WO2002082600A3 - Q-switched cavity dumped co2 laser for material processing - Google Patents

Q-switched cavity dumped co2 laser for material processing Download PDF

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Publication number
WO2002082600A3
WO2002082600A3 PCT/US2002/010766 US0210766W WO02082600A3 WO 2002082600 A3 WO2002082600 A3 WO 2002082600A3 US 0210766 W US0210766 W US 0210766W WO 02082600 A3 WO02082600 A3 WO 02082600A3
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WO
WIPO (PCT)
Prior art keywords
switched
laser
cavity dumped
eom
electro
Prior art date
Application number
PCT/US2002/010766
Other languages
French (fr)
Other versions
WO2002082600A2 (en
Inventor
John T Kennedy
Richard A Hart
Lanny Laughman
Joel Fontanella
Anthony J Demaria
Leon Newman
Robert Henschke
Original Assignee
Coherent Deos
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Filing date
Publication date
Application filed by Coherent Deos filed Critical Coherent Deos
Publication of WO2002082600A2 publication Critical patent/WO2002082600A2/en
Publication of WO2002082600A3 publication Critical patent/WO2002082600A3/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22Gases
    • H01S3/223Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232Carbon dioxide (CO2) or monoxide [CO]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/0315Waveguide lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813Configuration of resonator
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09702Details of the driver electronics and electric discharge circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1061Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a variable absorption device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/107Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using electro-optic devices, e.g. exhibiting Pockels or Kerr effect
    • H01S3/1075Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using electro-optic devices, e.g. exhibiting Pockels or Kerr effect for optical deflection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1103Cavity dumping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123Q-switching
    • H01S3/115Q-switching using intracavity electro-optic devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308Amplifier arrangements, e.g. MOPA
    • H01S3/2325Multi-pass amplifiers, e.g. regenerative amplifiers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2366Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media comprising a gas as the active medium

Abstract

This disclosure discusses techniques for obtaining wavelength selected simultaneously super pulsed Q-switched and cavity dumped laser pulses utilizing high optical damage threshold electro-optic modulators, maintaining a zero DC voltage bias on the CdTe electro-optic modulator (142) (EOM) so as to minimize polarization variations depending on the location of the laser beam (402) propagating through the CdSe EOM crystal (142), as well as the addition of one or more laser amplifiers in a compact package and the use of simultaneous gain switched, Q-switched and cavity dumped operation of CO2 lasers for generating shorter pulses and higher peak power for the hole drilling, engraving and perforation applications.
PCT/US2002/010766 2001-04-04 2002-04-04 Q-switched cavity dumped co2 laser for material processing WO2002082600A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28143101P 2001-04-04 2001-04-04
US60/281,431 2001-04-04

Publications (2)

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WO2002082600A2 WO2002082600A2 (en) 2002-10-17
WO2002082600A3 true WO2002082600A3 (en) 2003-05-30

