WO2002090245A3 - Methods of forming microstructure devices - Google Patents

Methods of forming microstructure devices Download PDF

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Publication number
WO2002090245A3
WO2002090245A3 PCT/US2002/014142 US0214142W WO02090245A3 WO 2002090245 A3 WO2002090245 A3 WO 2002090245A3 US 0214142 W US0214142 W US 0214142W WO 02090245 A3 WO02090245 A3 WO 02090245A3
Authority
WO
WIPO (PCT)
Prior art keywords
methods
microstructure devices
forming microstructure
materials
forming
Prior art date
Application number
PCT/US2002/014142
Other languages
French (fr)
Other versions
WO2002090245A2 (en
Inventor
Toi Yue Becky Leung
Jeffrey D Chinn
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2002090245A2 publication Critical patent/WO2002090245A2/en
Publication of WO2002090245A3 publication Critical patent/WO2002090245A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0005—Anti-stiction coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0176—Chemical vapour Deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Abstract

The invention includes methods of forming microstructure devices. In an exemplary method, a substrate is provided which includes a first material and a second material. At least one of the first and second materials is exposed to vapor-phase alkylsilane-containing molecules to form a coating over the at least one of the first and second materials.
PCT/US2002/014142 2001-05-07 2002-05-01 Methods of forming microstructure devices WO2002090245A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/850,923 2001-05-07
US09/850,923 US6576489B2 (en) 2001-05-07 2001-05-07 Methods of forming microstructure devices

Publications (2)

Publication Number Publication Date
WO2002090245A2 WO2002090245A2 (en) 2002-11-14
WO2002090245A3 true WO2002090245A3 (en) 2003-09-25

Family

ID=25309455

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/014142 WO2002090245A2 (en) 2001-05-07 2002-05-01 Methods of forming microstructure devices

Country Status (3)

Country Link
US (2) US6576489B2 (en)
TW (1) TW546833B (en)
WO (1) WO2002090245A2 (en)

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Also Published As

Publication number Publication date
US20030166342A1 (en) 2003-09-04
US20020164879A1 (en) 2002-11-07
US6830950B2 (en) 2004-12-14
WO2002090245A2 (en) 2002-11-14
TW546833B (en) 2003-08-11
US6576489B2 (en) 2003-06-10

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