WO2002071452A2 - Method for patterning silicides in the submicrometer range and components so produced - Google Patents
Method for patterning silicides in the submicrometer range and components so produced Download PDFInfo
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- WO2002071452A2 WO2002071452A2 PCT/DE2002/000387 DE0200387W WO02071452A2 WO 2002071452 A2 WO2002071452 A2 WO 2002071452A2 DE 0200387 W DE0200387 W DE 0200387W WO 02071452 A2 WO02071452 A2 WO 02071452A2
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- layer
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- metal layer
- notch
- silicide
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- 238000000034 method Methods 0.000 title claims abstract description 58
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 53
- 238000000059 patterning Methods 0.000 title abstract description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 29
- 239000002184 metal Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 238000003746 solid phase reaction Methods 0.000 claims abstract description 10
- 238000010671 solid-state reaction Methods 0.000 claims abstract description 10
- 238000006243 chemical reaction Methods 0.000 claims abstract description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000003989 dielectric material Substances 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 2
- 229910000676 Si alloy Inorganic materials 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 24
- AIOWANYIHSOXQY-UHFFFAOYSA-N cobalt silicon Chemical compound [Si].[Co] AIOWANYIHSOXQY-UHFFFAOYSA-N 0.000 description 12
- 238000000137 annealing Methods 0.000 description 7
- 238000007373 indentation Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000005496 tempering Methods 0.000 description 4
- 206010010144 Completed suicide Diseases 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- -1 Arsenic ions Chemical class 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910008484 TiSi Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910020711 Co—Si Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- HAYXDMNJJFVXCI-UHFFFAOYSA-N arsenic(5+) Chemical compound [As+5] HAYXDMNJJFVXCI-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66606—Lateral single gate silicon transistors with final source and drain contacts formation strictly before final or dummy gate formation, e.g. contact first technology
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28518—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System the conductive layers comprising silicides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28537—Deposition of Schottky electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66545—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using a dummy, i.e. replacement gate in a process wherein at least a part of the final gate is self aligned to the dummy gate
Definitions
- the invention relates to a method for producing submicron structures in a silicide layer, and to components to be produced by this method.
- Silicides are used in technology as contact and connection materials in highly integrated circuits. Metal silicides are suitable as source, drain and gate contacts of a metal oxide semiconductor field effect transistor (MOSFETs). Nano-structured silicides are widely used in semiconductor components, for example in nanometer Shottky source / drain MOSFETs (Tucker et al.; Metall silicide patterning: a new approach to Silicon nanoelectrics, Nanotechnology 7, 275 (1996). The structuring of Silicide layers in areas below 100 nm represent a problem that has not yet been solved due to the lack of suitable gases for reactive ion etching.
- MOSFET metal oxide semiconductor field effect transistor
- Self-adjusting structuring methods are preferred for the production of nano-structuring.
- a method for structuring monocrystalline cobalt disilicide by local oxidation is described in DE 195 03 641.7. This method disadvantageously requires high temperatures above 950 ° C and an oxidizing, ie oxygen-containing environment.
- Both the starting layer and the layer structured by the method consist of a silicide which has a high temperature resistance. Therefore, only crystalline silicides are suitable for this process. Polycrystalline silicides, such as those used in semiconductor technology due to simplified processes and low costs, are not suitable for this process, since they generally do not have the required temperature resistance.
- the object of the invention is to provide a method for structuring suicides which allows structuring in the nanometer range. Furthermore, it is the object of the invention to provide components which have a silicide structure have in the nanometer range.
- the object is achieved by a method with all the features of the first claim.
- the object is also achieved by components according to the subclaims.
- Advantageous embodiments of the method and the components result from the claims which refer back to them in each case.
- the invention relates to a method for producing nano-structured silicide layers.
- metal layers are applied to a semiconductor material that can form silicide layers in one reaction.
- the metal layer can be a single pure metal layer made of e.g. B. Co, Ti, Ni, Pd, W, Ta, Pt, Er or a layer system.
- a first and then a second mask layer is applied to the metal layer.
- the mask layers create an elastic tension in the metal layer.
- a suitable material for the first mask is, for example, silicon dioxide (Si0 2 ) and for the second mask silicon nitride (Si 3 N 4 ), which is formed for example by chemical vacuum deposition (CVD).
- the applied mask layers create an elastic tension in the metal layer.
- the magnitude of the voltage varies with the layer thickness of the mask layers.
- the elastic tension for a given 20 nm thick first mask layer can be modified by varying the layer thickness of the second layer, e.g. B. by varying the layer thickness of a Si 3 N layer as a second mask in the range of 100 to 300 nm.
