WO2002075384A3 - Variable filter-based optical spectrometer - Google Patents

Variable filter-based optical spectrometer Download PDF

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Publication number
WO2002075384A3
WO2002075384A3 PCT/US2002/007910 US0207910W WO02075384A3 WO 2002075384 A3 WO2002075384 A3 WO 2002075384A3 US 0207910 W US0207910 W US 0207910W WO 02075384 A3 WO02075384 A3 WO 02075384A3
Authority
WO
WIPO (PCT)
Prior art keywords
filter
variable filter
based optical
optical spectrometer
spectrometer
Prior art date
Application number
PCT/US2002/007910
Other languages
French (fr)
Other versions
WO2002075384A2 (en
Inventor
Sohrab Zarrabian
Milligen Fred J Van
Kenneth P Rosenberg
John D Sonderman
Original Assignee
Optical Coating Laboratory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optical Coating Laboratory Inc filed Critical Optical Coating Laboratory Inc
Priority to JP2002573936A priority Critical patent/JP2004532402A/en
Priority to EP02723450A priority patent/EP1373844A2/en
Publication of WO2002075384A2 publication Critical patent/WO2002075384A2/en
Publication of WO2002075384A3 publication Critical patent/WO2002075384A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum

Abstract

An optical spectrometer uses a tapered Fabry-Perot type linear variable optical filter in conjunction with an optical detector array. The filter can be a long-pass, short-pass, or narrow bandpass filter. The stability of the variable optical filter allows high resolution, depending on the number and spacing of the detectors used. In a further embodiment, signal-processing techniques are used to enhance the resolution of the spectrometer beyond the measured response.
PCT/US2002/007910 2001-03-16 2002-03-12 Variable filter-based optical spectrometer WO2002075384A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002573936A JP2004532402A (en) 2001-03-16 2002-03-12 Optical spectrometer based on a tunable filter.
EP02723450A EP1373844A2 (en) 2001-03-16 2002-03-12 Variable filter-based optical spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/810,828 US6785002B2 (en) 2001-03-16 2001-03-16 Variable filter-based optical spectrometer
US09/810,828 2001-03-16

Publications (2)

Publication Number Publication Date
WO2002075384A2 WO2002075384A2 (en) 2002-09-26
WO2002075384A3 true WO2002075384A3 (en) 2003-04-24

Family

ID=25204812

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/007910 WO2002075384A2 (en) 2001-03-16 2002-03-12 Variable filter-based optical spectrometer

Country Status (5)

Country Link
US (1) US6785002B2 (en)
EP (1) EP1373844A2 (en)
JP (1) JP2004532402A (en)
CN (1) CN1498340A (en)
WO (1) WO2002075384A2 (en)

