WO2003025244B1 - Refurbishing spent sputtering targets - Google Patents

Refurbishing spent sputtering targets

Info

Publication number
WO2003025244B1
WO2003025244B1 PCT/US2002/029246 US0229246W WO03025244B1 WO 2003025244 B1 WO2003025244 B1 WO 2003025244B1 US 0229246 W US0229246 W US 0229246W WO 03025244 B1 WO03025244 B1 WO 03025244B1
Authority
WO
WIPO (PCT)
Prior art keywords
metal
sputter target
sputter
new
erosion groove
Prior art date
Application number
PCT/US2002/029246
Other languages
French (fr)
Other versions
WO2003025244A2 (en
WO2003025244A3 (en
Inventor
Michael Sandlin
Original Assignee
Heraeus Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Inc filed Critical Heraeus Inc
Priority to KR1020047003873A priority Critical patent/KR100617402B1/en
Priority to JP2003530013A priority patent/JP2005508444A/en
Priority to AU2002333640A priority patent/AU2002333640A1/en
Publication of WO2003025244A2 publication Critical patent/WO2003025244A2/en
Publication of WO2003025244A3 publication Critical patent/WO2003025244A3/en
Publication of WO2003025244B1 publication Critical patent/WO2003025244B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • B22F2007/068—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts repairing articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps

Abstract

Spent sputtering targets are refurbished by filling the depleted (2) region of the target (1) with new sputter material using a hot isostatic pressing or HIP'ing technique.

Claims

[received by the International Bureau on 12 Octo er 2004 ( 12 , 10.04 original claims 2, 5, and 10 amended original claim 1 cancelled; original claims 11 to 14 new, other claims 6-9 remain unchanged (2 pages)]
2. A refurbished sputter target comprising a support structure having an erosion groove, said erosion groove filled with new sputter material that is diffusion bonded to said support structure, wherein said support structure is a material selected from the group consisting of a CoCrPtB alloy, a NiAl alloy, a CoCr alloy, Al, and W.
3. A refurbished sputter target comprising a support structure having an erosion groove, said erosion groove filled with new sputter material that is diffusion bonded to said support structure, wherein said new sputter material contains platinum and a magnetic material.
4. A refurbished sputter target comprising a support structure having an erosion groove, said erosion groove filled with new sputter material that is diffusion bonded to said support structure.
5. A method of refurbishing a sputter target comprising the steps of:
(a) blending a powder of metal alloys to form a blend of metal alloy powders to produce a new sputter material,
(b) adding said metal alloy powders to a metal can to form a powdered layer,
(c) placing a spent sputter target having an erosion groove on said powdered layer,
(d) covering said spent sputter target with said metal alloy powders to form a second powdered layer,
(e) sealing said metal can, and
(f) subjecting said metal can to pressure and heat to consolidate and diffuse said metal alloy powders into and fill said erosion groove and form said new sputter material in said erosion groove.
6. The method of Claim 5, wherein said support structure is a material selected from the group consisting of a CoCrPtB alloy, Cu, stainless steel, a NiAl alloy, a CoCr alloy, Al W and Mo.
7. The method of Claim 5, wherein said new sputter material contains platinum and a magnetic material.
8. The method of Claim 5, wherein said new sputter target material contains a metal selected from a group consisting of Pt, Ru, Pd, Re, Rh, Au and Ag.
• 9. The method of Claim 5 wherein said method repeats steps (c) and (d) to add one or more additional spent metal targets to be refurbished.
10. The method of Claim 5, wherein said method further includes the steps of sawing and machining the product of step (f) to form a refurbished sputter target.
10 AMENDED SHEET ARTfCLE 19
11. A process for refurbishing a sputter target, comprising the steps of: blending a powder of metal alloys to form a blend of metal alloy powders to produce a new sputter material; adding said metal alloy powders to a metal can to form a powdered layer; placing at least a first spent sputter target having an erosion groove on the powdered layer; covering the first spent sputter target with the metal alloy powders to form an additional powdered layer; sealing the metal can; subjecting the metal can to pressure and heat to consolidate and diffuse the metal alloy powders into and fill the erosion groove, and form a solid metallic cylinder; and machining the solid metallic cylinder to form a refurbished sputter target.
12. A process for refurbishing a sputter target according to Claim 11, wherein the new sputter material contains platinum and a magnetic material.
13. A process for refurbishing a sputter target according to Claim 11, wherein the new sputter target material contains a metal selected from a group consisting of Pt, Ru, Pd, Re, Rh, Au and Ag.
14. A refurbished sputter target prepared by a process comprising the steps of: blending a powder of metal alloys to form a blend of metal alloy powders to produce a new sputter material; adding said metal alloy powders to a metal can to form a powdered layer; placing at least a first spent sputter target having an erosion groove on the powdered layer; covering the first spent sputter target with the metal alloy powders to form an additional powdered layer; sealing the metal can; subjecting the metal can to pressure and heat to consolidate and diffuse the metal alloy powders into and fill the erosion groove, and form a solid metallic cylinder; and machining the solid metallic cylinder to form a refurbished sputter target, wherein the first spent sputter target is comprised of a material selected from the group consisting of a CoCrPtB alloy, Cu, stainless steel, a NiAl alloy, a CoCr alloy, and Al W.
ORC 348230-1.050346.0088
11
PCT/US2002/029246 2001-09-17 2002-09-16 Refurbishing spent sputtering targets WO2003025244A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020047003873A KR100617402B1 (en) 2001-09-17 2002-09-16 Refurbishing spent sputtering targets
JP2003530013A JP2005508444A (en) 2001-09-17 2002-09-16 Recycling of used sputter targets
AU2002333640A AU2002333640A1 (en) 2001-09-17 2002-09-16 Refurbishing spent sputtering targets

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32242901P 2001-09-17 2001-09-17
US60/322,429 2001-09-17

Publications (3)

Publication Number Publication Date
WO2003025244A2 WO2003025244A2 (en) 2003-03-27
WO2003025244A3 WO2003025244A3 (en) 2004-10-14
WO2003025244B1 true WO2003025244B1 (en) 2004-12-29

Family

ID=23254840

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/029246 WO2003025244A2 (en) 2001-09-17 2002-09-16 Refurbishing spent sputtering targets

Country Status (6)

Country Link
US (1) US7175802B2 (en)
JP (1) JP2005508444A (en)
KR (1) KR100617402B1 (en)
CN (1) CN1608141A (en)
AU (1) AU2002333640A1 (en)
WO (1) WO2003025244A2 (en)

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Also Published As

Publication number Publication date
US20030077199A1 (en) 2003-04-24
KR100617402B1 (en) 2006-09-01
WO2003025244A2 (en) 2003-03-27
KR20040044935A (en) 2004-05-31
WO2003025244A3 (en) 2004-10-14
US7175802B2 (en) 2007-02-13
CN1608141A (en) 2005-04-20
JP2005508444A (en) 2005-03-31
AU2002333640A1 (en) 2003-04-01

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