WO2000075996A1

WO2000075996A1 - Radiation detecting device connected by anisotropically conductive film

Info

Publication number: WO2000075996A1
Application number: PCT/FR2000/001557
Authority: WO
Inventors: Loïck Verger; Jacques Rustique; Jean-Louis Girard
Original assignee: Commissariat A L'energie Atomique
Priority date: 1999-06-08
Filing date: 2000-06-07
Publication date: 2000-12-14
Also published as: FR2794894A1; FR2794894B1

Abstract

The invention concerns a radiation detecting device comprising: at least a semiconductor detector (10, 12, 14), at least an electronic circuit (16) for polarising and/or scanning said detector, and connection means (18a, 18b, 20a, 20b, 21a, 21b) between said detector and said electronic circuit, and wherein the connection means comprise at least an adhesive anisotropically conductive film (18a, 18b). The invention is applicable to medical imaging systems.

Description

RADIATION DETECTION DEVICE CONNECTED BY ANISOTROPIC CONDUCTIVE FILM

Technical Field The present invention relates to a radiation detection device, sensitive to X, beta or gamma radiation and to an imaging system using such a detection device.

The invention finds applications in scientific and industrial fields, in particular in radiology, and for the non-destructive testing of matter. It also finds applications in nuclear medicine and medical imaging.

In particular, the detection device of the invention can be used in a gamma camera, a positron tomograph or a digital radiological imager.

STATE OF THE PRIOR ART Among the radiation detectors generally used, a distinction can be made in particular between scintillation detectors and semiconductor detectors.

In a scintillation detector, energy radiation interacts with the material of a crystal, called a scintillator, which emits a light photon in response to an X photon or a γ photon. The light photon is then converted into electrical charges by means of a photomultiplier. The energy resolution of a detector is strongly linked to the number of charges supplied in response to an event, that is to say in response to an interaction between the radiation and the material of the detector.

In semiconductor detectors, which do not have a scintillator, the number of charges created in response to an incident X or γ photon is of an order of magnitude greater than that obtained with a scintillation detector. Thus, semiconductor detectors tend to gradually replace scintillation detectors, especially in areas such as medical imaging where the activity of radiation sources is not very important. Semiconductor detectors are made from semiconductor blocks such as CdTe, CdZnTe, GaAs, InP, and operate on a principle of direct conversion of the energy of incident photons into carriers of electrical charges. This principle is illustrated very briefly with reference to Figure 1.

The detector of FIG. 1 comprises a single detection element formed from a semiconductor block 10. On the opposite main faces of the block, designated by "connection faces" in the remainder of the text, a first electrode is formed respectively. 12 and a second electrode 14.

The electrodes are connected to an electronic circuit 16. This circuit has two functions essential. The first function is to apply a bias voltage between the electrodes 12 and 14. The second function is to collect the charges created by the interaction of radiation in the semiconductor and thus form a detection signal.

The detection signal can then be supplied to an image forming circuit, not shown.

When an energetic radiation reaches the semiconductor block 10, it creates charges in the form of electron-hole pairs, by yielding all or part of its energy to matter.

Under the effect of an electric field established between the electrodes by the application of the bias voltage, the electrons and the holes respectively migrate towards the electrodes located on the opposite connection faces. The electrons and the holes are then collected by the circuit 16 for the formation of the signal.

FIG. 2 shows a semiconductor detector constituting a variant with respect to that of FIG. 1. It comprises a plurality of detection elements formed in the same semiconductor block 10.

Each detection element is defined by an individual electrode 14 formed on one of the connection faces. This connection face thus comprises several juxtaposed but not contiguous electrodes. The opposite connection face of the semiconductor has a single electrode 12 common to all the detection elements.

Such a detector structure is known for example from document (1), the reference of which is specified at the end of the description.

The reference 16, in FIG. 2, always designates an electronic bias and reading circuit intended to apply a bias voltage between the common electrode 12 and the individual electrodes 14, and intended to collect a detection signal for each of the elements detection.

Phantom lines represent the necessary connections between the electrodes of the detector, and in particular the individual electrodes 14, and corresponding terminals of the electronic circuit 16.

The connection between the detector and the electronic circuit, or an intermediate connection card, must meet a certain number of requirements and raises a certain number of difficulties.

