WO2002006872A1

WO2002006872A1 - Optical waveguide device having wavelength selectivity

Info

Publication number: WO2002006872A1
Application number: PCT/JP2001/006011
Authority: WO
Inventors: Takayuki Toyoshima; Toshiaki Anzaki
Original assignee: Nippon Sheet Glass Co., Ltd.
Priority date: 2000-07-14
Filing date: 2001-07-11
Publication date: 2002-01-24
Also published as: JP2002031728A

Abstract

An optical waveguide device (11) having a wavelength selectivity comprises a glass substrate (18) including an optical waveguide (12) having a plurality of channels (13 to 16) having a plurality of apertures in a first end face (17); and a multi-layer filter (19) formed on the first end face. The multi-layer filter has a film thickness varying continuously depending on the positions of the apertures of the channels. The light transmitted through the multi-layer filter has a center wavelength different with the position of the channel. When a mixed light comes from the channels into the multi-layer filter, it is divided into beams of different center wavelengths by the multi-layer filter having different thicknesses. This multi-layer filter is formed directly on the first end face of the substrate by a physical gas deposition method, so that the optical waveguide device is easily manufactured.

Description

Specification

Optical waveguide device with wavelength selectivity

The present invention relates to an optical waveguide device used for optical communication such as wavelength division multiplexing communication, and more particularly, to a wavelength selectivity suitable for multiplexing light having different wavelengths and dividing the multiplexed light for each wavelength. The present invention relates to an optical waveguide device having: Background art

Conventionally, members having an optical waveguide have been used as optical communication equipment. In the future, with the spread of optical communication, the demand for smaller and more integrated optical communication equipment will increase. Optical communication requires a demultiplexing technique for selectively transmitting or reflecting light of a predetermined wavelength. As a demultiplexing optical filter, a multilayer filter in which high-refractive-index dielectric layers and low-refractive-index dielectric layers are alternately laminated, such as an edge filter and a narrow-band filter, are known.

FIG. 6 shows a conventional optical communication device 60 using an optical filter. The optical communication device 60 includes a glass substrate 62 having an optical waveguide 61. From the fiber array 66 on the left side, mixed light enters the channel 63 of the optical communication equipment 60. The mixed light is divided into two mixed lights including a light having a wavelength of 1 and a light having a wavelength of λ2 by a primary optical filter 67. One of the mixed lights is guided toward the secondary optical filter 68, and is divided into light having a wavelength of λ1 by the secondary optical filter 68, and the light is emitted to the fiber array 70 through the channel 64. . Also, the other mixed light is guided toward the secondary optical filter 68 and is divided by the secondary optical filter 69 into light having a wavelength of I 2, and the light is transmitted through the channel 65 to the fiber array 70. It is emitted to

The optical communication device 60 shown in FIG. 6 requires three optical filters 67, 68, and 69 to split the mixed light. Therefore, the optical filters 67, 68, 69 Grooves 7 1 and 7 2 are required to be arranged at predetermined positions of the waveguide 61. Therefore, in the manufacturing process of the optical communication equipment 60, the machining for forming the grooves 71, 72 in the substrate 62, and the optical filters 67, 68, 69 corresponding to the grooves 71, This requires the work to assemble in 72, and there is a problem that the number of manufacturing processes is relatively large. In particular, as the number of channels of the optical waveguide 61 increases, the number of optical filters also increases, and accordingly, the manufacturing operation becomes more complicated and the manufacturing time becomes longer. Moreover, assembling the relatively small optical filters 67, 68, 69 to the relatively small optical communication equipment 60 (glass substrate 62) is a very detailed operation. The production of 60 was difficult. Disclosure of the invention

An object of the present invention is to provide an optical waveguide device having wavelength selectivity, which is easily manufactured at a relatively low cost.