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT410721B (en) * 2001-02-26 2003-07-25 Femtolasers Produktions Gmbh DISPERSIVE MULTI-LAYER MIRROR
US6678093B1 (en) * 2001-03-15 2004-01-13 Cierra Photonics, Inc. Optically coupled etalons and methods of making and using same
US7663762B2 (en) * 2002-07-09 2010-02-16 Finisar Corporation High-speed transmission system comprising a coupled multi-cavity optical discriminator
US7228025B1 (en) * 2002-10-31 2007-06-05 Finisar Corporation Thin film interleaver
US8792531B2 (en) 2003-02-25 2014-07-29 Finisar Corporation Optical beam steering for tunable laser applications
US7202955B2 (en) * 2004-06-30 2007-04-10 Digital Optics Corporation Spectrally diverse spectrometer and associated methods
US20090073451A1 (en) * 2004-06-30 2009-03-19 Tekolste Robert D Spectrally diverse, spatially sensitive apparatus and associated methods
US7291824B2 (en) * 2005-12-22 2007-11-06 Palo Alto Research Center Incorporated Photosensing throughout energy range and in subranges
US7310153B2 (en) * 2004-08-23 2007-12-18 Palo Alto Research Center, Incorporated Using position-sensitive detectors for wavelength determination
US7522786B2 (en) * 2005-12-22 2009-04-21 Palo Alto Research Center Incorporated Transmitting light with photon energy information
US7508507B2 (en) * 2004-10-12 2009-03-24 Leica Microsystems Cms Gmbh Device for selecting and detecting at least two spectral regions of a light beam
JP2006176831A (en) * 2004-12-22 2006-07-06 Tokyo Electron Ltd Vapor deposition system
EP2597457B1 (en) * 2005-07-28 2018-03-14 Bioptigen, Inc. Frequency-domain optical coherence tomography imaging system
US7623798B1 (en) * 2005-10-04 2009-11-24 Sprint Communications Company L.P. Polarization mode dispersion mitigation of multiple optical communication channels
US7420677B2 (en) * 2005-12-22 2008-09-02 Palo Alto Research Center Incorporated Sensing photon energies of optical signals
US7386199B2 (en) * 2005-12-22 2008-06-10 Palo Alto Research Center Incorporated Providing light to channels or portions
US7358476B2 (en) 2005-12-22 2008-04-15 Palo Alto Research Center Incorporated Sensing photons from objects in channels
US7433552B2 (en) * 2005-12-22 2008-10-07 Palo Alto Research Center Incorporated Obtaining analyte information
US7315667B2 (en) * 2005-12-22 2008-01-01 Palo Alto Research Center Incorporated Propagating light to be sensed
US8437582B2 (en) 2005-12-22 2013-05-07 Palo Alto Research Center Incorporated Transmitting light with lateral variation
US7547904B2 (en) * 2005-12-22 2009-06-16 Palo Alto Research Center Incorporated Sensing photon energies emanating from channels or moving objects
FI119830B (en) * 2006-05-24 2009-03-31 Valtion Teknillinen Spectrometer and interferometric procedure
JP2007316486A (en) * 2006-05-29 2007-12-06 Olympus Corp Variable spectral element, spectroscope and endoscope system
EP1882916A1 (en) * 2006-07-20 2008-01-30 Interuniversitair Microelektronica Centrum Compact catadioptric spectrometer
US7718948B2 (en) * 2006-12-04 2010-05-18 Palo Alto Research Center Incorporated Monitoring light pulses
WO2008080171A1 (en) 2006-12-22 2008-07-03 Finisar Corporation Optical transmitter having a widely tunable directly modulated laser and periodic optical spectrum reshaping element
US7941057B2 (en) 2006-12-28 2011-05-10 Finisar Corporation Integral phase rule for reducing dispersion errors in an adiabatically chirped amplitude modulated signal
US8131157B2 (en) 2007-01-22 2012-03-06 Finisar Corporation Method and apparatus for generating signals with increased dispersion tolerance using a directly modulated laser transmitter
US8821799B2 (en) 2007-01-26 2014-09-02 Palo Alto Research Center Incorporated Method and system implementing spatially modulated excitation or emission for particle characterization with enhanced sensitivity
US9164037B2 (en) 2007-01-26 2015-10-20 Palo Alto Research Center Incorporated Method and system for evaluation of signals received from spatially modulated excitation and emission to accurately determine particle positions and distances
EP2111678B1 (en) 2007-02-02 2015-04-08 Finisar Corporation Temperature stabilizing packaging for optoelectronic components in a transmitter module