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WO (1) WO2002082600A2 (en)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002082596A2 (en) * 2001-04-04 2002-10-17 Coherent Deos Q-switched co2 laser for material processing
US6697408B2 (en) * 2001-04-04 2004-02-24 Coherent, Inc. Q-switched cavity dumped CO2 laser for material processing
US7439530B2 (en) * 2005-06-29 2008-10-21 Cymer, Inc. LPP EUV light source drive laser system
DE10125779A1 (en) * 2001-05-26 2003-01-02 Deutsche Telekom Ag Method and device for the intensity-dependent attenuation of light
JP3838064B2 (en) * 2001-09-28 2006-10-25 松下電器産業株式会社 Laser control method
JP3903761B2 (en) * 2001-10-10 2007-04-11 株式会社日立製作所 Laser annealing method and laser annealing apparatus
US8148989B2 (en) * 2002-03-11 2012-04-03 Keith Kopp Ferromagnetic detection enhancer compatible with magnetic resonance
CN100335259C (en) * 2002-03-12 2007-09-05 三星钻石工业股份有限公司 Method and system for machining fragile material
WO2004000098A2 (en) 2002-06-19 2003-12-31 Palomar Medical Technologies, Inc. Method and apparatus for treatment of cutaneous and subcutaneous conditions
US6969845B2 (en) * 2002-12-20 2005-11-29 Textron Systems Corporation System and processes for causing the simultaneity of events including controlling a pulse repetition frequency of a pulsed laser for disabling a scanning imaging system
US7039079B2 (en) * 2003-03-14 2006-05-02 Coherent, Inc. Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement
US7361171B2 (en) 2003-05-20 2008-04-22 Raydiance, Inc. Man-portable optical ablation system
US9022037B2 (en) 2003-08-11 2015-05-05 Raydiance, Inc. Laser ablation method and apparatus having a feedback loop and control unit
US8173929B1 (en) 2003-08-11 2012-05-08 Raydiance, Inc. Methods and systems for trimming circuits
US8921733B2 (en) 2003-08-11 2014-12-30 Raydiance, Inc. Methods and systems for trimming circuits
US20050087522A1 (en) * 2003-10-24 2005-04-28 Yunlong Sun Laser processing of a locally heated target material
US20050088510A1 (en) * 2003-10-24 2005-04-28 Shlomo Assa Low angle optics and reversed optics
WO2005058536A1 (en) * 2003-12-18 2005-06-30 Retainagroup Limited Portable laser apparatus for marking an object
US20050255406A1 (en) * 2004-05-11 2005-11-17 Shlomo Assa Marking on a thin film
US7590156B1 (en) * 2004-05-17 2009-09-15 University Of Central Florida Research Foundation, Inc. High intensity MHz mode-locked laser
US7433373B2 (en) * 2004-06-15 2008-10-07 National Tsing Hua University Actively Q-switched laser system using quasi-phase-matched electro-optic Q-switch
DE102004031740B4 (en) * 2004-06-30 2008-07-31 Raylase Ag Method for controlling a laser for generating a gray scale image and laser system
US7280569B2 (en) * 2004-07-08 2007-10-09 Coherent, Inc. Electro-optical modulator module for CO2 laser Q-switching, mode-locking, and cavity dumping
US7263116B2 (en) * 2004-08-05 2007-08-28 Coherent, Inc. Dielectric coupled CO2 slab laser
EP1778431A1 (en) * 2004-08-19 2007-05-02 Retainagroup Limited Method and apparatus for marking a vehicle
US7508850B2 (en) * 2004-09-02 2009-03-24 Coherent, Inc. Apparatus for modifying CO2 slab laser pulses
JP5242758B2 (en) * 2004-10-07 2013-07-24 ギガフォトン株式会社 Driver laser for extreme ultraviolet light source device and LPP type extreme ultraviolet light source device
JP5100990B2 (en) * 2004-10-07 2012-12-19 ギガフォトン株式会社 Driver laser for extreme ultraviolet light source device and LPP type extreme ultraviolet light source device
US20060189091A1 (en) * 2004-11-11 2006-08-24 Bo Gu Method and system for laser hard marking
US8506087B2 (en) 2005-01-19 2013-08-13 William R. Benner, Jr. Laser projector having safety lens for audience scanning
AU2006206400B2 (en) * 2005-01-19 2010-10-28 William R. Benner Jr. Laser projector for audience scanning
US7292616B2 (en) * 2005-02-09 2007-11-06 Ultratech, Inc. CO2 laser stabilization systems and methods
US7394479B2 (en) * 2005-03-02 2008-07-01 Marken Corporation Pulsed laser printing
US7856985B2 (en) 2005-04-22 2010-12-28 Cynosure, Inc. Method of treatment body tissue using a non-uniform laser beam
JP2006309861A (en) * 2005-04-27 2006-11-09 Sharp Corp Optical integrated unit and optical pickup device
