WO2003010565A3 - Optical waveguides and grating structures fabricated using polymeric dielectric compositions - Google Patents

Optical waveguides and grating structures fabricated using polymeric dielectric compositions Download PDF

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Publication number
WO2003010565A3
WO2003010565A3 PCT/US2002/023740 US0223740W WO03010565A3 WO 2003010565 A3 WO2003010565 A3 WO 2003010565A3 US 0223740 W US0223740 W US 0223740W WO 03010565 A3 WO03010565 A3 WO 03010565A3
Authority
WO
WIPO (PCT)
Prior art keywords
gratings
optical waveguides
optical
polymeric dielectric
grating structures
Prior art date
Application number
PCT/US2002/023740
Other languages
French (fr)
Other versions
WO2003010565A2 (en
Inventor
Jeffrey M Catchmark
Guy P Lavallee
Original Assignee
Penn State Res Found
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Penn State Res Found filed Critical Penn State Res Found
Priority to AU2002317579A priority Critical patent/AU2002317579A1/en
Publication of WO2003010565A2 publication Critical patent/WO2003010565A2/en
Publication of WO2003010565A3 publication Critical patent/WO2003010565A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material
    • G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating

Abstract

Using polymeric dielectric materials (preferably materials derived from bisbenzocyclobutene monomers) and an electron beam lithography process for patterning this material, we have developed a process for fabricating optical waveguides with complex integrated devices such as gratings. Such gratings are not limited to one-dimensional type gratings but can include 2 dimensional gratings such as curved gratings or photonic crystals. Due to the properties of BCB, this process could also be implemented using optical photolithography depending upon the waveguide dimensions desired and the grating dimensions desired. Alternatively, the optical waveguide could be patterned using optical lithography and the grating can be patterned using electron beam lithography.
PCT/US2002/023740 2001-07-26 2002-07-26 Optical waveguides and grating structures fabricated using polymeric dielectric compositions WO2003010565A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002317579A AU2002317579A1 (en) 2001-07-26 2002-07-26 Optical waveguides and grating structures fabricated using polymeric dielectric compositions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30790801P 2001-07-26 2001-07-26
US60/307,908 2001-07-26

Publications (2)

Publication Number Publication Date
WO2003010565A2 WO2003010565A2 (en) 2003-02-06
WO2003010565A3 true WO2003010565A3 (en) 2003-06-05

Family

ID=23191684

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/023740 WO2003010565A2 (en) 2001-07-26 2002-07-26 Optical waveguides and grating structures fabricated using polymeric dielectric compositions

Country Status (3)

Country Link
US (2) US6826333B2 (en)
AU (1) AU2002317579A1 (en)
WO (1) WO2003010565A2 (en)

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AU2002317579A1 (en) * 2001-07-26 2003-02-17 The Penn State Research Foundation Optical waveguides and grating structures fabricated using polymeric dielectric compositions
US6780567B2 (en) * 2001-08-02 2004-08-24 Fuji Photo Film Co., Ltd. Lithographic process using reaction of o-quinodimethane
US7110624B2 (en) * 2001-12-14 2006-09-19 Evans & Sutherland Computer Corporation Fiber optic mechanical/thermal tuner and isolator
JP2003195234A (en) * 2001-12-27 2003-07-09 Mitsubishi Electric Corp Variable dispersion compensator and substrate for the variable dispersion compensator
US6782164B1 (en) * 2002-01-31 2004-08-24 Intel Corporation Thermally wavelength tunable laser having selectively activated gratings
WO2003071587A1 (en) * 2002-02-15 2003-08-28 University Of Delaware Process for making photonic crystal circuits using an electron beam and ultraviolet lithography combination
US7006719B2 (en) * 2002-03-08 2006-02-28 Infinera Corporation In-wafer testing of integrated optical components in photonic integrated circuits (PICs)
US20050087877A1 (en) * 2003-10-22 2005-04-28 Dong-Ho Han Differential signal traces coupled with high permittivity material
KR100626656B1 (en) * 2005-05-04 2006-09-25 한국전자통신연구원 Optical transmitter module for optical line terminal in wdm-pon network and method for manufacturing the same
KR100637928B1 (en) * 2004-10-13 2006-10-24 한국전자통신연구원 Tunable wavelength optical transmission module
JP5459929B2 (en) 2005-11-14 2014-04-02 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． Silicon-containing polymer and optical waveguide formed from the polymer
US7891818B2 (en) 2006-12-12 2011-02-22 Evans & Sutherland Computer Corporation System and method for aligning RGB light in a single modulator projector
US8094023B1 (en) * 2008-03-10 2012-01-10 Sandia Corporation Phononic crystal devices
US8358317B2 (en) 2008-05-23 2013-01-22 Evans & Sutherland Computer Corporation System and method for displaying a planar image on a curved surface
US8702248B1 (en) 2008-06-11 2014-04-22 Evans & Sutherland Computer Corporation Projection method for reducing interpixel gaps on a viewing surface
US8077378B1 (en) 2008-11-12 2011-12-13 Evans & Sutherland Computer Corporation Calibration system and method for light modulation device
WO2010126493A1 (en) * 2009-04-28 2010-11-04 Hewlett-Packard Development Company, L.P. Holographic mirror for optical interconnect signal routing
US8111724B2 (en) 2009-07-07 2012-02-07 International Business Machines Corporation Temperature control device for optoelectronic devices
EP3567416A1 (en) * 2009-10-12 2019-11-13 The Trustees of Columbia University in the City of New York Photonic crystal spectrometer
US8625941B1 (en) * 2010-05-20 2014-01-07 Western Digital (Fremont), Llc Broadband reflective waveguide metal gratings and their formation
US9641826B1 (en) 2011-10-06 2017-05-02 Evans & Sutherland Computer Corporation System and method for displaying distant 3-D stereo on a dome surface
US9336814B1 (en) 2013-03-12 2016-05-10 Western Digital (Fremont), Llc Inverse tapered waveguide for use in a heat assisted magnetic recording head
US8947985B1 (en) 2013-07-16 2015-02-03 Western Digital (Fremont), Llc Heat assisted magnetic recording transducers having a recessed pole
CN103633558B (en) * 2013-12-20 2016-04-20 武汉光迅科技股份有限公司 Adopt the wideband adjustable outside cavity gas laser of small-sized MEMS mirror
US9998252B2 (en) * 2014-02-21 2018-06-12 Dicon Fiberoptics, Inc. Apparatus and manufacturing method for an integrated multicast switch, for use in reconfigurable optical add-drop networks
US9142233B1 (en) 2014-02-28 2015-09-22 Western Digital (Fremont), Llc Heat assisted magnetic recording writer having a recessed pole
US9190085B1 (en) 2014-03-12 2015-11-17 Western Digital (Fremont), Llc Waveguide with reflective grating for localized energy intensity
US10315371B2 (en) 2016-07-28 2019-06-11 Microsoft Technology Licensing, Llc Multiphase optical grating
US10720338B1 (en) 2017-11-07 2020-07-21 Honeywell Federal Manufacturing & Technologies, Llc Low temperature cofired ceramic substrates and fabrication techniques for the same
US20220002474A1 (en) * 2020-07-02 2022-01-06 Rohm And Haas Electronic Materials Llc Bisbenzocyclobutene formulations

Citations (3)

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Publication number Priority date Publication date Assignee Title
US4812588A (en) * 1987-12-14 1989-03-14 The Dow Chemical Company Polyorganosiloxane-bridged bisbenzocyclobutene monomers
US6083661A (en) * 1991-12-10 2000-07-04 The Dow Chemical Company Photodefineable cyclobutarene compositions
US6421472B1 (en) * 2000-04-14 2002-07-16 Corning Incorporated Athermalized polymer overclad integrated planar optical waveguide device and method

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AU2002317579A1 (en) * 2001-07-26 2003-02-17 The Penn State Research Foundation Optical waveguides and grating structures fabricated using polymeric dielectric compositions
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US6421472B1 (en) * 2000-04-14 2002-07-16 Corning Incorporated Athermalized polymer overclad integrated planar optical waveguide device and method

Also Published As

Publication number Publication date
AU2002317579A1 (en) 2003-02-17
US6985663B2 (en) 2006-01-10
US20030039443A1 (en) 2003-02-27
US20050117843A1 (en) 2005-06-02
WO2003010565A2 (en) 2003-02-06
US6826333B2 (en) 2004-11-30

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