WO2002077697A3 - Active tuning of a torsional resonant structure - Google Patents

Active tuning of a torsional resonant structure Download PDF

Info

Publication number
WO2002077697A3
WO2002077697A3 PCT/US2002/005983 US0205983W WO02077697A3 WO 2002077697 A3 WO2002077697 A3 WO 2002077697A3 US 0205983 W US0205983 W US 0205983W WO 02077697 A3 WO02077697 A3 WO 02077697A3
Authority
WO
WIPO (PCT)
Prior art keywords
scanning device
flexible arm
absorptive material
resonant frequency
oscillatory body
Prior art date
Application number
PCT/US2002/005983
Other languages
French (fr)
Other versions
WO2002077697A2 (en
Inventor
David W Wine
Mark P Helsel
Original Assignee
Microvision Inc
David W Wine
Mark P Helsel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25221646&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2002077697(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microvision Inc, David W Wine, Mark P Helsel filed Critical Microvision Inc
Priority to AU2002252140A priority Critical patent/AU2002252140A1/en
Priority to JP2002575694A priority patent/JP2004532425A/en
Publication of WO2002077697A2 publication Critical patent/WO2002077697A2/en
Publication of WO2002077697A3 publication Critical patent/WO2002077697A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/02—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes by tracing or scanning a light beam on a screen
    • G09G3/025—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes by tracing or scanning a light beam on a screen with scanning or deflecting the beams in two directions or dimensions
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
    • G09G5/003—Details of a display terminal, the details relating to the control arrangement of the display terminal and to the interfaces thereto
    • G09G5/005—Adapting incoming signals to the display format of the display terminal
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/04—Structural and physical details of display devices
    • G09G2300/0469—Details of the physics of pixel operation
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/346—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on modulation of the reflection angle, e.g. micromirrors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Abstract

A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the oscillatory body and a secondary mass carried by the flexible arm. The shifted moment of inertia changes the resonant frequency of the MEMs device. In another embodiment, an absorptive material forms a portion of a torsional arm that supports the oscillatory body. The mechanical properties of the absorptive material can be varied by varying the concentration of a gas surrounding the absorptive material. The varied mechanical properties change the resonant frequency of the scanning device. A display apparatus includes the scanning device and the scanning device scans about two or more axes, typically in a raster pattern. Various approaches to controlling the frequency responses of the scanning device are described, including active control of MEMsscanners and passive frequency tuning.
PCT/US2002/005983 2001-03-23 2002-02-27 Active tuning of a torsional resonant structure WO2002077697A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002252140A AU2002252140A1 (en) 2001-03-23 2002-02-27 Active tuning of a torsional resonant structure
JP2002575694A JP2004532425A (en) 2001-03-23 2002-02-27 Dynamic adjustment of torsional resonance structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/816,804 2001-03-23
US09/816,804 US6384406B1 (en) 1999-08-05 2001-03-23 Active tuning of a torsional resonant structure

Publications (2)

Publication Number Publication Date
WO2002077697A2 WO2002077697A2 (en) 2002-10-03
WO2002077697A3 true WO2002077697A3 (en) 2003-06-12

Family

ID=25221646

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/005983 WO2002077697A2 (en) 2001-03-23 2002-02-27 Active tuning of a torsional resonant structure

Country Status (4)

Country Link
US (4) US6384406B1 (en)
JP (1) JP2004532425A (en)
AU (1) AU2002252140A1 (en)
WO (1) WO2002077697A2 (en)