EP1736272B9 (en) * 2005-06-21 2009-08-12 Fameccanica.Data S.p.A. A method and device for laser cutting articles, in particular sanitary products and components thereof, with a laser spot diameter between 0.1 and 0.3 mm
US8135050B1 (en) 2005-07-19 2012-03-13 Raydiance, Inc. Automated polarization correction
US20070031156A1 (en) * 2005-07-29 2007-02-08 Robotham W S Jr Amplification of TTL RF oscillator signals with digital logic and power switching technology for CO2 laser RF power supplies
US20070024011A1 (en) * 2005-07-29 2007-02-01 Raymond Michaud Thermally stable vacuum enclosure seal design for CO2 lasers
US20080002751A1 (en) * 2005-08-10 2008-01-03 Gongxue Hua High damage threshold Q-switched CO2 laser
US7453918B2 (en) * 2005-08-11 2008-11-18 Coherent, Inc. Pulsed RF high pressure CO2 lasers
US7327769B2 (en) 2005-10-18 2008-02-05 Coherent, Inc. Injection locking Q-switched and Q-switched cavity dumped CO2 lasers for extreme UV generation
DE102005061716A1 (en) * 2005-12-22 2007-07-05 BME Meßgeräte Entwicklung KG Pockels cell drive circuit for rapid variation of the pulse amplitude of short or ultrashort laser pulses
US9130344B2 (en) 2006-01-23 2015-09-08 Raydiance, Inc. Automated laser tuning
US8189971B1 (en) 2006-01-23 2012-05-29 Raydiance, Inc. Dispersion compensation in a chirped pulse amplification system
US7444049B1 (en) 2006-01-23 2008-10-28 Raydiance, Inc. Pulse stretcher and compressor including a multi-pass Bragg grating
US8232687B2 (en) * 2006-04-26 2012-07-31 Raydiance, Inc. Intelligent laser interlock system
DE102006006589B4 (en) * 2006-02-13 2013-02-21 Jenoptik Laser Gmbh Laser and method for generating pulsed laser radiation
US7822347B1 (en) 2006-03-28 2010-10-26 Raydiance, Inc. Active tuning of temporal dispersion in an ultrashort pulse laser system
US7929579B2 (en) * 2006-08-02 2011-04-19 Cynosure, Inc. Picosecond laser apparatus and methods for its operation and use
US7586957B2 (en) * 2006-08-02 2009-09-08 Cynosure, Inc Picosecond laser apparatus and methods for its operation and use
JP5086677B2 (en) * 2006-08-29 2012-11-28 ギガフォトン株式会社 Driver laser for extreme ultraviolet light source device
US7720141B2 (en) * 2006-09-05 2010-05-18 Advanced Micro Devices, Inc. Decision feedback restore of DC signals in a receiver
US9029731B2 (en) * 2007-01-26 2015-05-12 Electro Scientific Industries, Inc. Methods and systems for laser processing continuously moving sheet material
US7817685B2 (en) * 2007-01-26 2010-10-19 Electro Scientific Industries, Inc. Methods and systems for generating pulse trains for material processing
US7727796B2 (en) * 2007-04-26 2010-06-01 Oxford Instruments Analytical Oy Method for patterning detector crystal using Q-switched laser
US7903699B2 (en) * 2007-05-24 2011-03-08 Coherent, Inc. Acousto-optically Q-switched CO2 laser
US7903326B2 (en) 2007-11-30 2011-03-08 Radiance, Inc. Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system
US8332661B2 (en) * 2008-09-11 2012-12-11 Mostovych Andrew N Method and apparatus for prevention of tampering, unauthorized use, and unauthorized extraction of information from microdevices
US8498538B2 (en) 2008-11-14 2013-07-30 Raydiance, Inc. Compact monolithic dispersion compensator
JP5474576B2 (en) 2009-01-14 2014-04-16 ギガフォトン株式会社 LASER OPTICAL AMPLIFIER AND LASER DEVICE USING THE SAME
US10307862B2 (en) * 2009-03-27 2019-06-04 Electro Scientific Industries, Inc Laser micromachining with tailored bursts of short laser pulses
JP2010258198A (en) * 2009-04-24 2010-11-11 Fujifilm Corp Mode-locked solid-state laser apparatus
RU2589274C2 (en) * 2010-03-26 2016-07-10 ЛОРЕНС ЛИВЕРМОР НЭШНЛ СЕКЬЮРИТИ, ЭлЭлСи Architecture of multipass amplifier for high-power laser systems
FR2958817B1 (en) * 2010-04-08 2012-12-07 Univ Limoges IMPULSIVE SUPERCONTINUUM SOURCE WITH VARIABLE PULSE DURATION
WO2012021748A1 (en) 2010-08-12 2012-02-16 Raydiance, Inc. Polymer tubing laser micromachining
WO2012037465A1 (en) 2010-09-16 2012-03-22 Raydiance, Inc. Laser based processing of layered materials
KR101918789B1 (en) * 2010-10-29 2018-11-14 로렌스 리버모어 내쇼날 시큐리티, 엘엘시 Method and system for compact efficient laser architecture