In order to achieve the above object, according to a first aspect of the present invention, there is provided a substrate having: one end face; and an optical waveguide including a plurality of channels each having a plurality of first openings formed in the one end face; An optical waveguide element having wavelength selectivity, comprising: a multilayer filter formed on one end surface of a substrate. The thickness of the multilayer filter changes continuously according to the position of each of the plurality of first openings.

The plurality of first openings are arranged in a line from a first end to a second end of one end surface of the substrate, and a film thickness of the multilayer filter is a second thickness from the first end. It preferably changes linearly toward the end.

Preferably, the optical waveguide includes at least one channel having a second opening formed on the other end surface of the substrate.

It is preferable that the optical waveguide element is further formed integrally with the multilayer filter, and further includes an optical signal generation unit that emits parallel light to the multilayer filter.

The optical signal generation unit includes: a lens array having a plurality of lenses respectively corresponding to the plurality of first openings; and an optical signal to the multilayer filter via the plurality of lenses. And a plurality of light sources that emit light.

It is preferable that the optical signal generation unit is an aperture lens array having a plurality of aperture lenses.

An optical waveguide element is formed integrally with a multilayer filter, and an optical signal for detecting light obtained by dividing mixed light obtained by multiplexing light having different wavelengths into wavelengths using a multilayer filter. It is preferable to further include a detection unit. ·

Preferably, the optical signal detection unit includes a plurality of photoelectric conversion elements.

According to a second aspect of the present invention, there is provided a method for manufacturing an optical waveguide device having wavelength selectivity. The manufacturing method includes the steps of: preparing a substrate having one end face; and an optical waveguide including a plurality of channels each having a plurality of first openings on the one end face. A step of directly forming a multilayer filter whose one end surface continuously changes in accordance with each position of the plurality of first openings. It is preferable that the manufacturing method further includes, prior to the step of forming the multilayer filter, arranging the substrate such that one end surface of the substrate is inclined with respect to an evaporation source or a target. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a plan view of an optical waveguide device according to a first embodiment of the present invention.

FIG. 2 is a schematic perspective view of a film forming apparatus used for manufacturing the optical waveguide device of FIG.

Figure 3a shows a Darraf showing the incident light without wavelength dependence.

FIG. 3B is a diagram showing the wavelength of the split outgoing light.

FIG. 4 is a plan view showing an optical waveguide device according to a second embodiment of the present invention.

FIG. 5 is a perspective view of the optical waveguide device of FIG.

FIG. 6 is a perspective view of a conventional optical waveguide device. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, an optical waveguide device 11 having wavelength selectivity according to the first embodiment of the present invention will be described. This will be described with reference to FIGS.

As shown in FIG. 1, the optical waveguide element 11 has a glass substrate 18 having a first end face 17 and a second end face 20, a multilayer filter 19 formed on the first end face 17, and It is equipped with. Inside the glass substrate 18, an optical waveguide 12 including a plurality (four) of channels 13, 14, 15, and 16 is formed. The four channels 13 to 16 have openings 13a, 14a, 15a, and 16a on the first end face 17, respectively. The four channels 13 to 16 join one channel 21. The channel 21 has an opening 21 a in the second end face 20 of the glass substrate 18.

The first end face 17 is flattened. Multi-layer filter 19th; It is formed on the entire end face 17. The film thickness of the multilayer filter 19 at positions corresponding to the four openings 13a, 14a, 15a, and 16a is different. In other words, the four lights supplied to the multilayer filter 19 from the apertures 13 a, 14 a, 15 a, 16 a of the four channels 13 to 16 are converted into the multilayer filter 19. By passing through, the light is converted into four lights with different central wavelengths. Specifically, the light transmitted through the thinner multilayer filter 19 has a shorter central wavelength. .

The multilayer filter 19 is a narrow-band filter manufactured by alternately laminating high-refractive-index dielectric layers and low-refractive-index dielectric layers. It is formed directly on the first end face 17. Tantalum oxide is preferably used for the material of the high refractive index dielectric layer, and silicon oxide is preferably used for the material of the low refractive index dielectric layer.