Families Citing this family (144)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6654158B2 (en) * 2001-04-20 2003-11-25 Microvision, Inc. Frequency tunable resonant scanner with auxiliary arms
US6882462B2 (en) * 2002-11-01 2005-04-19 Microvision, Inc. Resonant scanner with asymmetric mass distribution
US6525310B2 (en) * 1999-08-05 2003-02-25 Microvision, Inc. Frequency tunable resonant scanner
US7516896B2 (en) * 1999-08-05 2009-04-14 Microvision, Inc. Frequency tunable resonant scanner with auxiliary arms
US7428997B2 (en) * 2003-07-29 2008-09-30 Microvision, Inc. Method and apparatus for illuminating a field-of-view and capturing an image
FR2859542B1 (en) * 2003-09-08 2005-11-04 Commissariat Energie Atomique OSCILLATING MICRO-MIRROR WITH BIMORPHIC ACTUATION
JP2005144487A (en) * 2003-11-13 2005-06-09 Seiko Epson Corp Laser beam machining device and laser beam machining method
EP1688777B1 (en) 2003-11-27 2008-06-11 Brother Kogyo Kabushiki Kaisha Optical scanner and image formation device using the same
US7273281B2 (en) * 2003-12-31 2007-09-25 Symbol Technologies, Inc. Method and apparatus for aligning a plurality of lasers in an electronic display device
US6995622B2 (en) * 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
US7446919B2 (en) * 2004-04-30 2008-11-04 Symbol Technologies, Inc. Piezoelectric actuated scanning mirror
US7724210B2 (en) * 2004-05-07 2010-05-25 Microvision, Inc. Scanned light display system using large numerical aperture light source, method of using same, and method of making scanning mirror assemblies
JP2008505359A (en) * 2004-06-29 2008-02-21 ローベル ニコラス Optical scanner
US7586097B2 (en) * 2006-01-05 2009-09-08 Virgin Islands Microsystems, Inc. Switching micro-resonant structures using at least one director
US7626179B2 (en) * 2005-09-30 2009-12-01 Virgin Island Microsystems, Inc. Electron beam induced resonance
US20070034518A1 (en) * 2005-08-15 2007-02-15 Virgin Islands Microsystems, Inc. Method of patterning ultra-small structures
US7791290B2 (en) * 2005-09-30 2010-09-07 Virgin Islands Microsystems, Inc. Ultra-small resonating charged particle beam modulator
US7407105B2 (en) * 2004-08-30 2008-08-05 Intermec Ip Corp. Apparatus for diagonal progressive scanning video and method of improving aiming visibility, reducing tilt dependence and improving read range
US20060061846A1 (en) * 2004-09-17 2006-03-23 Microvision, Inc. Scanned light display system using array of collimating elements in conjunction with large numerical aperture light emitter array
CN101031839A (en) * 2004-09-28 2007-09-05 皇家飞利浦电子股份有限公司 Two dimensional micro scanner
US20060108425A1 (en) * 2004-11-23 2006-05-25 Microvision, Inc. Partitioned bar code system and method
EP1851673B1 (en) * 2004-12-23 2016-11-02 University of Washington Methods of driving a scanning beam device to achieve high frame rates
JP4639812B2 (en) * 2005-01-19 2011-02-23 株式会社デンソー Scanning device
JP4161971B2 (en) * 2005-02-16 2008-10-08 セイコーエプソン株式会社 Optical scanning device and image display device
JP2006300981A (en) * 2005-04-15 2006-11-02 Seiko Epson Corp Optical scanner, method of controlling optical scanner, and image display device
US7925391B2 (en) * 2005-06-02 2011-04-12 The Boeing Company Systems and methods for remote display of an enhanced image
JP4193817B2 (en) 2005-06-22 2008-12-10 セイコーエプソン株式会社 Actuator
JP2007025009A (en) * 2005-07-13 2007-02-01 Kyocera Mita Corp Optical scanner unit and image forming apparatus equipped therewith
US20070035798A1 (en) * 2005-08-11 2007-02-15 Oettinger Eric G Apparatus and method to compensate for the non-linear movement of an oscillating mirror in a display or printer
US7705337B2 (en) * 2005-11-16 2010-04-27 Microvision, Inc. System and method for image detection using large area pin diode
US7736006B2 (en) * 2005-11-21 2010-06-15 Microvision, Inc. Substrate-guided display with improved image quality
US7579609B2 (en) * 2005-12-14 2009-08-25 Virgin Islands Microsystems, Inc. Coupling light of light emitting resonator to waveguide
US7619373B2 (en) * 2006-01-05 2009-11-17 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US20070152781A1 (en) * 2006-01-05 2007-07-05 Virgin Islands Microsystems, Inc. Switching micro-resonant structures by modulating a beam of charged particles
US7470920B2 (en) * 2006-01-05 2008-12-30 Virgin Islands Microsystems, Inc. Resonant structure-based display
US20070190794A1 (en) * 2006-02-10 2007-08-16 Virgin Islands Microsystems, Inc. Conductive polymers for the electroplating
US7605835B2 (en) * 2006-02-28 2009-10-20 Virgin Islands Microsystems, Inc. Electro-photographic devices incorporating ultra-small resonant structures
