WO2001073935A3 - Optical switch employing biased rotatable comb drive devices and methods - Google Patents

Optical switch employing biased rotatable comb drive devices and methods Download PDF

Info

Publication number
WO2001073935A3
WO2001073935A3 PCT/US2001/009553 US0109553W WO0173935A3 WO 2001073935 A3 WO2001073935 A3 WO 2001073935A3 US 0109553 W US0109553 W US 0109553W WO 0173935 A3 WO0173935 A3 WO 0173935A3
Authority
WO
WIPO (PCT)
Prior art keywords
rotating element
rotating
methods
optical switch
drive devices
Prior art date
Application number
PCT/US2001/009553
Other languages
French (fr)
Other versions
WO2001073935A2 (en
Inventor
Behrang Behin
Satinderpall S Pannu
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Priority to AU2001249439A priority Critical patent/AU2001249439A1/en
Publication of WO2001073935A2 publication Critical patent/WO2001073935A2/en
Publication of WO2001073935A3 publication Critical patent/WO2001073935A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching

Abstract

Optical switches based on combdriven MEMs rotating devices (700) including actuators and position sensors. The present invention includes an embodiment that uses rotating elements attached to rotatable flexure (711) disposed along an axis and coupled to the comb fingers (702, 712) with a biasing element coupled to the rotating element causing the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element (720). A voltage applied between comb fingers may cause the rotating element to undergo further rotation about the axis in a predetermined manner to deflect and switch an optical signal. The switches of the present invention can be employed with prior-art staggered combdrives and single layer self-aligned combdriven devices.
PCT/US2001/009553 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods WO2001073935A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001249439A AU2001249439A1 (en) 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19185600P 2000-03-24 2000-03-24
US60/191,856 2000-03-24

Publications (2)

Publication Number Publication Date
WO2001073935A2 WO2001073935A2 (en) 2001-10-04
WO2001073935A3 true WO2001073935A3 (en) 2002-04-18

Family

ID=22707176

Family Applications (4)

Application Number Title Priority Date Filing Date
PCT/US2001/009260 WO2001076054A2 (en) 2000-03-24 2001-03-22 Biased rotatable comb drive sensor methods
PCT/US2001/009554 WO2001073936A2 (en) 2000-03-24 2001-03-23 Biased rotatable combdrive devices and methods
PCT/US2001/009533 WO2001076055A2 (en) 2000-03-24 2001-03-23 Biased rotatable comb drive actuator methods
PCT/US2001/009553 WO2001073935A2 (en) 2000-03-24 2001-03-23 Optical switch employing biased rotatable comb drive devices and methods

Family Applications Before (3)

Application Number Title Priority Date Filing Date
PCT/US2001/009260 WO2001076054A2 (en) 2000-03-24 2001-03-22 Biased rotatable comb drive sensor methods
PCT/US2001/009554 WO2001073936A2 (en) 2000-03-24 2001-03-23 Biased rotatable combdrive devices and methods
PCT/US2001/009533 WO2001076055A2 (en) 2000-03-24 2001-03-23 Biased rotatable comb drive actuator methods

Country Status (4)

