WO2001073823A2

WO2001073823A2 - Modular, automated process system

Info

Publication number: WO2001073823A2
Application number: PCT/DE2001/001164
Authority: WO
Inventors: Jörg HASSEL
Original assignee: Siemens Aktiengesellschaft
Priority date: 2000-03-28
Filing date: 2001-03-26
Publication date: 2001-10-04
Also published as: WO2001073823A3; DE10015423A1

Abstract

The invention relates to a modular, automated process system comprising process modules that can be configured to automatically work through a process and that each process predefined sub-processes. Said process modules (1 to 5) are connected to a higher-level control via a data link and have configuration signalling devices (26) for providing information that can be read via the data link (16) about the actual set configurations. The higher-level control (17) is connected to a device (60) for providing information about desired configurations of the process modules (1 to 5) and determines deviations between the actual configurations and the desired configurations.

Description

description

Modular automated process system

From US-A-5 083 364 a system for the production of semiconductor substrates is known which consists of several process modules arranged in a row. The process modules are energy and Benö ^¬ supplied via a common media bus with data saturated chemicals, gases and liquids; the fluids are also disposed of via the media bus. At least one of the process modules is designed to feed the fluids into the fluid bus or to dispose of the fluids. The media bus has electrical lines for data and energy transmission and different pipelines for the different fluids. At a grid spacing predetermined by the size of the process modules, junction boxes with electrical connections and fluid connections are provided along the media bus, to which the individual process modules can be connected with corresponding mating connections. The fluid connections are equipped with self-closing valves that the fluid connections at its seal is not Schlos ^¬ senem process module to the outside. Depending on the requirements, individual process modules can therefore be added, removed or replaced in a comparatively simple manner within the known system.

From EP-A-0 303 565 a system for producing a chemical product in particular is known. The different manufacturing steps take place in different fixed or mobile process modules, each comprising a control unit and a chemical unit, the manufacturing step in question being carried out controlled by the control unit within the chemical unit. The control units of the different process modules are connected to a higher-level control system in the form of a process control system via data lines. The Chemical units within the process modules are supplied or disposed of individually via supply and disposal lines with the substances required or generated during manufacture.

The subject of an earlier German Patent Application with the official file number 199 54 855.2 is a system for the automated processing of fluids with buttable, interchangeable process modules, common to both via a common data and GE over a multi-channel ^¬ fluid bus are interconnected. The configuration of at least some of the channels of the fluid bus in the areas of its connection to the individual process modules can be set, configuration reporting devices reporting information about the set actual configurations via the data bus to a higher-level control of the system.

The object of the invention is to ensure a safe process flow in a modular automated process system, in particular in a chemical or biological microsystem.

According to the invention, the object is achieved by the modular automated process system specified in claim 1.

Advantageous developments of the process system according to the invention can be found in the subclaims.

In the process system according to the invention, the respectively configured actual configurations of the process modules are reported to the higher-level control, which compares the actual configurations with the target configurations and shows deviations, for example, by visual output or in the form of alarms. The configurations can include both internal settings of the process modules, in particular the parameters set in each case, and the external connections of the process modules include each other. The external connections mean in particular the exchange of substances to be treated as part of the processing of the process between the process modules. In the case of a process system with multichannel fluid connections, for example a fluid bus, these are the configurations of the fluid bus in the areas of its connection to the process modules, with different fluid connections of the process modules being able to be connected to different fluid channels of the fluid bus according to the configured configuration.

At least some of the configurations, in particular the internal settings, that is to say for example the parameters, of the process modules by transmitting Em setting information, here for example the parameter values can be automatically set by the higher-level controller or a programming device via the data connection to the process modules. If the channels of the fluid connections are connected to the fluid connections of the process modules via controllable valves, the configuration of the fluid connections between the process modules can also be set automatically. However, it is also possible for the individual fluid connections to be produced manually, in which case the configurations set in each case are recognized by the configuration reporting devices of the process modules and reported to the higher-level control system.