US20070200646A1 (en) * 2006-02-28 2007-08-30 Virgin Island Microsystems, Inc. Method for coupling out of a magnetic device
US7443358B2 (en) * 2006-02-28 2008-10-28 Virgin Island Microsystems, Inc. Integrated filter in antenna-based detector
US20070200063A1 (en) * 2006-02-28 2007-08-30 Virgin Islands Microsystems, Inc. Wafer-level testing of light-emitting resonant structures
US20080018641A1 (en) * 2006-03-07 2008-01-24 Sprague Randall B Display configured for varying the apparent depth of selected pixels
US7558490B2 (en) * 2006-04-10 2009-07-07 Virgin Islands Microsystems, Inc. Resonant detector for optical signals
US7878658B2 (en) * 2006-04-11 2011-02-01 Microvision, Inc. Distortion and polarization alteration in MEMS based projectors or the like
US7834867B2 (en) * 2006-04-11 2010-11-16 Microvision, Inc. Integrated photonics module and devices using integrated photonics modules
US20080037090A1 (en) * 2006-04-11 2008-02-14 Microvision, Inc. Mems-based projector suitable for inclusion in portable user devices
US7876793B2 (en) 2006-04-26 2011-01-25 Virgin Islands Microsystems, Inc. Micro free electron laser (FEL)
US20070264023A1 (en) * 2006-04-26 2007-11-15 Virgin Islands Microsystems, Inc. Free space interchip communications
US7492868B2 (en) * 2006-04-26 2009-02-17 Virgin Islands Microsystems, Inc. Source of x-rays
US7646991B2 (en) * 2006-04-26 2010-01-12 Virgin Island Microsystems, Inc. Selectable frequency EMR emitter
US20070252089A1 (en) * 2006-04-26 2007-11-01 Virgin Islands Microsystems, Inc. Charged particle acceleration apparatus and method
US7986113B2 (en) * 2006-05-05 2011-07-26 Virgin Islands Microsystems, Inc. Selectable frequency light emitter
US8188431B2 (en) * 2006-05-05 2012-05-29 Jonathan Gorrell Integration of vacuum microelectronic device with integrated circuit
US20070258675A1 (en) * 2006-05-05 2007-11-08 Virgin Islands Microsystems, Inc. Multiplexed optical communication between chips on a multi-chip module
US7569836B2 (en) * 2006-05-05 2009-08-04 Virgin Islands Microsystems, Inc. Transmission of data between microchips using a particle beam
US7746532B2 (en) * 2006-05-05 2010-06-29 Virgin Island Microsystems, Inc. Electro-optical switching system and method
US7710040B2 (en) * 2006-05-05 2010-05-04 Virgin Islands Microsystems, Inc. Single layer construction for ultra small devices
US7728702B2 (en) * 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Shielding of integrated circuit package with high-permeability magnetic material
US7557647B2 (en) * 2006-05-05 2009-07-07 Virgin Islands Microsystems, Inc. Heterodyne receiver using resonant structures
US7656094B2 (en) 2006-05-05 2010-02-02 Virgin Islands Microsystems, Inc. Electron accelerator for ultra-small resonant structures
US7586167B2 (en) * 2006-05-05 2009-09-08 Virgin Islands Microsystems, Inc. Detecting plasmons using a metallurgical junction
US20070257273A1 (en) * 2006-05-05 2007-11-08 Virgin Island Microsystems, Inc. Novel optical cover for optical chip
US20070272931A1 (en) * 2006-05-05 2007-11-29 Virgin Islands Microsystems, Inc. Methods, devices and systems producing illumination and effects
US7718977B2 (en) 2006-05-05 2010-05-18 Virgin Island Microsystems, Inc. Stray charged particle removal device
US7741934B2 (en) 2006-05-05 2010-06-22 Virgin Islands Microsystems, Inc. Coupling a signal through a window
US7728397B2 (en) * 2006-05-05 2010-06-01 Virgin Islands Microsystems, Inc. Coupled nano-resonating energy emitting structures
US7554083B2 (en) * 2006-05-05 2009-06-30 Virgin Islands Microsystems, Inc. Integration of electromagnetic detector on integrated chip
US7723698B2 (en) * 2006-05-05 2010-05-25 Virgin Islands Microsystems, Inc. Top metal layer shield for ultra-small resonant structures
US7732786B2 (en) * 2006-05-05 2010-06-08 Virgin Islands Microsystems, Inc. Coupling energy in a plasmon wave to an electron beam
US7583370B2 (en) * 2006-05-05 2009-09-01 Virgin Islands Microsystems, Inc. Resonant structures and methods for encoding signals into surface plasmons
US7573045B2 (en) * 2006-05-15 2009-08-11 Virgin Islands Microsystems, Inc. Plasmon wave propagation devices and methods
US7501616B2 (en) * 2006-05-25 2009-03-10 Microvision, Inc. Method and apparatus for capturing an image of a moving object
US7679067B2 (en) * 2006-05-26 2010-03-16 Virgin Island Microsystems, Inc. Receiver array using shared electron beam
WO2007146093A2 (en) * 2006-06-06 2007-12-21 Microvision, Inc. Beam scanner with reduced phase error
JP5121301B2 (en) * 2006-06-07 2013-01-16 キヤノン株式会社 Oscillator device, optical deflector, and optical apparatus using the same