US7471399B2 (en) * 2007-02-05 2008-12-30 Palo Alto Research Center Incorporated Photosensing optical cavity output light
US7502123B2 (en) * 2007-02-05 2009-03-10 Palo Alto Research Center Incorporated Obtaining information from optical cavity output light
US7936463B2 (en) * 2007-02-05 2011-05-03 Palo Alto Research Center Incorporated Containing analyte in optical cavity structures
US7633629B2 (en) * 2007-02-05 2009-12-15 Palo Alto Research Center Incorporated Tuning optical cavities
US8027593B2 (en) 2007-02-08 2011-09-27 Finisar Corporation Slow chirp compensation for enhanced signal bandwidth and transmission performances in directly modulated lasers
US7991291B2 (en) 2007-02-08 2011-08-02 Finisar Corporation WDM PON based on DML
US7991297B2 (en) 2007-04-06 2011-08-02 Finisar Corporation Chirped laser with passive filter element for differential phase shift keying generation
US8204386B2 (en) 2007-04-06 2012-06-19 Finisar Corporation Chirped laser with passive filter element for differential phase shift keying generation
US7576860B2 (en) * 2007-05-11 2009-08-18 Hewlett-Packard Development Company, L.P. Light filter having a wedge-shaped profile
US7817274B2 (en) 2007-10-05 2010-10-19 Jingyun Zhang Compact spectrometer
US8345226B2 (en) 2007-11-30 2013-01-01 Jingyun Zhang Spectrometers miniaturized for working with cellular phones and other portable electronic devices
US8320983B2 (en) 2007-12-17 2012-11-27 Palo Alto Research Center Incorporated Controlling transfer of objects affecting optical characteristics
US8160455B2 (en) * 2008-01-22 2012-04-17 Finisar Corporation Method and apparatus for generating signals with increased dispersion tolerance using a directly modulated laser transmitter
US8373860B2 (en) 2008-02-01 2013-02-12 Palo Alto Research Center Incorporated Transmitting/reflecting emanating light with time variation
US8629981B2 (en) 2008-02-01 2014-01-14 Palo Alto Research Center Incorporated Analyzers with time variation based on color-coded spatial modulation
US7936528B2 (en) * 2008-12-31 2011-05-03 Teledyne Scientific & Imaging, Llc Graded order-sorting filter for hyperspectral imagers and methods of making the same
GB0908027D0 (en) 2009-05-08 2009-06-24 Zinir Ltd Spetrophotometer with no moving parts
DE102009021936A1 (en) 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical filter and a method for producing an optical filter
US8199785B2 (en) 2009-06-30 2012-06-12 Finisar Corporation Thermal chirp compensation in a chirp managed laser
JP5707739B2 (en) * 2010-06-01 2015-04-30 セイコーエプソン株式会社 Spectrometer
JP5630091B2 (en) 2010-06-22 2014-11-26 セイコーエプソン株式会社 Spectrometer
JP5765081B2 (en) * 2011-06-22 2015-08-19 ソニー株式会社 Image sensor, electronic device, manufacturing method, and inspection apparatus
US8692987B2 (en) * 2011-08-09 2014-04-08 Artel, Inc. Artifact apparatus to mimic reflection losses of solution-filled microtiter plate readers and related uses thereof
US8723140B2 (en) 2011-08-09 2014-05-13 Palo Alto Research Center Incorporated Particle analyzer with spatial modulation and long lifetime bioprobes
US9029800B2 (en) 2011-08-09 2015-05-12 Palo Alto Research Center Incorporated Compact analyzer with spatial modulation and multiple intensity modulated excitation sources
CN104040309B (en) 2011-11-03 2019-06-07 威利食品有限公司 Inexpensive spectrometric system for end user's food analysis
US8848173B2 (en) * 2011-11-10 2014-09-30 Cdex, Inc. Chemical and molecular identification and quantification system utilizing enhanced photoemission spectroscopy
US8861106B2 (en) 2011-12-02 2014-10-14 Raytheon Company Variable monochromatic uniform calibration source
JP5926610B2 (en) 2012-05-18 2016-05-25 浜松ホトニクス株式会社 Spectroscopic sensor
JP5988690B2 (en) 2012-05-18 2016-09-07 浜松ホトニクス株式会社 Spectroscopic sensor
JP5875936B2 (en) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 Spectroscopic sensor
US9257478B2 (en) * 2012-05-22 2016-02-09 The Regents Of The University Of California Spatially resolved spectral-imaging device
US9885655B2 (en) 2012-11-13 2018-02-06 Viavi Solutions Inc. Spectrometer with a relay lightpipe
EP3722758B1 (en) * 2012-11-13 2023-11-01 Viavi Solutions Inc. Portable spectrometer
EP2951621B1 (en) * 2013-01-29 2021-01-27 Viavi Solutions Inc. A variable optical filter and a wavelength-selective sensor based thereon
