WO2002045092A1 - Analyseur de defauts - Google Patents
Analyseur de defauts Download PDFInfo
- Publication number
- WO2002045092A1 WO2002045092A1 PCT/JP2001/010041 JP0110041W WO0245092A1 WO 2002045092 A1 WO2002045092 A1 WO 2002045092A1 JP 0110041 W JP0110041 W JP 0110041W WO 0245092 A1 WO0245092 A1 WO 0245092A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reduced
- fail
- logical data
- analysis device
- test result
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C2029/5604—Display of error information
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10196980T DE10196980T5 (de) | 2000-11-28 | 2001-11-16 | Fehleranalysevorrichtung |
KR10-2003-7007125A KR20030048483A (ko) | 2000-11-28 | 2001-11-16 | 오류 분석장치 |
US10/432,807 US7079971B2 (en) | 2000-11-28 | 2001-11-16 | Fail analysis device |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-361120 | 2000-11-28 | ||
JP2000-361121 | 2000-11-28 | ||
JP2000361121A JP4146074B2 (ja) | 2000-11-28 | 2000-11-28 | フェイル解析装置 |
JP2000361119A JP4187401B2 (ja) | 2000-11-28 | 2000-11-28 | フェイル解析装置 |
JP2000-361119 | 2000-11-28 | ||
JP2000361120A JP4294848B2 (ja) | 2000-11-28 | 2000-11-28 | フェイル解析装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002045092A1 true WO2002045092A1 (fr) | 2002-06-06 |
Family
ID=27345280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/010041 WO2002045092A1 (fr) | 2000-11-28 | 2001-11-16 | Analyseur de defauts |
Country Status (6)
Country | Link |
---|---|
US (1) | US7079971B2 (ja) |
KR (1) | KR20030048483A (ja) |
CN (1) | CN100437832C (ja) |
DE (1) | DE10196980T5 (ja) |
TW (1) | TW533422B (ja) |
WO (1) | WO2002045092A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010044837A (ja) * | 2008-08-15 | 2010-02-25 | Yokogawa Electric Corp | 半導体メモリ検査装置 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7020815B2 (en) * | 2002-08-29 | 2006-03-28 | Micron Technology, Inc. | Memory technology test apparatus |
US7228475B2 (en) * | 2004-09-30 | 2007-06-05 | Advantest Corporation | Program, test apparatus and testing method |
JP5000104B2 (ja) * | 2005-06-22 | 2012-08-15 | 浜松ホトニクス株式会社 | 半導体不良解析装置、不良解析方法、不良解析プログラム、及び不良解析システム |
JP5005893B2 (ja) * | 2005-06-22 | 2012-08-22 | 浜松ホトニクス株式会社 | 半導体不良解析装置、不良解析方法、及び不良解析プログラム |
JP4463173B2 (ja) * | 2005-09-14 | 2010-05-12 | 株式会社アドバンテスト | 試験装置、試験方法、プログラム、及び記録媒体 |
KR101199771B1 (ko) * | 2005-12-19 | 2012-11-09 | 삼성전자주식회사 | 모드별 논리적 어드레스를 설정하는 반도체 메모리 테스트장치 및 방법 |
JP4931483B2 (ja) * | 2006-06-14 | 2012-05-16 | ルネサスエレクトロニクス株式会社 | 半導体不良解析装置、不良解析方法、及び不良解析プログラム |
JP5091430B2 (ja) * | 2006-06-14 | 2012-12-05 | ルネサスエレクトロニクス株式会社 | 半導体不良解析装置、不良解析方法、及び不良解析プログラム |
JP5087236B2 (ja) * | 2006-06-14 | 2012-12-05 | ルネサスエレクトロニクス株式会社 | 半導体不良解析装置、不良解析方法、及び不良解析プログラム |
JP2008082976A (ja) * | 2006-09-28 | 2008-04-10 | Fujitsu Ltd | Fbm生成装置、fbm生成方法 |
JP2008299953A (ja) * | 2007-05-31 | 2008-12-11 | Toshiba Corp | 半導体メモリの不良解析方法および不良解析システム |
US20100163756A1 (en) * | 2008-12-31 | 2010-07-01 | Custom Test Systems, Llc. | Single event upset (SEU) testing system and method |
JP5658451B2 (ja) * | 2009-11-30 | 2015-01-28 | ソニー株式会社 | 情報処理装置、情報処理方法及びそのプログラム |