US7655934B2 (en) 2006-06-28 2010-02-02 Virgin Island Microsystems, Inc. Data on light bulb
US7769281B1 (en) * 2006-07-18 2010-08-03 Siimpel Corporation Stage with built-in damping
TW200815709A (en) * 2006-07-31 2008-04-01 3M Innovative Properties Co Integrating light source module
US20080036972A1 (en) * 2006-07-31 2008-02-14 3M Innovative Properties Company Led mosaic
EP2372797A3 (en) 2006-07-31 2017-01-18 3M Innovative Properties Co. Light emitting diode source with hollow collection lens
US8075140B2 (en) 2006-07-31 2011-12-13 3M Innovative Properties Company LED illumination system with polarization recycling
JP5330993B2 (en) * 2006-07-31 2013-10-30 スリーエム イノベイティブ プロパティズ カンパニー Optical projection subsystem
US20080043487A1 (en) * 2006-08-21 2008-02-21 Sprague Randall B Light bar structure having light conduits and scanned light display system employing same
JP5098254B2 (en) * 2006-08-29 2012-12-12 富士通株式会社 Micro oscillating device
US7560716B2 (en) * 2006-09-22 2009-07-14 Virgin Islands Microsystems, Inc. Free electron oscillator
US9079762B2 (en) 2006-09-22 2015-07-14 Ethicon Endo-Surgery, Inc. Micro-electromechanical device
US7561317B2 (en) * 2006-11-03 2009-07-14 Ethicon Endo-Surgery, Inc. Resonant Fourier scanning
WO2008069176A1 (en) * 2006-12-05 2008-06-12 Panasonic Corporation Actuator
US20080146898A1 (en) * 2006-12-19 2008-06-19 Ethicon Endo-Surgery, Inc. Spectral windows for surgical treatment through intervening fluids
US7659513B2 (en) * 2006-12-20 2010-02-09 Virgin Islands Microsystems, Inc. Low terahertz source and detector
US20080151343A1 (en) * 2006-12-22 2008-06-26 Ethicon Endo-Surgery, Inc. Apparatus including a scanned beam imager having an optical dome
US7713265B2 (en) 2006-12-22 2010-05-11 Ethicon Endo-Surgery, Inc. Apparatus and method for medically treating a tattoo
US8273015B2 (en) 2007-01-09 2012-09-25 Ethicon Endo-Surgery, Inc. Methods for imaging the anatomy with an anatomically secured scanner assembly
US8801606B2 (en) 2007-01-09 2014-08-12 Ethicon Endo-Surgery, Inc. Method of in vivo monitoring using an imaging system including scanned beam imaging unit
US7589316B2 (en) 2007-01-18 2009-09-15 Ethicon Endo-Surgery, Inc. Scanning beam imaging with adjustable detector sensitivity or gain
US20080226029A1 (en) 2007-03-12 2008-09-18 Weir Michael P Medical device including scanned beam unit for imaging and therapy
US8216214B2 (en) 2007-03-12 2012-07-10 Ethicon Endo-Surgery, Inc. Power modulation of a scanning beam for imaging, therapy, and/or diagnosis
JP5089205B2 (en) * 2007-03-19 2012-12-05 キヤノン株式会社 Image forming apparatus and control method thereof
US8626271B2 (en) 2007-04-13 2014-01-07 Ethicon Endo-Surgery, Inc. System and method using fluorescence to examine within a patient's anatomy
US7995045B2 (en) 2007-04-13 2011-08-09 Ethicon Endo-Surgery, Inc. Combined SBI and conventional image processor
US7832641B2 (en) * 2007-05-24 2010-11-16 Metrologic Instruments, Inc. Scanner switched to active state by sensed movement in quiescent scanning mechanism
US8160678B2 (en) 2007-06-18 2012-04-17 Ethicon Endo-Surgery, Inc. Methods and devices for repairing damaged or diseased tissue using a scanning beam assembly
US7990336B2 (en) * 2007-06-19 2011-08-02 Virgin Islands Microsystems, Inc. Microwave coupled excitation of solid state resonant arrays
US7558455B2 (en) * 2007-06-29 2009-07-07 Ethicon Endo-Surgery, Inc Receiver aperture broadening for scanned beam imaging
US7589901B2 (en) * 2007-07-10 2009-09-15 Microvision, Inc. Substrate-guided relays for use with scanned beam light sources
US7982776B2 (en) 2007-07-13 2011-07-19 Ethicon Endo-Surgery, Inc. SBI motion artifact removal apparatus and method
US20090021818A1 (en) * 2007-07-20 2009-01-22 Ethicon Endo-Surgery, Inc. Medical scanning assembly with variable image capture and display
US9125552B2 (en) 2007-07-31 2015-09-08 Ethicon Endo-Surgery, Inc. Optical scanning module and means for attaching the module to medical instruments for introducing the module into the anatomy
US7983739B2 (en) 2007-08-27 2011-07-19 Ethicon Endo-Surgery, Inc. Position tracking and control for a scanning assembly
US7925333B2 (en) 2007-08-28 2011-04-12 Ethicon Endo-Surgery, Inc. Medical device including scanned beam unit with operational control features
JP2009075309A (en) * 2007-09-20 2009-04-09 Fujifilm Corp Optical scanning element and driving method for the same, and optical scanning probe employing optical scanning element
US7791053B2 (en) 2007-10-10 2010-09-07 Virgin Islands Microsystems, Inc. Depressed anode with plasmon-enabled devices such as ultra-small resonant structures