- a notch is formed through the mask layers, which extends to the surface of the metal layer. This can be done, for example, by anisotropic etching.
- the distance of the notch at the height of the second mask is called the width of the notch.
- This width of the notch is responsible for the width of the silicide structure that is formed later.
- the width of the notch thus essentially corresponds to the gate width in a component produced by this method.
- the silicide is then formed by a solid-state reaction.
- an oven or a cutting anneal can advantageously be used, depending on which silicide material is to be formed.
- the tempering can take place both in vacuum and under ambient pressure.
- the gases N 2 , 0 2 , H 2 0 N 2 0 or NO or corresponding gas mixtures, eg. B. Ar + H 2 or N 2 + H 2 used.
- the semiconductor substrate reacts with the metal layer and forms silicide. Depending on the process conditions, metal and / or substrate atoms diffuse.
- Co and Si are the dominant diffusing atoms.
- Co atoms react with silicon to form Co 2 Si.
- the Co atoms are the dominant diffusing atoms.
- the Co 2 Si then reacts with further silicon atoms to form cobalt monosilicide (CoSi), this time the silicon atoms being the dominant, diffusing atoms.
- CoSi converts to CoSi 2 , the Co atoms again being the predominantly diffusing atoms (see also K.
- the diffusion during the solid-state reaction occurs inconsistently due to the field distribution of the elastic stress generated.
- the tempering ends with the formation of the desired suicide, monocrystalline or polycrystalline, and the structuring of this silicide. It happens only in the areas below the masks to form the silicide. In the area of the bottom of the notch, no silicide is formed, but other compounds that can be easily removed afterwards.
- TiSi 2 is formed in the area below the masks, while TiN is formed in the area of the bottom of the indentation. After annealing, TiN can be selectively removed from the bottom of the notch.
- the founding atoms can advantageously be controlled in the process by using a metastable silicon phase on a substrate before the masks are applied.
- cobalt monosilicide (CoSi) on silicon is used as the starting material.
- CoSi is only stable up to temperatures of 450 ° C and has a high specific resistance.
- a first and second mask are then applied and a notch of nanometer size is created.
- the solid-state reaction takes place at temperatures of 700 to 900 ° C., during which Co-Si is formed and the silicide layer formed in this way has a nano-structuring corresponding to the indentation.
- the Co atoms mainly diffuse during the solid-state reaction, the diffusion being influenced by the stress distribution occurring at the bottom of the notch.
- An example of a suitable application is a Schottky source / drain MOSFET.
- the silicide layers separated by a nano-structure form Schottky contacts for source and drain.
- the width of the notch determines the gate length of the transistor, ie the effective channel length corresponds to the distance between the two silicide layers separated by the nano-structuring at the bottom of the notch.
- the sacrificial layer is removed again after a few further process steps. First, however, the sacrificial layer is anisotropically etched back to the surface of the second mask, with the notch remaining filled with the sacrificial material.
- the thickness of the two mask layers is then reduced, so that the sacrificial material protrudes from the notch beyond the mask layers.
- the sacrificial material in the notch serves as a mask for the subsequent ion implantation, so that the bottom of the notch is protected from the implantation. On- the sacrificial material is then selectively removed.
- a local channel implantation can be carried out to set the threshold voltage of the transistor. This is followed by the formation of the dielectric film and the gate electrode.
- Figures 1 to 5 describe the process of a nano- Structuring (notching) in a mask by controlled under-etching technique and standard lithography steps.
- FIG. 6 describes the nano-structuring method of a silicide layer according to the invention.
- FIGS. 7 to 8 describe the manufacturing process for a Schottky source / drain MOSFET component using the nano-structuring method according to the invention.
- FIGS. 9 to 14 describe the manufacturing process for a pn source / drain MOSFET component using the nano-structuring method according to the invention.
- the present invention discloses a method of nano-structuring a silicide layer by means of a voltage-dependent silicidation process.
- the tension caused by a mask layer is varied by a notch in the mask layer.
- the width of the notch is set to less than 100 nm in order to achieve a nano-structured silicide layer.
- Such a narrow indentation can be done by electron beam lithography or other sub-100 nm
- a metal layer (SL) for forming the desired silicide structure is formed on a semiconductor surface (SB).
- a first mask layer (ML1) for example 20 nm Si0 2 is applied.
- a second mask layer (ML2) e.g. B. 50 - 300 nm Si 3 N 4 applied.