CN103162828B (en) * 2013-02-26 2015-10-21 浙江大学 Based on the ultrahigh resolution spectrometer of tunable enamel Pohle-perot filter and array type detector spectrometer
KR101950733B1 (en) * 2013-06-26 2019-02-21 주식회사 포벨 Optical receiver with wavelength tunable filter
GB2529070B (en) 2013-08-02 2017-07-12 Verifood Ltd Spectrometer comprising a plurality of isolated optical paths
WO2015101992A2 (en) 2014-01-03 2015-07-09 Verifood, Ltd. Spectrometry systems, methods, and applications
KR102197456B1 (en) * 2014-01-31 2020-12-31 비아비 솔루션즈 아이엔씨. An optical filter and spectrometer
CN103968943B (en) * 2014-04-24 2016-02-03 中国电子科技集团公司第四十一研究所 A kind of accurate measurement method of fiber spectrometer signal to noise ratio (S/N ratio)
JP2016053550A (en) * 2014-09-04 2016-04-14 株式会社セコニック Photometric apparatus
DE102014014983A1 (en) * 2014-10-07 2016-04-07 Technische Universität Dresden Optical filter element for spectroscopic devices for converting spectral information into location information
WO2016063284A2 (en) 2014-10-23 2016-04-28 Verifood, Ltd. Accessories for handheld spectrometer
WO2016125165A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system with visible aiming beam
WO2016125164A2 (en) 2015-02-05 2016-08-11 Verifood, Ltd. Spectrometry system applications
US10066990B2 (en) 2015-07-09 2018-09-04 Verifood, Ltd. Spatially variable filter systems and methods
JP6441759B2 (en) * 2015-07-24 2018-12-19 株式会社堀場製作所 Output correction method for photodetector used in spectroscopic analyzer
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
TWI794145B (en) 2015-10-28 2023-03-01 美商加州太平洋生物科學公司 Arrays of optical devices comprising integrated bandpass filters
US10203246B2 (en) 2015-11-20 2019-02-12 Verifood, Ltd. Systems and methods for calibration of a handheld spectrometer
EP3488204A4 (en) 2016-07-20 2020-07-22 Verifood Ltd. Accessories for handheld spectrometer
US10791933B2 (en) 2016-07-27 2020-10-06 Verifood, Ltd. Spectrometry systems, methods, and applications
DE102016218578A1 (en) * 2016-09-27 2018-03-29 Robert Bosch Gmbh Optical sensor device, method for adjusting a spectral resolution of an optical sensor device and spectral measuring method
US11041756B2 (en) 2017-10-20 2021-06-22 Charted Scientific Inc. Method and apparatus of filtering light using a spectrometer enhanced with additional spectral filters with optical analysis of fluorescence and scattered light from particles suspended in a liquid medium using confocal and non confocal illumination and imaging
US10585028B2 (en) 2017-10-20 2020-03-10 Charted Scientific, Inc. Method and apparatus for optical analysis
JP6966039B2 (en) * 2017-10-25 2021-11-10 住友電工デバイス・イノベーション株式会社 Test equipment
WO2020163492A1 (en) * 2019-02-06 2020-08-13 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
CN109798979B (en) * 2019-03-12 2021-02-12 天津津航技术物理研究所 Design method of semiconductor process compatible high-spectrum imaging chip with wide spectrum range
WO2020211929A1 (en) 2019-04-16 2020-10-22 Huawei Technologies Co., Ltd. Signal collection spectrometer
US20220299367A1 (en) * 2019-07-16 2022-09-22 Ams International Ag Reconstructing light wavelength spectrum with thin-film device
WO2021092579A1 (en) 2019-11-08 2021-05-14 California Institute Of Technology Infrared spectrometer having dielectric-polymer-based spectral filter
EP3907483A1 (en) * 2020-05-05 2021-11-10 X-Rite, Inc. Multichannel spectrophotometer using linear variable filter (lvf) bonded to 2d image sensor
WO2022147919A1 (en) * 2021-01-06 2022-07-14 苏州联讯仪器有限公司 Broadband spectrometer
CN114370939B (en) * 2022-01-18 2023-10-13 无锡迅杰光远科技有限公司 Spectrometer and spectroscopic device for the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442738A2 (en) * 1990-02-14 1991-08-21 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5255332A (en) * 1992-07-16 1993-10-19 Sdl, Inc. NxN Optical crossbar switch matrix
US5392117A (en) * 1992-07-21 1995-02-21 Institut National D'optique Fabry-Perot optical sensing device for measuring a physical parameter
WO1995020144A1 (en) * 1994-01-20 1995-07-27 British Telecommunications Public Limited Company Optical wavelength sensor
US5872655A (en) * 1991-07-10 1999-02-16 Optical Coating Laboratory, Inc. Monolithic linear variable filter and method of manufacture

