WO2003025656A1 - Digital control scanning method and apparatus - Google Patents

Digital control scanning method and apparatus Download PDF

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Publication number
WO2003025656A1
WO2003025656A1 PCT/JP2001/007598 JP0107598W WO03025656A1 WO 2003025656 A1 WO2003025656 A1 WO 2003025656A1 JP 0107598 W JP0107598 W JP 0107598W WO 03025656 A1 WO03025656 A1 WO 03025656A1
Authority
WO
WIPO (PCT)
Prior art keywords
micro
point
real image
light source
light
Prior art date
Application number
PCT/JP2001/007598
Other languages
French (fr)
Japanese (ja)
Inventor
Tohoru Hayashi
Toru Yamada
Shozo Ishizaka
Original Assignee
Kabushiki Kaisha Hayashi Soken
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Hayashi Soken filed Critical Kabushiki Kaisha Hayashi Soken
Priority to PCT/JP2001/007598 priority Critical patent/WO2003025656A1/en
Priority to JP2003529228A priority patent/JP3634343B2/en
Publication of WO2003025656A1 publication Critical patent/WO2003025656A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

By using a micro light beam deflecting device (DMD) (4) which has a plurality of two-dimensionally arranged micro mirrors inclanable with digital signals, the inclination of each micro mirror on the DMD (4) is scanned, the real image of a light source (a point light source, surface a light source) is formed on the micro mirrors, the real image is formed by an objective lens (2) to illuminate a point or a micro area in the space of a sample (1). The real image of a fluorescent light or a scattered light from the point or micro area is formed by the scanning by the objective lens (2) on the inclined micro mirrors and picked up by a charge coupled device (CCD) (5).
PCT/JP2001/007598 2001-09-03 2001-09-03 Digital control scanning method and apparatus WO2003025656A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2001/007598 WO2003025656A1 (en) 2001-09-03 2001-09-03 Digital control scanning method and apparatus
JP2003529228A JP3634343B2 (en) 2001-09-03 2001-09-03 Digitally controlled scanning method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2001/007598 WO2003025656A1 (en) 2001-09-03 2001-09-03 Digital control scanning method and apparatus

Publications (1)

Publication Number Publication Date
WO2003025656A1 true WO2003025656A1 (en) 2003-03-27

Family

ID=11737693

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2001/007598 WO2003025656A1 (en) 2001-09-03 2001-09-03 Digital control scanning method and apparatus

Country Status (2)

Country Link
JP (1) JP3634343B2 (en)
WO (1) WO2003025656A1 (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005024596A (en) * 2003-06-30 2005-01-27 Susumu Terakawa Confocal scanning microscope
JP2005148296A (en) * 2003-11-13 2005-06-09 Olympus Corp Light source apparatus of microscope
JP2005275206A (en) * 2004-03-26 2005-10-06 Olympus Corp Optical scan type observation device
JP2006003747A (en) * 2004-06-18 2006-01-05 Olympus Corp Optical scanning type observation apparatus
JP2006017706A (en) * 2005-06-14 2006-01-19 Hayashi Soken:Kk Biochip on-line analytical system
JP2006133499A (en) * 2004-11-05 2006-05-25 Shimadzu Corp Confocal scanner and confocal microscope
JP2006154126A (en) * 2004-11-26 2006-06-15 Cmet Inc Optical beam control device and beam lithographic apparatus
WO2006104184A1 (en) * 2005-03-29 2006-10-05 National University Corporation, Hamamatsu University School Of Medicine Dlp type slit scanning microscope
JP2008164841A (en) * 2006-12-27 2008-07-17 Olympus Corp Confocal laser scanning type microscope
JP2009244319A (en) * 2008-03-28 2009-10-22 V Technology Co Ltd Method of forming pattern and pattern formation apparatus
JP2010044272A (en) * 2008-08-14 2010-02-25 Omron Corp Laser radiation device
JP2012256062A (en) * 2012-08-02 2012-12-27 Omron Corp Laser irradiation device
CN104040322A (en) * 2011-12-06 2014-09-10 Ccs株式会社 Lighting Device For Inspection And Lighting Method For Inspection
JP2016188923A (en) * 2015-03-30 2016-11-04 ウシオ電機株式会社 Exposure apparatus and exposure method
CN107121422A (en) * 2017-06-21 2017-09-01 中国科学院苏州生物医学工程技术研究所 A kind of parallel confocal microscopic imaging device and method based on digital micromirror array
WO2019159933A1 (en) * 2018-02-19 2019-08-22 京セラ株式会社 Electromagnetic wave detection device and information acquisition system
JP2019144219A (en) * 2018-02-19 2019-08-29 京セラ株式会社 Electromagnetic wave detection device and information acquisition system
JP2021503096A (en) * 2017-10-02 2021-02-04 ナノトロニクス イメージング インコーポレイテッドＮａｎｏｔｒｏｎｉｃｓ Ｉｍａｇｉｎｇ，Ｉｎｃ． Devices and methods for reducing vignetting in microscopic imaging

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2315065B1 (en) 2009-10-26 2015-05-13 Olympus Corporation Microscope
US9081176B2 (en) 2010-04-05 2015-07-14 Osaka University Observation system and observation method

Citations (5)

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Publication number Priority date Publication date Assignee Title
US5587832A (en) * 1993-10-20 1996-12-24 Biophysica Technologies, Inc. Spatially light modulated confocal microscope and method
EP0911667A1 (en) * 1997-10-22 1999-04-28 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Programmable spatially light modulated microscope and microscopy method
EP0916981A1 (en) * 1997-11-17 1999-05-19 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Confocal spectroscopy system and method
US5923466A (en) * 1993-10-20 1999-07-13 Biophysica Technologies, Inc. Light modulated confocal optical instruments and method
US6144489A (en) * 1996-02-22 2000-11-07 Isis Innovation Limited Confocal microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587832A (en) * 1993-10-20 1996-12-24 Biophysica Technologies, Inc. Spatially light modulated confocal microscope and method
US5923466A (en) * 1993-10-20 1999-07-13 Biophysica Technologies, Inc. Light modulated confocal optical instruments and method
US6144489A (en) * 1996-02-22 2000-11-07 Isis Innovation Limited Confocal microscope
EP0911667A1 (en) * 1997-10-22 1999-04-28 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Programmable spatially light modulated microscope and microscopy method
EP0916981A1 (en) * 1997-11-17 1999-05-19 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Confocal spectroscopy system and method

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005024596A (en) * 2003-06-30 2005-01-27 Susumu Terakawa Confocal scanning microscope
JP2005148296A (en) * 2003-11-13 2005-06-09 Olympus Corp Light source apparatus of microscope
JP2005275206A (en) * 2004-03-26 2005-10-06 Olympus Corp Optical scan type observation device
JP4593141B2 (en) * 2004-03-26 2010-12-08 オリンパス株式会社 Optical scanning observation device
JP2006003747A (en) * 2004-06-18 2006-01-05 Olympus Corp Optical scanning type observation apparatus
JP2006133499A (en) * 2004-11-05 2006-05-25 Shimadzu Corp Confocal scanner and confocal microscope
JP4499538B2 (en) * 2004-11-26 2010-07-07 シーメット株式会社 Light beam control apparatus and stereolithography apparatus
JP2006154126A (en) * 2004-11-26 2006-06-15 Cmet Inc Optical beam control device and beam lithographic apparatus
WO2006104184A1 (en) * 2005-03-29 2006-10-05 National University Corporation, Hamamatsu University School Of Medicine Dlp type slit scanning microscope
JP2006276377A (en) * 2005-03-29 2006-10-12 Hamamatsu Univ School Of Medicine Dlp type slit optical scanning microscope
JP4538633B2 (en) * 2005-03-29 2010-09-08 国立大学法人浜松医科大学 DLP slit optical scanning microscope
JP2006017706A (en) * 2005-06-14 2006-01-19 Hayashi Soken:Kk Biochip on-line analytical system
JP2008164841A (en) * 2006-12-27 2008-07-17 Olympus Corp Confocal laser scanning type microscope
JP2009244319A (en) * 2008-03-28 2009-10-22 V Technology Co Ltd Method of forming pattern and pattern formation apparatus
JP2010044272A (en) * 2008-08-14 2010-02-25 Omron Corp Laser radiation device
US9494422B2 (en) 2011-12-06 2016-11-15 Ccs Inc. Lighting device for inspection and lighting method for inspection
CN104040322A (en) * 2011-12-06 2014-09-10 Ccs株式会社 Lighting Device For Inspection And Lighting Method For Inspection
JP2012256062A (en) * 2012-08-02 2012-12-27 Omron Corp Laser irradiation device
JP2016188923A (en) * 2015-03-30 2016-11-04 ウシオ電機株式会社 Exposure apparatus and exposure method
CN107121422A (en) * 2017-06-21 2017-09-01 中国科学院苏州生物医学工程技术研究所 A kind of parallel confocal microscopic imaging device and method based on digital micromirror array
JP2021503096A (en) * 2017-10-02 2021-02-04 ナノトロニクス イメージング インコーポレイテッドＮａｎｏｔｒｏｎｉｃｓ Ｉｍａｇｉｎｇ，Ｉｎｃ． Devices and methods for reducing vignetting in microscopic imaging
JP7054266B2 (en) 2017-10-02 2022-04-13 ナノトロニクス イメージング インコーポレイテッド Devices and methods for reducing vignetting in microscopic imaging
JP2022084859A (en) * 2017-10-02 2022-06-07 ナノトロニクス イメージング インコーポレイテッド Apparatus and method for reducing vignetting in microscopic imaging
US11880028B2 (en) 2017-10-02 2024-01-23 Nanotronics Imaging, Inc. Apparatus and method to reduce vignetting in microscopic imaging
JP7427266B2 (en) 2017-10-02 2024-02-05 ナノトロニクス イメージング インコーポレイテッド Apparatus and method for reducing vignetting in microscopic imaging
WO2019159933A1 (en) * 2018-02-19 2019-08-22 京セラ株式会社 Electromagnetic wave detection device and information acquisition system
JP2019144219A (en) * 2018-02-19 2019-08-29 京セラ株式会社 Electromagnetic wave detection device and information acquisition system
JP7260966B2 (en) 2018-02-19 2023-04-19 京セラ株式会社 Electromagnetic wave detector

Also Published As

Publication number Publication date
JP3634343B2 (en) 2005-03-30
JPWO2003025656A1 (en) 2004-12-24

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