WO2002052235A3 - Use of multi-layer thin films as stress sensors - Google Patents

Use of multi-layer thin films as stress sensors Download PDF

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Publication number
WO2002052235A3
WO2002052235A3 PCT/US2001/050341 US0150341W WO02052235A3 WO 2002052235 A3 WO2002052235 A3 WO 2002052235A3 US 0150341 W US0150341 W US 0150341W WO 02052235 A3 WO02052235 A3 WO 02052235A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
thin films
layer thin
tmr
resistance
Prior art date
Application number
PCT/US2001/050341
Other languages
French (fr)
Other versions
WO2002052235A2 (en
Inventor
Shiva Prakash
Srinavasan K Ganapathi
Randolph S Gluck
Steven H Hovey
Original Assignee
Fidelica Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fidelica Microsystems Inc filed Critical Fidelica Microsystems Inc
Priority to AU2002246839A priority Critical patent/AU2002246839A1/en
Publication of WO2002052235A2 publication Critical patent/WO2002052235A2/en
Publication of WO2002052235A3 publication Critical patent/WO2002052235A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing

Abstract

The present invention provides a pressure sensing device that includes at least one TMR sensor, and preferably an array of TMR sensors, with each TMR sensor having an insulating spacer layer interposed between a pinned and a free ferromagnetic layer. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a small woltage, the magnetization vectors remain unchanged. Upon application of stress, the magnetization vector of the free magnetic layer will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.
PCT/US2001/050341 2000-12-20 2001-12-20 Use of multi-layer thin films as stress sensors WO2002052235A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002246839A AU2002246839A1 (en) 2000-12-20 2001-12-20 Use of multi-layer thin films as stress sensors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/747,304 US7059201B2 (en) 2000-12-20 2000-12-20 Use of multi-layer thin films as stress sensors
US09/747,304 2000-12-20

Publications (2)

Publication Number Publication Date
WO2002052235A2 WO2002052235A2 (en) 2002-07-04
WO2002052235A3 true WO2002052235A3 (en) 2003-03-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/050341 WO2002052235A2 (en) 2000-12-20 2001-12-20 Use of multi-layer thin films as stress sensors

Country Status (3)

Country Link
US (1) US7059201B2 (en)
AU (1) AU2002246839A1 (en)
WO (1) WO2002052235A2 (en)

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JP5150284B2 (en) 2008-01-30 2013-02-20 株式会社東芝 Magnetoresistive element and manufacturing method thereof
JP5361201B2 (en) * 2008-01-30 2013-12-04 株式会社東芝 Method for manufacturing magnetoresistive element
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JP5032429B2 (en) * 2008-09-26 2012-09-26 株式会社東芝 Magnetoresistive element manufacturing method, magnetoresistive element, magnetic head assembly, and magnetic recording / reproducing apparatus
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Also Published As

Publication number Publication date
US7059201B2 (en) 2006-06-13
US20020073785A1 (en) 2002-06-20
AU2002246839A1 (en) 2002-07-08
WO2002052235A2 (en) 2002-07-04

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