WO2001002173A1 - Method for producing a microcomponent, use of a print head that functions according to the ink jet principle for producing a microcomponent, and device for producing a microcomponent - Google Patents

Method for producing a microcomponent, use of a print head that functions according to the ink jet principle for producing a microcomponent, and device for producing a microcomponent Download PDF

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Publication number
WO2001002173A1
WO2001002173A1 PCT/EP2000/006404 EP0006404W WO0102173A1 WO 2001002173 A1 WO2001002173 A1 WO 2001002173A1 EP 0006404 W EP0006404 W EP 0006404W WO 0102173 A1 WO0102173 A1 WO 0102173A1
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WO
WIPO (PCT)
Prior art keywords
micro
component
microcomponent
producing
print head
Prior art date
Application number
PCT/EP2000/006404
Other languages
German (de)
French (fr)
Inventor
Wolfgang Wehl
Original Assignee
Ekra Eduard Kraft Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ekra Eduard Kraft Gmbh filed Critical Ekra Eduard Kraft Gmbh
Priority to AU68223/00A priority Critical patent/AU6822300A/en
Publication of WO2001002173A1 publication Critical patent/WO2001002173A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • B41J3/4073—Printing on three-dimensional objects not being in sheet or web form, e.g. spherical or cubic objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
    • B41M3/16—Braille printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/0023—Digital printing methods characterised by the inks used

Definitions

  • the invention relates to a method for producing a micro component, the use of a printhead which works according to the ink printing principle and a device for producing a micro component.
  • microcomponents which for example comprise plastic or consist of plastic
  • injection molds which are then sprayed out with the liquid plastic. After solidification, the microcomponent can be removed from the mold.
  • a disadvantage of these manufacturing processes is that the manufacture of the injection molds is complex and expensive. Especially if you only want to produce a prototype.
  • the starting material is spherical mig before, similar to the well-known metallic sintered materials.
  • the balls are then applied in layers to a carrier by means of a suitable device, to which they may be fixed by stabilizing measures. If the component is applied in layers, the balls can be melted by subsequent heat treatment, so that the individual balls connect to one another and thus form the macroscopic component.
  • the disadvantage here is that only components that are at least 5 to 10 mm in size can be produced. In addition, the contour accuracy of the components is not sufficiently good in some cases.
  • the liquid phase material for the microcomponent is sprayed onto a substrate in the form of drops, with several drops of the material being present in a common plane and / or in different planes and after solidification form the micro device.
  • the print head By means of the print head, several drops are applied to a substrate next to and / or one above the other and / or at least partially overlapping one another.
  • the method according to the invention can thus be used to produce microcomponents quickly and easily, since after the sprayed-out liquid mass has solidified, the microcomponent is already finished, so subsequent reflow processes can largely be dispensed with.
  • the method according to the invention makes it possible to produce microcomponents which have dimensions which are smaller than 5 to 10 mm. With the print head working according to the ink printing principle, it is also possible to spray drop sizes or drops with a volume such that the contour accuracy is improved compared to the known method.
  • the material for the microcomponent and preferably a liquid support material are sprayed out of at least one print head simultaneously or in succession. If support material is sprayed out before or at the same time as the material for the microcomponent, more complex designs can also be implemented for the microcomponents, since undercuts or the like can also be formed.
  • the material for the microcomponent and the support material is sprayed out from different outlet openings of a printhead.
  • a print head is used for each material to be sprayed out.
  • a support material is also applied to the substrate, provision is preferably made for the support material to be removed after the microcomponent has been finished, so that the microcomponent is exposed.
  • etching processes or chemical dissolution of the support material can be provided.
  • the support material and the material for the microcomponent have different melting temperatures, the support material can optionally also be removed by heating, the melting temperature of the support material being below that of the microcomponent.
  • Plastics, metals and / or glass can be used as the material for the microcomponent, it preferably being provided that these materials have a low melting temperature so that the print head is not damaged.
  • the microcomponent is post-treated, for example by being subjected to a heat treatment and / or a treatment with a chemical.
  • the properties of the component surface can thus be influenced in particular.
  • the chemical can be liquid.
  • gaseous chemicals can also be used for the treatment of the micro component.
  • This object is also achieved by using a printhead which works on the ink printing principle, as stated in claim 8. It is envisaged that the printhead, which works on the ink printing principle, is used for the production of a micro component.
  • the material for the microcomponent is sprayed drop-shaped from the print head onto a substrate, wherein individual drops can be present in a common plane and / or in different planes. Drops can thus be sprayed onto one another, next to one another or at least partially overlapping. If materials are used for the microcomponent that have melting temperatures that are below 150 ° C., even printheads that do not have to be particularly temperature-resistant can be used.
  • a device for producing a micro component which shows the features of claim 9.
  • a device is therefore provided which comprises at least one printhead which works on the ink printing principle and from which the material for the microcomponent is sprayed in drops onto a substrate.
  • the print head comprises a medium chamber, a membrane forming a wall of the medium chamber and an actuator for deflecting the membrane, the medium chamber having at least one ejection opening.
  • the actuator is thermally decoupled from the membrane.
  • materials for the microcomponents that have melting temperatures that are above 150 ° C. If, for example, piezoelectric actuators are used, it is necessary to keep the operating temperature of the actuator below the piezoelectric Curie temperature.
  • thermal decoupling is provided so that the temperature on the membrane cannot be passed on to the actuator.
  • Figure 1 is a sectional view of a micro device
  • Figure 2 shows a print head
  • a microcomponent 1 is described with reference to FIG. 1, which has a relatively simple structure, here essentially T-shaped. NATURALLY Micro components with more complex or simpler structures can also be manufactured.