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3929398A (en) 1971-08-18 1975-12-30 Harry E Bates High speed optical wavelength detection system
NL191813C (en) * 1985-06-11 1996-08-02 Philips Electronics Nv Electric lamp equipped with an interference filter.
JPH02278210A (en) * 1989-04-20 1990-11-14 Oki Electric Ind Co Ltd Optical coupler
US5082629A (en) 1989-12-29 1992-01-21 The Board Of The University Of Washington Thin-film spectroscopic sensor
US5166755A (en) * 1990-05-23 1992-11-24 Nahum Gat Spectrometer apparatus
US5218473A (en) 1990-07-06 1993-06-08 Optical Coating Laboratories, Inc. Leakage-corrected linear variable filter
US5303165A (en) 1992-02-12 1994-04-12 The Perkin-Elmer Corporation Standardizing and calibrating a spectrometric instrument
US5343542A (en) * 1993-04-22 1994-08-30 International Business Machines Corporation Tapered fabry-perot waveguide optical demultiplexer
JPH07103824A (en) * 1993-09-30 1995-04-21 Shimadzu Corp Spectrometer
US5760910A (en) 1995-06-07 1998-06-02 Masimo Corporation Optical filter for spectroscopic measurement and method of producing the optical filter
US5583683A (en) * 1995-06-15 1996-12-10 Optical Corporation Of America Optical multiplexing device
US5719989A (en) 1995-06-28 1998-02-17 Jds Fitel Inc. Multilayer thin film bandpass filter
US5760391A (en) * 1996-07-17 1998-06-02 Mechanical Technology, Inc. Passive optical wavelength analyzer with a passive nonuniform optical grating
CA2212776A1 (en) 1997-08-08 1999-02-08 Andrzej Barwicz A spectrometric micro-sensor/transducer and procedure for interpretation of spectrometric data
US5850292A (en) 1997-11-13 1998-12-15 Hewlett-Packard Company Wavelength monitor for optical signals
JPH11242115A (en) * 1998-02-26 1999-09-07 Fujitsu Ltd Optical element without temperature dependency
US6151114A (en) * 1998-03-31 2000-11-21 The Boeing Company Coherent laser warning system
US6130971A (en) * 1998-08-06 2000-10-10 Avanex Corporation Fiber optic dense wavelength division multiplexer with a phase differential method of wavelength separation utilizing a polarization beam splitter and a nonlinear interferometer
US6057925A (en) 1998-08-28 2000-05-02 Optical Coating Laboratory, Inc. Compact spectrometer device
US6334014B1 (en) * 1998-11-02 2001-12-25 Canon Kabushiki Kaisha Optical fiber apparatus provided with demultiplexing/multiplexing unit on fiber's end portion, optical detecting apparatus provided with demultiplexing/multiplexing unit on its light receiving surface, and optical transmission system using the same
US6272157B1 (en) * 1999-01-11 2001-08-07 Agere Systems Optoelectronics Guardian Corp. Apparatus and method for calibrating a wavelength stabilized laser
US6278549B1 (en) * 2000-04-17 2001-08-21 Ciena Corporation Optical filter having a quartz substrate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442738A2 (en) * 1990-02-14 1991-08-21 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5872655A (en) * 1991-07-10 1999-02-16 Optical Coating Laboratory, Inc. Monolithic linear variable filter and method of manufacture
US5255332A (en) * 1992-07-16 1993-10-19 Sdl, Inc. NxN Optical crossbar switch matrix
US5392117A (en) * 1992-07-21 1995-02-21 Institut National D'optique Fabry-Perot optical sensing device for measuring a physical parameter
WO1995020144A1 (en) * 1994-01-20 1995-07-27 British Telecommunications Public Limited Company Optical wavelength sensor

Also Published As

Publication number Publication date
JP2004532402A (en) 2004-10-21
WO2002075384A2 (en) 2002-09-26
US20020131047A1 (en) 2002-09-19
US6785002B2 (en) 2004-08-31
CN1498340A (en) 2004-05-19
EP1373844A2 (en) 2004-01-02

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