WO2003036246A3 - An electrostatic pressure transducer and a method thereof - Google Patents

An electrostatic pressure transducer and a method thereof Download PDF

Info

Publication number
WO2003036246A3
WO2003036246A3 PCT/US2002/034454 US0234454W WO03036246A3 WO 2003036246 A3 WO2003036246 A3 WO 2003036246A3 US 0234454 W US0234454 W US 0234454W WO 03036246 A3 WO03036246 A3 WO 03036246A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
pair
pressure transducer
chamber
housing
Prior art date
Application number
PCT/US2002/034454
Other languages
French (fr)
Other versions
WO2003036246A2 (en
Inventor
Michael D Potter
Alexander E Martens
Original Assignee
Michael D Potter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Michael D Potter filed Critical Michael D Potter
Priority to AU2002353900A priority Critical patent/AU2002353900A1/en
Publication of WO2003036246A2 publication Critical patent/WO2003036246A2/en
Publication of WO2003036246A3 publication Critical patent/WO2003036246A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Abstract

A pressure transducer system includes a housing (12) with a chamber (14), a member (20(1)) with a stored electrical charge, and a pair of electrodes (22, 24(1)) that are at least partially in alignment with each other. At least a portion of the chamber (14) is at a reference pressure. The member (20(1)) is connected to the housing (12) and extends across at least a portion of the chamber (14). Each pair of electrodes (22, 24(l)) is connected to the housing (12) and is spaced from and on substantially opposing sides of the member (20(1)). The member (20(1)) is movable with respect to the pair of electrodes (22, 24(1)) or one of the pair of electrodes is movable with respect to the member (20(1)) in response to a monitored pressure.
PCT/US2002/034454 2001-10-26 2002-10-25 An electrostatic pressure transducer and a method thereof WO2003036246A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002353900A AU2002353900A1 (en) 2001-10-26 2002-10-25 An electrostatic pressure transducer and a method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33677101P 2001-10-26 2001-10-26
US60/336,771 2001-10-26

Publications (2)

Publication Number Publication Date
WO2003036246A2 WO2003036246A2 (en) 2003-05-01
WO2003036246A3 true WO2003036246A3 (en) 2003-07-03

Family

ID=23317583

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/034454 WO2003036246A2 (en) 2001-10-26 2002-10-25 An electrostatic pressure transducer and a method thereof

Country Status (3)

Country Link
US (1) US6688179B2 (en)
AU (1) AU2002353900A1 (en)
WO (1) WO2003036246A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7280014B2 (en) * 2001-03-13 2007-10-09 Rochester Institute Of Technology Micro-electro-mechanical switch and a method of using and making thereof
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) * 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
WO2005089046A2 (en) * 2004-03-17 2005-09-29 Heckerman Donald A Flat screen display stand
WO2006074417A2 (en) 2005-01-07 2006-07-13 Intellisensing Llc Wireless fluid pressure sensor
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
GB0605576D0 (en) * 2006-03-20 2006-04-26 Oligon Ltd MEMS device
US8968345B2 (en) * 2008-03-24 2015-03-03 Covidien Lp Surgical introducer with indicators
JP5506244B2 (en) * 2009-05-27 2014-05-28 キヤノン株式会社 Capacitive electromechanical transducer
EP2644824A1 (en) * 2012-03-28 2013-10-02 Siemens Aktiengesellschaft Method for producing and restoring of ceramic thermal barrier coatings in gas turbines and related gas turbine
DE112013004855T5 (en) * 2012-10-02 2015-07-23 Ando Feyh Capacitive pressure sensor and method
WO2014070930A2 (en) * 2012-11-01 2014-05-08 Robert Bosch Gmbh Surface charge mitigation layer for mems sensors
KR20170069806A (en) * 2015-12-11 2017-06-21 현대자동차주식회사 Manufacturing method of micro electro mechanical system sensor
CN106092384A (en) * 2016-06-06 2016-11-09 中国科学院深圳先进技术研究院 Capacitance type pressure sensor and preparation method thereof
US10616690B2 (en) * 2016-08-22 2020-04-07 Goertek Inc. Capacitive MEMS microphone and electronic apparatus
WO2018048713A1 (en) 2016-09-06 2018-03-15 Becsis, Llc Electrostatic catalysis
US10879027B2 (en) 2017-03-06 2020-12-29 Becsis, Llc High energy X-ray generation without the use of a high voltage power supply

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349492A (en) * 1991-12-26 1994-09-20 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor
US5365790A (en) * 1992-04-02 1994-11-22 Motorola, Inc. Device with bonded conductive and insulating substrates and method therefore
US6324914B1 (en) * 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US6470754B1 (en) * 1998-08-19 2002-10-29 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5220851B1 (en) 1969-12-11 1977-06-07
US4160882A (en) 1978-03-13 1979-07-10 Driver Michael L Double diaphragm electrostatic transducer each diaphragm comprising two plastic sheets having different charge carrying characteristics
US5054081B1 (en) 1985-04-02 1994-06-28 Roger A West Electrostatic transducer with improved bass response utilizing distributed bass resonance energy
JP2804196B2 (en) * 1991-10-18 1998-09-24 株式会社日立製作所 Microsensor and control system using the same
DE19743749A1 (en) * 1996-10-03 1998-04-09 Hitachi Ltd Semiconductor pressure sensor for absolute pressure measurement
US6496348B2 (en) * 1998-03-10 2002-12-17 Mcintosh Robert B. Method to force-balance capacitive transducers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349492A (en) * 1991-12-26 1994-09-20 Yamatake-Honeywell Co., Ltd. Capacitive pressure sensor
US5365790A (en) * 1992-04-02 1994-11-22 Motorola, Inc. Device with bonded conductive and insulating substrates and method therefore
US6324914B1 (en) * 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US6470754B1 (en) * 1998-08-19 2002-10-29 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors

Also Published As

Publication number Publication date
WO2003036246A2 (en) 2003-05-01
AU2002353900A1 (en) 2003-05-06
US20030079548A1 (en) 2003-05-01
US6688179B2 (en) 2004-02-10

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