A first connection possibility consists in bonding the detector directly to the substrate of the electronic circuit or to an appropriate intermediate connection support, using a conductive adhesive.

However, conductive adhesives, generally with two components, are expensive and their application to the components requires complex techniques. The application of glue indeed comprises an operation of mixing the components then a deposition according to a screen printing technique.

In addition, problems of chemical compatibility between the adhesives and the material of the detector can lead to defects in reliability and drops in performance of the detectors over time.

It may be added that the bonding of the detectors, if it remains possible for detectors with a single detection element, such as the detector illustrated in FIG. 1, proves to be particularly disadvantageous for detectors comprising a plurality of detection elements, this which is the case for the detector of fig 2.

In fact, to prevent the conductive adhesive from short-circuiting the individual electrodes of the detection elements, it is necessary to provide suitable insulation. This requires the implementation of complex masking steps. This additional constraint is incompatible with good spatial resolution of the detectors and with the production of detectors with a high density of detection elements (pixels). To avoid the difficulties mentioned above, and to increase the resolution of the detectors, a second known connection possibility uses a hybridization technique, using balls of junction material. In this case, the detector, comprising one or more detection elements, can be postponed and connected directly to a platform comprising the bias or read circuits. The hybridization technique which is well mastered in the context of the manufacture of infrared type sensors is also envisaged for X-ray or γ-ray imaging devices. By way of illustration, reference may be made to documents (2), (3), (4) and (5), the references of which are given at the end of the description.

Hybridization of detectors however remains a technique whose implementation is costly and complex. It is moreover unsuitable for the connection of large detectors. The transfer area authorized by the usual hybridization techniques is in fact limited to a few square centimeters. Finally, it is worth highlighting the fragility of the detectors which withstand mechanical and thermal stresses very poorly. Temperatures above 150 ° C., necessary for the hybridization of the connection balls, are, for example, liable to alter the detection properties.

Statement of the invention

The object of the present invention is to propose a device for detecting radiation which does not present the difficulties mentioned above, and which is linked to the connection of a detector to a reading and polarization circuit.

An aim is also to propose a device capable of being produced without the detectors of radiation are not subjected to excessive mechanical or thermal stresses.

Another object is to propose a large detection device, inexpensive, capable of being fitted with detectors also large, or of a large number of individual detection elements.

To achieve these aims, the invention more specifically relates to a radiation detection device comprising:

- at least one semiconductor detector,

at least one electronic circuit for biasing and / or reading said detector, and

- connection means between said detector and said electronic circuit.

According to the invention, the connection means comprise at least one self-adhesive conductive film.

The term self-adhesive conductive film is understood to mean a film allowing electrical contact and a mechanical bond without the exertion of pressure or the implementation of a heat treatment being necessary.

The use of a self-adhesive conductive film turns out to be a particularly economical and reliable means for assembling the constituent elements of the device and for ensuring the electrical connections between the semiconductor detector and the electronic circuit. It also makes it possible to assemble large surface elements (a few dm ² ). In addition, the use of a self-adhesive film makes it possible to free the fragile parts of the device, and in particular the detector, from any mechanical or thermal stress. Finally, the self-adhesive conductive film is less likely to interact chemically with the parts it assembles, than a conductive glue.

According to a particularly advantageous aspect of the invention, the self-adhesive film can be an anisotropic conductive film comprising two principal opposite parallel faces, the film being conductive in a direction perpendicular to the faces and being substantially insulating in a direction parallel to the main faces.

In other words, the anisotropic film is conductive in the direction of its thickness and insulating parallel to its surface.

This feature makes it possible to make an easy connection between a plurality of individual electrodes of the detector and corresponding terminals of a connection support, without taking any particular measures for mutual insulation between the electrodes.

Indeed, as the anisotropic conductive film is insulating in a direction parallel to its surface, any short circuit between neighboring electrodes is automatically avoided.

It should be noted that the anisotropic conductive films are not known per se. These are, for example, acrylic adhesive films loaded with conductive particles. These particles can present in particular in the form of calibrated nickel beads, coated with silver. Such a film is marketed for example by the company 3M under the reference 9703. A more detailed description of the structure of the film is therefore omitted here.

In a particular embodiment of the device of the invention, the connection means may further comprise one or more connection cards, connected to said electronic circuit. Each connection card is glued against a connection face of the semiconductor detector, equipped with at least one electrode, by means of said conductive adhesive film. Here, the connection card essentially has an intermediary role between the detector and the electronic polarization and / or reading circuit.

