WO2002052287A3 - Method and device for testing of a transistor using a network analyzer - Google Patents

Method and device for testing of a transistor using a network analyzer Download PDF

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Publication number
WO2002052287A3
WO2002052287A3 PCT/IB2001/002610 IB0102610W WO02052287A3 WO 2002052287 A3 WO2002052287 A3 WO 2002052287A3 IB 0102610 W IB0102610 W IB 0102610W WO 02052287 A3 WO02052287 A3 WO 02052287A3
Authority
WO
WIPO (PCT)
Prior art keywords
test
fixture
software
transistor
output impedance
Prior art date
Application number
PCT/IB2001/002610
Other languages
French (fr)
Other versions
WO2002052287A2 (en
Inventor
Steven J Laureanti
Original Assignee
Ericsson Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Inc filed Critical Ericsson Inc
Priority to AU2002222391A priority Critical patent/AU2002222391A1/en
Publication of WO2002052287A2 publication Critical patent/WO2002052287A2/en
Publication of WO2002052287A3 publication Critical patent/WO2002052287A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2822—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere of microwave or radiofrequency circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Amplifiers (AREA)

Abstract

Virtual device fixturing is used to test transistor products, such as LDMOS power amplifier products, in the final packaging and testing stage of device fabrication. The input and output impedance transformation networks of a typical test fixture are implemented in software. The impedance matching function, normally performed by the physical input and output impedance transformation networks of the fixture, is supplanted by de-embedded scatter parameter calibration files. Test equipment, such as a vector network ananalyzer, attaches to a universal test fixture, while the software scatter parameter components are responsible for making the calibrations necessary to present the device under test with a matching low impedance.
PCT/IB2001/002610 2000-12-26 2001-12-21 Method and device for testing of a transistor using a network analyzer WO2002052287A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002222391A AU2002222391A1 (en) 2000-12-26 2001-12-21 Method and device for testing of a transistor using a network analyzer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/749,027 US6541993B2 (en) 2000-12-26 2000-12-26 Transistor device testing employing virtual device fixturing
US09/749,027 2000-12-26

Publications (2)

Publication Number Publication Date
WO2002052287A2 WO2002052287A2 (en) 2002-07-04
WO2002052287A3 true WO2002052287A3 (en) 2002-12-05

Family

ID=25011922

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2001/002610 WO2002052287A2 (en) 2000-12-26 2001-12-21 Method and device for testing of a transistor using a network analyzer

Country Status (4)

Country Link
US (1) US6541993B2 (en)
AU (1) AU2002222391A1 (en)
TW (1) TW562933B (en)
WO (1) WO2002052287A2 (en)

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US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE20114544U1 (en) 2000-12-04 2002-02-21 Cascade Microtech Inc wafer probe
AU2002327490A1 (en) 2001-08-21 2003-06-30 Cascade Microtech, Inc. Membrane probing system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
WO2004111768A2 (en) * 2003-06-11 2004-12-23 Agilent Technologies, Inc. Correcting test system calibration and transforming device measurements when using multiple test fixtures
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202004021093U1 (en) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Differential probe for e.g. integrated circuit, has elongate probing units interconnected to respective active circuits that are interconnected to substrate by respective pair of flexible interconnects
CN100403038C (en) * 2003-12-30 2008-07-16 上海贝岭股份有限公司 Test circuit of double Rutherford horizontal dual diffusion field-effect transistor conducting resistor
DE102004014731B4 (en) * 2004-03-25 2007-05-03 Infineon Technologies Ag Measuring circuit for the output of a power amplifier and a measuring amplifier comprehensive power amplifier
KR20070058522A (en) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 Double sided probing structures
US8330475B2 (en) * 2004-10-06 2012-12-11 Epcos Ag Circuit for detecting a magnitude and phase of an impedance of a load
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7639079B2 (en) 2007-02-09 2009-12-29 Agere Systems Inc. Techniques for designing wide band low noise amplifiers
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
DE102009025259A1 (en) * 2009-06-17 2010-12-30 Sinitec Vertriebsgesellschaft Mbh Method for adjusting the signal transmission between two electronic devices and arrangement with a computer system and a peripheral device
EP2716224B1 (en) * 2011-06-02 2017-03-29 Konica Minolta, Inc. Radiation imaging system
WO2014182669A1 (en) * 2013-05-06 2014-11-13 Litepoint Corporation Vector network power meter
US9054793B2 (en) 2013-07-19 2015-06-09 International Business Machines Corporation Structure, system and method for device radio frequency (RF) reliability
US9647632B2 (en) * 2013-12-05 2017-05-09 Advantest Corporation Lumped element radio frequency tuning calibration process
CN105891628B (en) * 2016-03-30 2018-05-29 清华大学 General four port is in piece high frequency De- embedding method
JP6832654B2 (en) * 2016-09-09 2021-02-24 東京エレクトロン株式会社 Inspection system adjustment method and auxiliary elements used for it
CN114035016B (en) * 2021-11-23 2024-03-12 河北博威集成电路有限公司 Power device transmission parameter determination method, device, terminal and storage medium

Citations (1)

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Publication number Priority date Publication date Assignee Title
JPS59125079A (en) * 1982-12-29 1984-07-19 Fujitsu Ltd Method for measuring transistor

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Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JPS59125079A (en) * 1982-12-29 1984-07-19 Fujitsu Ltd Method for measuring transistor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 008, no. 254 (P - 315) 21 November 1984 (1984-11-21) *
VANDELOO P ET AL: "Measuring and fitting of the small signal model of the MOS transistor for high frequency applications", PROCEEDINGS OF THE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE. SAN DIEGO, APR. 20 - 22, 1988, NEW YORK, IEEE, US, vol. CONF. 5, 20 April 1988 (1988-04-20), pages 232 - 237, XP010075004 *

Also Published As

Publication number Publication date
AU2002222391A1 (en) 2002-07-08
TW562933B (en) 2003-11-21
US20020118034A1 (en) 2002-08-29
US6541993B2 (en) 2003-04-01
WO2002052287A2 (en) 2002-07-04

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