The information about the desired configurations of the process modules to be set is preferably generated by a simulation device which simulates the process to be processed in terms of information technology, that is to say in a non-experimental manner. For this purpose, the simulation device receives information about the process to be processed, for example information about the chemicals which are to react with one another in a reactor module, and also information about the available process modules. The simulation device can assist the user in the selection and configuration Support the process modules or independently select and configure the required process modules based on access to stored expert knowledge. Thus is created an information technology model of the wish to build end modular process system with which the process development and possibly also deviations from it can be simulated to ^¬ special dangerous process state. In this way, a suitable selection and configuration of the process modules for setting up the process system can finally be found. After the process system has been set up, the actual configurations of the process modules are compared with the target configurations provided by the simulation device, so that errors can be recognized in good time. Insofar as, as already mentioned above, the configuration of process modules can take place automatically, the information supplied by the simulation device about the target configurations to be set is transmitted to the process modules as configuration information. In addition, the information about the target configurations to be set is also displayed, in particular with regard to the respective configurations to be carried out manually, preferably on a visualization unit, for example a monitor.

To further explain the invention, reference is made below to the figures of the drawing; show in detail

1 shows an exemplary embodiment of the modular process system according to the invention in the form of a simplified block diagram, FIG. 2 shows a second exemplary embodiment of the process system according to the invention, and FIG. 3 shows a third exemplary embodiment and FIG. 4 shows an example for the determination and selection of the process modules to be used by a simulation device. Figure 1 shows a modular automated process system for the automated treatment of fluids, for example different liquids or gases. Under treatment is, for example, the Analy ^¬ se of the fluids and / or synthesis by chemical reac- tions of fluids, including the necessary side ^¬ functions such as to understand the preparation, mixing, filtering, claim or pressure build-up by means of pumps, heating, evaporation, etc.. The process system consists of different process modules 1, 2, 3, 4 and 5, which are arranged in a row and to which sub-processes are carried out automatically. The process modules 1 to 5 can accordingly be different types of analysis modules, reactor modules with, for example, microreactors, pump modules, filter modules, energy supply modules, fluid supply and disposal modules, etc. Each process module 1 to 5 each has a control unit 6 and a fluid unit 7, the actual subprocess within the fluid unit 7 being carried out as a function of control signals 8 from the control unit 6. Process signals 9 recorded in the fluid unit 7, for example pressure values or analysis values, are transmitted to the control unit 6. The control units 6 m of different process modules 1 to 5 are connected to one another via a data bus 10 and a power supply bus 11. The fluid units 7 are connected to one another via a fluid bus 12, which consists of a plurality of parallel channels 13, through which the required fluids are routed. The configuration of the channels 13 is adjustable in the area 14 of the connection of the fluid bus 12 to the individual fluid units 7 m in the process modules 1 to 5.

In addition to the connections to the data bus 10, the power supply bus 11 and the fluid bus 12, the process modules 1 to 5 can have further external connections. In the example shown, the process module 1 is used to provide basic functions for the process system, for which the

Control unit 6 at an external power supply source 15 and via a data connection 16, for example an external bus, is connected to a higher-level controller 17, for example a control system, with visualization unit 18. Alternatively, the data connection 16 can also be designed as a direct continuation of the data bus 10. The process system is connected to the fluid unit 7 of the process module 1, external fluid lines 19 and 20 for feeding in or discharging the fluids required. Alternatively, a battery or fuel cell module m is also considered for the energy supply. In the process module 2, a fluid is fed into the process system via a supply container 21 that can be plugged into the process module, while, for example, a disposal container 22 for receiving a fluid from the process system is connected to the process module 5

As is shown schematically here, the data bus 10, the power supply bus 11 and the fluid bus 12 are each formed from internal bus sections within the process modules 1 to 5 which are lined up, the process modules 1 to 5 being held next to one another on a common carrier 23, for example a top-hat rail , By pushing or plugging the required process modules 1 to 5 onto the carrier 23, the buses 10 to 12 are formed.