  • the microcomponent 1 is constructed from a plurality of layers 2, each layer preferably having a plurality of material drops 3 which lie next to one another or even partially run into one another. It is also possible that the drops 3 can be arranged partially overlapping and offset from one another within the layer, that is to say in one plane.
  • the lowermost layer 2 is sprayed onto a substrate 4 by means of a print head which works according to the ink printing principle and is shown in FIG. 2. After completion of the first layer, the second layer 2 is sprayed onto the first layer or the lowest layer 2. It can thus be seen that a plurality of material drops 3 can be present in a common plane, that is to say in a common layer 2 and / or in different planes, that is to say in different, parallel layers 2.
  • the essentially T-shaped structure of the microcomponent in addition to the base 5, also has a cross member 6 which rests on the base 5, it is necessary to also spray on a support material 7 in the layers 2 in addition to the material drops 3 for the microcomponent 1, so that the cross member 6 can be sprayed onto the top layer of the support material 7.
  • a support material 7 in the layers 2 in addition to the material drops 3 for the microcomponent 1, so that the cross member 6 can be sprayed onto the top layer of the support material 7.
  • an extension which runs essentially at right angles to the cross member 6, that is to say parallel to the base 5, however, does not extend to the substrate 4.
  • the support material 7 is sprayed out with a print head, it is possible to produce almost any shape and / or contour of a micro-component, so that undercuts of the support material 7 can also be provided on the extension 8 on the extension 8.
  • the support material 7 can be removed in a subsequent process, so that the actual microcomponent 1 is exposed. Subsequently or simultaneously, the microcomponent 1 can also be detached from the substrate.
  • the material drops 3 and the support material 7 are applied to the substrate 4 using a print head 9 which works according to the ink printing principle and is shown in FIG.
  • the print head 9 comprises a medium chamber 10 in which the material for the microcomponent 1 or the support material 7 is present. If both materials are applied to the substrate 4 by means of a print head 9, the print head 9 preferably has at least two medium chambers 10 which are separated from one another, or else two print heads 9 are used.
  • the medium chamber 10 has an ejection opening 11, from which the material drops 3 or the support material 7 are sprayed onto the substrate 4 in drops.
  • a Wall of the medium chamber forming membrane 12 is deflected so that the materials emerge in a drop shape from the ejection opening 11.
  • the print head 9 has an actuator 13, which is designed in particular as a piezoelectric element and has two contact surfaces for its electrical control, only the contact surface 14 being shown in FIG. 2. The other contact surface is parallel to the contact surface 14, that is parallel to the plane of the drawing.
  • the electrical actuation of the actuator 13 changes its length, so that the membrane 12 either moves in the direction of the bottom 16 of the medium chamber or is removed from the bottom 16, the membrane 12 being deflected arched. If hot materials are sprayed out of the medium chamber 10, the actuator 13 has a heat blocking element 17, which forms a thermal transition resistance between the membrane 12 and the actuator 13. This ensures that the piezoelectrically active parts of the actuator 13 are below the piezoelectric Curie temperature, so that it is ensured that the actuator 13 works optimally, that is, its change in length as a function of the applied electrical voltage remains constant, whereby constant from the ejection opening 11 Drop volume can be applied.
  • the actuator 13 is held within a housing 18 of the print head 9, with its end having the contact surfaces 14.
  • the print head 9 preferably has a heating device 19, so that the material present in the medium chamber 10 can be kept at the appropriate temperature at which it is liquid. However, it can also be provided that the material is introduced into the medium chamber 10 already hot and liquid, which means that the heating device 19 can be dispensed with if necessary.
  • a pulsed electrical control of the actuator 13 can be provided for this purpose.
  • a cooling medium can be introduced into the housing interior through a housing opening 20 and flows around the actuator 13 so that it is at a housing opening 21 located in the vicinity of the ejection opening 11 emerges again.
  • temperature sensors 22 can be arranged on the side of the membrane 12 facing away from the medium chamber 10, said temperature sensors 22 detecting the temperature of the materials prevailing in the medium chamber 10, so that the heating device 19 is controlled accordingly, that is to say switched on or off can be.
  • the ejection openings 11 of the print heads 9 have opening cross sections of different sizes, so that different droplets window sizes are deployable. If only one print head with several medium chambers 10 is used, the ejection openings can of course have different cross-sectional sizes.
  • the print head 9 can be moved relative to the substrate 4 or the substrate can be moved relative to the print head 9.

Abstract

The invention relates to a method for producing a microcomponent (1). According to said method, the material (3) for the microcomponent (1), which is in liquid phase, is injected onto a substrate (4) in drops, by means of a print head (9) that functions according to the ink jet principle. Several drops (3) of the material lie in a common plane (layer 2) and/or in different planes and once they harden, form the microcomponent (1).

Description

Verfahren zur Herstellung eines Mikrobauelements, Verwendung eines nach dem Tintendruckprinzip arbeitenden Druckkopfes zur Herstellung eines Mikrobauelements und Vorrichtung zum Herstellen eines Mik- robaue1ementsMethod for producing a micro-component, use of a printhead working according to the ink printing principle for producing a micro-component and device for producing a micro-component
Beschreibungdescription
Die Erfindung betrifft ein Verfahren zur Herstellung eines Mikrobauelements, die Verwendung eines nach dem Tintendruckprinzip arbeitenden Druckkopfes sowie eine Vorrichtung zum Herstellen eines Mikrobauelements .The invention relates to a method for producing a micro component, the use of a printhead which works according to the ink printing principle and a device for producing a micro component.
