WO2001067156A3 - Tunable fabry-perot filter - Google Patents
Tunable fabry-perot filter Download PDFInfo
- Publication number
- WO2001067156A3 WO2001067156A3 PCT/US2001/006676 US0106676W WO0167156A3 WO 2001067156 A3 WO2001067156 A3 WO 2001067156A3 US 0106676 W US0106676 W US 0106676W WO 0167156 A3 WO0167156 A3 WO 0167156A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- pattern
- tethers
- reflector
- filter
- Prior art date
Links
- 239000012528 membrane Substances 0.000 abstract 7
- 230000003287 optical effect Effects 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001245386A AU2001245386A1 (en) | 2000-03-03 | 2001-03-01 | Tunable fabry-perot filter |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US18678000P | 2000-03-03 | 2000-03-03 | |
US60/186,780 | 2000-03-03 | ||
US09/649,168 US6373632B1 (en) | 2000-03-03 | 2000-08-25 | Tunable Fabry-Perot filter |
US09/649,168 | 2000-08-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001067156A2 WO2001067156A2 (en) | 2001-09-13 |
WO2001067156A3 true WO2001067156A3 (en) | 2002-01-31 |
Family
ID=26882403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/006676 WO2001067156A2 (en) | 2000-03-03 | 2001-03-01 | Tunable fabry-perot filter |
Country Status (3)
Country | Link |
---|---|
US (1) | US6373632B1 (en) |
AU (1) | AU2001245386A1 (en) |
WO (1) | WO2001067156A2 (en) |
Cited By (1)
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---|---|---|---|---|
CN107171047A (en) * | 2017-05-03 | 2017-09-15 | 电子科技大学 | Ultra-wide tunable resonator |
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KR100533535B1 (en) * | 2003-11-13 | 2005-12-06 | 한국전자통신연구원 | Thermally actuated wavelength tunable optical filter |
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US20050238067A1 (en) * | 2004-04-26 | 2005-10-27 | Choi Youngmin A | Simple fiber optic cavity |
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US7619805B2 (en) * | 2005-03-29 | 2009-11-17 | Hewlett-Packard Development Company, L.P. | Light modulator device |
US7733553B2 (en) * | 2005-09-21 | 2010-06-08 | Hewlett-Packard Development Company, L.P. | Light modulator with tunable optical state |
US20070090732A1 (en) * | 2005-10-25 | 2007-04-26 | The Charles Stark Draper Laboratory, Inc. | Systems, methods and devices relating to actuatably moveable machines |
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US20070211257A1 (en) * | 2006-03-09 | 2007-09-13 | Kearl Daniel A | Fabry-Perot Interferometer Composite and Method |
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US10359551B2 (en) | 2013-08-12 | 2019-07-23 | Axsun Technologies, Inc. | Dielectric-enhanced metal coatings for MEMS tunable filters |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4203128A (en) * | 1976-11-08 | 1980-05-13 | Wisconsin Alumni Research Foundation | Electrostatically deformable thin silicon membranes |
US4859060A (en) * | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
CH681047A5 (en) * | 1991-11-25 | 1992-12-31 | Landis & Gyr Betriebs Ag | Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph |
US5430574A (en) * | 1994-07-25 | 1995-07-04 | Litton Systems, Inc. | Rugged optical filter and switch for communication networks |
US5757562A (en) * | 1996-01-31 | 1998-05-26 | Compagnie Industrielle Des Lasers Cilas | Mirror with reflection coefficient variable spatially in amplitude and in phase |
WO1999034484A2 (en) * | 1997-12-29 | 1999-07-08 | Coretek, Inc. | Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter |
FR2777124A1 (en) * | 1998-08-06 | 1999-10-08 | Commissariat Energie Atomique | Microlaser mosaic image projection |
Family Cites Families (9)