Optionally, when a plurality of detection devices are associated, the connection card can also have a role of electrical insulation. This aspect is described in more detail later in the text.

In certain embodiments, the connection card can also serve as a support for all or part of the electronic bias and / or reading circuit.

In a particular construction of the device, the connection means may include in particular a first connection card glued to a first connection face of the semi-detector conductive via a first self-adhesive conductive film and a second connection card glued to a second connection face of the semiconductor detector, opposite to said first connection face, via a second self-adhesive film driver. An anisotropic conductive film is used in particular when the corresponding connection face comprises more than one electrode.

One of the connection cards can be used for example for the connection of a single common electrode on the first connection face, while the second card can be provided for the individual connection of a plurality of electrodes on the second face of the detector. Each electrode then corresponds to an individual detector of the same block of semiconductors.

The invention also relates to an imaging system, such as for example a medical imaging system, comprising a detection device as described above, with a stack of a plurality of detectors.

Other characteristics and advantages of the present invention will emerge more clearly from the description which follows, with reference to the figures of the appended drawings. This description is given purely by way of non-limiting illustration.

Brief description of the figures,

- Figure 1, already described, is a simplified schematic section of a radiation detector at unique detection element illustrating the operating principle of semiconductor detectors.

- Figure 2, already described, is a simplified schematic section of a semiconductor detector and multiple detection elements.

- Figure 3 is an exploded perspective view of the structure of a detection device according to the invention.

- Figure 4 is an exploded perspective view of the structure of a detection device according to the invention and including a plurality of radiation detectors.

Detailed description of methods of implementing the invention

In the following description, identical, similar or equivalent parts of the various figures mentioned above are designated with the same references. Furthermore, it should be noted that for reasons of readability of the figures, the various components of the devices shown are not reproduced on a uniform scale.

In FIG. 3, there is a detector with multiple detection elements, formed in a block 10 of semiconductor material.

The reference 12 designates a common electrode, for example made of Au chemically deposited from an AuCl ₃ salt, on a first connection face of the block 10. Similarly, the reference 14 refers to a plurality of individual electrodes formed on the second connection face.

In the example described, the thickness of the semiconductor block 10 is 0.9 mm and the connection faces each have an area of 16 × 20 mm ² .

Although the figure shows a smaller number, the second connection face can be equipped, for example, with sixteen longitudinal electrodes 14, in the form of a comb with a pitch of 1 mm.

The common electrode 12 is connected to a first terminal of a reading and polarization circuit 16 via an anisotropic conductive film 18a, a first connection card 20a, and a connection line shown symbolically with the reference 21a.

The connection card is for example formed from a sheet of insulating material such as Kapton, covered with a layer or a conductive copper track.

In the figure, a face 22a of the first connection card 20a, facing the silicon block 10, is covered with a layer of copper. The opposite face 24a is insulating.

The electrodes 14 of the second face of the semiconductor block 10 are individually connected to a plurality of corresponding terminals of the electronic circuit 16. They are connected to it by means of a second conductive film anisotropic 18b, a second connection card 20b and a bundle of connection lines 21b.

The connection lines 21b, as well as the line 21a, can be constituted, for example, by conductive tracks, or can be simply eliminated when the electronic circuit 16 for reading and polarization is directly formed or transferred to one of the connection cards.

The second connection card 20b has a face 22b facing the semiconductor block 10, part of which is bonded to the block via the second anisotropic conductive film 18b. The face 22b also includes isolated connection tracks, shown very schematically and in dotted lines in the figure, which provide the connection to the reading circuit. Like the first connection card, the second card 20b can be formed from copper-colored Kapton.

Thanks to the anisotropic conduction nature of the adhesive conductive film 18b, each electrode 14 can be individually connected to a terminal and a connection track of the connection card 20b, and therefore to the reading and polarization circuit.

The read and bias circuit can thus be designed to apply a bias voltage to all of the electrodes and to collect individually the charges appearing on each electrode 14 in response to interactions taking place in corresponding regions of the semi- block. driver. The use of copper Kapton sheets as a connection card is particularly advantageous. It makes it possible, when the sheets are bonded to the semiconductor block by the anisotropic conductive films, to obtain a particularly compact structure.