Für die Herstellung von Mikrobauelementen, die beispielsweise Kunststoff umfassen oder aus Kunststoff bestehen, ist es bekannt, Spritzgießformen herzustellen, die dann mit dem flüssigen Kunststoff ausgespritzt werden. Nach dem Erstarren kann das Mikrobauelement aus der Form entnommen werden. Nachteilig bei diesen Herstellungsverfahren ist, daß die Herstellung der Spritzgießformen aufwendig und teuer ist. Insbesondere, wenn lediglich ein Prototyp hergestellt werden soll.For the production of microcomponents, which for example comprise plastic or consist of plastic, it is known to produce injection molds which are then sprayed out with the liquid plastic. After solidification, the microcomponent can be removed from the mold. A disadvantage of these manufacturing processes is that the manufacture of the injection molds is complex and expensive. Especially if you only want to produce a prototype.
Es ist auch bekannt, Bauelemente in makroskopischer Größe nach einem sogenannten Rapid-Prototyping- Verfahren herzustellen. Hierbei werden keine Spritzgießformen oder dergleichen benötigt, wenn Kunststoffbauelemente hergestellt werden sollen. Beispielsweise liegt das Ausgangsmaterial kugelför- mig vor, ähnlich den bekannten metallischen Sinterwerkstoffen. Die Kugeln werden dann mittels einer geeigneten Vorrichtung schichtweise auf einen Träger aufgetragen, auf dem sie gegebenenfalls durch stabilisierende Maßnahmen fixiert werden. Ist das Bauelement schichtweise aufgetragen, können durch anschließende Wärmebehandlung die Kugeln aufgeschmolzen werden, so daß sich die einzelnen Kugeln miteinander verbinden und so das makroskopische Bauelement bilden. Nachteilig hierbei ist, daß sich lediglich Bauteile herstellen lassen, die mindestens 5 bis 10 mm groß sind. Außerdem ist in manchen Fällen die Konturgenauigkeit der Bauelemente nicht ausreichend gut .It is also known to produce macroscopic components by a so-called rapid prototyping process. No injection molds or the like are required here if plastic components are to be produced. For example, the starting material is spherical mig before, similar to the well-known metallic sintered materials. The balls are then applied in layers to a carrier by means of a suitable device, to which they may be fixed by stabilizing measures. If the component is applied in layers, the balls can be melted by subsequent heat treatment, so that the individual balls connect to one another and thus form the macroscopic component. The disadvantage here is that only components that are at least 5 to 10 mm in size can be produced. In addition, the contour accuracy of the components is not sufficiently good in some cases.
Es ist daher Aufgabe der Erfindung, ein Verfahren und eine Vorrichtung zum Herstellen eines Mikrobauelements anzugeben, das/die diese Nachteile nicht aufweisen.It is therefore an object of the invention to provide a method and an apparatus for producing a micro component which do not have these disadvantages.
Gelöst wird diese Aufgabe mit einem Verfahren zur Herstellung eines Mikrobauelements, das die im Anspruch 1 genannten Merkmale zeigt . Erfindungsgemäß ist vorgesehen, daß mittels eines nach dem Tintendruckprinzip arbeitenden Druckkopfes das in flüssiger Phase vorliegende Material für das Mikrobauelement tropfenförmig auf ein Substrat aufgespritzt wird, wobei mehrere Tropfen des Materials in einer gemeinsamen Ebene und/oder in unterschiedlichen E- benen vorliegen und nach dem Erstarren das Mikrobauelement bilden. Mittels des Druckkopfes werden also mehrere Tropfen nebeneinander und/oder übereinander und/oder zumindest teilweise einander ü- berlappend auf ein Substrat aufgetragen. Mit dem erfindungsgemäßen Verfahren können also Mikrobau- elemente schnell und einfach hergestellt werden, da nach dem Erstarren der ausgespritzten flüssigen Masse das Mikrobauelement bereits fertiggestellt ist, also auf nachfolgende Reflow-Prozesse weitgehend verzichtet werden kann. Außerdem ist es mit dem erfindungsgemäßen Verfahren möglich, Mikrobau- elemente herzustellen, die Abmessungen aufweisen, die kleiner als 5 bis 10 mm sind. Mit dem nach dem Tintendruckprinzip arbeitenden Druckkopf ist es darüber hinaus möglich, Tropfengrößen beziehungsweise Tropfen mit einem Volumen derart auszuspritzen, daß die Konturgenauigkeit gegenüber dem bekannten Verfahren verbessert ist .This object is achieved with a method for producing a micro component which shows the features mentioned in claim 1. According to the invention it is provided that by means of a print head operating according to the ink printing principle, the liquid phase material for the microcomponent is sprayed onto a substrate in the form of drops, with several drops of the material being present in a common plane and / or in different planes and after solidification form the micro device. By means of the print head, several drops are applied to a substrate next to and / or one above the other and / or at least partially overlapping one another. With the The method according to the invention can thus be used to produce microcomponents quickly and easily, since after the sprayed-out liquid mass has solidified, the microcomponent is already finished, so subsequent reflow processes can largely be dispensed with. In addition, the method according to the invention makes it possible to produce microcomponents which have dimensions which are smaller than 5 to 10 mm. With the print head working according to the ink printing principle, it is also possible to spray drop sizes or drops with a volume such that the contour accuracy is improved compared to the known method.