The multilayer filter 19 is formed, for example, by using a film forming apparatus 22 as shown in FIG. 2 and according to a physical vapor phase method such as a sputtering method. The film forming apparatus 22 includes a vacuum chamber 23 having a target electrode 25. A target 24 is mounted on the target electrode 25 in the vacuum chamber 23. A negative voltage is applied to the target electrode 25 from a DC power supply or a high-frequency power supply (not shown). The vacuum chamber 23 is connected to a vacuum exhaust system (not shown). The rotating drum 26 is provided in the vacuum chamber 23. The rotating drum 26 has at least one glass The substrate 18 is attached via a jig or the like (not shown). In FIG. 2, one glass substrate 18 is shown. The glass substrate 18 is rotated so that the longitudinal direction of the first end face 17 and the longitudinal direction of the target 24 are in the same direction, and the first end face 17 is inclined with respect to the target 24. Fixed to 6.

The vacuum chamber 23 is evacuated to a high vacuum by an evacuation system. Thereafter, an inert gas such as Ar is introduced into the vacuum chamber 23, and a negative voltage is applied to the target electrode 25. As a result, the gas phase near the surface of the target electrode 25 becomes a plasma state. Due to the sputtering phenomenon, target atoms are released from the surface of the target electrode 25, and the target atoms are deposited on the first end face 17 of the glass substrate 18 and deposited, whereby a thin film is formed on the first end face 17 It is formed.

During the process of forming a thin film on the first end face 17, the first end face 17 of the glass substrate 18 passes in an inclined position in front of the target 24 by rotating the rotating drum 26 at a predetermined speed. I do. For this reason, the distance between the first end face 17 and the target 24 is the longest at the first end 17 a in the longitudinal direction of the first end face 17, and the distance becomes shorter toward the second end 17. I'm sorry. Therefore, a relatively thin film is formed on the first end 17a side of the first end face 17, and a relatively thick film is formed toward the second end 17b. In other words, the film thickness of the multilayer filter 19 is linear along the longitudinal direction of the first end face 17 from the opening 13 a of the channel 13 toward the opening 16 a of the channel 16. Increase (see Figure 1).

The multilayer filter 19 may be formed according to a physical vapor phase method such as a vacuum evaporation method or another sputtering method. The multilayer filter 19 may be formed by a magnetron sputtering method, an ion beam sputtering method, an ion-assisted evaporation method, or the like. In this case, a multilayer filter 19 having improved weather resistance is obtained. Further, the film thickness of the multilayer filter 19 can be made gradient by processing the deposition shield into an appropriate shape and making the opening through which the sputtered particles fly through an inclined opening.

According to the first embodiment, the following effects can be obtained. (1) By passing through the multilayer filter 19, the center wavelengths of the four transmitted lights supplied from the four channels 13 to 16 of the optical waveguide 12 are different from each other. More specifically, when a mixed light including light having a plurality of wavelengths, for example, incident light having no wavelength dependence as shown in FIG. 3A is incident on the channel 21 of the optical waveguide 12, the mixed light Is applied to the multilayer filter 19 from the openings 13a to 16a of the channels 13 to 16 (Fig. 3b). By passing through the multilayer filter 19, four outgoing lights A, B, C, and D having different center wavelengths (the wavelengths are ΐ, λ 2, λ 3 λ 4, respectively) are obtained. That is, the incident light including light having a center wavelength of lambda. 1 to 4 (the optical signal having two ^fourth information amount), the multilayer filter 1 9, each central wavelength; L. 1 to 4 single output light 4 A, B, C, D are divided.