Country Link
US (2) US6629461B2 (en)
AU (4) AU2001247702A1 (en)
TW (1) TW523485B (en)
WO (4) WO2001076054A2 (en)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6850662B1 (en) 2000-07-31 2005-02-01 Tellabs Operations, Inc. Optical switch for reciprocal traffic
US6363182B2 (en) 2000-07-31 2002-03-26 James D. Mills Optical switch for reciprocal traffic
AU2002258356A1 (en) 2000-11-03 2002-09-12 Herzel Laor Piezoelectric optical cross connect switching
WO2002086602A1 (en) 2001-04-17 2002-10-31 M2N, Inc. Micro-actuator and micro-device using the same
US7005775B2 (en) * 2001-05-09 2006-02-28 Chang Feng Wan Microfabricated torsional drive utilizing lateral electrostatic force
US6750745B1 (en) * 2001-08-29 2004-06-15 Magfusion Inc. Micro magnetic switching apparatus and method
US6614954B2 (en) * 2001-10-24 2003-09-02 Transparent Networks, Inc. Feedback control system for a MEMS based optical switching fabric
US6757092B2 (en) 2001-12-10 2004-06-29 Nayef M. Abu-Ageel Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
US7872394B1 (en) 2001-12-13 2011-01-18 Joseph E Ford MEMS device with two axes comb drive actuators
GB2385946A (en) * 2002-02-28 2003-09-03 Bookham Technology Plc Micro electro mechanical system
US6925710B1 (en) 2002-03-27 2005-08-09 Analog Devices, Inc. Method for manufacturing microelectromechanical combdrive device
ITTO20020565A1 (en) * 2002-06-28 2003-12-29 St Microelectronics Srl PROCEDURE FOR THE MANUFACTURE OF A MICRO-WORKED OSCILLATING ELEMENT, IN PARTICULAR A MIRROR FOR OPTICAL SWITCHES.
US6842555B2 (en) 2002-07-18 2005-01-11 Analog Devices, Inc. Method and apparatus for optical switching with same side input and outputs
EP1398766A3 (en) * 2002-08-13 2005-08-17 Lg Electronics Inc. Micro-actuator, manufacturing method thereof, optical pickup head of optical recording/reproducing apparatus with micro-actuator and fabrication method thereof
KR100455122B1 (en) * 2002-08-13 2004-11-06 엘지전자 주식회사 Apparatus for focusing servo
KR20060026001A (en) * 2002-11-22 2006-03-22 어드밴스드 나노 시스템즈 인코포레이티드 Mems scanning mirror with tunable natural frequency
US7034370B2 (en) * 2002-11-22 2006-04-25 Advanced Nano Systems, Inc. MEMS scanning mirror with tunable natural frequency
JP4337511B2 (en) 2003-02-12 2009-09-30 株式会社デンソー Electrostatic actuator and manufacturing method thereof
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
US7688689B2 (en) 2004-02-26 2010-03-30 Seagate Technology Llc Head with optical bench for use in data storage devices
FR2865201A1 (en) * 2004-06-18 2005-07-22 Commissariat Energie Atomique Vertical comb-drive type electrostatic actuator for very large telescope, has two electrode sets moving with respect to each other, from rest to maximum positions, where sets partially and electrically overlap even in rest position
TWI239414B (en) * 2004-06-25 2005-09-11 Ind Tech Res Inst MEMS optical switch with self-assembly structure
KR100624436B1 (en) * 2004-10-19 2006-09-15 삼성전자주식회사 2-axis actuator and method of manufacturing the same
US7400792B2 (en) 2004-12-09 2008-07-15 Tellabs Operations, Inc. Methods and apparatus to make substantially uniform losses in optical cross connects
JP4385937B2 (en) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 Actuator
KR100639918B1 (en) * 2004-12-16 2006-11-01 한국전자통신연구원 MEMS Actuator
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US20060185446A1 (en) * 2005-02-18 2006-08-24 Speckhart Frank H Printed strain gage for vehicle seats
CN100381862C (en) * 2005-03-23 2008-04-16 精工爱普生株式会社 Actuator, optical device having actuator, and actuator manufacturing method
US7509870B2 (en) * 2005-10-26 2009-03-31 Orthodata Technologies Llc MEMS capacitive bending and axial strain sensor
US7529016B1 (en) 2006-07-27 2009-05-05 Allen James J Extended-range tiltable micromirror
DE102007027428A1 (en) * 2007-06-14 2008-12-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Component with a vibration element
DE102007033000B4 (en) * 2007-07-16 2016-02-04 Robert Bosch Gmbh Micromechanical component with a position detection component for position determination and amplitude determination of a vibratable element
US8085508B2 (en) * 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
US8155259B2 (en) * 2008-11-17 2012-04-10 Global Nuclear Fuel—Americas, LLC Apparatus and method for measuring and setting perpendicularity of an upper tie plate of a nuclear fuel bundle
DE102008059634B4 (en) * 2008-11-28 2012-12-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical actuator with electrostatic comb drive
KR20100063996A (en) * 2008-12-04 2010-06-14 삼성전자주식회사 Scanner and image forming apparatus employing the same
US20110063068A1 (en) * 2009-09-17 2011-03-17 The George Washington University Thermally actuated rf microelectromechanical systems switch
US8347739B2 (en) * 2010-09-09 2013-01-08 Steering Solutions Ip Holding Corporation Torque sensing system having torque sensor, method for determining an amount of torque, and steering system
JP2013200337A (en) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd Light deflector
US10184951B2 (en) * 2016-02-10 2019-01-22 Globalfoundries Singapore Pte. Ltd. Three-axis monolithic MEMS accelerometers and methods for fabricating same
EP3605186B1 (en) * 2017-03-30 2022-11-23 Mitsubishi Electric Corporation Optical scanning device and method of manufacture therefor
US10825628B2 (en) * 2017-07-17 2020-11-03 Analog Devices Global Unlimited Company Electromagnetically actuated microelectromechanical switch
US10509198B1 (en) 2018-12-07 2019-12-17 Didi Research America, Llc Lever system for driving mirrors of a lidar transmitter
US11085995B2 (en) 2018-12-07 2021-08-10 Beijing Voyager Technology Co., Ltd. Non-linear springs to unify the dynamic motion of individual elements in a micro-mirror array
US11061201B2 (en) 2018-12-07 2021-07-13 Beijing Voyager Technology Co., Ltd. Non-linear springs to unify the dynamic motion of individual elements in a micro-mirror array
US11360299B2 (en) 2019-04-02 2022-06-14 Microsoft Technology Licensing, Llc Display device with compact scanning mirror
DE102020120906A1 (en) * 2020-08-07 2022-02-10 Infineon Technologies Ag Method for determining a torsion angle of a mirror body of a MEMS device
DE102021113303A1 (en) 2021-05-21 2022-11-24 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung HIGH PRECISION ALIGNMENT PROCESS FOR MAKING A COMPONENT AND COMPONENT
DE102021132791A1 (en) 2021-06-07 2022-12-08 Quantum Technologies Gmbh Exploiting the fluorescence feature of an HDNV diamond using a goniometer
DE102023122657A1 (en) 2022-08-24 2024-02-29 Quantum Technologies Gmbh Improved optical fiber with a self-aligning sensor element with NV centers and a small measuring volume and method for producing this optical fiber and its applications
WO2024041703A1 (en) 2022-08-24 2024-02-29 Quantum Technologies Gmbh Improved optical waveguide comprising a self-adjusting sensor element having nv centres and a small measuring volume, method for manufacturing said optical waveguide, and applications thereof
DE102023121633A1 (en) 2022-08-24 2024-02-29 Quantum Technologies Gmbh Self-aligned carrier substrate for NV centers
DE102023122664A1 (en) 2022-08-24 2024-02-29 Quantum Technologies Gmbh ODMR spectrum analyzer based on NV-rich diamond powder
DE102023115906A1 (en) 2022-09-06 2024-03-07 Quantum Technologies Gmbh ODMR spectrum analyzer based on NV-rich diamond powder

