WO2002007328A3 - Apparatus for handling optical communication signals and method of manufacture therefor - Google Patents

Apparatus for handling optical communication signals and method of manufacture therefor Download PDF

Info

Publication number
WO2002007328A3
WO2002007328A3 PCT/US2001/017037 US0117037W WO0207328A3 WO 2002007328 A3 WO2002007328 A3 WO 2002007328A3 US 0117037 W US0117037 W US 0117037W WO 0207328 A3 WO0207328 A3 WO 0207328A3
Authority
WO
WIPO (PCT)
Prior art keywords
implemented
optical communication
communication signals
monolithic
manufacture therefor
Prior art date
Application number
PCT/US2001/017037
Other languages
French (fr)
Other versions
WO2002007328A2 (en
Inventor
Barbara M Foley
Timothy J Brophy
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Priority to AU2001264985A priority Critical patent/AU2001264985A1/en
Publication of WO2002007328A2 publication Critical patent/WO2002007328A2/en
Publication of WO2002007328A3 publication Critical patent/WO2002007328A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/132Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004Combinations of two or more optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/131Integrated optical circuits characterised by the manufacturing method by using epitaxial growth
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166Manufacturing methods
    • G02B2006/12169Annealing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/43Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/0206Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/021Silicon based substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0261Non-optical elements, e.g. laser driver components, heaters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262Photo-diodes, e.g. transceiver devices, bidirectional devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0262Photo-diodes, e.g. transceiver devices, bidirectional devices
    • H01S5/0264Photo-diodes, e.g. transceiver devices, bidirectional devices for monitoring the laser-output
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H01S5/0265Intensity modulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Abstract

An apparatus for effecting selected aspects of optically conveyed communications treats received incoming optical signals to produce treated outgoing optical signals. The apparatus comprises a plurality of optical signal handling devices (188, 192, 202, and 232) implemented in a monolithic integrated structure arranged on a single substrate (182). The apparatus may further comprise at least one electrically driven device (198) implemented in the monolithic integrated structure. Preferably, at least a first portion of the monolithic structure is implemented in silicon, and at least a second portion of the monolithic structure is implemented in at least one compound semiconductor material.
PCT/US2001/017037 2000-07-17 2001-05-24 Apparatus for handling optical communication signals and method of manufacture therefor WO2002007328A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001264985A AU2001264985A1 (en) 2000-07-17 2001-05-24 Apparatus for handling optical communication signals and method of manufacture therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61764000A 2000-07-17 2000-07-17
US09/617,640 2000-07-17

Publications (2)

Publication Number Publication Date
WO2002007328A2 WO2002007328A2 (en) 2002-01-24
WO2002007328A3 true WO2002007328A3 (en) 2002-06-06

Family

ID=24474431

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/017037 WO2002007328A2 (en) 2000-07-17 2001-05-24 Apparatus for handling optical communication signals and method of manufacture therefor

Country Status (2)

Country Link
AU (1) AU2001264985A1 (en)
WO (1) WO2002007328A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001294601A1 (en) * 2000-10-19 2002-04-29 Motorola, Inc. Biochip excitation and analysis structure

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773063A (en) * 1984-11-13 1988-09-20 University Of Delaware Optical wavelength division multiplexing/demultiplexing system
US5191625A (en) * 1991-04-10 1993-03-02 Telefonaktiebolaget L M Ericsson Terminal for a frequency divided, optical communication system
US5394489A (en) * 1993-07-27 1995-02-28 At&T Corp. Wavelength division multiplexed optical communication transmitters
US5572052A (en) * 1992-07-24 1996-11-05 Mitsubishi Denki Kabushiki Kaisha Electronic device using zirconate titanate and barium titanate ferroelectrics in insulating layer
US6146906A (en) * 1998-09-16 2000-11-14 Nec Corporation DC magnetron sputtering method for manufacturing electrode of ferroelectric capacitor
US6184044B1 (en) * 1997-12-10 2001-02-06 Nec Corporation Thin film capacitor including perovskite-type oxide layers having columnar structure and granular structure

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773063A (en) * 1984-11-13 1988-09-20 University Of Delaware Optical wavelength division multiplexing/demultiplexing system
US5191625A (en) * 1991-04-10 1993-03-02 Telefonaktiebolaget L M Ericsson Terminal for a frequency divided, optical communication system
US5572052A (en) * 1992-07-24 1996-11-05 Mitsubishi Denki Kabushiki Kaisha Electronic device using zirconate titanate and barium titanate ferroelectrics in insulating layer
US5394489A (en) * 1993-07-27 1995-02-28 At&T Corp. Wavelength division multiplexed optical communication transmitters
US6184044B1 (en) * 1997-12-10 2001-02-06 Nec Corporation Thin film capacitor including perovskite-type oxide layers having columnar structure and granular structure
US6146906A (en) * 1998-09-16 2000-11-14 Nec Corporation DC magnetron sputtering method for manufacturing electrode of ferroelectric capacitor

Also Published As

Publication number Publication date
WO2002007328A2 (en) 2002-01-24
AU2001264985A1 (en) 2002-01-30

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