KR101328960B1 (en) * 2007-11-05 2013-11-14 엘지전자 주식회사 Projector
JP2009122383A (en) * 2007-11-14 2009-06-04 Canon Inc Method for manufacturing oscillator device, and optical deflector and optical device comprising oscillator device manufactured by this method
US20090161705A1 (en) * 2007-12-20 2009-06-25 Etienne Almoric Laser projection utilizing beam misalignment
JP5554895B2 (en) * 2008-02-20 2014-07-23 キヤノン株式会社 Oscillator structure and oscillator device using the oscillator structure
US8050520B2 (en) 2008-03-27 2011-11-01 Ethicon Endo-Surgery, Inc. Method for creating a pixel image from sampled data of a scanned beam imager
US8332014B2 (en) 2008-04-25 2012-12-11 Ethicon Endo-Surgery, Inc. Scanned beam device and method using same which measures the reflectance of patient tissue
US20100252514A1 (en) * 2009-04-03 2010-10-07 Min-Ju Chung Foldable baseball equipment rack
US8248541B2 (en) * 2009-07-02 2012-08-21 Microvision, Inc. Phased locked resonant scanning display projection
DE102009058762A1 (en) * 2009-12-14 2011-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. A deflection apparatus for a projection apparatus, a projection apparatus for projecting an image and a method for controlling a deflection apparatus for a projection apparatus
US8072664B1 (en) 2010-05-26 2011-12-06 Hong Kong Applied Science & Technology Research Institute, Ltd. Biaxial scanning mirror having resonant frequency adjustment
US8531773B2 (en) 2011-01-10 2013-09-10 Microvision, Inc. Substrate guided relay having a homogenizing layer
US8391668B2 (en) 2011-01-13 2013-03-05 Microvision, Inc. Substrate guided relay having an absorbing edge to reduce alignment constraints
KR20140043910A (en) * 2011-06-03 2014-04-11 톰슨 라이센싱 Variable and serrated scanning in laser projectors
EP2745096B1 (en) 2011-08-17 2016-10-12 Public Service Solutions Inc Passive detectors for imaging systems
US20140327601A1 (en) * 2011-11-15 2014-11-06 Elbit Systems Of America, Llc System and method for streaming multiple images from a single projector
DE102012201481A1 (en) * 2012-02-02 2013-08-08 Robert Bosch Gmbh Apparatus for projecting an image, portable mobile device with a corresponding device and method for projecting an image
US20150168733A1 (en) * 2012-03-30 2015-06-18 Thomson Licensing Laser projector system with graphical pointer
JP5963567B2 (en) * 2012-06-26 2016-08-03 日立オートモティブシステムズ株式会社 Inertial sensor
US9265458B2 (en) 2012-12-04 2016-02-23 Sync-Think, Inc. Application of smooth pursuit cognitive testing paradigms to clinical drug development
JP2014132295A (en) * 2013-01-07 2014-07-17 Hitachi Media Electoronics Co Ltd Laser beam display unit
WO2014113506A1 (en) * 2013-01-15 2014-07-24 Magic Leap, Inc. Ultra-high resolution scanning fiber display
US9380976B2 (en) 2013-03-11 2016-07-05 Sync-Think, Inc. Optical neuroinformatics
CN105185243B (en) * 2015-10-15 2018-01-09 京东方科技集团股份有限公司 A kind of display base plate, display device and display methods
ITUB20156009A1 (en) * 2015-11-30 2017-05-30 St Microelectronics Srl BIASAL MEMS REFLECTOR WITH PIEZOELECTRIC ACTUATORS AND MEMS SYSTEM INCLUDING THE MEDIUM
US9971150B1 (en) 2017-04-28 2018-05-15 Microsoft Technology Licensing, Llc Compact display engine with MEMS scanners
US9958684B1 (en) 2017-04-28 2018-05-01 Microsoft Technology Licensing, Llc Compact display engine with MEMS scanners
US10527842B2 (en) 2018-04-04 2020-01-07 Stmicroelectronics Ltd Techniques for suppressing multiple resonance modes in a quasi-statically operated movable mirror
US11029512B2 (en) * 2018-06-27 2021-06-08 Microsoft Technology Licensing, Llc Adjusting a resonant frequency of a scanning mirror
WO2020008750A1 (en) * 2018-07-05 2020-01-09 パナソニックＩｐマネジメント株式会社 Image display apparatus and optical device
CN110873961B (en) * 2018-08-31 2022-03-04 成都理想境界科技有限公司 Optical fiber scanning display device, optical fiber scanning display equipment and optical fiber scanning method
US10484656B1 (en) 2018-12-12 2019-11-19 Microsoft Technology Licensing, Llc Driver system resonant frequency determination
US11218506B2 (en) 2018-12-17 2022-01-04 Microsoft Technology Licensing, Llc Session maturity model with trusted sources
JP7036139B2 (en) 2020-03-13 2022-03-15 カシオ計算機株式会社 Image processing equipment, projection equipment, programs and image processing methods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999036825A1 (en) * 1998-01-16 1999-07-22 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Induction microscanner
US6256131B1 (en) * 1999-08-05 2001-07-03 Microvision Inc. Active tuning of a torsional resonant structure