In addition, the electrical insulating nature of the faces 24a, 24b turned away from the semiconductor block allow the association and in particular the stacking of a plurality of detectors without any particular insulation measure.

Such a stack is shown in the form of an exploded view in FIG. 4. The stack comprises a plurality of detectors formed of semiconductor blocks 10, for example 256 in number, each equipped with a first and with a second connection cards 20a, 20b. The cards are respectively connected to the detectors by films 18a, 18b anisotropic conductors.

The electrical connections 21a, 21b to a bias and read circuit 16 are symbolically indicated by dashed lines.

Each detector, that is to say each semiconductor block, comprises a number of detection elements corresponding to the number of individual electrodes 14 shown in FIG. 3.

Thus, by stacking a, plurality of detectors each comprising a plurality of elements of detection, a device is obtained with a large number of individual elements also called "pixels".

The signals of all the pixels can be collected by the electronic circuit 16 and processed to form an "image" of the radiation received from the environment. To this end, the circuit 16 can include or be associated with an image forming circuit. This type of circuit is known per se.

The good performance of semiconductor detectors, associated with anisotropic conductive film connection means, which avoid leakage currents between neighboring pixels, make it possible to produce particularly reliable imaging systems, and in particular medical imaging systems. with excellent energy resolution.

It should be noted that the anisotropic conductive films used are self-adhesive films, the installation of which requires neither mechanical nor thermal effort. For example, in the case where the films are placed manually, a simple smoothing of the finger makes it possible to guarantee the mechanical contacting of the surfaces to be made integral.

CITED DOCUMENTS

(1)

"Modeling by an analytical function of a pixellized CdTe photoconduc ₍ tor response") by Jean-François GIGOT et al. 9 ^th international workshop on roo temperature semiconductor X and γ ray detectors associâtes electronics & applications.

(2)

"X-ray imaging performances of a 2D hybrid cadmium telluride structure" by F. Glasser et al.

Nuclear Instruments and methods in Physics Research A 380 (1996) 252-255

(3)

"Preliminary characterization of a new hybrid structure with CdTe; X-ray imaging capabilities" by Marc CUZIN et al.

SPIE July 1994 IMASOL

(*)

"Progress in developing focal-plane multiplexer readout for large CdZnTe arrays for nuclear medicine applications" by H.B. BARBER et al.

Nuclear Instruments and Methods in Physics Research A380 (1996) 262-265

(5)

GB-A-2 319 394

Claims

1. Radiation detection device comprising:

- at least one semiconductor detector (10, 12, 14), - at least one electronic circuit (16) for biasing and / or reading said detector, and

- connection means (18a, 18b, 20a, 20b, 21a, 21b) between said detector and said electronic circuit, characterized in that the connection means comprise at least one self-adhesive conductive film (18a, 18b).

2. Device according to claim 1, in which the self-adhesive film (18a, 18b) is an anisotropic conductive film comprising two opposite main parallel faces, the film being conductive in a direction perpendicular to the faces and being insulating in a direction parallel to the main faces.

3. Device according to claim 2, wherein the connection means further comprises at least one connection card (20a, 20b), connected to said electronic circuit (16), each connection card being glued against a connection face of the detector. semiconductor, equipped with at least one electrode, by means of said self-adhesive film

(18a, 18b).

4. Device according to claim 3, wherein at least part of the electronic circuit is formed on the connection card.

5. Device according to claim 2, in which the connection means (20a) comprise a first connection card bonded to a first connection face of the semiconductor detector by means of a first self-adhesive anisotropic conductive film. (18a) and a second connection card (20b) bonded to a second connection face of the semiconductor detector, opposite to said first connection face, by means of a second anisotropic conductive self-adhesive film (20b ).

6. Device according to claim 5, in which the first connection face of the detector is equipped with a single electrode (12) and in which the second connection face of the detector is equipped with a plurality of electrodes (14).

7. Detection device according to claim 1, comprising a plurality of semiconductor detectors.

8. Detection device according to claim 7, in which each detector (10, 12, 14) is equipped with a first and a second connection card (20a, 20b), bonded respectively to the detector by means of an anisotropic conductive self-adhesive film, in which the detectors, fitted with connection cards are stacked.

9. An imaging system comprising a detection device according to claim 8.