WO2002084736A3 - Microelectronic spring with additional protruding member - Google Patents

Microelectronic spring with additional protruding member Download PDF

Info

Publication number
WO2002084736A3
WO2002084736A3 PCT/US2002/012762 US0212762W WO02084736A3 WO 2002084736 A3 WO2002084736 A3 WO 2002084736A3 US 0212762 W US0212762 W US 0212762W WO 02084736 A3 WO02084736 A3 WO 02084736A3
Authority
WO
WIPO (PCT)
Prior art keywords
protruding member
microelectronic spring
substrate
clearance under
cantilevered
Prior art date
Application number
PCT/US2002/012762
Other languages
French (fr)
Other versions
WO2002084736A8 (en
WO2002084736A2 (en
WO2002084736A1 (en
Inventor
Gary W Grube
Original Assignee
Formfactor Inc
Gary W Grube
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Formfactor Inc, Gary W Grube filed Critical Formfactor Inc
Priority to AU2002256325A priority Critical patent/AU2002256325A1/en
Publication of WO2002084736A2 publication Critical patent/WO2002084736A2/en
Publication of WO2002084736A1 publication Critical patent/WO2002084736A1/en
Publication of WO2002084736A8 publication Critical patent/WO2002084736A8/en
Publication of WO2002084736A3 publication Critical patent/WO2002084736A3/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50Fixed connections
    • H01R12/51Fixed connections for rigid printed circuits or like structures
    • H01R12/55Fixed connections for rigid printed circuits or like structures characterised by the terminals
    • H01R12/57Fixed connections for rigid printed circuits or like structures characterised by the terminals surface mounting terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716Elastic
    • G01R1/06727Cantilever beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Various structural features for modifying the performance characteristics of cantilevered microelectronic spring structures (102) are disclosed. Generally, the features comprise a protruding member (120) mounted between a supporting substrate (116) and the transverse cantilever beam (106) of a microelectronic spring structure (102), at a distance spaced apart from the supporting structure from which the beam is cantilevered. The protruding member (120) may be equal to the clearance under the beam, less than the clearance under the beam, or adjustable in height; and may be attached or mounted to either the beam or the substrate. The protruding member may be substantially rigid and incompressible, and shorter than the clearance under the beam or 'soft' and compressible. The protruding member may comprise an electronic device attached to both the substrate and the beam. Additionally the protruding member may be comprised of an adjustable pressure device.
PCT/US2002/012762 2001-04-12 2002-04-10 Microelectronic spring with additional protruding member WO2002084736A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002256325A AU2002256325A1 (en) 2001-04-12 2002-04-10 Microelectronic spring with additional protruding member

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/834,074 US6811406B2 (en) 2001-04-12 2001-04-12 Microelectronic spring with additional protruding member
US09/834,074 2001-04-12

Publications (4)

Publication Number Publication Date
WO2002084736A2 WO2002084736A2 (en) 2002-10-24
WO2002084736A1 WO2002084736A1 (en) 2002-10-24
WO2002084736A8 WO2002084736A8 (en) 2002-11-21
WO2002084736A3 true WO2002084736A3 (en) 2003-04-24

Family

ID=25266036

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/012762 WO2002084736A1 (en) 2001-04-12 2002-04-10 Microelectronic spring with additional protruding member

Country Status (4)

Country Link
US (1) US6811406B2 (en)
AU (1) AU2002256325A1 (en)
TW (1) TW593123B (en)
WO (1) WO2002084736A1 (en)