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421381A (en) 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
GB2175705B (en) 1985-05-24 1989-04-19 Stc Plc Dirigible reflector and mounting made of crystal material
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5165279A (en) 1989-07-06 1992-11-24 Sundstrand Corporation Monolithic accelerometer with flexurally mounted force transducer
US5097354A (en) 1989-07-27 1992-03-17 Omron Corporation Beam scanner
JP2711158B2 (en) 1989-11-13 1998-02-10 富士写真フイルム株式会社 Resonant frequency stabilizing method and resonant optical deflector
ATE151891T1 (en) 1990-08-07 1997-05-15 Omron Tateisi Electronics Co OPTICAL SCANNER
US5355181A (en) 1990-08-20 1994-10-11 Sony Corporation Apparatus for direct display of an image on the retina of the eye using a scanning laser
US5467104A (en) 1992-10-22 1995-11-14 Board Of Regents Of The University Of Washington Virtual retinal display
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5488862A (en) 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6044705A (en) 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
JP2657769B2 (en) 1994-01-31 1997-09-24 正喜 江刺 Planar type galvanometer mirror having displacement detection function and method of manufacturing the same
US5491597A (en) 1994-04-15 1996-02-13 Hutchinson Technology Incorporated Gimbal flexure and electrical interconnect assembly
US5557444A (en) 1994-10-26 1996-09-17 University Of Washington Miniature optical scanner for a two axis scanning system
US5629794A (en) 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5640133A (en) 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
US5930019A (en) * 1996-12-16 1999-07-27 Fuji Xerox Co., Ltd. Light scanning device, optical device, and scanning method of optical device
EP1012890A4 (en) 1997-04-01 2000-06-28 Xros Inc Adjusting operating characteristics of micromachined torsional oscillators
US6140979A (en) * 1998-08-05 2000-10-31 Microvision, Inc. Scanned display with pinch, timing, and distortion correction
US6285489B1 (en) * 1999-08-05 2001-09-04 Microvision Inc. Frequency tunable resonant scanner with auxiliary arms
US6245590B1 (en) * 1999-08-05 2001-06-12 Microvision Inc. Frequency tunable resonant scanner and method of making
US6331909B1 (en) * 1999-08-05 2001-12-18 Microvision, Inc. Frequency tunable resonant scanner
KR100835639B1 (en) * 1999-10-29 2008-06-09 마이크로비젼, 인코퍼레이티드 Scanned display with pinch, timing, and distortion correction
JP2001265275A (en) * 2000-03-16 2001-09-28 Olympus Optical Co Ltd Picture display device
US7035299B2 (en) * 2001-03-29 2006-04-25 Fuji Photo Film Co., Ltd. Image forming apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999036825A1 (en) * 1998-01-16 1999-07-22 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Induction microscanner
US6256131B1 (en) * 1999-08-05 2001-07-03 Microvision Inc. Active tuning of a torsional resonant structure