- a sacrificial layer (SMI) is applied to the surface of the second mask. This layer can be selectively etched with respect to the second mask.
- a strip of a photoresist lacquer (PR) with a width of approximately 1 ⁇ m is applied to the surface of the sacrificial layer (SM1) with the aid of photolithography.
- the sacrificial layer (SM1) is selectively etched in consideration of ML2 and PR in order to achieve the undercut shown in the figure.
- a second sacrificial layer (SM2) is applied to the free surface of the second mask (ML2) from FIG. 1.
- the edge of this layer results exactly from the position of the edge of the photo-resistant strips (PR).
- the structure shown in FIG. 3 results.
- the distance between the sacrificial layers SM1 and SM2 is chosen such that it results in the silicide structure that is formed.
- the layers SM1 and SM2 are used as masks in order to effect the production of the notch in the first and second mask layers (ML1 and ML2) by selective etching, as shown in FIG.
- the metal layer (SL) reacts with the semiconductor substrate (SB) during the annealing to the desired silicide.
- Furnace or rapid annealing (RTA) can be used, depending on which silicide material is to be formed.
- the stresses generated by the masks (ML1 and ML2) are modified by the notch. The tension is particularly high at the bottom of the notch. Therefore, the voltage-dependent solid-state reaction in FIG. 6 only forms silicide (SL) below the masks ML1 and ML2, while no such reaction takes place in the region of the bottom of the indentation, and the metal of the metal layer (SL) evaporates.
- a possible application for this nano-structuring method according to the invention is the production of a Schottky barrier MOSFET, which uses Schottky contacts both as a source and as a drain.
- An 8 nm thick Co layer with a 4 nm thick silicon layer applied thereon serves as the starting material according to layer SL in FIG. 1.
- a 20 nm thick SiO 2 layer is used as a first mask, and a 50 to 300 nm thick Si as a second mask 3 N 4 layer applied by PECVD.
- annealing at 800 ° C. for 1 minute in one step N 2 atmosphere the silicidation carried out.
- the structure shown in FIG. 6 is obtained with a nano-structured CoSi 2 layer.
- a dielectric material (GD) is introduced into the notch that now extends to the surface of the semiconductor substrate.
- the material (GD) covering the bottom of the notch serves as dielectric gate material.
- the dielectric material comprises Si0 2 , which was formed by thermal oxidation or deposition and / or other materials with a high dielectric constant.
- FIG. 8 shows the T-shaped gate electrode (G) which is formed in the indentation without exact alignment or adaptation.
- the source and drain electrodes windows are first opened in the mask layers (ML1 and ML2), which extend to the surface of the silicide layer.
- the silicide layers (FL) on both sides of the notch form Schottky contacts.
- the substrate can also be lightly doped or also an intrinsic substrate (Tucker et al., "Silicon field-effect transistor based on quantum tunneling", Applied Physics Letters 65 (5), 618-620 (1994)).
- a 12 nm thick Co layer with a 4 nm thick silicon layer applied thereon are arranged on a silicon (100) substrate and serve as the starting material according to layer SL in FIG. 1.
- the first mask is a 20 nm thick SiO 2 layer
- a 50 to 300 nm thick Si 3 N 4 layer is applied by PECVD.
- the silicidation is carried out by tempering at 850 ° C. for 1 minute in an N 2 + H 2 atmosphere.
- the structure shown in FIG. 6 is obtained with an approximately 40 nm wide structured CoSi 2 layer.
- a sacrificial layer e.g. B. a photoresist or SiO x , applied in the notch and on the surface of the second mask (ML2).
- This GSL layer can be selectively etched with respect to the second mask.
- the layer is thicker than the height of the notch in order to be able to achieve a planar surface with regard to the second mask (ML2) after removal of the top GSL layer. This process is not a difficult process due to the extremely narrow indentation.
- the top layer of the GSL material is removed by anisotropic etching up to the level of the second mask (ML2), so that only the notch is filled with the sacrificial material of the GSL layer.
- the second mask is partially etched back.
- the GSL material in the notch serves as a mask for the following process step to protect the bottom of the notch from a doping with which the source / drain implantation is carried out.
- the GSL material protrudes beyond the etched back second mask layer.
- Figure 12 shows the structure after the ion implantation.
- an arsenic ion implantation is used for an NMOSFET.
- Arsenic ions with a concentration of approx. 10 15 per cm 2 are implanted into the silicide layer with a suitable energy through the first and second mask. The area below the notch is protected by the GSL material. After heating up
- the arsenic ions diffuse from the silicide layer into the silicon layer below.