Families Citing this family (103)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6036924A (en) 1997-12-04 2000-03-14 Hewlett-Packard Company Cassette of lancet cartridges for sampling blood
US6391005B1 (en) 1998-03-30 2002-05-21 Agilent Technologies, Inc. Apparatus and method for penetration with shaft having a sensor for sensing penetration depth
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6426638B1 (en) * 2000-05-02 2002-07-30 Decision Track Llc Compliant probe apparatus
US8641644B2 (en) 2000-11-21 2014-02-04 Sanofi-Aventis Deutschland Gmbh Blood testing apparatus having a rotatable cartridge with multiple lancing elements and testing means
DE10057832C1 (en) * 2000-11-21 2002-02-21 Hartmann Paul Ag Blood analysis device has syringe mounted in casing, annular mounting carrying needles mounted behind test strip and being swiveled so that needle can be pushed through strip and aperture in casing to take blood sample
DE10143173A1 (en) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafer probe has contact finger array with impedance matching network suitable for wide band
US7025774B2 (en) 2001-06-12 2006-04-11 Pelikan Technologies, Inc. Tissue penetration device
US8337419B2 (en) * 2002-04-19 2012-12-25 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US9795747B2 (en) 2010-06-02 2017-10-24 Sanofi-Aventis Deutschland Gmbh Methods and apparatus for lancet actuation
WO2002100254A2 (en) 2001-06-12 2002-12-19 Pelikan Technologies, Inc. Method and apparatus for lancet launching device integrated onto a blood-sampling cartridge
US9226699B2 (en) 2002-04-19 2016-01-05 Sanofi-Aventis Deutschland Gmbh Body fluid sampling module with a continuous compression tissue interface surface
US9427532B2 (en) 2001-06-12 2016-08-30 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
EP1404233B1 (en) 2001-06-12 2009-12-02 Pelikan Technologies Inc. Self optimizing lancing device with adaptation means to temporal variations in cutaneous properties
US7033371B2 (en) 2001-06-12 2006-04-25 Pelikan Technologies, Inc. Electric lancet actuator
US7344507B2 (en) * 2002-04-19 2008-03-18 Pelikan Technologies, Inc. Method and apparatus for lancet actuation
AU2002312521A1 (en) 2001-06-12 2002-12-23 Pelikan Technologies, Inc. Blood sampling apparatus and method
US7981056B2 (en) 2002-04-19 2011-07-19 Pelikan Technologies, Inc. Methods and apparatus for lancet actuation
WO2003052435A1 (en) 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
US7256591B2 (en) * 2001-11-29 2007-08-14 Fujitsu Limited Probe card, having cantilever-type probe and method
CN100423221C (en) * 2002-02-05 2008-10-01 飞而康公司 Method for manufacturing electrical contact element for testing electro device and electrical contact element thereby
US7371247B2 (en) 2002-04-19 2008-05-13 Pelikan Technologies, Inc Method and apparatus for penetrating tissue
US7713214B2 (en) 2002-04-19 2010-05-11 Pelikan Technologies, Inc. Method and apparatus for a multi-use body fluid sampling device with optical analyte sensing
US9248267B2 (en) 2002-04-19 2016-02-02 Sanofi-Aventis Deustchland Gmbh Tissue penetration device
US8221334B2 (en) 2002-04-19 2012-07-17 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7976476B2 (en) 2002-04-19 2011-07-12 Pelikan Technologies, Inc. Device and method for variable speed lancet
US8702624B2 (en) 2006-09-29 2014-04-22 Sanofi-Aventis Deutschland Gmbh Analyte measurement device with a single shot actuator
US7892185B2 (en) 2002-04-19 2011-02-22 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
US7297122B2 (en) 2002-04-19 2007-11-20 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7717863B2 (en) 2002-04-19 2010-05-18 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7229458B2 (en) * 2002-04-19 2007-06-12 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7674232B2 (en) 2002-04-19 2010-03-09 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7291117B2 (en) * 2002-04-19 2007-11-06 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7909778B2 (en) 2002-04-19 2011-03-22 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7892183B2 (en) 2002-04-19 2011-02-22 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