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DE2336930A1 (en) * | 1973-07-20 | 1975-02-06 | Battelle Institut E V | INFRARED MODULATOR (II.) |
US5022745A (en) * | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
US5291502A (en) | 1992-09-04 | 1994-03-01 | The Board Of Trustees Of The Leland Stanford, Jr. University | Electrostatically tunable optical device and optical interconnect for processors |
FI94804C (en) | 1994-02-17 | 1995-10-25 | Vaisala Oy | Electrically adjustable surface micromechanical Fabry-Perot interferometer for optical material analysis |
FI103216B (en) | 1995-07-07 | 1999-05-14 | Vaisala Oyj | Method for controlling a short Fabry-Perot interferometer in an ND IR measuring device |
US5739945A (en) | 1995-09-29 | 1998-04-14 | Tayebati; Parviz | Electrically tunable optical filter utilizing a deformable multi-layer mirror |
US5629951A (en) * | 1995-10-13 | 1997-05-13 | Chang-Hasnain; Constance J. | Electrostatically-controlled cantilever apparatus for continuous tuning of the resonance wavelength of a fabry-perot cavity |
FR2768812B1 (en) | 1997-09-19 | 1999-10-22 | Commissariat Energie Atomique | FABRY-PEROT INTERFEROMETER TUNABLE INTEGRATED |
US5914804A (en) * | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
-
2000
- 2000-08-25 US US09/649,168 patent/US6373632B1/en not_active Expired - Lifetime
-
2001
- 2001-03-01 WO PCT/US2001/006676 patent/WO2001067156A2/en active Application Filing
- 2001-03-01 AU AU2001245386A patent/AU2001245386A1/en not_active Abandoned
Patent Citations (7)
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---|---|---|---|---|
US4203128A (en) * | 1976-11-08 | 1980-05-13 | Wisconsin Alumni Research Foundation | Electrostatically deformable thin silicon membranes |
US4859060A (en) * | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
CH681047A5 (en) * | 1991-11-25 | 1992-12-31 | Landis & Gyr Betriebs Ag | Measuring parameter, esp. pressure difference, using Fabry-Perot detector - controlling optical length of detector according to output parameter to determine working point on graph |
US5430574A (en) * | 1994-07-25 | 1995-07-04 | Litton Systems, Inc. | Rugged optical filter and switch for communication networks |
US5757562A (en) * | 1996-01-31 | 1998-05-26 | Compagnie Industrielle Des Lasers Cilas | Mirror with reflection coefficient variable spatially in amplitude and in phase |
WO1999034484A2 (en) * | 1997-12-29 | 1999-07-08 | Coretek, Inc. | Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter |
FR2777124A1 (en) * | 1998-08-06 | 1999-10-08 | Commissariat Energie Atomique | Microlaser mosaic image projection |
Non-Patent Citations (3)
Title |
---|
ARATANI K ET AL: "SURFACE MICROMACHINED TUNEABLE INTERFEROMETER ARRAY", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A43, no. 1/3, 1 May 1994 (1994-05-01), pages 17 - 23, XP000454081, ISSN: 0924-4247 * |
DEHE A ET AL: "III-V compound semiconductor micromachined actuators for long resonator tunable Fabry-Perot detectors", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 68, no. 1-3, 15 June 1998 (1998-06-15), pages 365 - 371, XP004139861, ISSN: 0924-4247 * |
JERMAN J H ET AL: "A MINIATURE FABRY-PEROT INTERFEROMETER WITH A CORRUGATED SILICON DIAPHRAGM SUPPORT", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A29, no. 2, November 1991 (1991-11-01), pages 151 - 158, XP000241462, ISSN: 0924-4247 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107171047A (en) * | 2017-05-03 | 2017-09-15 | 电子科技大学 | Ultra-wide tunable resonator |
Also Published As
Publication number | Publication date |
---|---|
US6373632B1 (en) | 2002-04-16 |
AU2001245386A1 (en) | 2001-09-17 |
WO2001067156A2 (en) | 2001-09-13 |
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