Nach einer Weiterbildung der Erfindung ist vorgesehen, daß gleichzeitig oder nacheinander das Material für das Mikrobauelement und vorzugsweise ein flüssiges Stützmaterial aus zumindest einem Druckkopf ausgespritzt werden. Wird Stützmaterial vor oder gleichzeitig mit dem Material für das Mikrobauelement ausgespritzt, können auch komplexere Bauformen für die Mikrobauelemente realisiert werden, da auch Hinterschneidungen oder dergleichen mit ausgebildet werden können.According to a development of the invention it is provided that the material for the microcomponent and preferably a liquid support material are sprayed out of at least one print head simultaneously or in succession. If support material is sprayed out before or at the same time as the material for the microcomponent, more complex designs can also be implemented for the microcomponents, since undercuts or the like can also be formed.
Nach einer Weiterbildung wird das Material für das Mikrobauelement und das Stützmaterial aus verschiedenen Auslaßöffnungen eines Druckkopfs ausgespritzt. Alternativ kann vorgesehen sein, daß für jedes auszuspritzende Material ein Druckkopf verwendet wird. Wird ein Stützmaterial mit auf das Substrat aufgebracht, ist vorzugsweise vorgesehen, daß nach der Fertigstellung des Mikrobauelements das Stützmaterial entfernt wird, so daß das Mikrobauelement freigelegt wird. Zum Entfernen der Stützmaterialien können beispielsweise Ätz-Prozesse oder chemisches Auflösen des Stützmaterials vorgesehen sein. Weisen Stützmaterial und Material für das Mikrobauelement unterschiedliche Schmelztemperaturen auf, kann gegebenenfalls das Stützmaterial auch durch Erhitzen entfernt werden, wobei die Schmelztemperatur des Stützmaterials unterhalb der des Mikrobauelements liegt.According to a further development, the material for the microcomponent and the support material is sprayed out from different outlet openings of a printhead. Alternatively, it can be provided that a print head is used for each material to be sprayed out. If a support material is also applied to the substrate, provision is preferably made for the support material to be removed after the microcomponent has been finished, so that the microcomponent is exposed. To remove the support materials, for example, etching processes or chemical dissolution of the support material can be provided. If the support material and the material for the microcomponent have different melting temperatures, the support material can optionally also be removed by heating, the melting temperature of the support material being below that of the microcomponent.
Als Material für das Mikrobauelement können Kunststoffe, Metalle und/oder Glas Verwendung finden, wobei vorzugsweise vorgesehen ist, daß diese Materialien eine niedrige Schmelztemperatur besitzen, damit der Druckkopf nicht beschädigt wird.Plastics, metals and / or glass can be used as the material for the microcomponent, it preferably being provided that these materials have a low melting temperature so that the print head is not damaged.
Nach einer Weiterbildung ist vorgesehen, daß das Mikrobauelement nachbehandelt wird, beispielsweise indem es einer Wärmebehandlung und/oder einer Behandlung mit einer Chemikalie unterzogen wird. Damit lassen sich insbesondere die Eigenschaften der Bauelementoberfläche beeinflussen. Darüber hinaus ist es möglich, das Mikrobauelement weiter zu verfestigen, zu stabilisieren oder die Oberfläche zu glätten.According to a further development, it is provided that the microcomponent is post-treated, for example by being subjected to a heat treatment and / or a treatment with a chemical. The properties of the component surface can thus be influenced in particular. In addition, it is possible to further solidify, stabilize or smooth the surface of the microcomponent.
Bei einem Ausführungsbeispiel kann vorgesehen sein, daß die Chemikalie flüssig vorliegt. Alternativ können jedoch auch gasförmige Chemikalien für die Behandlung des Mikrobauelements verwendet werden. Diese Aufgabe wird auch durch die Verwendung eines nach dem Tintendruckprinzip arbeitenden Druckkopfes gelöst, wie dies im Anspruch 8 angegeben ist. Es ist vorgesehen, daß der nach dem Tintendruckprinzip arbeitende Druckkopf für die Herstellung eines Mikrobauelements verwendet wird. Aus dem Druckkopf wird das Material für das Mikrobauelement tropfenförmig auf ein Substrat ausgespritzt, wobei einzelne Tropfen in einer gemeinsamen Ebene und/oder in unterschiedlichen Ebenen vorliegen können. Es können also Tropfen aufeinander, nebeneinander oder zumindest teilweise überlappend aufgespritzt werden. Werden Materialien für das Mikrobauelement verwendet, die Schmelztemperaturen aufweisen, die unter 150°C liegen, können sogar Druckköpfe verwendet werden, die nicht besonders temperaturbeständig sein müssen.In one embodiment, the chemical can be liquid. Alternatively, however, gaseous chemicals can also be used for the treatment of the micro component. This object is also achieved by using a printhead which works on the ink printing principle, as stated in claim 8. It is envisaged that the printhead, which works on the ink printing principle, is used for the production of a micro component. The material for the microcomponent is sprayed drop-shaped from the print head onto a substrate, wherein individual drops can be present in a common plane and / or in different planes. Drops can thus be sprayed onto one another, next to one another or at least partially overlapping. If materials are used for the microcomponent that have melting temperatures that are below 150 ° C., even printheads that do not have to be particularly temperature-resistant can be used.
Die Aufgabe wird auch mit einer Vorrichtung zum Herstellen eines Mikrobauelements gelöst, die die Merkmale des Anspruchs 9 zeigt . Es ist also eine Vorrichtung vorgesehen, die zumindest einen Druckkopf umfaßt, der nach dem Tintendruckprinzip arbeitet und aus dem das Material für das Mikrobauelement tropfenförmig auf ein Substrat ausgespritzt wird.The object is also achieved with a device for producing a micro component, which shows the features of claim 9. A device is therefore provided which comprises at least one printhead which works on the ink printing principle and from which the material for the microcomponent is sprayed in drops onto a substrate.