Conversely, four light A with lambda. 1 to example 4 of the central wavelengths, B, C, (an optical signal having two ^fourth information amount) mixed light including D, channel 1 3 from multilayer filter 1 9 When the light enters the apertures 13 a to 16 a of 16, the mixed light is converted into four lights A, B, C, and D each having a center wavelength of λ 1 to L 4 by the multilayer filter 19. Can be divided into The four lights A, B, C, and D enter the corresponding channels 13 to 16, respectively. That is, only light having a center wavelength of λ 1 to 4 passes through the multilayer filter 19, and the light enters channels 13 to 16 and joins in channel 21. Thus, it multiplexed mixed light having a different wavelength, i.e. an optical signal having two ⁴ amount of information is emitted from the second end face 2 0 of the glass substrate 1 8. The configuration of the optical waveguide element 11 having such wavelength selectivity is relatively simple.

(2) The optical waveguide element 11 is manufactured by continuously forming the multilayer filter 19 having a different thickness on the first end face 17 of the glass substrate 18. Therefore, in the conventional manufacturing process of the optical communication equipment 60, there are very many processes such as the process of forming the filter grooves 71 and 72 in the substrate 62 and the process of assembling the filter in the grooves 71 and 72. Precise work is omitted, and the number of manufacturing steps and labor of the optical waveguide element 11 are reduced.

In particular, in the prior art, as the number of channels in the optical waveguide 61 increases, more optical filters are used, so the number of steps for forming the filter grooves increases, and However, the number of optical filter assembly steps is also increased. Therefore, the manufacturing process of the optical communication equipment 60 is more complicated, and the manufacturing time becomes longer. On the other hand, according to the present embodiment, even when the number of channels of the optical waveguide 12 is increased, it is only necessary to form the multilayer filter 19 having a film thickness corresponding to the increase in the number of channels. Therefore, the manufacturing process of the optical waveguide element 11 is hardly affected by the increase in the number of channels. Therefore, the optical waveguide element 11 is easily manufactured, and its manufacturing cost is reduced.

(3) The thickness of the multilayer filter 19 changes linearly from the first end 17a of the first end face 17 to the second end 17b. Therefore, the center wavelength of light passing through the multilayer filter 19 is uniquely determined at positions corresponding to the openings 13 a to 16 a of the channels 13 to 16. That is, the center wavelength of light passing through the multilayer filter 19 via the channels 13 to 16 is expressed by a linear expression. Therefore, it is easy to change the design such as changing the positions of the plurality of channels 13 to 16 and changing the number of channels, and even if such a design change occurs, the optical waveguide element 11 can be It is easily manufactured.

(4) When the number of channels 13 to 16 is increased to increase the amount of information, the thickness of the multilayer filter 19 is uniquely determined according to the increased channel opening position. The center wavelength of the light passing through the filter 19 is uniquely determined. Therefore, the number of channels can be easily increased without increasing the number of groove forming steps and filter assembling steps as in the prior art.

Next, an optical waveguide device 11 according to a second embodiment of the present invention will be described with reference to FIG. 4 and FIG.

In the optical waveguide element 11, a multilayer filter 19 and an optical signal generator 30 that emits parallel light to the multilayer filter 19 are integrally formed. An optical waveguide 12 is formed on the glass substrate 18. The optical waveguide 12 has openings 3 la, 32 a, 33 a, 34 a, 35 a, 36 a, 37 a, and 38 a on the first end face 17 of the glass substrate 18, respectively. One channel 3 1, 3 2, 3 3, 34, 3 5, 3 6, 3 7 , 38 and one channel 21 having an opening 21 a in the second end face 20 of the glass substrate 18. Eight channels 3:! To 38 join the channel 21 1 The optical signal generator 30 includes eight lens elements L1 to L8 arranged in parallel Rod lens array 40 and parallel And a laser diode array 41 including eight laser diodes LD 1 to LD 8 arranged in a matrix.

The rod lens array 40 is filled with a plurality of (eight in this example) refractive index distributed optical elements, rod lenses L 1 L 8, and gaps between the open lenses L 1 to L 8 and their surroundings. Resin (not shown) and a holding plate (not shown). The open lenses L 1 to L 8 function as collimator lenses, and the optical axes of the open lenses L 1 to L 8 are arranged so as to be parallel to each other. Both end surfaces of the open lens array 40, that is, the surface on the multilayer filter 19 side and the surface on the laser diode array 41 side are flattened. The optical axes of the rod lenses L1 to L8 substantially coincide with the openings of the channels 31 to 38 on the first end face 17 side, respectively. The laser diode array 41 is formed integrally with the rod lens array 40 such that the centers of the laser diodes LD 1 to LD 8 substantially coincide with the optical axes of the rod lenses L 1 to L 8, respectively. .

