WO2002067325A3 - High-density flip-chip interconnect - Google Patents

High-density flip-chip interconnect Download PDF

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Publication number
WO2002067325A3
WO2002067325A3 PCT/US2002/002836 US0202836W WO02067325A3 WO 2002067325 A3 WO2002067325 A3 WO 2002067325A3 US 0202836 W US0202836 W US 0202836W WO 02067325 A3 WO02067325 A3 WO 02067325A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
viad
signals
chip
chip interconnect
Prior art date
Application number
PCT/US2002/002836
Other languages
French (fr)
Other versions
WO2002067325A2 (en
Inventor
Mark P Jamieson
Original Assignee
Intel Corp
Mark P Jamieson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp, Mark P Jamieson filed Critical Intel Corp
Priority to KR1020037010895A priority Critical patent/KR100732123B1/en
Priority to EP02703307A priority patent/EP1364403A2/en
Priority to AU2002236936A priority patent/AU2002236936A1/en
Priority to JP2002566550A priority patent/JP4156927B2/en
Publication of WO2002067325A2 publication Critical patent/WO2002067325A2/en
Publication of WO2002067325A3 publication Critical patent/WO2002067325A3/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49822Multilayer substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • H05K1/112Pads for surface mounting, e.g. lay-out directly combined with via connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3011Impedance
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0216Reduction of cross-talk, noise or electromagnetic interference
    • H05K1/0218Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
    • H05K1/0219Printed shielding conductors for shielding around or between signal conductors, e.g. coplanar or coaxial printed shielding conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09218Conductive traces
    • H05K2201/09227Layout details of a plurality of traces, e.g. escape layout for Ball Grid Array [BGA] mounting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10674Flip chip
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array

Abstract

An interconnect routing for a card or interposer or the like, including splines of traces on a first layer (66, 69, 70) and traces on a second layer (58, 60), with vias connecting between the layers. Outer rows of signals (40, 42, 44) are routed out from a chip on the first layer, while inner rows of signals (48, 50) are viad down to the second layer where they are routed out, then viad back up to the first layer. These outer vias are arranged in an arc, enabling the second layer trace segments to be of a more uniform length. The second layer may also include ground or power plane fingers extending between the splines and viad up to ground or power signals of the chip.
PCT/US2002/002836 2001-02-20 2002-02-01 High-density flip-chip interconnect WO2002067325A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020037010895A KR100732123B1 (en) 2001-02-20 2002-02-01 High-density flip-chip interconnect
EP02703307A EP1364403A2 (en) 2001-02-20 2002-02-01 High-density flip-chip interconnect
AU2002236936A AU2002236936A1 (en) 2001-02-20 2002-02-01 High-density flip-chip interconnect
JP2002566550A JP4156927B2 (en) 2001-02-20 2002-02-01 Multi-layer board device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/789,401 US8125087B2 (en) 2001-02-20 2001-02-20 High-density flip-chip interconnect
US09/789,401 2001-02-20

Publications (2)

Publication Number Publication Date
WO2002067325A2 WO2002067325A2 (en) 2002-08-29
WO2002067325A3 true WO2002067325A3 (en) 2003-05-30

Family

ID=25147535

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/002836 WO2002067325A2 (en) 2001-02-20 2002-02-01 High-density flip-chip interconnect

Country Status (7)

Country Link
US (1) US8125087B2 (en)
EP (1) EP1364403A2 (en)
JP (1) JP4156927B2 (en)
KR (1) KR100732123B1 (en)
CN (1) CN1331222C (en)
AU (1) AU2002236936A1 (en)
WO (1) WO2002067325A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100615606B1 (en) * 2005-03-15 2006-08-25 삼성전자주식회사 Memory module and signal line arrangement method of the same
JP2009175198A (en) 2008-01-21 2009-08-06 Sony Corp El display panel and electronic apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5424492A (en) * 1994-01-06 1995-06-13 Dell Usa, L.P. Optimal PCB routing methodology for high I/O density interconnect devices
US5812379A (en) * 1996-08-13 1998-09-22 Intel Corporation Small diameter ball grid array pad size for improved motherboard routing
US5986893A (en) * 1996-07-18 1999-11-16 Compaq Computer Corporation Apparatus for controlling the impedance of high speed signals on a printed circuit board
US6011695A (en) * 1998-11-02 2000-01-04 Intel Corporation External bus interface printed circuit board routing for a ball grid array integrated circuit package
US6121554A (en) * 1997-04-30 2000-09-19 Kabushiki Kaisha Toshiba Printed wiring board
EP1098555A2 (en) * 1999-11-02 2001-05-09 Canon Kabushiki Kaisha Printed-wiring board

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0563029A (en) * 1991-09-02 1993-03-12 Fujitsu Ltd Semiconductor device
JPH05129366A (en) * 1991-11-08 1993-05-25 Fujitsu Ltd Tab mounting structure for integrated circuit use
US5545923A (en) * 1993-10-22 1996-08-13 Lsi Logic Corporation Semiconductor device assembly with minimized bond finger connections
US5906042A (en) * 1995-10-04 1999-05-25 Prolinx Labs Corporation Method and structure to interconnect traces of two conductive layers in a printed circuit board
JP3386977B2 (en) * 1997-06-05 2003-03-17 新光電気工業株式会社 Multilayer circuit board
JP3152180B2 (en) * 1997-10-03 2001-04-03 日本電気株式会社 Semiconductor device and manufacturing method thereof
US6310398B1 (en) * 1998-12-03 2001-10-30 Walter M. Katz Routable high-density interfaces for integrated circuit devices

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5424492A (en) * 1994-01-06 1995-06-13 Dell Usa, L.P. Optimal PCB routing methodology for high I/O density interconnect devices
US5986893A (en) * 1996-07-18 1999-11-16 Compaq Computer Corporation Apparatus for controlling the impedance of high speed signals on a printed circuit board
US5812379A (en) * 1996-08-13 1998-09-22 Intel Corporation Small diameter ball grid array pad size for improved motherboard routing
US6121554A (en) * 1997-04-30 2000-09-19 Kabushiki Kaisha Toshiba Printed wiring board
US6011695A (en) * 1998-11-02 2000-01-04 Intel Corporation External bus interface printed circuit board routing for a ball grid array integrated circuit package
EP1098555A2 (en) * 1999-11-02 2001-05-09 Canon Kabushiki Kaisha Printed-wiring board

Also Published As

Publication number Publication date
EP1364403A2 (en) 2003-11-26
WO2002067325A2 (en) 2002-08-29
KR20040014460A (en) 2004-02-14
JP2005505910A (en) 2005-02-24
US20020113307A1 (en) 2002-08-22
US8125087B2 (en) 2012-02-28
CN1331222C (en) 2007-08-08
CN1568544A (en) 2005-01-19
JP4156927B2 (en) 2008-09-24
KR100732123B1 (en) 2007-06-25
AU2002236936A1 (en) 2002-09-04

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