Bei einem bevorzugten Ausführungsbeispiel der Vorrichtung ist vorgesehen, daß der Druckkopf eine Mediumkammer, eine eine Wandung der Mediumkammer bildende Membran und einen Aktor zur Auslenkung der Membran umfaßt, wobei die Mediumkammer zumindest eine Ausspritzöffnung aufweist. Außerdem ist vorge- sehen, daß der Aktor von der Membran thermisch entkoppelt ist. Insbesondere durch die thermische Entkopplung ist es möglich, auch Materialien für die Mikrobauelemente zu verwenden, die Schmelztemperaturen besitzen, die über 150°C liegen. Werden beispielsweise piezoelektrische Aktoren verwendet, ist es notwendig, die Betriebstemperatur des Aktors unterhalb der piezoelektrischen Curie-Temperatur zu halten. Hierzu ist die thermische Entkopplung vorgesehen, so daß die an der Membran vorliegende Temperatur nicht bis zum Aktor weitergeleitet werden kann. Somit können also in der Mediumkammer wesentlich höhere Temperaturen als bei üblichen Druckköpfen vorliegen, wobei dennoch gewährleistet ist, daß der Aktor einwandfrei arbeitet, da sichergestellt ist, daß seine Betriebstemperatur unterhalb der piezoelektrischen Curie-Temperatur liegt.In a preferred embodiment of the device it is provided that the print head comprises a medium chamber, a membrane forming a wall of the medium chamber and an actuator for deflecting the membrane, the medium chamber having at least one ejection opening. In addition, see that the actuator is thermally decoupled from the membrane. In particular, due to the thermal decoupling, it is also possible to use materials for the microcomponents that have melting temperatures that are above 150 ° C. If, for example, piezoelectric actuators are used, it is necessary to keep the operating temperature of the actuator below the piezoelectric Curie temperature. For this purpose, thermal decoupling is provided so that the temperature on the membrane cannot be passed on to the actuator. Thus there can be significantly higher temperatures in the medium chamber than in the case of conventional printheads, but it is nevertheless ensured that the actuator works properly, since it is ensured that its operating temperature is below the piezoelectric Curie temperature.
Weitere Ausgestaltungen ergeben sich aus den Unteransprüchen.Further refinements result from the subclaims.
Die Erfindung wird nachfolgend anhand von Ausführungsbeispielen mit Bezug auf die Zeichnung näher erläutert. Es zeigen:The invention is explained in more detail below on the basis of exemplary embodiments with reference to the drawing. Show it:
Figur 1 eine Schnittansicht eines Mikrobauelements, undFigure 1 is a sectional view of a micro device, and
Figur 2 einen Druckkopf .Figure 2 shows a print head.
Anhand von Figur 1 wird ein Mikrobauelement 1 beschrieben, daß eine relativ einfache Struktur, hier im wesentlichen T-förmig, aufweist. Selbstverständ- lich können auch Mikrobauelemente mit komplexeren oder einfacheren Strukturen hergestellt werden.A microcomponent 1 is described with reference to FIG. 1, which has a relatively simple structure, here essentially T-shaped. NATURALLY Micro components with more complex or simpler structures can also be manufactured.
Aus Figur 1 ist ersichtlich, daß das Mikrobauelement 1 aus mehreren Schichten 2 aufgebaut ist, wobei jede Schicht vorzugsweise mehrere Materialtropfen 3 aufweist, die nebeneinander liegen oder sogar teilweise ineinander verlaufen sind. Es ist auch möglich, daß die Tropfen 3 teilweise überlappend und innerhalb der Schicht, also in einer Ebene, versetzt zueinander angeordnet sein können. Die unterste Schicht 2 wird auf ein Substrat 4 mittels eines nach dem Tintendruckprinzip arbeitenden Druckkopfes, der in Figur 2 dargestellt ist, aufgespritzt. Nach Fertigstellung der ersten Schicht wird die zweite Schicht 2 auf die erste Schicht beziehungsweise unterste Schicht 2 aufgespritzt . Es ist also ersichtlich, daß mehrere Materialtropfen 3 in einer gemeinsamen Ebene, also in einer gemeinsamen Schicht 2 und/oder in unterschiedlichen Ebenen, also in unterschiedlichen, parallelen Schichten 2, vorliegen können.It can be seen from FIG. 1 that the microcomponent 1 is constructed from a plurality of layers 2, each layer preferably having a plurality of material drops 3 which lie next to one another or even partially run into one another. It is also possible that the drops 3 can be arranged partially overlapping and offset from one another within the layer, that is to say in one plane. The lowermost layer 2 is sprayed onto a substrate 4 by means of a print head which works according to the ink printing principle and is shown in FIG. 2. After completion of the first layer, the second layer 2 is sprayed onto the first layer or the lowest layer 2. It can thus be seen that a plurality of material drops 3 can be present in a common plane, that is to say in a common layer 2 and / or in different planes, that is to say in different, parallel layers 2.
