WO2001059531A3 - Verfahren und vorrichtung zum verstellen eines elements - Google Patents

Verfahren und vorrichtung zum verstellen eines elements Download PDF

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Publication number
WO2001059531A3
WO2001059531A3 PCT/EP2001/001454 EP0101454W WO0159531A3 WO 2001059531 A3 WO2001059531 A3 WO 2001059531A3 EP 0101454 W EP0101454 W EP 0101454W WO 0159531 A3 WO0159531 A3 WO 0159531A3
Authority
WO
WIPO (PCT)
Prior art keywords
control signal
control
time history
model
signal
Prior art date
Application number
PCT/EP2001/001454
Other languages
English (en)
French (fr)
Other versions
WO2001059531A2 (de
Inventor
Randolf Hoche
Original Assignee
Randolf Hoche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Randolf Hoche filed Critical Randolf Hoche
Priority to EP01921278A priority Critical patent/EP1264222B1/de
Priority to US10/204,933 priority patent/US6782296B2/en
Priority to DE50101297T priority patent/DE50101297D1/de
Publication of WO2001059531A2 publication Critical patent/WO2001059531A2/de
Publication of WO2001059531A3 publication Critical patent/WO2001059531A3/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41331—Galvano driver
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41367—Estimator, state observer, space state controller

Abstract

Die Erfindung betrifft ein Verfahren sowie eine Vorrichtung, wobei ein mit dem Element verbundener Galvanometer-Aktor (7) sowie eine Steuereinheit vorgesehen sind, die ein Stellsignal für den Aktor liefert, um das Element gemäss eines frei vorgebbaren zeitlichen Soll-Positionsverlauf unter Berücksichtigung eines Modells (4) der Einheit aus dem Aktor und dem Element ermittelt, wobei das Modell ein zeitdiskretes Zustandsraummodell ist und so gewählt ist, dass es für einen frei vorgebbaren zeitlichen Verlauf des Stellsignals den entsprechenden zeitlichen Positionsverlauf des Elements mit vorgegebener Genauigkeit vorhersagen kann, wobei der vorgegebene Soll-Positionsverlauf mittels Vorfilters von der Steuereinheit überprüft und falls erforderlich hinsichtlich seiner Realisierbarkeit modifiziert wird, wobei ein Positionssensor vorgesehen ist, der ein Positionssignal entsprechend der Position des Elements liefert und der Steuereinheit zuführt, die das Positionssignal bei der Ermittlung des Stellsignals berücksichtigt, wobei die Ermittlung des Stellsignals aus dem Modell nur zu vorgegebenen Steuer-Zeitpunkten des Soll-Positionsverlaufs erfolgt, wobei der Wert des Stellsignals zu einem Steuer-Zeitpunkten des Soll-Positionsverlaufs erfolgt, wobei der Wert des Stellsignals zu einem Steuer-Zeitpunkt dadurch ermittelt wird, dass gefordert wird, dass die summierte, gewichtete Differenz zwischen der Soll-Position und der von dem Modell verhergesagten Position für die nächstfolgenden Steuer-Zeitpunkte für diesen Wert des Stellsignals minimal wird, und wobei der so ermittelte Wert des Stellsignals mindestens bis zum nachfolgenden Steuer-Zeitpunkt angelegt wird.
PCT/EP2001/001454 2000-02-09 2001-02-09 Verfahren und vorrichtung zum verstellen eines elements WO2001059531A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP01921278A EP1264222B1 (de) 2000-02-09 2001-02-09 Verfahren und vorrichtung zum verstellen eines elements
US10/204,933 US6782296B2 (en) 2000-02-09 2001-02-09 Method and apparatus for positioning a movable element using a galvanometer actuator and pre-filtering
DE50101297T DE50101297D1 (de) 2000-02-09 2001-02-09 Verfahren und vorrichtung zum verstellen eines elements

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10005611.3 2000-02-09
DE10005611A DE10005611A1 (de) 2000-02-09 2000-02-09 Verfahren und Vorrichtung zum Verstellen eines Elements

Publications (2)

Publication Number Publication Date
WO2001059531A2 WO2001059531A2 (de) 2001-08-16
WO2001059531A3 true WO2001059531A3 (de) 2002-03-07

Family

ID=7630284

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2001/001454 WO2001059531A2 (de) 2000-02-09 2001-02-09 Verfahren und vorrichtung zum verstellen eines elements

Country Status (4)

Country Link
US (1) US6782296B2 (de)
EP (1) EP1264222B1 (de)
DE (2) DE10005611A1 (de)
WO (1) WO2001059531A2 (de)

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FR2842625B1 (fr) * 2002-07-17 2004-09-03 Appedge Procede et systeme d'optimisation d'au moins un parametre caracteristique d'un systeme physique destine a etre soumis a des conditions exterieures variables
US7515156B2 (en) * 2003-01-08 2009-04-07 Hrl Laboratories, Llc Method and apparatus for parallel speculative rendering of synthetic images
DE10312644A1 (de) * 2003-03-21 2004-09-30 Olympus Biosystems Gmbh Verfahren und Vorrichtung zum Verstellen eines Elements
GB0313887D0 (en) * 2003-06-16 2003-07-23 Gsi Lumonics Ltd Monitoring and controlling of laser operation
EP1706775B1 (de) * 2004-01-23 2008-11-26 GSI Group Corporation System und verfahren zum optimieren der zeichenmarkierungsleistung
US20080303474A1 (en) * 2007-06-08 2008-12-11 Gsi Group Corporation Systems and methods for controlling limited rotation motor systems
FR2925182B1 (fr) * 2007-12-18 2021-07-02 Airbus France Procede et dispositif de detection de pannes oscillatoires dans une chaine d'asservissement en position d'une gouverne d'aeronef.
US9157763B2 (en) * 2008-02-06 2015-10-13 Rosemount, Inc. Minimal dead time digitally compensated process transmitter
GB0809037D0 (en) 2008-05-19 2008-06-25 Renishaw Plc Video Probe
GB0909635D0 (en) * 2009-06-04 2009-07-22 Renishaw Plc Vision measurement probe
US20120274646A1 (en) * 2011-04-29 2012-11-01 Randy Johnson Laser particle projection system
US9136886B2 (en) 2013-03-11 2015-09-15 Rosemount Inc. Digitally compensated process transmitter with minimal dead time
DE102015007838A1 (de) * 2015-06-18 2016-12-22 Scanlab Ag Verstellung eines, insbesondere optischen, Elements
US9721640B2 (en) * 2015-12-09 2017-08-01 Intel Corporation Performance of additional refresh operations during self-refresh mode
DE102015225534A1 (de) * 2015-12-17 2017-02-09 Carl Zeiss Smt Gmbh Positionier-Vorrichtung, insbesondere für eine Projektionsbelichtungsanlage, und Positionier-Verfahren mittels einer derartigen Positionier-Vorrichtung
US11165372B2 (en) * 2017-09-13 2021-11-02 Rockwell Automation Technologies, Inc. Method and apparatus to characterize loads in a linear synchronous motor system

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US5424942A (en) * 1993-08-10 1995-06-13 Orbital Research Inc. Extended horizon adaptive block predictive controller with an efficient prediction system
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Also Published As

Publication number Publication date
DE50101297D1 (de) 2004-02-12
WO2001059531A2 (de) 2001-08-16
EP1264222B1 (de) 2004-01-07
US20030011788A1 (en) 2003-01-16
DE10005611A1 (de) 2001-08-30
US6782296B2 (en) 2004-08-24
EP1264222A2 (de) 2002-12-11

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