Process modules 1 to 5 can be configured both internally and externally. The internal configuration includes, in particular, the parameterization of process modules 1 to 5, parameter values being transferable from the higher-level controller 17 or a programming device (not shown here) via the data connection 16 and the data bus 10 to the control units 6 m of the individual process modules 1 to 5. In addition, the internal configuration includes settings that can be made via process elements 24 on process modules 1 to 5. The external configuration here means the integration of the individual process modules 1 to 5 m in the process system. In addition to the selection and sequence of process modules 1 to 5, this also includes the configurations of the channels 13 m regions 14 of the connection of the fluid bus 12 with the Fluidemheiten 7 m the individual process modules 1 to 5. The respective channel configuration can thereby by the user manually, for example, by setting not shown valves in the Ver ^¬ course of the passages 13 and the channel branches to the Fluidem ^¬ units are set. 7 If the valves are designed to be controllable, their setting can also be carried out automatically by the control unit 6, the corresponding adjustment information being transferable from the higher-level control 17 to the individual control units 6 to the process modules 1 to 5. Each set Kanalkon- figuration is detected by means of a Konfigurationserfassungsem- direction 25, and along with any other informa- tion about the inner and outer configuration of the Subject Author ^¬ fenden process module 1 to 5 m of an m of the standardized Steuerungsem- 6 integrated Konflgurationsmeldeemrichtung 26 deposited from where this information can be called up by the higher-level controller 7 via the data bus 10 and the data connection 16.

In the example of the process system according to the invention shown in detail in FIG. 2, the process modules 38, 39 and 40 each have a control unit 6 and a fluid unit 7 in accordance with the example described above, the control units 6 being connected to one another via a data bus 10 and an energy supply bus 11. The process modules 38, 39 and 40 are connected with their respective fluid units 7 here via adapters 41, 42 and 43 to a fluid bus 44 with a plurality of channels 45. Depending on the adapter 41 to 43 used, there are different interconnections between the channels of the incoming and outgoing fluid bus and the fluid ports and outlets 46 of the fluid unit 7 m in the respective process module 38 to 40. Each adapter, for example 43, each has a configuration entry. solution device 47 with an information interface to the connected process module, for example 40, for transmission information about the set channel configuration to the configuration reporting device 26 of the module-specific control unit 6. The corresponding information is stored here, for example, as coding on a chip 48 of the adapter 43, so that the information can be read out by the control unit 6.

In the example of the process system according to the invention shown in FIG. 3, the process modules 49 and 50 each have a control unit 6 and a fluid unit 7 in accordance with the examples described above, the control units 6 in turn being connected to one another via a data bus 10 and a power supply bus 11. The fluid units 7 are connected to fluid bus sections 51 and 52 formed within the process modules 49 and 50, the fluid bus sections 51 and 52 of all process modules 49 and 50 being lined up forming the fluid bus 53 of the process system. The channels 56 of the fluid bus 53 are configured here with the aid of configuration modules 54 and 55, which can be added to the series of process modules 49, 50 between them. Depending on the configuration module 54 or 55 used, there is a different interconnection of the channels 56 of adjacent process modules 49 and 50. The configuration modules 54 and 55 each have their own configuration message device 57 connected to the data bus 10 for transmitting information about the channel configuration set the higher-level controller 17. As indicated by dashed lines, this information can alternatively also be coded in a chip 58 according to the example shown in FIG. 2

Information interfaces 59 are transmitted to the configuration reporting devices 26 of the immediately adjacent process modules 49 and 50, respectively.

As FIG. 1 shows, a device 60 is connected to the data connection 16, which device is used to generate and provide information about the desired Configurations of the process modules 1 to 5, or 38 to 40 m Figure 2 and 49, 50 m Figure 3 is used. In the device 60 is here a simulation device 62 information and technical simulation of the process system to be executed m the process due to predetermined Informa ^¬ functions to be executed on the process and on the basis of given information on the purpose for related disposal process modules. This information is part m a storage device 61 stored, can be retrieved in part from external data sources, such as Internet data sources, and in part by the user input 60 m Simula ^¬ tion device. In particular, the information about the available process modules and the possibilities of their configuration are contained in the storage device 61. On the basis of this information, a suitable selection of process modules, for example 1 to 5 and their target configurations, can be determined at least partially automatically by means of the simulation device 60, with the information technology process model obtained thereby being able to simulate the process to be carried out, including the simulation of errors and dangerous states is. The information determined in this way about the suitable selection of process modules and their target configuration is displayed within the simulation device 60 or, for example, on the visualization unit 18 of the higher-level control 17 as a process system image or in some other way, so that the visualized information is used to build up the process system the process modules can be done. The process modules, for example 1 to 5, are configured partly manually by the user according to the visualized information about the target configurations and partly automatically by transferring the target configurations as setting values (parameter values) to the control units 6 m the process modules 1 to 5. After the process system has been set up and configured, the actual configurations set by the configuration notification messages 26 of the individual process modules 1 to 5 are applied transfer the higher-level control 17 and compare it there with the target configurations supplied by the simulation device 60, deviations being shown on the visualization device 18. This comparison can also be carried out in the process system during the process flow, in order to be able to recognize configuration changes which have been made during the process flow or which have arisen due to errors and, if appropriate, to be able to trigger an alarm.

FIG. 4 illustrates the process simulation m of the simulation device 62 on the basis of a simplified flow diagram. Information 63 about the m process used and produced chemicals, including their response behavior and information 64 about the stationary for grouting Prozessmoudule and its configurability a ^¬ A are supplied to integrated Modeilbildung 65 em process model provides 65th Information about the structure of the process system and about the target configurations of the process modules 67 are part of the process module. As a result of information technology simulations of process 68, the

Target configurations 67 are changed in a targeted manner before they are transferred as target data 69 to this higher-level control.

Claims

claims

1. A modular automated process system mated to auto ^¬ execution of a process and each configurable predetermined subprocesses abarbeitenden process modules (1 to 5; 38 to 40; 49, 50) via a data connection

(16) are connected to a higher-level controller (17), the process modules (1 to 5; 38 to 40; 49, 50) configuration reporting devices (26) for providing information about the set actual configurations that can be read via the data connection (16) have, the higher-level control (17) being connected to a device (60) for providing information about desired configurations of the process modules (1 to 5; 38 to 40; 49, 50) to be set and the higher-level control

(17) Deviations between the actual configurations and the target configurations are determined and provided.

2. Process system according to claim 1, d a d u r c h g e - k e n n z e i c h n e t that the configurations inner

Settings of the process modules (1 to 5; 38 to 40; 49, 50) and / or external connections of the process modules (1 to 5; 38 to 40; 49, 50) to each other.

3. Process system according to claim 2, so that the external connections comprise the exchange between the process modules (1 to 5; 38 to 40; 49, 50) of substances to be treated in the course of the processing of the process.

4. Process system according to claim 3, characterized in that the outer connections comprise configurable multi-channel fluid connections (12; 44; 53) between the process modules (1 to 5; 38 to 40; 49, 50).

5. Process system according to one of the preceding claims, characterized in that at least em part of the configurations, in particular the internal settings of the process modules (1 to 5; 38 to 40; 49, 50), by transmitting Emstellmformationen on the Datenverbin ^¬ extension (10) to the process modules (1 to 5; 38 to 40; 49, 50) can be set automatically.

6. Prozessystem according to any one of the preceding claims, characterized in that the A ^¬ device (60) for providing information about adjusted target Konflgurationen a simulation means (62) information and technical simulation of the to be executed process on the basis of predetermined information on the to be executed process, and on the basis of predetermined information about the process modules available for this purpose and that the simulation device generates the information about the target configurations of the process modules (1 to 5; 38 to 40; 49, 50) to be set as part of the simulation.

7. Automation system according to claim 5 and 6, - characterized in that for the automatic setting of configurations of the process modules (1 to 5; 38 to 40; 49, 50), the corresponding information about the desired configurations to be set as Emstellmformationen to the process modules (1 to 5; 38 to 40; 49, 50) are transmitted.

8. Process system according to claim 6 or 7, so that the information about the desired configurations of the process modules (1 to 5; 38 to 40; 49, 50) to be set can be displayed on a visualization unit (18).

9. Process system according to one of claims 6 to 8, since - characterized in that the simula- tion device (62) is designed, on the basis of information about the process to be processed, to automatically select suitable process modules (1 to 5; 38 to 40; 49, 50) from a predetermined set of different available process modules and to configure them to support a user in the selection and configuration.