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29618818U1 (en) * 1996-10-29 1996-12-12 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switching unit
EP0907076A2 (en) * 1991-05-14 1999-04-07 Cornell Research Foundation, Inc. Methods of fabricating integrated, aligned tunneling tip pairs
DE19757181A1 (en) * 1997-12-19 1999-07-01 Bosch Gmbh Robert Arrangement for coupling glass fibers
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US4413766A (en) 1981-04-03 1983-11-08 General Electric Company Method of forming a conductor pattern including fine conductor runs on a ceramic substrate
JP3003429B2 (en) 1992-10-08 2000-01-31 富士電機株式会社 Torsional vibrator and optical deflector
FR2697675B1 (en) 1992-11-05 1995-01-06 Suisse Electronique Microtech Method for manufacturing integrated capacitive transducers.
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
JP3269274B2 (en) * 1994-03-15 2002-03-25 株式会社デンソー Acceleration sensor
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
FR2732467B1 (en) 1995-02-10 1999-09-17 Bosch Gmbh Robert ACCELERATION SENSOR AND METHOD FOR MANUFACTURING SUCH A SENSOR
WO1998012587A1 (en) 1995-06-07 1998-03-26 Mcdonnell Douglas Corporation An alignment apparatus for precisely aligning an optical fiber and an associated fabrication method
US6073484A (en) 1995-07-20 2000-06-13 Cornell Research Foundation, Inc. Microfabricated torsional cantilevers for sensitive force detection
US6000280A (en) 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JP3576677B2 (en) 1996-01-19 2004-10-13 キヤノン株式会社 Electrostatic actuator, probe using the actuator, scanning probe microscope, processing device, recording / reproducing device
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6134207A (en) 1996-07-30 2000-10-17 Seagate Technology, Inc. Optical data storage system having optical microswitch
US6301403B1 (en) 1996-07-30 2001-10-09 Iolon, Inc. Optical microswitch with rotary electrostatic microactuator
US6850475B1 (en) 1996-07-30 2005-02-01 Seagate Technology, Llc Single frequency laser source for optical data storage system
US5872880A (en) 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
DE19644918C2 (en) 1996-10-29 1999-10-21 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switching unit
US6025951A (en) 1996-11-27 2000-02-15 National Optics Institute Light modulating microdevice and method
US5867297A (en) 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
US5969848A (en) 1997-07-03 1999-10-19 The Regents Of The University Of California Micromachined electrostatic vertical actuator
JP3011144B2 (en) 1997-07-31 2000-02-21 日本電気株式会社 Optical scanner and its driving method
US6201629B1 (en) 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6181050B1 (en) 1997-10-27 2001-01-30 Hewlett Packard Company Electrostatic micromotor with large in-plane force and no out-of-plane force
US5995334A (en) 1997-12-30 1999-11-30 International Business Machines Corporation Rotary electrostatic microactuator with area-efficient comb electrode arrangement
US6212309B1 (en) 1998-01-24 2001-04-03 Mitel Corporation Optical cross point switch using deformable micromirror
US6253612B1 (en) 1998-06-05 2001-07-03 Integrated Micro Instruments, Inc. Generation of mechanical oscillation applicable to vibratory rate gyroscopes
US6137941A (en) 1998-09-03 2000-10-24 Lucent Technologies, Inc. Variable optical attenuator
AU2183700A (en) 1998-12-15 2000-07-03 Seagate Technology Llc Optical microswitch with rotary electrostatic microactuator
DE60021638T2 (en) 1999-03-04 2006-05-24 Japan Aviation Electronics Industry, Ltd. Optical switch and method of making such a switch
US6215222B1 (en) 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
US6133670A (en) 1999-06-24 2000-10-17 Sandia Corporation Compact electrostatic comb actuator
US6257062B1 (en) * 1999-10-01 2001-07-10 Delphi Technologies, Inc. Angular Accelerometer
US6330102B1 (en) 2000-03-24 2001-12-11 Onix Microsystems Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0907076A2 (en) * 1991-05-14 1999-04-07 Cornell Research Foundation, Inc. Methods of fabricating integrated, aligned tunneling tip pairs
DE29618818U1 (en) * 1996-10-29 1996-12-12 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switching unit
DE19757181A1 (en) * 1997-12-19 1999-07-01 Bosch Gmbh Robert Arrangement for coupling glass fibers
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
LEE A P ET AL: "ELECTROSTATIC COMB DRIVE FOR VERTICAL ACTUATION", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3224, 29 September 1997 (1997-09-29), pages 109 - 119, XP001012085 *
P. CHEUNG AND R. HOROWITZ AND R. T. HOWE: "Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator", IEEE TRANSACTIONS ON MAGNETICS, vol. 32, no. 1, 1 January 1996 (1996-01-01), pages 122 - 128, XP002177264 *
SELVAKUMAR A ET AL: "A HIGH-SENSITIVITY Z-AXIS CAPACITIVE SILICON MICROACCELEROMETER WITH A TORSIONAL SUSPENSION", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 7, no. 2, June 1998 (1998-06-01), pages 192 - 200, XP000834738, ISSN: 1057-7157 *