US7331931B2 (en) 2002-04-19 2008-02-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7491178B2 (en) 2002-04-19 2009-02-17 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8267870B2 (en) 2002-04-19 2012-09-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for body fluid sampling with hybrid actuation
US8360992B2 (en) 2002-04-19 2013-01-29 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7547287B2 (en) 2002-04-19 2009-06-16 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US8579831B2 (en) 2002-04-19 2013-11-12 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7901362B2 (en) 2002-04-19 2011-03-08 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US9314194B2 (en) 2002-04-19 2016-04-19 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US8784335B2 (en) 2002-04-19 2014-07-22 Sanofi-Aventis Deutschland Gmbh Body fluid sampling device with a capacitive sensor
US9795334B2 (en) 2002-04-19 2017-10-24 Sanofi-Aventis Deutschland Gmbh Method and apparatus for penetrating tissue
US7232451B2 (en) 2002-04-19 2007-06-19 Pelikan Technologies, Inc. Method and apparatus for penetrating tissue
US7265565B2 (en) 2003-02-04 2007-09-04 Microfabrica Inc. Cantilever microprobes for contacting electronic components and methods for making such probes
US20050184748A1 (en) * 2003-02-04 2005-08-25 Microfabrica Inc. Pin-type probes for contacting electronic circuits and methods for making such probes
US20050104609A1 (en) * 2003-02-04 2005-05-19 Microfabrica Inc. Microprobe tips and methods for making
US7084650B2 (en) * 2002-12-16 2006-08-01 Formfactor, Inc. Apparatus and method for limiting over travel in a probe card assembly
US8574895B2 (en) 2002-12-30 2013-11-05 Sanofi-Aventis Deutschland Gmbh Method and apparatus using optical techniques to measure analyte levels
US7567089B2 (en) * 2003-02-04 2009-07-28 Microfabrica Inc. Two-part microprobes for contacting electronic components and methods for making such probes
US10416192B2 (en) 2003-02-04 2019-09-17 Microfabrica Inc. Cantilever microprobes for contacting electronic components
US20050189958A1 (en) * 2003-02-04 2005-09-01 Microfabrica Inc. Cantilever microprobes for contacting electronic components and methods for making such probes
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
DE602004028463D1 (en) * 2003-05-30 2010-09-16 Pelikan Technologies Inc METHOD AND DEVICE FOR INJECTING LIQUID
US7850621B2 (en) * 2003-06-06 2010-12-14 Pelikan Technologies, Inc. Method and apparatus for body fluid sampling and analyte sensing
WO2006001797A1 (en) 2004-06-14 2006-01-05 Pelikan Technologies, Inc. Low pain penetrating
US7604592B2 (en) * 2003-06-13 2009-10-20 Pelikan Technologies, Inc. Method and apparatus for a point of care device
WO2005013430A1 (en) * 2003-08-01 2005-02-10 Fci Asia Technology Pte Ltd Connector
US8282576B2 (en) 2003-09-29 2012-10-09 Sanofi-Aventis Deutschland Gmbh Method and apparatus for an improved sample capture device
EP1680014A4 (en) 2003-10-14 2009-01-21 Pelikan Technologies Inc Method and apparatus for a variable user interface
DE202004021093U1 (en) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Differential probe for e.g. integrated circuit, has elongate probing units interconnected to respective active circuits that are interconnected to substrate by respective pair of flexible interconnects
TW200536039A (en) * 2003-12-31 2005-11-01 Microfabrica Inc Cantilever microprobes for contacting electronic components and methods for making such probes
EP1706026B1 (en) 2003-12-31 2017-03-01 Sanofi-Aventis Deutschland GmbH Method and apparatus for improving fluidic flow and sample capture