- the N + P source / drain implanted zones (DL1 and DL2) are formed as shown in Figure 12.
- the heating temperature should not be chosen too high considering the thermal stability of the silicide layer.
- FIG. 13 shows the arrangement in which the sacrificial layer (GSL) from FIG. 12 was first selectively removed.
- a local channel implantation follows, for example boron for an NMOSFET, and heating in order to set the threshold voltage of the transistor (see also C.-P. Chang et al., "SALVO Process for sub-50 nm Low V ⁇ replacement Gate CMOS with KrF Lithography "IEDM Tech. Digest (2000)).
- a dielectric layer is introduced as the gate material (GD).
- the GD material comprises thermally grown and deposited silicon dioxide and / or other materials with a high dielectric constant.
- FIG. 14 shows a T-shaped gate electrode (G) which was produced by depositing a conductive layer and structuring with the aid of photolithography.
- the gate material comprises highly doped polysilicon and polysilicon alloys, for example highly doped poly-Si ⁇ _ x Ge x , and metals.
- the source and drain electrodes (SD1 and SD2) are formed by opening windows in the mask layers ML1 and ML2 up to the silicide layer (FL) and then depositing conductive material.
Abstract
Description
Claims
Priority Applications (1)
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EP02708199A EP1364395A2 (en) | 2001-03-02 | 2002-02-02 | Method for patterning silicides in the submicrometer range and components so produced |
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DE2001110222 DE10110222A1 (en) | 2001-03-02 | 2001-03-02 | Process for sub-micrometer structuring of silicides and components manufactured thereby |
DE10110222.4 | 2001-03-02 |
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WO2002071452A2 true WO2002071452A2 (en) | 2002-09-12 |
WO2002071452A3 WO2002071452A3 (en) | 2003-02-06 |
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PCT/DE2002/000387 WO2002071452A2 (en) | 2001-03-02 | 2002-02-02 | Method for patterning silicides in the submicrometer range and components so produced |
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EP (1) | EP1364395A2 (en) |
DE (1) | DE10110222A1 (en) |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053105A (en) * | 1990-07-19 | 1991-10-01 | Micron Technology, Inc. | Process for creating an etch mask suitable for deep plasma etches employing self-aligned silicidation of a metal layer masked with a silicon dioxide template |
Family Cites Families (1)
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JPH04288834A (en) * | 1991-03-18 | 1992-10-13 | Fujitsu Ltd | Manufacturing for semiconductor device |
-
2001
- 2001-03-02 DE DE2001110222 patent/DE10110222A1/en not_active Withdrawn
-
2002
- 2002-02-02 EP EP02708199A patent/EP1364395A2/en not_active Withdrawn
- 2002-02-02 WO PCT/DE2002/000387 patent/WO2002071452A2/en not_active Application Discontinuation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053105A (en) * | 1990-07-19 | 1991-10-01 | Micron Technology, Inc. | Process for creating an etch mask suitable for deep plasma etches employing self-aligned silicidation of a metal layer masked with a silicon dioxide template |
Non-Patent Citations (5)
Title |
---|
KLUTH P ET AL: "FABRICATION OF EPITAXIAL COSI2 NANOWIRES" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, Bd. 79, Nr. 6, 6. August 2001 (2001-08-06), Seiten 824-826, XP001083193 ISSN: 0003-6951 * |
KLUTH P ET AL: "Growth of patterned thin epitaxial CoSi2-films by a titanium oxide mediated epitaxy process" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 380, Nr. 1-2, 22. Dezember 2000 (2000-12-22), Seiten 201-203, XP004226633 ISSN: 0040-6090 * |
KLUTH P ET AL: "Nanometer patterning of thin CoSi2-films by application of local stress" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, Bd. 55, Nr. 1-4, März 2001 (2001-03), Seiten 177-182, XP004229613 ISSN: 0167-9317 * |
KLUTH P ET AL: "Self-assembly patterning of epitaxial CoSi2 wires" MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, Bd. 60, Nr. 1-2, Januar 2002 (2002-01), Seiten 239-245, XP004313069 ISSN: 0167-9317 * |
PATENT ABSTRACTS OF JAPAN vol. 017, no. 097 (E-1326), 25. Februar 1993 (1993-02-25) & JP 04 288834 A (FUJITSU LTD), 13. Oktober 1992 (1992-10-13) * |
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DE10110222A1 (en) | 2002-09-05 |
WO2002071452A3 (en) | 2003-02-06 |
EP1364395A2 (en) | 2003-11-26 |
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