As each of the laser diodes LD1 to LD8, for example, one that outputs laser light of the same wavelength is used. The half width of the laser beam output from each of the laser diodes LD1 to LD8 may be wide. In the second embodiment, the eight types of wavelengths; the light of 1 to 8 are divided by the multilayer filter 19 so that the half value width is in the range of the half value width of the laser light of each laser diode LD1 to LD8. And sent to each channel 31-38. That is, the laser light emitted from the laser diode LD1 is incident on the multilayer filter 19 via the rod lens L1. The laser light passes through the multilayer filter 19, and the light having the center wavelength of λ1 is incident on the channel 31. Similarly, the laser beams respectively output from the laser diodes LD2 to LD8 are transmitted through the multilayer lenses L2 to L8. To the data 19 respectively. Each laser beam passes through the multilayer filter 19, and light having a center wavelength of λ2 to 8 enters the channels 32 to 38, respectively.

According to the second embodiment, the following effects can be obtained.

(5) Of the laser diodes LD 1 to LD 8, the light output from the laser diode that is selectively turned on is sent to the corresponding channels 31 to 38 via the multilayer filter 19. This is explained with reference to Table 1 below.

table 1

For example, when only the laser diode LD 1 is turned on, the wavelength selected by the multilayer filter 19 within the half width of the laser light output from the laser diode; the light of L 1 enters the channel 31 . On the other hand, when only the laser diode LD 2 is turned on, light of the wavelength λ 2 selected by the multilayer filter 19 enters the channel 32. Similarly, when only one of the laser diodes LD3 to LD8 is turned on, the laser diode is turned on within the half-value width of the laser beam output from the turned on laser diode. The light of the corresponding wavelength is selected by the multilayer filter 19, and the light enters the corresponding channels 33-38.

ON and OFF of the laser diodes LD1 to LD8 are controlled by a control circuit (not shown). Control circuit converts the electrical signals to optical signals that have a data amount of 2 ⁸ outputs having an information amount of 2 ^8. Therefore, the optical waveguide device 11 of the second embodiment has a wavelength Mixed light obtained by multiplexing different lights can be emitted.

The first and second embodiments may be changed as follows.

• In the first embodiment, the number of channels of the optical waveguide 12 may be arbitrarily changed.

'In the first embodiment, the method of forming the multilayer filter 19 is not limited to the method of FIG. For example, by blocking a part of the surface of the target 24 using a correction plate, the opening width of the surface of the target 24 exposed to the first end face 17 is increased in the longitudinal direction of the first end face 17. You may make it change gradually from one end side to the other end side. The glass substrate 18 is moved horizontally with respect to the target 24 so that the surface of the target 24 and the first end face 17 face each other. Thus, a multilayer filter having a thickness corresponding to the opening width of the surface of the target 24 is formed on the first end face 17. That is, a thinner multilayer filter is formed as the opening width on the surface of the target 24 becomes narrower, and a thicker multilayer filter is formed as the opening width becomes wider. According to this method as well, the multilayer filter 19 whose film thickness changes linearly can be formed on the first end face 17 of the glass substrate 18.

