WO2001073937A2 - Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing - Google Patents
Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing Download PDFInfo
- Publication number
- WO2001073937A2 WO2001073937A2 PCT/US2001/009611 US0109611W WO0173937A2 WO 2001073937 A2 WO2001073937 A2 WO 2001073937A2 US 0109611 W US0109611 W US 0109611W WO 0173937 A2 WO0173937 A2 WO 0173937A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- outer frame
- comb fingers
- scanner
- comb
- base
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP01924326A EP1269619A2 (en) | 2000-03-22 | 2001-03-22 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
AU2001250989A AU2001250989A1 (en) | 2000-03-24 | 2001-03-22 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
JP2001571547A JP2003529108A (en) | 2000-03-24 | 2001-03-22 | Two-dimensional gimbal-type scanning actuator with vertical electrostatic comb drive for operation and / or sensing |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19185600P | 2000-03-24 | 2000-03-24 | |
US19198700P | 2000-03-24 | 2000-03-24 | |
US19109700P | 2000-03-24 | 2000-03-24 | |
US60/191,987 | 2000-03-24 | ||
US60/191,856 | 2000-03-24 | ||
US60/191,097 | 2000-03-24 | ||
US09/751,660 | 2000-12-28 | ||
US09/751,660 US6819822B2 (en) | 2000-03-24 | 2000-12-28 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2001073937A2 true WO2001073937A2 (en) | 2001-10-04 |
WO2001073937A3 WO2001073937A3 (en) | 2002-01-03 |
Family
ID=27497876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/009611 WO2001073937A2 (en) | 2000-03-22 | 2001-03-22 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1269619A2 (en) |
AU (1) | AU2001250989A1 (en) |
WO (1) | WO2001073937A2 (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2389707A (en) * | 2002-06-14 | 2003-12-17 | Suisse Electronique Microtech | Linear response MEMS device |
US6757092B2 (en) | 2001-12-10 | 2004-06-29 | Nayef M. Abu-Ageel | Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof |
EP1490714A2 (en) * | 2002-03-18 | 2004-12-29 | Continuum Photonics Inc. | Multiple-axis control system for an optical switch |
WO2006026227A2 (en) | 2004-08-27 | 2006-03-09 | Idc, Llc | Mems display device and method of driving such a device |
WO2007045408A1 (en) * | 2005-10-21 | 2007-04-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Flat substrate having an electrically conductive structure |
EP1806613A1 (en) * | 2006-01-10 | 2007-07-11 | Samsung Electronics Co., Ltd. | Two-axis micro optical scanner |
US7494594B2 (en) | 2003-02-12 | 2009-02-24 | Denso Corporation | Method of manufacturing an electrostatic actuator |
WO2009140077A2 (en) * | 2008-05-12 | 2009-11-19 | Board Of Regents, The University Of Texas System | Optical scanning devices |
US7872394B1 (en) | 2001-12-13 | 2011-01-18 | Joseph E Ford | MEMS device with two axes comb drive actuators |
US8204703B2 (en) | 2008-02-11 | 2012-06-19 | Qualcomm Mems Technologies, Inc. | Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display |
US8207920B2 (en) | 2004-08-27 | 2012-06-26 | Qualcomm Mems Technologies, Inc. | System and method of sensing actuation and release voltages of an interferometric modulator |
US8878771B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | Method and system for reducing power consumption in a display |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726073A (en) * | 1993-06-01 | 1998-03-10 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5872880A (en) * | 1996-08-12 | 1999-02-16 | Ronald S. Maynard | Hybrid-optical multi-axis beam steering apparatus |
-
2001
- 2001-03-22 EP EP01924326A patent/EP1269619A2/en not_active Withdrawn
- 2001-03-22 AU AU2001250989A patent/AU2001250989A1/en not_active Abandoned
- 2001-03-22 WO PCT/US2001/009611 patent/WO2001073937A2/en not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726073A (en) * | 1993-06-01 | 1998-03-10 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5872880A (en) * | 1996-08-12 | 1999-02-16 | Ronald S. Maynard | Hybrid-optical multi-axis beam steering apparatus |
Non-Patent Citations (1)
Title |
---|
SELVAKUMAR A ET AL: "A HIGH-SENSITIVITY Z-AXIS CAPACITIVE SILICON MICROACCELEROMETER WITH A TORSIONAL SUSPENSION" JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE INC. NEW YORK, US, vol. 7, no. 2, June 1998 (1998-06), pages 192-200, XP000834738 ISSN: 1057-7157 * |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US6757092B2 (en) | 2001-12-10 | 2004-06-29 | Nayef M. Abu-Ageel | Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof |
US6888662B2 (en) | 2001-12-10 | 2005-05-03 | Nayef M. Abu-Ageel | Micro-mechanical system employing electrostatic actuator and fabrication methods of same |
US7872394B1 (en) | 2001-12-13 | 2011-01-18 | Joseph E Ford | MEMS device with two axes comb drive actuators |
EP1490714A2 (en) * | 2002-03-18 | 2004-12-29 | Continuum Photonics Inc. | Multiple-axis control system for an optical switch |
EP1490714A4 (en) * | 2002-03-18 | 2005-08-17 | Continuum Photonics Inc | Multiple-axis control system for an optical switch |
GB2389707A (en) * | 2002-06-14 | 2003-12-17 | Suisse Electronique Microtech | Linear response MEMS device |
US7494594B2 (en) | 2003-02-12 | 2009-02-24 | Denso Corporation | Method of manufacturing an electrostatic actuator |
US8207920B2 (en) | 2004-08-27 | 2012-06-26 | Qualcomm Mems Technologies, Inc. | System and method of sensing actuation and release voltages of an interferometric modulator |
US8487846B2 (en) | 2004-08-27 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | System and method of sensing actuation and release voltages of an interferometric modulator |
WO2006026227A2 (en) | 2004-08-27 | 2006-03-09 | Idc, Llc | Mems display device and method of driving such a device |
WO2006026227A3 (en) * | 2004-08-27 | 2006-08-17 | Idc Llc | Mems display device and method of driving such a device |
US8878771B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | Method and system for reducing power consumption in a display |
US7795693B2 (en) | 2005-10-21 | 2010-09-14 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E. V. | Flat substrate having an electrically conductive structure |
WO2007045408A1 (en) * | 2005-10-21 | 2007-04-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Flat substrate having an electrically conductive structure |
EP1806613A1 (en) * | 2006-01-10 | 2007-07-11 | Samsung Electronics Co., Ltd. | Two-axis micro optical scanner |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US8355883B2 (en) | 2008-02-11 | 2013-01-15 | Qualcomm Mems Technologies, Inc. | Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display |
US8775107B2 (en) | 2008-02-11 | 2014-07-08 | Qualcomm Mems Technologies, Inc. | Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display |
US8204703B2 (en) | 2008-02-11 | 2012-06-19 | Qualcomm Mems Technologies, Inc. | Measurement and apparatus for electrical measurement of electrical drive parameters for a MEMS based display |
WO2009140077A2 (en) * | 2008-05-12 | 2009-11-19 | Board Of Regents, The University Of Texas System | Optical scanning devices |
WO2009140077A3 (en) * | 2008-05-12 | 2010-01-14 | Board Of Regents, The University Of Texas System | Optical scanning devices |
Also Published As
Publication number | Publication date |
---|---|
EP1269619A2 (en) | 2003-01-02 |
AU2001250989A1 (en) | 2001-10-08 |
WO2001073937A3 (en) | 2002-01-03 |
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