Also Published As

Publication number Publication date
AU2001247770A1 (en) 2001-10-08
US6629461B2 (en) 2003-10-07
WO2001076055A2 (en) 2001-10-11
AU2001249439A1 (en) 2001-10-08
AU2001247702A1 (en) 2001-10-15
WO2001073936A3 (en) 2002-04-18
WO2001073935A2 (en) 2001-10-04
WO2001073936A2 (en) 2001-10-04
US20010040419A1 (en) 2001-11-15
WO2001076054A3 (en) 2002-04-18
TW523485B (en) 2003-03-11
AU2001245984A1 (en) 2001-10-15
WO2001076055A3 (en) 2002-03-07
WO2001076054A2 (en) 2001-10-11
US20020026831A1 (en) 2002-03-07

Similar Documents

Publication Publication Date Title
WO2001073935A3 (en) Optical switch employing biased rotatable comb drive devices and methods
US5781331A (en) Optical microshutter array
WO2001043268A3 (en) Balanced microdevice and rotary electrostatic microactuator for use therewith
US6917268B2 (en) Lateral microelectromechanical system switch
US20010048784A1 (en) Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
WO2009006118A3 (en) Microelectromechanical device with optical function separated from mechanical and electrical function
WO2002086273A3 (en) Movable barrier operation having cable tension sensor and door lock mechanism
US4118611A (en) Buckling spring torsional snap actuator
EP0754958A3 (en) Improvements in or relating to micro-mechanical devices
WO2003083957A3 (en) Piezoelectric actuator for moving folded-back arms
WO2002036486A3 (en) Electrostatically actuated electromagnetic radiation shutter
WO2002091025A3 (en) Method and apparatus for detecting and latching the position of a mems moving member
WO2005015592A3 (en) Electric switch
JPH0854947A (en) Electric-switch-actuator assembly and discrimination method of changeover position
EP0915277A3 (en) Piezo-electric valve
BR9906059A (en) Micromechanical acceleration switch and monolithic biaxial acceleration switch
WO2002022494A3 (en) Thin film mems sensors employing electrical sensing and force feedback
WO2005078752A8 (en) Piezoelectric thin-film electromechanical microsystem device
AU4269901A (en) Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same
EP1269619A2 (en) Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
US8193884B2 (en) Switching device including a moving ferromagnetic part
KR20010050221A (en) Switching-on/off- and rotational frequency adjusting device for electrical tools
WO2003076951A3 (en) A microelectromechanical device having an analog system for positioning sensing
ES2167241A1 (en) Mechanical reset device for switch
US5661274A (en) Precision double-pole single-throw switch assembly

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
AK Designated states

Kind code of ref document: A3

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CR CU CZ DE DK DM DZ EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A3

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GW ML MR NE SN TD TG

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP