WO2001067156A3 - Tunable fabry-perot filter - Google Patents

Tunable fabry-perot filter Download PDF

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Publication number
WO2001067156A3
WO2001067156A3 PCT/US2001/006676 US0106676W WO0167156A3 WO 2001067156 A3 WO2001067156 A3 WO 2001067156A3 US 0106676 W US0106676 W US 0106676W WO 0167156 A3 WO0167156 A3 WO 0167156A3
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
pattern
tethers
reflector
filter
Prior art date
Application number
PCT/US2001/006676
Other languages
French (fr)
Other versions
WO2001067156A2 (en
Inventor
Dale C Flanders
Original Assignee
Axsun Tech Inc
Dale C Flanders
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Axsun Tech Inc, Dale C Flanders filed Critical Axsun Tech Inc
Priority to AU2001245386A priority Critical patent/AU2001245386A1/en
Publication of WO2001067156A2 publication Critical patent/WO2001067156A2/en
Publication of WO2001067156A3 publication Critical patent/WO2001067156A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Abstract

A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
PCT/US2001/006676 2000-03-03 2001-03-01 Tunable fabry-perot filter WO2001067156A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001245386A AU2001245386A1 (en) 2000-03-03 2001-03-01 Tunable fabry-perot filter

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US18678000P 2000-03-03 2000-03-03
US60/186,780 2000-03-03
US09/649,168 US6373632B1 (en) 2000-03-03 2000-08-25 Tunable Fabry-Perot filter
US09/649,168 2000-08-25

Publications (2)

Publication Number Publication Date
WO2001067156A2 WO2001067156A2 (en) 2001-09-13
WO2001067156A3 true WO2001067156A3 (en) 2002-01-31

Family

ID=26882403

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/006676 WO2001067156A2 (en) 2000-03-03 2001-03-01 Tunable fabry-perot filter

Country Status (3)

Country Link
US (1) US6373632B1 (en)
AU (1) AU2001245386A1 (en)
WO (1) WO2001067156A2 (en)

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CN107171047A (en) * 2017-05-03 2017-09-15 电子科技大学 Ultra-wide tunable resonator

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107171047A (en) * 2017-05-03 2017-09-15 电子科技大学 Ultra-wide tunable resonator

Also Published As

Publication number Publication date
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AU2001245386A1 (en) 2001-09-17
WO2001067156A2 (en) 2001-09-13

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