• In the second embodiment, in place of the laser diode array 4 1 and the lens array 4 0, for example, the rod lenses mixed light (for example, an optical signal that have a data amount of 2 ⁸⁾ containing light of different wavelengths L It is also possible to use an optical signal generation unit that allows the light to enter the multilayer filter 19 in parallel via 1 to L8. Alternatively, an optical signal generating unit that makes the mixed light incident on the multilayer filter 19 in parallel without using the rod lenses L1 to L8 may be used. Even when adopting any of the optical signal generating unit, the optical waveguide device 1 1, an optical signal having an information amount of 2 ⁸ multilayer filter 1 9 by light of different wavelengths for each channel 3 1 to 3 8 (lambda divided into light) of I～ 8, then, λ ΐ~; by the multiplexing of the light L 8 to regenerate the optical signal having an information amount of 2 ^8, and is capable of emitting the optical signal.

'In the second embodiment, a photoelectric conversion element such as a photodetector may be used instead of the laser diodes LD1 to LD8. In this case, Rodren The optical signal detecting section 30a is composed of the optical elements L1 to L8 and the photoelectric conversion element units 41a including the same number of photodetectors PD1 to PD8 (see FIG. 4). In this case, mixed light obtained by multiplexing lights having different wavelengths is applied to the multilayer filter 19 from each of the channels 31 to 38. The mixed light is divided into lights having different center wavelengths (λΐ to 18) by the multilayer filter 19 and received by the photodetectors PD 1 to PD 8 via the rod lenses L 1 to L 8. (See Table 2 below). For this reason, the same optical signal detection unit 30a can detect light having different wavelengths contained in the mixed light separately for each wavelength. For example, assuming that the mixed light is an optical signal having an information amount of 2 ⁿ , the mixed light is divided by the multilayer filter 19 into lights of λ 1 to λ n having different center wavelengths. Thus, optical signal detection unit 3 0 a can be converted from the optical signals having the information amount of 2 ⁿ to an electric signal having an information amount of 2 ^n.

Table 2

According to the optical waveguide element 11 of the present invention, the film thickness of the multilayer filter 19 changes continuously according to each position of the plurality of channels. Different for each of a plurality of channels. Therefore, when mixed light including light having different wavelengths enters the multilayer filter 19 through a plurality of channels of the optical waveguide 12, the mixed light is centered for each channel by the multilayer filter 19. It can be divided into lights with different wavelengths. For example, when Table waveguide 1 2 number of channels (the numerical aperture) in eta,. 1 to the center wavelength of lambda; mixed light including light of I eta (No. Mitsunobu having an information amount of 2 ^eta) is a respective channel When the mixed light passes through the multilayer filter, the mixed light is divided into light having a central wavelength of 1 to L η. Conversely, when mixed light including light having a center wavelength of λ 1 to L η is applied to the channel from the multilayer filter 19, the mixed light passes through the multilayer filter 19, and the mixed light becomes the center wavelength. Is divided into different lights. For example, the mixed light is divided by the multilayer filter 19 into light having a center wavelength of 1 to Lη, and each light enters each corresponding channel. That is, an optical signal having an information amount of ^2η is divided into lights having different center wavelengths for each channel.

As described above, the optical waveguide element 11 having wavelength selectivity of the present invention can be manufactured only by forming the multilayer filter 19 having a continuously changing film thickness on one end face 17 of the substrate 18. That is, the optical waveguide element 11 is manufactured in two steps: a step of forming the optical waveguide 12 on the substrate 18 and a step of forming the multilayer filter 19 on one end face 17 of the substrate 18. Therefore, the optical waveguide element 11 is easily manufactured, and the manufacturing cost is reduced. Further, even when the number of channels of the optical waveguide 12 is relatively large, it is possible to avoid an increase in manufacturing work and an increase in manufacturing time.

The optical waveguide element 11 can receive light from either of the two end faces 17 and 20 of the substrate 18, so that the optical waveguide element 11 has versatility as a bidirectional optical waveguide element 11. Can be used.

Since the optical signal generator 30 integrated with the multilayer filter 19 supplies light parallel to the multilayer filter 19, the light is appropriately divided by the multilayer filter 19 and transmitted to each channel. Can be By combining the divided lights having different center wavelengths, it is possible to produce a mixed light in which lights having different wavelengths are multiplexed.