Da die im wesentlichen T-förmige Struktur des Mikrobauelements außer dem Sockel 5 noch einen Querträger 6 aufweist, der auf dem Sockel 5 aufliegt, ist es notwendig, neben den Materialtropfen 3 für das Mikrobauelement 1 noch ein Stützmaterial 7 in den Schichten 2 mit aufzuspritzen, so daß der Querträger 6 auf die oberste Schicht des Stützmaterials 7 aufgespritzt werden kann. Es ist auch ersichtlich, daß an den Enden des Querträgers 6 ein Fortsatz ausgeht, der im wesentlichen rechtwinklig zum Querträger 6, also parallel zum Sockel 5 verläuft, jedoch sich nicht bis an das Substrat 4 heranerstreckt. Dadurch, daß das Stützmaterial 7 mit aus einem Druckkopf ausgespritzt wird, ist es möglich, nahezu beliebige Formen und/oder Konturen eines Mikrobauelements herzustellen, so daß wie im gezeigten Ausführungsbeispiel am Fortsatz 8 auch Hinterschneidungen des Stützmaterials 7 vorgesehen sein können.Since the essentially T-shaped structure of the microcomponent, in addition to the base 5, also has a cross member 6 which rests on the base 5, it is necessary to also spray on a support material 7 in the layers 2 in addition to the material drops 3 for the microcomponent 1, so that the cross member 6 can be sprayed onto the top layer of the support material 7. It can also be seen that at the ends of the cross member 6 there is an extension which runs essentially at right angles to the cross member 6, that is to say parallel to the base 5, however, does not extend to the substrate 4. Characterized in that the support material 7 is sprayed out with a print head, it is possible to produce almost any shape and / or contour of a micro-component, so that undercuts of the support material 7 can also be provided on the extension 8 on the extension 8.
Nachdem die letzte Schicht beziehungsweise oberste Schicht 2 der Materialtropfen 3 aufgetragen ist, also das Mikrobauelement fast fertiggestellt ist, kann in einem nachfolgenden Prozeß das Stützmaterial 7 entfernt werden, so daß das eigentliche Mikrobauelement 1 freigelegt wird. Anschließend oder gleichzeitig kann das Mikrobauelement 1 auch vom Substrat gelöst werden.After the last layer or uppermost layer 2 of the material drops 3 has been applied, that is to say the microcomponent is almost finished, the support material 7 can be removed in a subsequent process, so that the actual microcomponent 1 is exposed. Subsequently or simultaneously, the microcomponent 1 can also be detached from the substrate.
Die Materialtropfen 3 und das Stützmaterial 7 werden auf das Substrat 4 mit einem nach dem Tintendruckprinzip arbeitenden Druckkopf 9 aufgebracht, der in Figur 2 dargestellt ist. Der Druckkopf 9 umfaßt eine Mediumkammer 10, in der das Material für das Mikrobauelement 1 oder das Stützmaterial 7 vorliegt. Werden beide Materialien mittels eines Druckkopfes 9 auf das Substrat 4 aufgebracht, weist der Druckkopf 9 vorzugsweise zumindest zwei Mediumkammern 10 auf, die voneinander getrennt sind, oder aber es werden zwei Druckköpfe 9 verwendet .The material drops 3 and the support material 7 are applied to the substrate 4 using a print head 9 which works according to the ink printing principle and is shown in FIG. The print head 9 comprises a medium chamber 10 in which the material for the microcomponent 1 or the support material 7 is present. If both materials are applied to the substrate 4 by means of a print head 9, the print head 9 preferably has at least two medium chambers 10 which are separated from one another, or else two print heads 9 are used.
Die Mediumkammer 10 weist eine Ausspritzδffnung 11 auf, aus der die Materialtropfen 3 oder das Stütz- material 7 tropfenförmig auf das Substrat 4 ausgespritzt wird. Hierzu ist vorgesehen, daß eine eine Wandung der Mediumkammer bildende Membran 12 ausgelenkt wird, so daß die Materialien tropfenförmig aus der Ausspritzöffnung 11 heraustreten. Für die Auslenkung der Membran 12 weist der Druckkopf 9 einen Aktor 13 auf, der insbesondere als piezoelektrisches Element ausgebildet ist und für seine e- lektrische Ansteuerung zwei Kontaktierflächen aufweist, wobei lediglich die Kontaktierfläche 14 in Figur 2 ersichtlich ist. Die andere Kontaktierfläche liegt parallel zur Kontaktierfläche 14, also parallel zur Zeichnungsebene. Durch die elektrische Ansteuerung des Aktors 13 ändert dieser seine Länge, so daß die Membran 12 entweder in Richtung zum Boden 16 der Mediumkammer bewegt oder vom Boden 16 entfernt wird, wobei die Membran 12 dabei gewölbt ausgelenkt wird. Werden heiße Materialien aus der Mediumkammer 10 ausgespritzt, so weist der Aktor 13 ein Wärmesperrelement 17 auf, welches einen Wärme- Übergangswiderstand zwischen Membran 12 und Aktor 13 bildet. Dadurch wird gewährleistet, daß die piezoelektrisch aktiven Teile des Aktors 13 unterhalb der piezoelektrischen Curie-Temperatur liegen, so daß gewährleistet ist, daß der Aktor 13 optimal arbeitet, also seine Längenänderung in Abhängigkeit der angelegten elektrischen Spannung konstant bleibt, wodurch aus der Ausspritzöffnung 11 konstante Tropfenvolumen ausbringbar sind.The medium chamber 10 has an ejection opening 11, from which the material drops 3 or the support material 7 are sprayed onto the substrate 4 in drops. For this purpose it is provided that a Wall of the medium chamber forming membrane 12 is deflected so that the materials emerge in a drop shape from the ejection opening 11. For the deflection of the membrane 12, the print head 9 has an actuator 13, which is designed in particular as a piezoelectric element and has two contact surfaces for its electrical control, only the contact surface 14 being shown in FIG. 2. The other contact surface is parallel to the contact surface 14, that is parallel to the plane of the drawing. The electrical actuation of the actuator 13 changes its length, so that the membrane 12 either moves in the direction of the bottom 16 of the medium chamber or is removed from the bottom 16, the membrane 12 being deflected arched. If hot materials are sprayed out of the medium chamber 10, the actuator 13 has a heat blocking element 17, which forms a thermal transition resistance between the membrane 12 and the actuator 13. This ensures that the piezoelectrically active parts of the actuator 13 are below the piezoelectric Curie temperature, so that it is ensured that the actuator 13 works optimally, that is, its change in length as a function of the applied electrical voltage remains constant, whereby constant from the ejection opening 11 Drop volume can be applied.