JP2012109417A (en) 2010-11-17 2012-06-07 Komatsu Ltd Slab type amplification device, laser device, and extreme ultraviolet light source device
WO2012066402A1 (en) 2010-11-17 2012-05-24 Gigaphoton Inc. Slab amplification device, laser apparatus, and extreme ultraviolet light generation system
DE102011075126A1 (en) * 2011-05-03 2012-11-08 Trumpf Laser Gmbh + Co. Kg Cavity dumping laser resonator and method for generating laser pulses
US10239160B2 (en) 2011-09-21 2019-03-26 Coherent, Inc. Systems and processes that singulate materials
DE102012002470A1 (en) 2012-02-03 2013-08-08 Iai Industrial Systems B.V. CO2 laser with fast power control
US8767291B2 (en) * 2012-03-16 2014-07-01 Kla-Tencor Corporation Suppression of parasitic optical feedback in pulse laser systems
JP2013229553A (en) * 2012-03-30 2013-11-07 Gigaphoton Inc Laser device and extreme ultraviolet light generation device
US8731015B2 (en) 2012-03-30 2014-05-20 Coherent, Inc. Compact CO2 slab-laser
KR102342629B1 (en) 2012-04-18 2021-12-22 싸이노슈어, 엘엘씨 Picosecond laser apparatus and methods for treating target tissues with same
US10054676B2 (en) * 2012-05-03 2018-08-21 Los Alamos National Security, Llc Acoustic camera
WO2014022681A1 (en) 2012-08-01 2014-02-06 Gentex Corporation Assembly with laser induced channel edge and method thereof
WO2014080822A1 (en) * 2012-11-20 2014-05-30 国立大学法人九州大学 Laser machining apparatus and laser machining method
TWI469462B (en) 2012-11-30 2015-01-11 Ind Tech Res Inst The apparatus of ultra short pulse laser generation through spectrally sideband gain manipulation
US10285757B2 (en) 2013-03-15 2019-05-14 Cynosure, Llc Picosecond optical radiation systems and methods of use
PL2800212T3 (en) * 2013-05-03 2019-07-31 Fotona D.O.O. Method for operating a laser system
DE102013212099B4 (en) * 2013-06-25 2020-03-05 Trumpf Laser Gmbh High voltage modulation without following error
RU2548592C2 (en) * 2013-07-16 2015-04-20 Открытое акционерное общество "Научно-производственное объединение "Карат" (ОАО "НПО КАРАТ") Pulsed two-mode solid-state laser
US8995052B1 (en) * 2013-09-09 2015-03-31 Coherent Kaiserslautern GmbH Multi-stage MOPA with first-pulse suppression
US9414498B2 (en) 2013-09-20 2016-08-09 Coherent, Inc. Via-hole drilling in a printed circuit board using a carbon monoxide laser
WO2015143423A1 (en) * 2014-03-21 2015-09-24 Lightwave International, Inc. Laser projection system
DE102014111774A1 (en) * 2014-08-18 2016-02-18 AMOtronics UG Arrangement and method for modulating laser pulses
US9925620B2 (en) 2015-08-19 2018-03-27 Coherent, Inc. Carbon monoxide laser machining system
US10641807B2 (en) * 2015-10-16 2020-05-05 Jx Nippon Mining & Metals Corporation Optical modulator and electric field sensor
US10274806B2 (en) 2015-11-06 2019-04-30 Coherent, Inc. Pulse-dividing method and apparatus for a pulsed carbon monoxide laser
US10423047B2 (en) 2016-07-27 2019-09-24 Coherent, Inc. Laser machining method and apparatus
KR101900413B1 (en) * 2017-04-24 2018-09-20 한국과학기술연구원 Single pulse laser apparatus
DE102017208705A1 (en) * 2017-05-23 2018-11-29 Robert Bosch Gmbh Transmitting unit for emitting radiation into the environment
GB2552636B (en) * 2017-11-22 2019-01-09 Rofin Sinar Uk Ltd Polarisation and mode selection technique for a laser
KR102627248B1 (en) 2018-02-26 2024-01-19 싸이노슈어, 엘엘씨 Q-switched cavity dumping subnanosecond laser
US10583668B2 (en) 2018-08-07 2020-03-10 Markem-Imaje Corporation Symbol grouping and striping for wide field matrix laser marking
US10855047B1 (en) 2018-11-06 2020-12-01 United States Of America As Represented By The Secretary Of The Air Force Passively cavity-dumped laser apparatus, system and methods
CN111864517B (en) * 2020-07-29 2023-04-18 中国科学院长春光学精密机械与物理研究所 Laser pulse waveform purification method and system
RU206918U1 (en) * 2021-04-26 2021-10-01 Общество с ограниченной ответственностью "КрОМ" Device for controlling the Q-factor of a laser resonator with the formation of a subnanosecond pulse front
CN114512297B (en) * 2022-01-17 2022-12-02 华中科技大学 Magnetic gain switch and method based on flat-top pulse magnetic field
CN115621829B (en) * 2022-12-21 2023-04-18 吉林省永利激光科技有限公司 Radio frequency excitation waveguide CO2 laser

