WO2003054910A1 - Device for treating objects by plasma deposition - Google Patents

Device for treating objects by plasma deposition Download PDF

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Publication number
WO2003054910A1
WO2003054910A1 PCT/CH2002/000698 CH0200698W WO03054910A1 WO 2003054910 A1 WO2003054910 A1 WO 2003054910A1 CH 0200698 W CH0200698 W CH 0200698W WO 03054910 A1 WO03054910 A1 WO 03054910A1
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WO
WIPO (PCT)
Prior art keywords
treatment chamber
transfer space
walls
objects
passage
Prior art date
Application number
PCT/CH2002/000698
Other languages
French (fr)
Inventor
Jean-Pierre Voigtmann
Original Assignee
Aisapack Holding Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisapack Holding Sa filed Critical Aisapack Holding Sa
Priority to EP20020782609 priority Critical patent/EP1459352A1/en
Priority to AU2002347187A priority patent/AU2002347187A1/en
Priority to CA002469863A priority patent/CA2469863A1/en
Priority to MXPA04005881A priority patent/MXPA04005881A/en
Priority to BR0215166-9A priority patent/BR0215166A/en
Priority to US10/498,906 priority patent/US20050028933A1/en
Priority to KR10-2004-7009529A priority patent/KR20040070244A/en
Priority to JP2003555540A priority patent/JP2005513269A/en
Publication of WO2003054910A1 publication Critical patent/WO2003054910A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32788—Means for moving the material to be treated for extracting the material from the process chamber

Definitions

  • the present invention relates to a device for the treatment of objects by plasma deposition.
  • the objects to be treated can for example be tube components such as skirts, shoulders or plugs.
  • It relates more specifically to an assembly consisting of a treatment chamber and a transfer space connected to the treatment chamber.
  • the object or objects to be treated passing through the transfer space prior to their introduction into the treatment chamber, the treatment being carried out under reduced pressure.
  • the devices of the state of the art although they can be used in automated systems, are relatively complex to produce and the processing of the objects is characterized by a high number of steps, hence a relatively long duration for the processing of a given object.
  • a device for the treatment of objects by plasma deposition comprising: - a sealed treatment chamber, under reduced pressure, provided on one of its walls a passage which can be closed, said passage making it possible to convey objects to be treated between the interior and the exterior of the treatment chamber,
  • the invention is particularly characterized by the fact that the transfer space:
  • - is delimited by discontinuous walls, - is movable relative to the treatment chamber so as to be able to cross the passage of the treatment chamber.
  • the transfer space has a double function: that of support during the transfer of the objects to be treated and that of airlock when it is in a particular position.
  • the device according to the invention is particularly well suited for automated use.
  • the invention can be declined in a large number of variants.
  • the transfer space can be moved by a drive system arranged outside the treatment chamber, near its passage.
  • the drive system can also be designed to pass completely through the treatment chamber. According to a preferred embodiment, a part of the walls delimiting the transfer space is adapted to block the passage of the treatment chamber.
  • the passage of the treatment chamber extends outside of it so as to form a hollow body, for example cylindrical, whose side walls are sealed.
  • the walls delimiting the transfer space are chosen and dimensioned so that when the transfer space is moved in the hollow body, a mobile and temporary airlock is formed.
  • the walls delimiting the transfer space can be fixed to each other, for example by means of a rod connecting them, the whole being made integral with a drive system such as a telescopic system.
  • the walls delimiting the transfer space are fixed independently of each other to the drive system which consists for example of a frame adapted to slide in a direction parallel to the movement of the transfer space .
  • the drive system which consists for example of a frame adapted to slide in a direction parallel to the movement of the transfer space .
  • the walls delimiting the transfer space consist of two parallel discs, the transfer space corresponding to the volume which is located between the two discs.
  • Each disc is fixed at its external face to a member forming part of the drive system.
  • the invention is characterized in particular by the fact that the treatment chamber and the transfer space are movable relative to each other which means that one can have a configuration in which the room of treatment is fixed and the treatment space mobile or, conversely, the treatment chamber is mobile and the treatment space fixed.
  • Figure 1 shows a front view of a first embodiment of the invention.
  • Figure 2 shows a top view of the embodiment of Figure 1.
  • Figure 3 shows a front view of a second embodiment of the invention.
  • FIG. 4 shows a front view, in a first position, of a third embodiment of the invention.
  • FIG. 5 shows a front view, in a second position, of the embodiment of FIG. 4.
  • FIG. 6 shows a front view, in a third position, of the embodiment of FIG. 4.
  • FIG. 7 shows a top view of the embodiment of FIGS. 4 to 6.
  • the device illustrated in FIG. 1 comprises a sealed treatment chamber 1 which contains elements (not shown) making it possible to establish a vacuum therein and to treat one or more objects 3 by plasma deposition.
  • the treatment chamber 1 is provided with a passage 2 connecting the interior of the chamber with the exterior.
  • the treatment chamber 1 is circular, as is the section of its passage 2.
  • the passage 2, which forms a hollow cylinder, extends towards the interior of the chamber treatment 1.
  • a transfer space 5 delimited by two parallel circular walls 6,7 fixed in their centers to each other by means of a rod 11.
  • the upper disc 6 being fixed to a telescopic axis 9 which can be actuated by a motor (not shown).
  • the telescopic axis 9 is itself fixed to a frame 12 arranged above the device.
  • the device illustrated in Figure 3 is identical to that of Figures 1 and 2 except that the telescopic axis and its motor are arranged below the device, the telescopic axis sealingly crossing the bottom wall of the treatment chamber.
  • the device illustrated in Figures 4 to 7 also has several points in common with the devices of the previous figures. It differs, however, in that the disks 6, 7 delimiting the transfer space 5 are fixed independently of one another to a sliding frame 10 which extends on either side of the treatment chamber 1.
  • the lower disc 7 actually forms the upper part of a cylinder 12 which is part of the sliding frame.
  • the treatment chamber 1 is provided with an opening 13 whose section is substantially equal to the diameter of the disks 6,7.
  • the length of the cylinder 12, which can be hollow or full, is such that during its movement, it permanently closes the opening 13 disposed in the bottom wall 14 of the treatment chamber 1.
  • a first step, illustrated in FIG. 4 objects to be treated 3 are placed, for example using a robotic arm, on the face of the lower disc 7 which is located on the side of the transfer space 5
  • the sliding frame 10 is then lowered to a position illustrated in FIG. 5.
  • the transfer space 5 is completely delimited by the discs 6, 7 and the wall of the extension 8.
  • transfer space 5 and the walls which delimit it form a sealed compartment exercising the function of an airlock.
  • means 15 can be provided to achieve a vacuum, total or partial, in the airlock.
  • the "lock" phase previously described can take place dynamically, that is to say without interrupting the movement of the sliding frame 10 downwards. It is also possible to momentarily interrupt the descent of the frame, sliding 10 when the airlock is formed, in particular if one wishes to establish a vacuum in the airlock.
  • FIG. 6 illustrates the situation where the transfer space 5 is completely included in the treatment chamber 1. It should be noted that at this stage, the upper disc 6 is in intimate contact with the upper wall 4 of the treatment chamber. treatment 1 in order to ensure a perfect seal within the latter. At this time, the processing of objects 3 can be carried out. Means (not shown) arranged in the treatment chamber can generate a plasma so as to coat the surface of the objects 3 with a thin layer acting, for example, as an anti-diffusion layer.
  • the section of the passage of the treatment chamber and its extension is not necessarily circular, a square section for example would achieve the same purpose.
  • a closed transfer space over most of its periphery, with an opening of a size just sufficient to ensure the introduction and removal of the objects to be treated. It is therefore possible to design a transfer space included in a sliding cylinder, the latter being provided with a small opening on its side wall.
  • the distance between the discs must allow an "airlock" phase to be obtained. Preferably, this distance is minimized in order to reduce the pressure variation resulting from the contacting of the transfer space with the space located inside the treatment chamber.
  • the geometry of the lower disc can be produced so as to ensure a progressive (gradual) vacuum in the transfer space when the transfer space is brought into contact with the treatment chamber.
  • One way to obtain this characteristic would be to use a disc whose upper face, on part of its periphery, is inclined downward.

Abstract

The invention concerns a device for treating objects by plasma deposition comprising: a sealed treatment chamber (1), under reduced pressure, provided on one of its walls (4) with a passageway (2) capable of being closed, said passageway (2) enabling to feed objects to be treated (3) between the inside and the outside of the treatment chamber (1); a transfer space (5) capable of communicating, via said passageway (2), with the treatment chamber (1), so that the objects to be treated (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1). Said device is characterized in that the transfer space (5): delimited by discontinuous walls (6, 7), is mobile relative to the treatment chamber (1) so as to be able to move across the passageway (2) of the treatment chamber (1).

Description

Dispositif pour le traitement d'objets par déposition plasma Device for the treatment of objects by plasma deposition
Domaine de l'inventionField of the invention
La présente invention concerne un dispositif pour le traitement d'objets par déposition plasma. Les objets à traiter peuvent par exemple être des composants de tube tels que jupes, épaules ou bouchons.The present invention relates to a device for the treatment of objects by plasma deposition. The objects to be treated can for example be tube components such as skirts, shoulders or plugs.
Elle se rapporte plus précisément à un ensemble constitué d'une chambre de traitement et d'un espace de transfert mis en relation avec la chambre de traitement. Le ou les objets à traiter passant dans l'espace de transfert préalablement à leur introduction dans la chambre de traitement, le traitement étant effectué sous pression réduite.It relates more specifically to an assembly consisting of a treatment chamber and a transfer space connected to the treatment chamber. The object or objects to be treated passing through the transfer space prior to their introduction into the treatment chamber, the treatment being carried out under reduced pressure.
Etat de la techniqueState of the art
Le brevet américain US 4,816,638 décrit une chambre de traitement pour déposition plasma. La chambre de traitement étant mise en relation avec une chambre de transfert faisant office de sas.American patent US 4,816,638 describes a treatment chamber for plasma deposition. The treatment chamber being connected with a transfer chamber acting as an airlock.
Le brevet américain US 4,861 ,563 décrit un ensemble comprenant une chambre de traitement mobile disposée à l'intérieur d'une chambre de transfert.American patent US 4,861,563 describes an assembly comprising a mobile processing chamber disposed inside a transfer chamber.
Les dispositifs de l'état de la technique, bien qu'ils puissent être utilisés dans des systèmes automatisés, sont relativement complexes à réaliser et le traitement des objets se caractérise par un nombre élevé d'étapes, d'où une durée relativement longue pour le traitement d'un objet donné.The devices of the state of the art, although they can be used in automated systems, are relatively complex to produce and the processing of the objects is characterized by a high number of steps, hence a relatively long duration for the processing of a given object.
Il est donc souhaitable d'avoir un système chambre de traitement - chambre de transfert plus performant. Résumé de l'inventionIt is therefore desirable to have a more efficient treatment chamber - transfer chamber system. Summary of the invention
Les inconvénients relevés dans le chapitre précédent sont évités grâce à la présente invention qui se rapporte à un dispositif pour le traitement d'objets par déposition plasma comprenant : - une chambre de traitement étanche, sous pression réduite, pourvue sur l'une de ses parois d'un passage pouvant être obturé, ledit passage permettant d'acheminer des objets à traiter entre l'intérieur et l'extérieur de la chambre de traitement ,The disadvantages noted in the previous chapter are avoided thanks to the present invention which relates to a device for the treatment of objects by plasma deposition comprising: - a sealed treatment chamber, under reduced pressure, provided on one of its walls a passage which can be closed, said passage making it possible to convey objects to be treated between the interior and the exterior of the treatment chamber,
- un espace de transfert pouvant être mis en relation, via ledit passage, avec la chambre de traitement de façon à ce que des objets à traiter soient introduits dans l'espace de transfert préalablement à leur introduction dans la chambre de traitement, l'invention se caractérise particulièrement par le fait que l'espace de transfert :- a transfer space which can be connected, via said passage, with the treatment chamber so that objects to be treated are introduced into the transfer space before their introduction into the treatment chamber, the invention is particularly characterized by the fact that the transfer space:
- est délimité par des parois discontinues, - est mobile relativement à la chambre de traitement de façon à pouvoir franchir le passage de la chambre de traitement .- is delimited by discontinuous walls, - is movable relative to the treatment chamber so as to be able to cross the passage of the treatment chamber.
Comme on le verra par la suite, l'espace de transfert a une double fonction : Celle de support lors du transfert des objets à traiter et celle de sas lorsqu'il se trouve dans une position particulière.As will be seen below, the transfer space has a double function: that of support during the transfer of the objects to be treated and that of airlock when it is in a particular position.
Cette double fonction simplifie considérablement la configuration du dispositif. En outre, le dispositif selon l'invention est particulièrement bien adapté pour une utilisation automatisée.This double function considerably simplifies the configuration of the device. In addition, the device according to the invention is particularly well suited for automated use.
L'invention peut être déclinée en un grand nombre de variantes.The invention can be declined in a large number of variants.
L'espace de transfert peut être déplacé par un système d'entraînement disposé à l'extérieur de la chambre de traitement, à proximité de son passage.The transfer space can be moved by a drive system arranged outside the treatment chamber, near its passage.
Le système d'entraînement peut également être conçu de façon à traverser complètement la chambre de traitement. Selon un mode préférentiel de réalisation, une partie des parois délimitant l'espace de transfert est adaptée pour obturer le passage de la chambre de traitement.The drive system can also be designed to pass completely through the treatment chamber. According to a preferred embodiment, a part of the walls delimiting the transfer space is adapted to block the passage of the treatment chamber.
Selon une variante particulièrement avantageuse de l'invention, le passage de la chambre de traitement se prolonge en dehors de celle-ci de façon à former un corps creux, par exemple cylindrique, dont les parois latérales sont étanches.According to a particularly advantageous variant of the invention, the passage of the treatment chamber extends outside of it so as to form a hollow body, for example cylindrical, whose side walls are sealed.
Les parois délimitant l'espace de transfert sont choisies et dimensionnées de façon que lors du déplacement de l'espace de transfert dans le corps creux, un sas mobile et temporaire se forme.The walls delimiting the transfer space are chosen and dimensioned so that when the transfer space is moved in the hollow body, a mobile and temporary airlock is formed.
Les parois délimitant l'espace de transfert peuvent être fixées l'une à l'autre, par exemple au moyen d'une tige les reliant, le tout étant rendu solidaire d'un système d'entraînement tel que système télescopique.The walls delimiting the transfer space can be fixed to each other, for example by means of a rod connecting them, the whole being made integral with a drive system such as a telescopic system.
De préférence, les parois délimitant l'espace de transfert sont fixées indépendamment l'une de l'autre au système d'entraînement qui est constitué par exemple d'un cadre adapté pour coulisser selon une direction parallèle au déplacement de l'espace de transfert. Cette configuration permet de libérer complètement l'espace de transfert de tout objet, autre que les objets à traiter.Preferably, the walls delimiting the transfer space are fixed independently of each other to the drive system which consists for example of a frame adapted to slide in a direction parallel to the movement of the transfer space . This configuration makes it possible to completely free up the transfer space for any object, other than the objects to be treated.
Selon une configuration particulièrement avantageuse de l'invention, les parois délimitant l'espace de transfert sont constituées de deux disques parallèles, l'espace de transfert correspondant au volume qui se trouve entre les deux disques. Chaque disque est fixé au niveau de sa face externe à un organe faisant partie du système d'entraînement.According to a particularly advantageous configuration of the invention, the walls delimiting the transfer space consist of two parallel discs, the transfer space corresponding to the volume which is located between the two discs. Each disc is fixed at its external face to a member forming part of the drive system.
Comme on l'a vu, l'invention se caractérise notamment par le fait que la chambre de traitement et l'espace de transfert sont mobiles l'un relativement à l'autre ce qui signifie que l'on peut avoir une configuration dans laquelle la chambre de traitement est fixe et l'espace de traitement mobile ou, inversement, la chambre de traitement est mobile et l'espace de traitement fixe.As we have seen, the invention is characterized in particular by the fact that the treatment chamber and the transfer space are movable relative to each other which means that one can have a configuration in which the room of treatment is fixed and the treatment space mobile or, conversely, the treatment chamber is mobile and the treatment space fixed.
Description détaillée de l'inventionDetailed description of the invention
L'invention sera décrite plus en détail ci-après au moyen des figures suivantes :The invention will be described in more detail below by means of the following figures:
La figure 1 montre une vue de face d'un premier mode de réalisation de l'invention.Figure 1 shows a front view of a first embodiment of the invention.
La figure 2 montre une vue de dessus du mode de réalisation de la figure 1. La figure 3 montre une vue de face d'un deuxième mode de réalisation de l'invention.Figure 2 shows a top view of the embodiment of Figure 1. Figure 3 shows a front view of a second embodiment of the invention.
La figure 4 montre une vue de face, dans une première position, d'un troisième mode de réalisation de l'invention.FIG. 4 shows a front view, in a first position, of a third embodiment of the invention.
La figure 5 montre une vue de face, dans une deuxième position, du mode de réalisation de la figure 4.FIG. 5 shows a front view, in a second position, of the embodiment of FIG. 4.
La figure 6 montre une vue de face, dans une troisième position, du mode de réalisation de la figure 4.FIG. 6 shows a front view, in a third position, of the embodiment of FIG. 4.
La figure 7 montre une vue de dessus du mode de réalisation des figures 4 à 6.FIG. 7 shows a top view of the embodiment of FIGS. 4 to 6.
Chaque élément commun à chaque figure porte la même référence numérique.Each element common to each figure has the same reference number.
Le dispositif illustré à la figure 1 comprend une chambre de traitement 1 étanche qui contient des éléments (non-illustrés) permettant d'y instaurer un vide et de traiter un ou des objets 3 par déposition plasma. Dans sa paroi supérieure 4, la chambre de traitement 1 est pourvue d'un passage 2 reliant l'intérieur de la chambre avec l'extérieur.The device illustrated in FIG. 1 comprises a sealed treatment chamber 1 which contains elements (not shown) making it possible to establish a vacuum therein and to treat one or more objects 3 by plasma deposition. In its upper wall 4, the treatment chamber 1 is provided with a passage 2 connecting the interior of the chamber with the exterior.
Comme on peut le remarquer sur la figure 2, la chambre de traitement 1 est de forme circulaire, de même que la section de son passage 2. Le passage 2, qui forme un cylindre creux, s'étend vers l'intérieur de la chambre de traitement 1. Disposé à l'extérieur de la chambre de traitement 1 , dans le prolongement du passage 2, se trouve un espace de transfert 5 délimité par deux parois circulaires parallèles 6,7 fixées en leurs centres l'une à l'autre au moyen d'une tige 11. Le disque supérieur 6 étant fixé à un axe télescopique 9 pouvant être actionné par un moteur (non-illustré). L'axe télescopique 9 est lui-même fixé à une armature 12 disposée en-dessus du dispositif.As can be seen in Figure 2, the treatment chamber 1 is circular, as is the section of its passage 2. The passage 2, which forms a hollow cylinder, extends towards the interior of the chamber treatment 1. Arranged outside the treatment chamber 1, in the extension of the passage 2, there is a transfer space 5 delimited by two parallel circular walls 6,7 fixed in their centers to each other by means of a rod 11. The upper disc 6 being fixed to a telescopic axis 9 which can be actuated by a motor (not shown). The telescopic axis 9 is itself fixed to a frame 12 arranged above the device.
Le dispositif illustré à la figure 3 est identique à celui des figures 1 et 2 à l'exception du fait que l'axe télescopique ainsi que son moteur sont disposés en- dessous du dispositif, l'axe télescopique traversant de façon étanche la paroi inférieure de la chambre de traitement.The device illustrated in Figure 3 is identical to that of Figures 1 and 2 except that the telescopic axis and its motor are arranged below the device, the telescopic axis sealingly crossing the bottom wall of the treatment chamber.
Le dispositif illustré sur les figures 4 à 7 présente également plusieurs points communs avec les dispositifs des figures précédentes. Il diffère cependant en ce que les disques 6,7 délimitant l'espace de transfert 5 sont fixés indépendamment l'un de l'autre à un cadre coulissant 10 qui s'étend de part et d'autre de la chambre de traitement 1. Le disque inférieur 7 forme en fait la partie supérieure d'un cylindre 12 qui fait partie du cadre coulissant. Dans sa paroi inférieure 14, la chambre de traitement 1 est pourvue d'une ouverture 13 dont la section est sensiblement égale au diamètre des disques 6,7. La longueur du cylindre 12, qui peut être creux ou plein, est telle que lors de son déplacement, il obture en permanence l'ouverture 13 disposée dans la paroi inférieure 14 de la chambre de traitement 1.The device illustrated in Figures 4 to 7 also has several points in common with the devices of the previous figures. It differs, however, in that the disks 6, 7 delimiting the transfer space 5 are fixed independently of one another to a sliding frame 10 which extends on either side of the treatment chamber 1. The lower disc 7 actually forms the upper part of a cylinder 12 which is part of the sliding frame. In its lower wall 14, the treatment chamber 1 is provided with an opening 13 whose section is substantially equal to the diameter of the disks 6,7. The length of the cylinder 12, which can be hollow or full, is such that during its movement, it permanently closes the opening 13 disposed in the bottom wall 14 of the treatment chamber 1.
Le dispositif illustré sur les figures 4 à 7 fonctionne comme suit :The device illustrated in Figures 4 to 7 operates as follows:
Dans une première étape, illustrée à la figure 4, des objets à traiter 3 sont placés, par exemple à l'aide d'un bras robotisé, sur la face du disque inférieure 7 qui se situe du côté de l'espace de transfert 5. Le cadre coulissant 10 est ensuite abaissé jusqu'à une position illustrée à la figure 5. A ce moment, l'espace de transfert 5 est complètement délimité par les disques 6, 7 et la paroi du prolongement 8. Dans cette position particulière, l'espace de transfert 5 et les parois qui le délimitent forme un compartiment étanche exerçant la fonction de sas. Optionnellement, des moyens 15 peuvent être prévus pour réaliser un vide, total ou partiel, dans le sas.In a first step, illustrated in FIG. 4, objects to be treated 3 are placed, for example using a robotic arm, on the face of the lower disc 7 which is located on the side of the transfer space 5 The sliding frame 10 is then lowered to a position illustrated in FIG. 5. At this time, the transfer space 5 is completely delimited by the discs 6, 7 and the wall of the extension 8. In this particular position, transfer space 5 and the walls which delimit it form a sealed compartment exercising the function of an airlock. Optionally, means 15 can be provided to achieve a vacuum, total or partial, in the airlock.
La phase « sas » précédemment décrite peut se dérouler de façon dynamique, c'est-à-dire sans interruption du mouvement du cadre coulissant 10 vers le bas. Il est également possible d'interrompre momentanément la descente du cadre, coulissant 10 lorsque le sas est formé, en particulier si l'on souhaite instaurer un vide dans le sas.The "lock" phase previously described can take place dynamically, that is to say without interrupting the movement of the sliding frame 10 downwards. It is also possible to momentarily interrupt the descent of the frame, sliding 10 when the airlock is formed, in particular if one wishes to establish a vacuum in the airlock.
La figure 6 illustre la situation où l'espace de transfert 5 est totalement compris dans la chambre de traitement 1. Il convient de remarquer qu'à ce stade, le disque supérieur 6 est en contact intime avec la paroi supérieure 4 de la chambre de traitement 1 afin d'assurer une étanchéité parfaite au sein de cette dernière. A ce moment, le traitement des objets 3 peut être effectué. Des moyens (non- illustrés) disposés dans la chambre de traitement peuvent générer un plasma de façon à revêtir la surface des objets 3 d'une mince couche agissant par exemple comme couche anti-diffusion.FIG. 6 illustrates the situation where the transfer space 5 is completely included in the treatment chamber 1. It should be noted that at this stage, the upper disc 6 is in intimate contact with the upper wall 4 of the treatment chamber. treatment 1 in order to ensure a perfect seal within the latter. At this time, the processing of objects 3 can be carried out. Means (not shown) arranged in the treatment chamber can generate a plasma so as to coat the surface of the objects 3 with a thin layer acting, for example, as an anti-diffusion layer.
Une fois les objets 3 traités, on réalise des étapes inverses à celles précédemment décrites de façon à ramener le dispositif dans une configuration identique à celle illustrée à la figure 4. Les objets traités 3 sont alors retirés de l'espace de transfert 5 et remplacés par de nouveaux objets 3 à traiter. Le cycle de traitement peut alors immédiatement continuer.Once the objects 3 have been treated, steps opposite to those previously described are carried out so as to bring the device back into a configuration identical to that illustrated in FIG. 4. The treated objects 3 are then removed from the transfer space 5 and replaced by new objects 3 to be treated. The treatment cycle can then immediately continue.
Des exemples décrits ci-dessus, on peut remarquer notamment un avantage particulièrement intéressant de l'invention : Quelque soit la position de l'espace de transfert, il y a toujours équilibre des forces de pression exercées sur les disques supérieur et inférieur. Il en résulte que l'énergie nécessaire au déplacement de l'espace de transfert est minime et que ce concept inventif fonctionne également lors d'un transfert dans une chambre de traitement ayant une pression supérieure à la pression atmosphérique. Il va sans dire que l'invention ne se limite pas aux exemples décrits ci-dessus.From the examples described above, one can note in particular a particularly advantageous advantage of the invention: Whatever the position of the transfer space, there is always a balance of the pressure forces exerted on the upper and lower discs. As a result, the energy required to move the transfer space is minimal and this inventive concept also works during a transfer to a treatment chamber having a pressure higher than atmospheric pressure. It goes without saying that the invention is not limited to the examples described above.
Comme mentionné, il existe un très grand nombre de variantes faisant partie du concept inventif.As mentioned, there are a very large number of variants which are part of the inventive concept.
On notera en particulier les points suivants :The following points should be noted in particular:
- La section du passage de la chambre de traitement et son prolongement n'est pas nécessairement circulaire, une section carrée par exemple réaliserait le même but. - Il est également possible d'envisager un espace de transfert fermé sur la plus grande partie de son pourtour, avec une ouverture de taille juste suffisante pour assurer l'introduction et le retrait des objets à traiter. On peut donc concevoir un espace de transfert compris dans un cylindre coulissant, ce dernier étant pourvu d'une ouverture de faible taille sur sa paroi latérale.- The section of the passage of the treatment chamber and its extension is not necessarily circular, a square section for example would achieve the same purpose. - It is also possible to envisage a closed transfer space over most of its periphery, with an opening of a size just sufficient to ensure the introduction and removal of the objects to be treated. It is therefore possible to design a transfer space included in a sliding cylinder, the latter being provided with a small opening on its side wall.