JP2011129218A (ja) * | 2009-12-18 | 2011-06-30 | Toshiba Corp | 不良解析方法、不良解析装置および不良解析プログラム |
CN101738556B (zh) * | 2009-12-24 | 2012-08-29 | 卡斯柯信号有限公司 | 一种新型故障信息显示处理系统 |
JP2012038368A (ja) * | 2010-08-04 | 2012-02-23 | Toshiba Corp | 不良解析装置及び不良解析方法 |
WO2012125719A2 (en) | 2011-03-14 | 2012-09-20 | Rambus Inc. | Methods and apparatus for testing inaccessible interface circuits in a semiconductor device |
KR101869095B1 (ko) * | 2011-08-23 | 2018-06-19 | 삼성전자주식회사 | 휴대단말기의 표시 방법 및 장치 |
JP2014038672A (ja) * | 2012-08-13 | 2014-02-27 | Toshiba Corp | 半導体装置の不良解析システムおよび半導体記憶装置 |
CN103678375A (zh) * | 2012-09-17 | 2014-03-26 | 鸿富锦精密工业(深圳)有限公司 | 测试状态呈现及异常索引系统与方法 |
KR102154075B1 (ko) * | 2013-10-21 | 2020-09-09 | 삼성전자주식회사 | 반도체 소자의 검사 방법 및 반도체 검사 시스템 |
US9791508B2 (en) * | 2016-01-20 | 2017-10-17 | The Boeing Company | Detecting and displaying flaws in a device under test |
CN107610738A (zh) * | 2017-09-29 | 2018-01-19 | 北京中电华大电子设计有限责任公司 | 一种高效的存储器失效分析方法 |
CN112037844B (zh) * | 2019-06-04 | 2022-12-06 | 长鑫存储技术有限公司 | 可变保持时间模式分析方法、装置、设备及可读存储介质 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10308099A (ja) * | 1997-04-30 | 1998-11-17 | Hitachi Chiyou Lsi Syst:Kk | メモリ不良解析表示システム |
JPH11134897A (ja) * | 1997-10-31 | 1999-05-21 | Ando Electric Co Ltd | Ic試験のフェイルメモリ解析装置 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5355083A (en) * | 1988-11-16 | 1994-10-11 | Measurex Corporation | Non-contact sensor and method using inductance and laser distance measurements for measuring the thickness of a layer of material overlaying a substrate |
US6185324B1 (en) * | 1989-07-12 | 2001-02-06 | Hitachi, Ltd. | Semiconductor failure analysis system |
JP3370379B2 (ja) * | 1993-03-19 | 2003-01-27 | 株式会社日立製作所 | 半導体装置の製造方法 |
KR960035944A (ko) * | 1995-03-28 | 1996-10-28 | 김주용 | 반도체 소자 제조시 불량분석 방법 |
US5541510A (en) * | 1995-04-06 | 1996-07-30 | Kaman Instrumentation Corporation | Multi-Parameter eddy current measuring system with parameter compensation technical field |
JP3639636B2 (ja) * | 1995-04-25 | 2005-04-20 | 株式会社ルネサステクノロジ | 半導体ウェハの不良解析装置及び不良解析方法 |
US5761064A (en) * | 1995-10-06 | 1998-06-02 | Advanced Micro Devices, Inc. | Defect management system for productivity and yield improvement |
JPH1167853A (ja) * | 1997-08-26 | 1999-03-09 | Mitsubishi Electric Corp | ウェーハマップ解析補助システムおよびウェーハマップ解析方法 |
JP3995768B2 (ja) * | 1997-10-02 | 2007-10-24 | 株式会社ルネサステクノロジ | 不良解析方法及びその装置 |
JPH11144496A (ja) * | 1997-11-10 | 1999-05-28 | Nec Corp | Lsiセル位置情報出力装置、出力方法およびlsiセル位置情報出力プログラムの記録媒体 |
US6446021B1 (en) * | 1998-02-27 | 2002-09-03 | Micron Technology, Inc. | Method and apparatus to display processing parameter |
JP4249285B2 (ja) * | 1998-03-25 | 2009-04-02 | 株式会社アドバンテスト | フィジカル変換定義編集装置 |
WO2000014790A1 (fr) * | 1998-09-03 | 2000-03-16 | Hitachi, Ltd. | Systeme d'inspection et procede de production d'un dispositif electronique l'utilisant |
US6185707B1 (en) * | 1998-11-13 | 2001-02-06 | Knights Technology, Inc. | IC test software system for mapping logical functional test data of logic integrated circuits to physical representation |
JP3319433B2 (ja) * | 1999-05-12 | 2002-09-03 | 日本電気株式会社 | メモリlsi不良解析装置及びシステム、方法並びに記録媒体 |