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3820038A (en) * 1973-02-09 1974-06-25 Atomic Energy Commission Method and apparatus for producing isolated laser pulses having a fast rise time
US4174504A (en) * 1978-01-25 1979-11-13 United Technologies Corporation Apparatus and method for cavity dumping a Q-switched laser
US4176327A (en) * 1978-01-25 1979-11-27 United Technologies Corporation Method for cavity dumping a Q-switched laser
US4498179A (en) * 1982-07-30 1985-02-05 The Unites States Of America As Represented By The Secretary Of The Army Modulated infrared laser with two coupled cavities
US4499582A (en) * 1980-04-05 1985-02-12 Heinrich Karning Laser system
US5365532A (en) * 1992-10-09 1994-11-15 Hughes Aircraft Company Cavity dump laser amplitude stabilization
US6061377A (en) * 1996-12-04 2000-05-09 Thomson-Csf Light amplifier device with two incident beams

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3571744A (en) * 1967-03-23 1971-03-23 Trw Inc Lasers incorporating time variable reflectivity
US3577097A (en) * 1967-11-28 1971-05-04 Trw Inc Laser with combined q-switch and synchronized cavity dump circuit
US3581230A (en) * 1969-01-27 1971-05-25 United Aircraft Corp Passive q-switch and modulator for co{hd 2 {l lasers
US3676504A (en) * 1970-09-10 1972-07-11 Reynolds Tobacco Co R Preparation of a terepene alcohol
US3711791A (en) * 1971-05-03 1973-01-16 A Erickson Frustrated total internal reflection laser q-switch
US3772611A (en) 1971-12-27 1973-11-13 Bell Telephone Labor Inc Waveguide gas laser devices
US4030839A (en) 1972-04-20 1977-06-21 Glenn Edward Rickert Frequency selective reflex sight
US3790278A (en) * 1972-04-26 1974-02-05 United Aircraft Corp Peaked power coherent pulsed laser transmitter/receiver system
US3824717A (en) * 1973-07-30 1974-07-23 Hughes Aircraft Co Enhanced field of view parametric image converter
US4197513A (en) * 1977-12-09 1980-04-08 Quanta Ray Inc. Active Q-switched high power single mode laser
US4169251A (en) 1978-01-16 1979-09-25 Hughes Aircraft Company Waveguide gas laser with high frequency transverse discharge excitation
US4393517A (en) * 1980-09-30 1983-07-12 The United States Of America As Represented By The Secretary Of The Army Pulse code modulation of laser pulse tail
US4363126A (en) 1980-12-10 1982-12-07 United Technologies Corporation Tuned-circuit RF-excited laser
US4660204A (en) * 1984-08-02 1987-04-21 Hughes Aircraft Company CO2 TEA laser utilizing an intra-cavity prism Q-switch
US4675872A (en) * 1985-09-30 1987-06-23 Harris Corporation Driver unit for a laser Q-switch
US4719639B1 (en) 1987-01-08 1994-06-28 Boreal Laser Inc Carbon dioxide slab laser
US4815094A (en) 1987-05-22 1989-03-21 California Laboratories, Inc. Multiply folded laser systems
US4787090A (en) 1988-03-28 1988-11-22 United Technologies Corporation Compact distributed inductance RF-excited waveguide gas laser arrangement
US4891819A (en) 1989-01-17 1990-01-02 Sutter Jr Leroy V RF excited laser with internally folded resonator
JPH02211684A (en) 1989-02-13 1990-08-22 Toshiba Corp Q-switch laser device
IT1249208B (en) * 1990-06-07 1995-02-20 Ausimont Srl PROCESS FOR THE PREPARATION OF HALOGENATED 1,3-DIOSSOLANS AND NEW PRODUCTS OBTAINED
US5220576A (en) 1990-09-26 1993-06-15 Seimans Aktiengesellschaft Slab or stripline laser
DE4125443C2 (en) 1991-08-01 1998-01-15 Man Technologie Gmbh Optically pumped far infrared laser
US5177748A (en) 1991-08-06 1993-01-05 California Institute Of Technology In phase coupled strip waveguide CO2 laser