US7822454B1 (en) 2005-01-03 2010-10-26 Pelikan Technologies, Inc. Fluid sampling device with improved analyte detecting member configuration
US20080312555A1 (en) * 2004-02-06 2008-12-18 Dirk Boecker Devices and methods for glucose measurement using rechargeable battery energy sources
EP1751546A2 (en) 2004-05-20 2007-02-14 Albatros Technologies GmbH & Co. KG Printable hydrogel for biosensors
EP1765194A4 (en) 2004-06-03 2010-09-29 Pelikan Technologies Inc Method and apparatus for a fluid sampling device
US9775553B2 (en) 2004-06-03 2017-10-03 Sanofi-Aventis Deutschland Gmbh Method and apparatus for a fluid sampling device
DE202005021435U1 (en) 2004-09-13 2008-02-28 Cascade Microtech, Inc., Beaverton Double-sided test setups
US8652831B2 (en) 2004-12-30 2014-02-18 Sanofi-Aventis Deutschland Gmbh Method and apparatus for analyte measurement test time
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
US7118385B1 (en) 2005-09-22 2006-10-10 International Business Machines Corporation Apparatus for implementing a self-centering land grid array socket
WO2007041585A1 (en) * 2005-09-30 2007-04-12 Sv Probe Pte Ltd Cantilever probe structure for a probe card assembly
US7579856B2 (en) * 2006-04-21 2009-08-25 Formfactor, Inc. Probe structures with physically suspended electronic components
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7583101B2 (en) * 2007-01-18 2009-09-01 Formfactor, Inc. Probing structure with fine pitch probes
US7462038B2 (en) * 2007-02-20 2008-12-09 Qimonda Ag Interconnection structure and method of manufacturing the same
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
WO2009026394A1 (en) * 2007-08-20 2009-02-26 Pelikan Technologies, Inc. Body fluid sampling systems
US7589547B2 (en) * 2007-09-13 2009-09-15 Touchdown Technologies, Inc. Forked probe for testing semiconductor devices
US20090072851A1 (en) * 2007-09-13 2009-03-19 Touchdown Technologies, Inc. Multi-Pivot Probe Card For Testing Semiconductor Devices
US7936177B2 (en) * 2008-03-07 2011-05-03 Formfactor, Inc. Providing an electrically conductive wall structure adjacent a contact structure of an electronic device
WO2009126900A1 (en) 2008-04-11 2009-10-15 Pelikan Technologies, Inc. Method and apparatus for analyte detecting device
US8528885B2 (en) * 2008-04-21 2013-09-10 Formfactor, Inc. Multi-stage spring system
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
WO2010059247A2 (en) 2008-11-21 2010-05-27 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8441272B2 (en) * 2008-12-30 2013-05-14 Stmicroelectronics S.R.L. MEMS probe for probe cards for integrated circuits
US9375169B2 (en) 2009-01-30 2016-06-28 Sanofi-Aventis Deutschland Gmbh Cam drive for managing disposable penetrating member actions with a single motor and motor and control system
US8965476B2 (en) 2010-04-16 2015-02-24 Sanofi-Aventis Deutschland Gmbh Tissue penetration device
US8251755B2 (en) * 2010-06-14 2012-08-28 Tyco Electronics Corporation Connector with a laterally moving contact
JP5748709B2 (en) * 2012-06-05 2015-07-15 三菱電機株式会社 Probe card
JP6500258B2 (en) * 2015-06-12 2019-04-17 北川工業株式会社 Contact member
US11262383B1 (en) 2018-09-26 2022-03-01 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US11761982B1 (en) 2019-12-31 2023-09-19 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact and methods for making such probes
US11802891B1 (en) 2019-12-31 2023-10-31 Microfabrica Inc. Compliant pin probes with multiple spring segments and compression spring deflection stabilization structures, methods for making, and methods for using
US11774467B1 (en) 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3891924A (en) * 1973-09-10 1975-06-24 Probe Rite Inc Adjustable multi-point probe head assembly
US4220389A (en) * 1979-08-13 1980-09-02 E. I. Du Pont De Nemours And Company Circuit card connector
JPS5669568A (en) * 1979-11-12 1981-06-10 Advantest Corp Movable contact piece driving mechansim
US4615573A (en) 1983-10-28 1986-10-07 Honeywell Inc. Spring finger interconnect for IC chip carrier
US6043563A (en) * 1997-05-06 2000-03-28 Formfactor, Inc. Electronic components with terminals and spring contact elements extending from areas which are remote from the terminals
US4811246A (en) * 1986-03-10 1989-03-07 Fitzgerald Jr William M Micropositionable piezoelectric contactor
JPS6447090A (en) 1987-08-18 1989-02-21 Seiko Epson Corp Circuit board
US4976629A (en) * 1989-10-04 1990-12-11 Teledyne Kinetics Zero insertion force dual in-line LCD connector
US4965865A (en) * 1989-10-11 1990-10-23 General Signal Corporation Probe card for integrated circuit chip
US5216631A (en) * 1990-11-02 1993-06-01 Sliwa Jr John W Microvibratory memory device
JPH04214650A (en) * 1990-12-12 1992-08-05 Nec Kyushu Ltd Contact for autohandler use
JPH07109780B2 (en) 1991-02-19 1995-11-22 山一電機株式会社 Contacts in sockets for electrical components
US5177438A (en) * 1991-08-02 1993-01-05 Motorola, Inc. Low resistance probe for semiconductor
JP3028875B2 (en) 1992-01-18 2000-04-04 ソニー株式会社 Lead frame manufacturing method
US5228866A (en) * 1992-07-06 1993-07-20 Wells Electronics, Inc. Socket for integrated circuit carrier
US5811982A (en) 1995-11-27 1998-09-22 International Business Machines Corporation High density cantilevered probe for electronic devices
JPH0721968A (en) 1993-07-06 1995-01-24 Canon Inc Cantilever type displacement element, cantilever type probe using the displacement element, and scanning type probe microscope and data processer using the probe
JPH0763999A (en) 1993-08-27 1995-03-10 Canon Inc Electrostatic actuator, actuator array, optical deflector and information processor provide with the electrostatic actuator
US5983492A (en) * 1996-11-27 1999-11-16 Tessera, Inc. Low profile socket for microelectronic components and method for making the same
US5476818A (en) 1994-08-19 1995-12-19 Motorola, Inc. Semiconductor structure and method of manufacture
US5513430A (en) 1994-08-19 1996-05-07 Motorola, Inc. Method for manufacturing a probe
US5613861A (en) 1995-06-07 1997-03-25 Xerox Corporation Photolithographically patterned spring contact
JP3611637B2 (en) * 1995-07-07 2005-01-19 ヒューレット・パッカード・カンパニー Electrical connection structure of circuit members
US5810609A (en) 1995-08-28 1998-09-22 Tessera, Inc. Socket for engaging bump leads on a microelectronic device and methods therefor
JP3838381B2 (en) * 1995-11-22 2006-10-25 株式会社アドバンテスト Probe card
US5994152A (en) 1996-02-21 1999-11-30 Formfactor, Inc. Fabricating interconnects and tips using sacrificial substrates
AU3073797A (en) 1996-05-17 1997-12-05 Formfactor, Inc. Wafer-level burn-in and test
EP0839322B1 (en) 1996-05-17 2005-08-10 Formfactor, Inc. Microelectronic contact structure and method of making same
US7063541B2 (en) * 1997-03-17 2006-06-20 Formfactor, Inc. Composite microelectronic spring structure and method for making same
US6149443A (en) * 1997-09-26 2000-11-21 Qualcomm Incorporated Ground connection apparatus
US6014032A (en) 1997-09-30 2000-01-11 International Business Machines Corporation Micro probe ring assembly and method of fabrication
JP3123483B2 (en) 1997-10-28 2001-01-09 日本電気株式会社 Probe card and probe card forming method
US5944537A (en) 1997-12-15 1999-08-31 Xerox Corporation Photolithographically patterned spring contact and apparatus and methods for electrically contacting devices
US6344752B1 (en) * 1998-08-12 2002-02-05 Tokyo Electron Limited Contactor and production method for contractor
US6184576B1 (en) 1998-09-21 2001-02-06 Advantest Corp. Packaging and interconnection of contact structure

Also Published As

Publication number Publication date
TW593123B (en) 2004-06-21
WO2002084736A8 (en) 2002-11-21
US6811406B2 (en) 2004-11-02
WO2002084736A1 (en) 2002-10-24
AU2002256325A1 (en) 2002-10-28
US20020151194A1 (en) 2002-10-17

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