Es ist ersichtlich, daß der Aktor 13 innerhalb eines Gehäuses 18 des Druckkopfes 9 gehalten ist, und zwar mit seinem Ende, welches die Kontaktflächen 14 aufweist . Der Druckkopf 9 weist vorzugsweise eine Heizeinrichtung 19 auf, so daß das in der Mediumkammer 10 vorliegende Material auf entsprechender Temperatur gehalten werden kann, bei der es flüssig vorliegt. Es kann jedoch auch vorgesehen sein, daß das Material bereits heiß und flüssig in die Mediumkammer 10 eingebracht wird, wodurch gegebenenfalls auf die Heizeinrichtung 19 verzichtet werden kann.It can be seen that the actuator 13 is held within a housing 18 of the print head 9, with its end having the contact surfaces 14. The print head 9 preferably has a heating device 19, so that the material present in the medium chamber 10 can be kept at the appropriate temperature at which it is liquid. However, it can also be provided that the material is introduced into the medium chamber 10 already hot and liquid, which means that the heating device 19 can be dispensed with if necessary.
Je nach Ansteuerung des Aktors 13 können einzelne Tropfen oder aber innerhalb kurzer Zeit eine große Tropfenanzahl aus der Ausspritzöffnung 11 ausgebracht werden. Beispielsweise kann hierzu eine impulsartige elektrische Ansteuerung des Aktors 13 vorgesehen sein. Um eine optimale Betriebstemperatur für den Aktor 13 gewährleisten zu können, kann auch vorgesehen sein, daß durch eine Gehäuseöffnung 20 ein Kühlmedium in das Gehäuseinnere einbringbar ist, welches den Aktor 13 umströmt, so daß es an einer in der Nähe der Ausspritzöffnung 11 liegenden Gehäuseöffnung 21 wieder austritt.Depending on the actuation of the actuator 13, individual drops or a large number of drops can be discharged from the ejection opening 11 within a short time. For example, a pulsed electrical control of the actuator 13 can be provided for this purpose. In order to be able to ensure an optimal operating temperature for the actuator 13, it can also be provided that a cooling medium can be introduced into the housing interior through a housing opening 20 and flows around the actuator 13 so that it is at a housing opening 21 located in the vicinity of the ejection opening 11 emerges again.
In Figur 2 ist noch ersichtlich, daß an der der Mediumkammer 10 abgewandten Seite der Membran 12 Temperatursensoren 22 anordenbar sind, die die in der Mediumkammer 10 vorherrschende Temperatur der Materialien detektieren, so daß gegebenenfalls die Heizeinrichtung 19 entsprechend angesteuert, das heißt ein- oder ausgeschaltet werden kann.In FIG. 2 it can also be seen that temperature sensors 22 can be arranged on the side of the membrane 12 facing away from the medium chamber 10, said temperature sensors 22 detecting the temperature of the materials prevailing in the medium chamber 10, so that the heating device 19 is controlled accordingly, that is to say switched on or off can be.
Werden mehrere Druckköpfe 9 verwendet, kann vorgesehen sein, daß die Ausspritzöffnungen 11 der Druckköpfe 9 unterschiedlich große Öffnungsquerschnitte aufweisen, so daß unterschiedliche Trop- fengrößen ausbringbar sind. Wird nur ein Druckkopf mit mehreren Mediumkammern 10 verwendet, können selbstverständlich die Ausspritzöffnungen unterschiedliche Querschnittsgrδßen aufweisen.If a plurality of print heads 9 are used, it can be provided that the ejection openings 11 of the print heads 9 have opening cross sections of different sizes, so that different droplets window sizes are deployable. If only one print head with several medium chambers 10 is used, the ejection openings can of course have different cross-sectional sizes.
Damit die einzelnen Tropfen die Schichten 2 bilden können, ist vorgesehen, daß entweder der Druckkopf 9 relativ zum Substrat 4 oder das Substrat relativ zum Druckkopf 9 bewegt werden kann. So that the individual drops can form the layers 2, it is provided that either the print head 9 can be moved relative to the substrate 4 or the substrate can be moved relative to the print head 9.

Claims

Ansprüche Expectations
1. Verfahren zur Herstellung eines Mikrobauelements, dadurch gekennzeichnet, daß mittels eines nach dem Tintendruckprinzip arbeitenden Druckkopfes (9) das in flüssiger Phase vorliegende Material für das Mikrobauelement (1) tropfenförmig auf ein Substrat (4) ausgespritzt wird, wobei mehrere Tropfen (3) des Materials in einer gemeinsamen Ebene (Schicht 2) und/oder in unterschiedlichen Ebenen vorliegen und nach dem Erstarren das Mikrobauelement (1) bilden.1. A method for producing a micro component, characterized in that by means of a printhead (9) working according to the ink printing principle, the liquid phase material for the micro component (1) is sprayed drop-shaped onto a substrate (4), several drops (3) the material is present in a common level (layer 2) and / or in different levels and form the microcomponent (1) after solidification.
2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß gleichzeitig oder nacheinander das Material für das Mikrobauelement (1) und ein flüssiges Stützmaterial (7) aus zumindest einem Druckkopf (9) ausgespritzt werden.2. The method according to claim 1, characterized in that the material for the micro-component (1) and a liquid support material (7) from at least one print head (9) are injected simultaneously or in succession.