US5329539A (en) * 1991-10-28 1994-07-12 Lightwave Electronics Efficient laser configuration
WO1993010583A1 (en) * 1991-11-22 1993-05-27 Omnichrome Corporation Liquid stabilized internal mirror lasers
US5327442A (en) * 1992-02-19 1994-07-05 Coherent, Inc. Solid state laser with dual cooling loops
DE9217640U1 (en) 1992-12-23 1994-09-29 Rofin Sinar Laser Gmbh Slab or stripline lasers
EP0608458B1 (en) 1993-01-29 2002-01-02 Citizen Watch Co. Ltd. A method of operating an optical modulator device
US5972737A (en) * 1993-04-14 1999-10-26 Frank J. Polese Heat-dissipating package for microcircuit devices and process for manufacture
US5353297A (en) 1993-07-12 1994-10-04 Coherent, Inc. Gas slab laser with folded resonator structure
US5491579A (en) 1994-05-31 1996-02-13 The United States Of America As Represented By The Secretary Of The Navy Broadband thermal optical limiter for the protection of eyes and sensors
US5748663A (en) 1994-06-08 1998-05-05 Qsource, Inc. Retangular discharge gas laser
US5610936A (en) 1995-09-28 1997-03-11 Technology Development Corporation Extended multiply folded optical paths
US5982790A (en) * 1997-01-16 1999-11-09 Lightwave Electronics Corporation System for reducing pulse-to-pulse energy variation in a pulsed laser
US6192061B1 (en) * 1997-03-14 2001-02-20 Demaria Electrooptics Systems, Inc. RF excited waveguide laser
US5881087A (en) 1997-04-30 1999-03-09 Universal Laser Systems, Inc. Gas laser tube design
US6072815A (en) * 1998-02-27 2000-06-06 Litton Systems, Inc. Microlaser submount assembly and associates packaging method
US6252726B1 (en) * 1999-09-02 2001-06-26 Lightlogic, Inc. Dual-enclosure optoelectronic packages
KR100346836B1 (en) * 2000-06-07 2002-08-03 삼성전자 주식회사 Delay locked loop circuit having duty cycle correction function and delay locking method
US6788722B1 (en) 2000-07-10 2004-09-07 Coherent, Inc. High power waveguide laser
US6697408B2 (en) * 2001-04-04 2004-02-24 Coherent, Inc. Q-switched cavity dumped CO2 laser for material processing
WO2002082596A2 (en) * 2001-04-04 2002-10-17 Coherent Deos Q-switched co2 laser for material processing
TW528636B (en) * 2001-05-09 2003-04-21 Electro Scient Ind Inc Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses
US6683893B2 (en) 2001-10-25 2004-01-27 Coherent, Inc. Q-switching method for pulse train generation

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3820038A (en) * 1973-02-09 1974-06-25 Atomic Energy Commission Method and apparatus for producing isolated laser pulses having a fast rise time
US4174504A (en) * 1978-01-25 1979-11-13 United Technologies Corporation Apparatus and method for cavity dumping a Q-switched laser
US4176327A (en) * 1978-01-25 1979-11-27 United Technologies Corporation Method for cavity dumping a Q-switched laser
US4499582A (en) * 1980-04-05 1985-02-12 Heinrich Karning Laser system
US4498179A (en) * 1982-07-30 1985-02-05 The Unites States Of America As Represented By The Secretary Of The Army Modulated infrared laser with two coupled cavities
US5365532A (en) * 1992-10-09 1994-11-15 Hughes Aircraft Company Cavity dump laser amplitude stabilization
US6061377A (en) * 1996-12-04 2000-05-09 Thomson-Csf Light amplifier device with two incident beams

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US7058093B2 (en) 2006-06-06
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US6697408B2 (en) 2004-02-24

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