Also Published As

Publication number Publication date
WO2002077697A2 (en) 2002-10-03
US20020020810A1 (en) 2002-02-21
US7002716B2 (en) 2006-02-21
AU2002252140A1 (en) 2002-10-08
US20020134929A1 (en) 2002-09-26
JP2004532425A (en) 2004-10-21
US6384406B1 (en) 2002-05-07
US6512622B2 (en) 2003-01-28
US20030161020A1 (en) 2003-08-28
US6687034B2 (en) 2004-02-03
US20040196518A1 (en) 2004-10-07

Similar Documents

Publication Publication Date Title
WO2002077697A3 (en) Active tuning of a torsional resonant structure
KR102290143B1 (en) Controlling method of tactile actuator and device
US10261585B2 (en) Adjusting the level of acoustic and haptic output in haptic devices
EP1449058B1 (en) Method and device for generating feedback
WO2001080710A3 (en) Methods and devices for reducing trembling
KR101490260B1 (en) Multidirectional vibration generator using single vibrator and method for the same
WO2001080284A3 (en) Electroactive polymer animated devices
WO2005017445A3 (en) Flexible vibratory micro-electromechanical device
EP1262160A3 (en) Ultrasonic wave cosmetic device
KR101666532B1 (en) Vibration mouse that provide real time vibration feedback
KR101787752B1 (en) Hapttic apparatus and method of partial vibration
US20150123913A1 (en) Apparatus and method for producing lateral force on a touchscreen
EP1329758A4 (en) Optical device
KR20160082955A (en) Tactile information supply device
AU2001212487A1 (en) Frequency tunable resonant scanner with auxiliary arms
US9780622B2 (en) Low frequency micro oscillator
US8476806B2 (en) Piezoelectric actuator module
KR101801389B1 (en) Haptic display apparatus and vibrating panel having plurality of vibrating point
JP4980199B2 (en) Portable electronic device and control method thereof
US20230158545A1 (en) Piezo actuator module for broadband-frequency haptic feedback
JPH07266263A (en) Touch transfer device
AU2001274144A1 (en) Variable or non-variable amplitude vibrating wave damping device
CN112840673B (en) Modal frequency transfer for speaker apparatus
CN220276131U (en) Microwave therapeutic apparatus
US20220111416A1 (en) Stereo tactile sensation providing device

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ PH PL PT RO RU SD SE SG SI SK SL TJ TM TR TT TZ UA UG US UZ VN YU ZA ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2002575694

Country of ref document: JP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase