402819B2 (en) * 2007-05-15 2013-03-26 Anasys Instruments, Inc. High frequency deflection measurement of IR absorption
DE102007031112A1 (en) * 2007-06-27 2009-01-02 Technische Universität Ilmenau Apparatus and method for investigating surface properties of various materials
US7952261B2 (en) 2007-06-29 2011-05-31 Bayer Materialscience Ag Electroactive polymer transducers for sensory feedback applications
CN100570347C (en) * 2007-07-19 2009-12-16 清华大学 A kind of sensor for self-testing self-oscillation of resonant-type tiny cantilever beam
US8505110B2 (en) * 2007-10-10 2013-08-06 Eloret Corporation Apparatus and process for controlled nanomanufacturing using catalyst retaining structures
JP5148969B2 (en) * 2007-10-26 2013-02-20 みずほ情報総研株式会社 Cantilever evaluation system, cantilever evaluation method, and cantilever evaluation program
US7979916B2 (en) * 2008-05-23 2011-07-12 Bede Pittenger Preamplifying cantilever and applications thereof
WO2010044869A1 (en) * 2008-10-14 2010-04-22 Proksch, Roger Modular atomic force microscope
JP5226481B2 (en) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス Self-displacement detection cantilever and scanning probe microscope
EP2374011B1 (en) 2008-12-11 2018-11-21 Infinitesima Limited Dynamic probe detection system and method
JP5340119B2 (en) * 2009-02-10 2013-11-13 株式会社日立ハイテクサイエンス Proximity method of probe and sample in scanning probe microscope
EP2219035A1 (en) * 2009-02-16 2010-08-18 Institut Curie Method for automatic adjustment of the applied force and control of the force drift in an Atomic Force Microscope during contact mode imaging.
EP2239793A1 (en) 2009-04-11 2010-10-13 Bayer MaterialScience AG Electrically switchable polymer film structure and use thereof
US20120047610A1 (en) 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
US8549660B2 (en) 2010-04-09 2013-10-01 Boise State University Cantilever-based optical fiber probe interfacial force microscope for partial immersion in liquid
US9408555B2 (en) 2010-06-30 2016-08-09 Indiana University Research And Technology Corporation Supersensitive linear pressure transducer
WO2012078415A2 (en) * 2010-11-29 2012-06-14 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
WO2012115653A1 (en) * 2011-02-25 2012-08-30 Agilent Technologies, Inc. Atomic force microscopy controller and method
JP2014513510A (en) 2011-03-01 2014-05-29 バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Deformable polymer device and automated manufacturing process for making deformable polymer film
WO2012129357A2 (en) 2011-03-22 2012-09-27 Bayer Materialscience Ag Electroactive polymer actuator lenticular system
US8458810B2 (en) * 2011-04-07 2013-06-04 Michael E. MCCONNEY Scanning thermal twisting atomic force microscopy
US8997954B2 (en) 2011-04-14 2015-04-07 Phillip D. Rodenbeck Variable-elastomer semi-active damping apparatus
US9689891B2 (en) * 2011-05-27 2017-06-27 Keysight Technologies, Inc. Automatic gain tuning in atomic force microscopy
ES2403555B1 (en) 2011-10-10 2014-03-28 Universidad Autonoma De Madrid CONTROL PROCEDURE OF A SWEEP MICROSCOPE
WO2013142552A1 (en) 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
US10254306B2 (en) 2012-11-29 2019-04-09 Infinitesima Limited Probe calibration or measurement routine
US8726411B1 (en) * 2013-03-21 2014-05-13 National Tsing Hua University Charged probe and electric fields measurement method thereof
US8943611B2 (en) 2013-07-23 2015-01-27 National Institute Of Standards And Technology Probe module, method for making and use of same
EP2913681A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
EP2913682A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe actuation system with feedback controller
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
US11162977B2 (en) * 2014-12-23 2021-11-02 Yale University Tuned oscillator atomic force microscopy methods and apparatus
US10739193B2 (en) * 2015-10-09 2020-08-11 Leica Microsystems Cms Gmbh Dynamic lock-in detection bandwidth for SRS imaging
KR102407818B1 (en) * 2016-01-26 2022-06-10 삼성전자주식회사 Cantilever set for atomic force microscope, apparatus for substrate surface inspection comprising the same, method of analyzing a surface of a semiconductor substrate using the same, and method of forming a micropattern using the same
US10837981B2 (en) 2016-05-04 2020-11-17 Institut National De La Sante Et De La Recherche Medicale (Inserm) Method of operating an AFM
RU2638365C1 (en) * 2016-11-29 2017-12-13 Общество с ограниченной ответственностью Научно-производственное предприятие "Центр перспективных технологий" Flow liquid cell for scanning probe microscopy
RU2645884C1 (en) * 2016-11-29 2018-02-28 Общество с ограниченной ответственностью Научно-производственное предприятие "Центр перспективных технологий" Flowing liquid mesh for scanning probe microscopy
CN109580990B (en) * 2017-09-28 2021-08-06 中国医学科学院基础医学研究所 Method for detecting cell surface holes by adopting atomic force microscope
JP7031851B2 (en) * 2017-12-27 2022-03-08 株式会社生体分子計測研究所 Atomic force microscope
JP7048964B2 (en) * 2018-03-26 2022-04-06 株式会社日立ハイテクサイエンス Scanning probe microscope and its scanning method
CN109873948B (en) * 2019-01-30 2020-06-26 中国地质大学（武汉） Intelligent automatic focusing method and device for optical microscope and storage device
JPWO2021044934A1 (en) * 2019-09-05 2021-03-11
US11002759B2 (en) 2019-09-10 2021-05-11 The United States Of America As Represented By The Secretary Of The Army High-sensitivity, low thermal deflection, stress-matched atomic force microscopy and scanning thermal microscopy probes
WO2022258084A1 (en) 2021-07-13 2022-12-15 Ceske Vysoke Uceni Technicke V Praze A method of examining a sample in an atomic force microscope

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519212A (en) * 1992-08-07 1996-05-21 Digital Instruments, Incorporated Tapping atomic force microscope with phase or frequency detection
US5631410A (en) * 1994-12-12 1997-05-20 Jeol Ltd. Vibrating probe atomic force microscope
US5723775A (en) * 1995-07-05 1998-03-03 Nikon Corporation Atomic force microscope under high speed feedback control
US5883705A (en) * 1994-04-12 1999-03-16 The Board Of Trustees Of The Leland Stanford, Jr. University Atomic force microscope for high speed imaging including integral actuator and sensor
US5955660A (en) * 1995-12-08 1999-09-21 Seiko Instruments Inc. Method of controlling probe microscope
US5965881A (en) * 1996-11-14 1999-10-12 Hitachi Construction Machinery Co., Ltd. Scanning probe microscope and processing apparatus

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US34489A (en) * 1862-02-25 Improvement in metallic cases for pictures, cards
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
US5237859A (en) 1989-12-08 1993-08-24 Digital Instruments, Inc. Atomic force microscope
US5224376A (en) 1989-12-08 1993-07-06 Digital Instruments, Inc. Atomic force microscope
JP2976131B2 (en) * 1990-09-13 1999-11-10 セイコーインスツルメンツ株式会社 Scanning tunnel microscope
JP2915554B2 (en) 1990-11-19 1999-07-05 オリンパス光学工業株式会社 Barrier height measurement device
US5210410A (en) 1991-09-26 1993-05-11 The Board Of Trustees Of The Leland Stanford Junior University Scanning probe microscope having scan correction
EP0551814B1 (en) 1992-01-10 1997-04-02 Hitachi, Ltd. Surface observing apparatus and method
JP3070216B2 (en) * 1992-01-13 2000-07-31 株式会社日立製作所 Surface microscope and microscopic method
US5319960A (en) * 1992-03-06 1994-06-14 Topometrix Scanning force microscope
US5412980A (en) 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
US5321977A (en) 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
US5406832A (en) 1993-07-02 1995-04-18 Topometrix Corporation Synchronous sampling scanning force microscope
US5537863A (en) * 1993-07-15 1996-07-23 Nikon Corporation Scanning probe microscope having a cantilever used therein
US5440121A (en) 1993-12-28 1995-08-08 Seiko Instruments Inc. Scanning probe microscope
US5517280A (en) 1994-04-12 1996-05-14 The Board Of Trustees Of The Leland Stanford, Jr. University Photolithography system
US5742377A (en) 1994-04-12 1998-04-21 The Board Of Trustees Of The Leland Stanford, Jr. University Cantilever for scanning probe microscope including piezoelectric element and method of using the same
US5883387A (en) * 1994-11-15 1999-03-16 Olympus Optical Co., Ltd. SPM cantilever and a method for manufacturing the same
US5838005A (en) * 1995-05-11 1998-11-17 The Regents Of The University Of California Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like
JPH10239329A (en) * 1997-02-27 1998-09-11 Jeol Ltd Scanning probe microscope
JPH09264897A (en) * 1996-03-28 1997-10-07 Hitachi Constr Mach Co Ltd Scanning probe microscope
JPH1010140A (en) * 1996-06-26 1998-01-16 Hitachi Constr Mach Co Ltd Scanning probe microscope
JP3925991B2 (en) * 1997-07-08 2007-06-06 日本電子株式会社 Scanning probe microscope
US6038916A (en) * 1997-07-22 2000-03-21 Digital Instruments Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope
JP2000266657A (en) * 1999-03-16 2000-09-29 Seiko Instruments Inc Self excitation type cantilever
US6245204B1 (en) * 1999-03-23 2001-06-12 Molecular Imaging Corporation Vibrating tip conducting probe microscope

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519212A (en) * 1992-08-07 1996-05-21 Digital Instruments, Incorporated Tapping atomic force microscope with phase or frequency detection
US5883705A (en) * 1994-04-12 1999-03-16 The Board Of Trustees Of The Leland Stanford, Jr. University Atomic force microscope for high speed imaging including integral actuator and sensor
US5631410A (en) * 1994-12-12 1997-05-20 Jeol Ltd. Vibrating probe atomic force microscope
US5723775A (en) * 1995-07-05 1998-03-03 Nikon Corporation Atomic force microscope under high speed feedback control
US5955660A (en) * 1995-12-08 1999-09-21 Seiko Instruments Inc. Method of controlling probe microscope
US5965881A (en) * 1996-11-14 1999-10-12 Hitachi Construction Machinery Co., Ltd. Scanning probe microscope and processing apparatus

Also Published As

Publication number Publication date
AU3510100A (en) 2000-10-16
KR20020006032A (en) 2002-01-18
US20030094036A1 (en) 2003-05-22
JP2002540436A (en) 2002-11-26
KR100732254B1 (en) 2007-06-25
DE10084431B4 (en) 2011-08-11
WO2000058759A2 (en) 2000-10-05
DE10084431T5 (en) 2004-07-01
JP4595041B2 (en) 2010-12-08
US7017398B2 (en) 2006-03-28
US6189374B1 (en) 2001-02-20
US20050066714A1 (en) 2005-03-31
US6530266B1 (en) 2003-03-11
US6810720B2 (en) 2004-11-02

Similar Documents

Publication Publication Date Title
WO2000058759A3 (en) Active probe for an atomic force microscope and method of use thereof
Sulchek et al. Characterization and optimization of scan speed for tapping-mode atomic force microscopy
EP0587459B1 (en) Tapping atomic force microscope
CA1330452C (en) Oscillating quartz atomic force microscope
US6005246A (en) Scanning probe microscope
US6008489A (en) Method for improving the operation of oscillating mode atomic force microscopes
EP0839312B1 (en) Tapping atomic force microscope with phase or frequency detection
US7036357B2 (en) Dynamic activation for an atomic force microscope and method of use thereof
US7596989B2 (en) Probe for an atomic force microscope
KR100878078B1 (en) High bandwidth recoiless microactuator
US6281495B1 (en) Method of producing magnetic force image and scanning probe microscope
US6823724B1 (en) Method and apparatus for measuring values of physical property
US7194897B2 (en) Non-contact scanning apparatus using frequency response scheme and scanning method thereof
Itoh et al. Piezoelectric force sensor for scanning force microscopy
US6006595A (en) Device for vibrating cantilever
EP0449221A3 (en) Scanning probe microscope
WO2000046569A1 (en) System and method of multi-dimensional force sensing for atomic force microscopy
JP3809893B2 (en) Scanning probe microscope
Seo et al. Quartz crystal resonator based scanning probe microscopy
Suter et al. Local oxidation of titanium using dynamic-mode tuning-fork probe with microfabricated silicon cantilever
Takata Tunneling acoustic microscopy
Labardi et al. Force gradient versus distance curves studied by atomic force microscopy
Kowalewski et al. Improvement of Tapping Mode AFM Imaging Stability by Operation Far Below Resonance Frequency of a Cantilever

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AL AM AT AU AZ BA BB BG BR BY CA CH CN CR CU CZ DE DK DM EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

ENP Entry into the national phase

Ref document number: 2000 608203

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1020017012508

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 1020017012508

Country of ref document: KR

122 Ep: pct application non-entry in european phase
RET De translation (de og part 6b)

Ref document number: 10084431

Country of ref document: DE

Date of ref document: 20040701

Kind code of ref document: P

WWE Wipo information: entry into national phase

Ref document number: 10084431

Country of ref document: DE

REG Reference to national code

Ref country code: DE

Ref legal event code: 8607

WWG Wipo information: grant in national office

Ref document number: 1020017012508

Country of ref document: KR

REG Reference to national code

Ref country code: DE

Ref legal event code: 8607