WO2003046510A3 - A shadow-creating apparatus - Google Patents
A shadow-creating apparatus Download PDFInfo
- Publication number
- WO2003046510A3 WO2003046510A3 PCT/US2002/036619 US0236619W WO03046510A3 WO 2003046510 A3 WO2003046510 A3 WO 2003046510A3 US 0236619 W US0236619 W US 0236619W WO 03046510 A3 WO03046510 A3 WO 03046510A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chip
- shadow
- side walls
- spaced
- cavity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002346400A AU2002346400A1 (en) | 2001-11-27 | 2002-11-14 | A shadow-creating apparatus |
DE10297486T DE10297486T5 (en) | 2001-11-27 | 2002-11-14 | Shadow generation device |
KR10-2004-7005779A KR20040062572A (en) | 2001-11-27 | 2002-11-14 | A shadow-creating apparatus |
JP2003547902A JP2005523424A (en) | 2001-11-27 | 2002-11-14 | Shadow forming device |
GB0407477A GB2397172B (en) | 2001-11-27 | 2002-11-14 | A shadow-creating apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33369001P | 2001-11-27 | 2001-11-27 | |
US60/333,690 | 2001-11-27 |
Publications (4)
Publication Number | Publication Date |
---|---|
WO2003046510A2 WO2003046510A2 (en) | 2003-06-05 |
WO2003046510A3 true WO2003046510A3 (en) | 2003-11-27 |
WO2003046510A9 WO2003046510A9 (en) | 2004-03-25 |
WO2003046510B1 WO2003046510B1 (en) | 2004-04-29 |
Family
ID=23303855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/036619 WO2003046510A2 (en) | 2001-11-27 | 2002-11-14 | A shadow-creating apparatus |
Country Status (8)
Country | Link |
---|---|
JP (1) | JP2005523424A (en) |
KR (1) | KR20040062572A (en) |
CN (1) | CN1328775C (en) |
AU (1) | AU2002346400A1 (en) |
DE (1) | DE10297486T5 (en) |
GB (1) | GB2397172B (en) |
TW (1) | TW577163B (en) |
WO (1) | WO2003046510A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6730268B2 (en) * | 2015-05-26 | 2020-07-29 | 住友化学株式会社 | Clean room for polarizing plate manufacturing |
CN110379784B (en) * | 2019-07-23 | 2021-05-07 | 深圳市优一达电子有限公司 | Semiconductor packaging structure |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4312117A (en) * | 1977-09-01 | 1982-01-26 | Raytheon Company | Integrated test and assembly device |
US5088190A (en) * | 1990-08-30 | 1992-02-18 | Texas Instruments Incorporated | Method of forming an apparatus for burn in testing of integrated circuit chip |
US5123850A (en) * | 1990-04-06 | 1992-06-23 | Texas Instruments Incorporated | Non-destructive burn-in test socket for integrated circuit die |
US5543725A (en) * | 1993-08-25 | 1996-08-06 | Sunright Limited | Reusable carrier for burn-in/testing on non packaged die |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0680602B2 (en) * | 1987-11-28 | 1994-10-12 | 株式会社村田製作所 | Electronic component chip holding jig and electronic component chip handling method |
US5673799A (en) * | 1995-06-05 | 1997-10-07 | Chip Star Inc. | Machine for testing and sorting capacitor chips and method of operating same |
WO1998057361A1 (en) * | 1997-06-12 | 1998-12-17 | Nikon Corporation | Substrate for device manufacturing, process for manufacturing the substrate, and method of exposure using the substrate |
GB2349205B (en) * | 1999-04-19 | 2003-12-31 | Applied Materials Inc | Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another |
EP1283751B1 (en) * | 2000-05-23 | 2007-05-09 | Electro Scientific Industries, Inc. | Inspection machine for surface mount passive component |
-
2002
- 2002-11-12 TW TW091133095A patent/TW577163B/en not_active IP Right Cessation
- 2002-11-14 KR KR10-2004-7005779A patent/KR20040062572A/en not_active Application Discontinuation
- 2002-11-14 AU AU2002346400A patent/AU2002346400A1/en not_active Abandoned
- 2002-11-14 CN CNB028209966A patent/CN1328775C/en not_active Expired - Fee Related
- 2002-11-14 WO PCT/US2002/036619 patent/WO2003046510A2/en active Application Filing
- 2002-11-14 GB GB0407477A patent/GB2397172B/en not_active Expired - Fee Related
- 2002-11-14 JP JP2003547902A patent/JP2005523424A/en active Pending
- 2002-11-14 DE DE10297486T patent/DE10297486T5/en not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4312117A (en) * | 1977-09-01 | 1982-01-26 | Raytheon Company | Integrated test and assembly device |
US5123850A (en) * | 1990-04-06 | 1992-06-23 | Texas Instruments Incorporated | Non-destructive burn-in test socket for integrated circuit die |
US5088190A (en) * | 1990-08-30 | 1992-02-18 | Texas Instruments Incorporated | Method of forming an apparatus for burn in testing of integrated circuit chip |
US5543725A (en) * | 1993-08-25 | 1996-08-06 | Sunright Limited | Reusable carrier for burn-in/testing on non packaged die |
Also Published As
Publication number | Publication date |
---|---|
WO2003046510A2 (en) | 2003-06-05 |
AU2002346400A1 (en) | 2003-06-10 |
TW200301008A (en) | 2003-06-16 |
GB2397172B (en) | 2005-05-11 |
KR20040062572A (en) | 2004-07-07 |
GB0407477D0 (en) | 2004-05-05 |
GB2397172A (en) | 2004-07-14 |
TW577163B (en) | 2004-02-21 |
WO2003046510A9 (en) | 2004-03-25 |
CN1328775C (en) | 2007-07-25 |
DE10297486T5 (en) | 2004-12-02 |
JP2005523424A (en) | 2005-08-04 |
WO2003046510B1 (en) | 2004-04-29 |
CN1575513A (en) | 2005-02-02 |
AU2002346400A8 (en) | 2003-06-10 |
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