Light that includes a lens array 40 having a plurality of lenses L1 to L8, and a plurality of light sources LD1 to LD8 that emit light to the multilayer filter 19 via the plurality of lenses L1 to L8, respectively. The light emitted from the plurality of light sources LD 1 to LD 8 by the signal generator 30 is divided by the multilayer filter 19 into light having different center wavelengths. Therefore, by controlling ON and OFF of a plurality of light sources individually and by combining the lights separated by the multilayer filter 19, mixed light including lights having different center wavelengths can be produced. For example, if the number of light sources, lenses, and channels is represented by n, A mixed light having an information content of 2 ^η including a light having a center wavelength of λ 1 to L η can be produced.

Since the optical signal generation section 30 includes an open lens array 40 having a plurality of rod lenses L1 to L8, a substrate 18 on which an optical waveguide 12 and a multilayer filter 19 are formed, and a rod lens array By combining with the ray 40, a small-sized optical waveguide element 11 having wavelength selectivity can be obtained. '

The light separated by the multilayer filter 19 is detected for each wavelength by the optical signal detector 30a integrated with the multilayer filter 19. Therefore, for example, a mixed optical signal having an information amount of 2 ⁿ is divided by the multilayer filter 19 into lights of different central wavelengths for each channel; L 1 to n. Therefore, the optical signal having the information amount of 2 ⁿ detected by the optical signal detection unit 30 a can be converted into an electric signal having the information amount of 2 ⁿ .

Claims

The scope of the claims

1. In an optical waveguide device having wavelength selectivity,

A substrate having one end face, and an optical waveguide including a plurality of channels each having a plurality of first openings formed in the one end face;

A multilayer filter formed on one end surface of the substrate, the multilayer filter having a thickness that continuously changes according to the position of each of the plurality of first openings. An optical waveguide element.

2. The plurality of first openings are arranged in a line from a first end to a second end of one end surface of the substrate, and the thickness of the multilayer filter is from the first end. 2. The wavelength-selective optical waveguide device according to claim 1, wherein the optical waveguide device changes linearly toward the second end.

3. The wavelength selection device according to claim 1, wherein the substrate further has another end surface, and the optical waveguide includes at least one channel having a second opening formed in the other end surface. An optical waveguide element having a property.

4. The wavelength according to any one of claims 1 to 3, further comprising an optical signal generation unit formed integrally with the multilayer filter and emitting parallel light to the multilayer filter. An optical waveguide device having selectivity.

5. The optical signal generation unit includes: a lens array having a plurality of lenses respectively corresponding to the plurality of first openings; and a plurality of light sources that emit light to the multilayer filter via the plurality of lenses. 5. The optical waveguide device having wavelength selectivity according to claim 4, comprising:

6. The optical waveguide device having wavelength selectivity according to claim 5, wherein the plurality of lenses are a plurality of aperture lenses, and the lens array is an aperture lens array.

7. An optical signal detection unit integrally formed with the multilayer filter, which is obtained by dividing mixed light obtained by multiplexing lights having different wavelengths into respective wavelengths using the multilayer filter. The optical waveguide device having wavelength selectivity according to any one of claims 1 to 3, further comprising an optical signal detection unit that detects light.

8. The optical waveguide device having wavelength selectivity according to claim 7, wherein the optical signal detection unit includes a plurality of photoelectric conversion elements.

9. A method for manufacturing an optical waveguide device having wavelength selectivity,

Preparing a substrate having one end face, and an optical waveguide including a plurality of channels each having a plurality of first openings on the one end face;

Directly forming, on one end surface of the substrate, a multilayer filter whose thickness continuously changes according to the position of each of the plurality of first openings according to a physical vapor deposition method. A method for manufacturing an optical waveguide device, comprising:

10. The method of manufacturing an optical waveguide device according to claim 9, further comprising:

A method for manufacturing an optical waveguide element, comprising a step of arranging the substrate such that one end surface of the substrate is inclined with respect to an evaporation source or a target, prior to the step of forming the multilayer filter.