US6625769B1 (en) * | 1999-11-12 | 2003-09-23 | International Business Machines Corporation | Method for IC fault analysis using programmable built-in self test and optical emission |
US6564346B1 (en) * | 1999-12-07 | 2003-05-13 | Infineon Technologies Richmond, Lp. | Advanced bit fail map compression with fail signature analysis |
US6553329B2 (en) * | 1999-12-13 | 2003-04-22 | Texas Instruments Incorporated | System for mapping logical functional test data of logical integrated circuits to physical representation using pruned diagnostic list |
DE10064329A1 (de) * | 1999-12-27 | 2001-07-19 | Mitsubishi Electric Corp | Fehleranalyseverfahren, Kompressionsschwellenwertableitungsverfahren und Aufzeichnungsmedium |
US6499120B1 (en) * | 1999-12-30 | 2002-12-24 | Infineon Technologies Richmond, Lp | Usage of redundancy data for displaying failure bit maps for semiconductor devices |
JP2001236249A (ja) * | 2000-02-24 | 2001-08-31 | Nec Corp | メモリ管理装置およびメモリ管理方法 |
JP2001267389A (ja) * | 2000-03-21 | 2001-09-28 | Hiroshima Nippon Denki Kk | 半導体メモリ生産システム及び半導体メモリ生産方法 |
JP3555859B2 (ja) * | 2000-03-27 | 2004-08-18 | 広島日本電気株式会社 | 半導体生産システム及び半導体装置の生産方法 |
JP2001357697A (ja) * | 2000-06-13 | 2001-12-26 | Advantest Corp | フェイル解析装置 |
JP2002305223A (ja) * | 2001-04-05 | 2002-10-18 | Toshiba Corp | 半導体装置における座標変換システム、及び座標変換プログラム |
US6845478B2 (en) * | 2001-06-26 | 2005-01-18 | Infineon Technologies Richmond, Lp | Method and apparatus for collecting and displaying bit-fail-map information |
JP3870052B2 (ja) * | 2001-09-20 | 2007-01-17 | 株式会社日立製作所 | 半導体装置の製造方法及び欠陥検査データ処理方法 |
US6823272B2 (en) * | 2001-10-23 | 2004-11-23 | Agilent Technologies, Inc. | Test executive system with progress window |
JP2003338196A (ja) * | 2002-05-22 | 2003-11-28 | Mitsubishi Electric Corp | 不良解析方法 |
US6842866B2 (en) * | 2002-10-25 | 2005-01-11 | Xin Song | Method and system for analyzing bitmap test data |
-
2001
- 2001-11-16 US US10/432,807 patent/US7079971B2/en not_active Expired - Lifetime
- 2001-11-16 TW TW090128516A patent/TW533422B/zh not_active IP Right Cessation
- 2001-11-16 WO PCT/JP2001/010041 patent/WO2002045092A1/ja not_active Application Discontinuation
- 2001-11-16 KR KR10-2003-7007125A patent/KR20030048483A/ko active Search and Examination
- 2001-11-16 CN CNB018222730A patent/CN100437832C/zh not_active Expired - Fee Related
- 2001-11-16 DE DE10196980T patent/DE10196980T5/de not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10308099A (ja) * | 1997-04-30 | 1998-11-17 | Hitachi Chiyou Lsi Syst:Kk | メモリ不良解析表示システム |
JPH11134897A (ja) * | 1997-10-31 | 1999-05-21 | Ando Electric Co Ltd | Ic試験のフェイルメモリ解析装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010044837A (ja) * | 2008-08-15 | 2010-02-25 | Yokogawa Electric Corp | 半導体メモリ検査装置 |
Also Published As
Publication number | Publication date |
---|---|
CN100437832C (zh) | 2008-11-26 |
TW533422B (en) | 2003-05-21 |
US20040153274A1 (en) | 2004-08-05 |
KR20030048483A (ko) | 2003-06-19 |
US7079971B2 (en) | 2006-07-18 |
CN1488149A (zh) | 2004-04-07 |
DE10196980T5 (de) | 2004-04-22 |
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