3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß das Material für das Mikrobauelement (1) und das Stützmaterial (7) aus verschiedenen Auslaßöffnungen (11) eines Druckkopfs (9) ausgespritzt werden.3. The method according to claim 1 or 2, characterized in that the material for the micro-component (1) and the support material (7) from different outlet openings (11) of a printhead (9) are injected.
4. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß nach der Fertigstellung des Mikrobauelements (1) das Stützmaterial (7) entfernt wird, so daß das Mikrobauelement (1) freigelegt wird.4. The method according to any one of the preceding claims, characterized in that after the completion of the micro-component (1), the support material (7) is removed so that the micro-component (1) is exposed.
5. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß als Material für das Mikrobauelement (1) Kunststoff, Metall und/oder Glas verwendet wird, das vorzugsweise eine niedrige Schmelztemperatur besitzt.5. The method according to any one of the preceding claims, characterized in that plastic, metal and / or as the material for the micro-component (1) Glass is used, which preferably has a low melting temperature.
6. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das Mikrobauelement (1) nachbehandelt wird, indem es einer Wärmebehandlung und/oder einer Behandlung mit einer Chemikalie unterzogen wird.6. The method according to any one of the preceding claims, characterized in that the micro-component (1) is post-treated by being subjected to a heat treatment and / or a treatment with a chemical.
7. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß die Chemikalie flüssig oder gasförmig ist.7. The method according to claim 6, characterized in that the chemical is liquid or gaseous.
8. Verwendung eines nach dem Tintendruckprinzips arbeitenden Druckkopfs (9) zur Herstellung eines Mikrobauelements (1) , wobei mit dem Druckkopf (9) das Material (3) für das Mikrobauelement tropfenförmig auf ein Substrat (4) ausgespritzt wird und einzelne Tropfen (3) in einer gemeinsamen Ebene (Schicht 2) und/oder in unterschiedlichen Ebenen vorliegen.8. Use of a printhead (9) working according to the ink printing principle for producing a micro-component (1), the material (3) for the micro-component being sprayed drop-shaped onto a substrate (4) with the printhead (9) and individual drops (3) exist in a common level (layer 2) and / or in different levels.
9. Vorrichtung zum Herstellen eines Mikrobauelements, dadurch gekennzeichnet, daß die Vorrichtung zumindest einen Druckkopf (9) nach Anspruch 8 umfaßt.9. A device for producing a micro component, characterized in that the device comprises at least one printhead (9) according to claim 8.
10. Vorrichtung nach Anspruch 9, dadurch gekennzeichnet, daß der Druckkopf (9) eine Mediumkammer (10) , eine eine Wandung der Mediumkammer bildende10. The device according to claim 9, characterized in that the print head (9) a medium chamber (10), a wall of the medium chamber forming
Membran (12) und einen Aktor (13) zur Auslenkung der Membran (12) umfaßt, wobei die Mediumkammer (10) zumindest eine Ausspritzδffnung (11) aufweist, und wobei der Aktor (13) von der Membran (12) thermisch entkoppelt ist . Diaphragm (12) and an actuator (13) for deflecting the membrane (12), wherein the medium chamber (10) has at least one ejection opening (11), and wherein the actuator (13) is thermally decoupled from the membrane (12).
PCT/EP2000/006404 1999-07-06 2000-07-06 Method for producing a microcomponent, use of a print head that functions according to the ink jet principle for producing a microcomponent, and device for producing a microcomponent WO2001002173A1 (en)

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DE10153208A1 (en) * 2001-10-27 2003-05-15 Bosch Gmbh Robert Process for producing a sensor element and its use
AT411741B (en) 2002-07-22 2004-05-25 Colop Stempelerzeugung Skopek METHOD AND DEVICE FOR PRODUCING A STAMP
GB0323462D0 (en) * 2003-10-07 2003-11-05 Fujifilm Electronic Imaging Providing a surface layer or structure on a substrate
DE102009030099B4 (en) 2009-06-22 2011-05-19 Karl Hehl Device for producing a three-dimensional object
US8292610B2 (en) 2010-12-21 2012-10-23 Arburg Gmbh + Co. Kg Device for manufacturing a three-dimensional object
US20160096323A1 (en) 2014-10-03 2016-04-07 Tyco Electronics Corporation Apparatus and method for rotary three-dimensional printing
US20160096321A1 (en) 2014-10-03 2016-04-07 Tyco Electronics Corporation Apparatus for three-dimensional printing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0490546A1 (en) * 1990-12-03 1992-06-17 Fritz B. Prinz Method and apparatus for fabrication of three-dimensional articles by thermal spray deposition
WO1995005943A1 (en) * 1993-08-26 1995-03-02 Sanders Prototypes, Inc. 3-d model maker
WO1997048557A2 (en) * 1996-06-04 1997-12-24 Thin Film Technology (Consultancy) Limited 3d printing and forming of structures

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2233928B (en) * 1989-05-23 1992-12-23 Brother Ind Ltd Apparatus and method for forming three-dimensional article
JPH0336019A (en) * 1989-07-03 1991-02-15 Brother Ind Ltd Three-dimensional molding method and device thereof
US5204055A (en) * 1989-12-08 1993-04-20 Massachusetts Institute Of Technology Three-dimensional printing techniques

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0490546A1 (en) * 1990-12-03 1992-06-17 Fritz B. Prinz Method and apparatus for fabrication of three-dimensional articles by thermal spray deposition
WO1995005943A1 (en) * 1993-08-26 1995-03-02 Sanders Prototypes, Inc. 3-d model maker
WO1997048557A2 (en) * 1996-06-04 1997-12-24 Thin Film Technology (Consultancy) Limited 3d printing and forming of structures

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