WO2001036929A3 - Via inspection with an optical inspection system - Google Patents

Via inspection with an optical inspection system Download PDF

Info

Publication number
WO2001036929A3
WO2001036929A3 PCT/US2000/041911 US0041911W WO0136929A3 WO 2001036929 A3 WO2001036929 A3 WO 2001036929A3 US 0041911 W US0041911 W US 0041911W WO 0136929 A3 WO0136929 A3 WO 0136929A3
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
optical
diffuser
camera
front side
Prior art date
Application number
PCT/US2000/041911
Other languages
French (fr)
Other versions
WO2001036929A2 (en
Inventor
Gary E Frame
Original Assignee
Midas Vision Sysems Inc
Gary E Frame
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Midas Vision Sysems Inc, Gary E Frame filed Critical Midas Vision Sysems Inc
Priority to AU27511/01A priority Critical patent/AU2751101A/en
Publication of WO2001036929A2 publication Critical patent/WO2001036929A2/en
Publication of WO2001036929A3 publication Critical patent/WO2001036929A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Abstract

An optical inspection apparatus includes a platform (14) for holding a device under inspection (32) and a light source (16) disposed to illuminate a backside portion of the device. The inspection apparatus also includes a camera (12) disposed over a front side portion of the device to receive optical energy that penetrates through the device and a diffuser (36) disposed over a front side portion of the device. The illumination source provides an image on a bottom surface of the diffuser, for processing by the camera.
PCT/US2000/041911 1999-11-05 2000-11-06 Via inspection with an optical inspection system WO2001036929A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU27511/01A AU2751101A (en) 1999-11-05 2000-11-06 Via inspection in optical inspection system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43488599A 1999-11-05 1999-11-05
US09/434,885 1999-11-05

Publications (2)

Publication Number Publication Date
WO2001036929A2 WO2001036929A2 (en) 2001-05-25
WO2001036929A3 true WO2001036929A3 (en) 2001-12-06

Family

ID=23726097

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/041911 WO2001036929A2 (en) 1999-11-05 2000-11-06 Via inspection with an optical inspection system

Country Status (3)

Country Link
AU (1) AU2751101A (en)
TW (1) TW466337B (en)
WO (1) WO2001036929A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111795954B (en) * 2020-09-09 2020-11-24 苏州鼎纳自动化技术有限公司 Transmittance precision detection mechanism

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560273A (en) * 1982-11-30 1985-12-24 Fujitsu Limited Method and apparatus for inspecting plated through holes in printed circuit boards
US4655349A (en) * 1984-12-27 1987-04-07 Brockway, Inc. System for automatically inspecting transparent containers for sidewall and dimensional defects
US4818617A (en) * 1986-08-14 1989-04-04 Stock Larry A Method and material for checking drilled printed circuit boards
US4843231A (en) * 1986-07-28 1989-06-27 Saint-Gobain Cinematique Et Controle Apparatus for the inspection of transparent materials utilizing a diffusing screen
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4560273A (en) * 1982-11-30 1985-12-24 Fujitsu Limited Method and apparatus for inspecting plated through holes in printed circuit boards
US4655349A (en) * 1984-12-27 1987-04-07 Brockway, Inc. System for automatically inspecting transparent containers for sidewall and dimensional defects
US4843231A (en) * 1986-07-28 1989-06-27 Saint-Gobain Cinematique Et Controle Apparatus for the inspection of transparent materials utilizing a diffusing screen
US4818617A (en) * 1986-08-14 1989-04-04 Stock Larry A Method and material for checking drilled printed circuit boards
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination

Also Published As

Publication number Publication date
AU2751101A (en) 2001-05-30
WO2001036929A2 (en) 2001-05-25
TW466337B (en) 2001-12-01

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