- La distance entre les disques doit permettre d'obtenir une phase « sas ». De préférence, cette distance est minimisée afin de réduire la variation de pression résultant de la mise en contact de l'espace de transfert avec l'espace situé à l'intérieur de la chambre de traitement. - La géométrie du disque inférieur peut être réalisée de manière à assurer un vide progressif (graduel) dans l'espace de transfert lors de la mise en contact de l'espace de transfert avec la chambre de traitement. Une manière d'obtenir cette caractéristique consisterait à utiliser un disque dont la face supérieure, sur une partie de sa périphérie, serait inclinée vers le bas. - The distance between the discs must allow an "airlock" phase to be obtained. Preferably, this distance is minimized in order to reduce the pressure variation resulting from the contacting of the transfer space with the space located inside the treatment chamber. - The geometry of the lower disc can be produced so as to ensure a progressive (gradual) vacuum in the transfer space when the transfer space is brought into contact with the treatment chamber. One way to obtain this characteristic would be to use a disc whose upper face, on part of its periphery, is inclined downward.

Claims

Revendications claims
1. Dispositif pour le traitement d'objets par déposition plasma comprenant :1. Device for the treatment of objects by plasma deposition comprising:
- une chambre de traitement étanche (1), sous pression réduite, pourvue sur l'une de ses parois (4) d'un passage (2) pouvant être obturé, ledit passage- a sealed treatment chamber (1), under reduced pressure, provided on one of its walls (4) with a passage (2) which can be closed, said passage
(2) permettant d'acheminer des objets à traiter (3) entre l'intérieur et l'extérieur de la chambre de traitement (1),(2) making it possible to route objects to be treated (3) between the interior and the exterior of the treatment chamber (1),
- un espace de transfert (5) pouvant être mis en relation, via ledit passage (2), avec la chambre de traitement (1 ) de façon à ce que des objets à traiter (3) soient introduits dans l'espace de transfert (5) préalablement à leur introduction dans la chambre de traitement (1 ), le dispositif étant caractérisé par le fait que l'espace de transfert (5) :- a transfer space (5) which can be connected, via said passage (2), with the treatment chamber (1) so that objects to be treated (3) are introduced into the transfer space ( 5) prior to their introduction into the treatment chamber (1), the device being characterized in that the transfer space (5):
- est délimité par des parois discontinues (6,7),- is delimited by discontinuous walls (6,7),
- est mobile relativement à la chambre de traitement (1 ) de façon à pouvoir franchir le passage (2) de la chambre de traitement (1 ).- is movable relative to the treatment chamber (1) so as to be able to pass through the passage (2) of the treatment chamber (1).
2. Dispositif selon la revendication précédente caractérisé par le fait qu'au moins une partie des parois (6,7) délimitant l'espace de transfert (5) est adaptée pour obturer le passage (2) de la chambre de traitement (1).2. Device according to the preceding claim, characterized in that at least part of the walls (6,7) delimiting the transfer space (5) is adapted to close the passage (2) of the treatment chamber (1) .
3. Dispositif selon la revendication précédente caractérisé par le fait que le passage (2) de la chambre de traitement (1 ) se prolonge en dehors de la chambre de traitement (1 ) de façon à ce que le prolongement (8) permette de transformer en sas l'espace de transfert (5) lorsque ce dernier se déplace à l'intérieur du prolongement (8).3. Device according to the preceding claim characterized in that the passage (2) of the treatment chamber (1) extends outside the treatment chamber (1) so that the extension (8) allows to transform in the lock space transfer (5) when the latter moves inside the extension (8).
4. Dispositif selon la revendication précédente caractérisé par le fait que les parois (6,7) délimitant l'espace de transfert (5) sont fixées entre elles, le tout étant rendu solidaire indépendamment l'une de l'autre d'un système d'entraînement (9). 4. Device according to the preceding claim characterized in that the walls (6,7) delimiting the transfer space (5) are fixed together, the whole being made integral independently of one another of a system drive (9).
5. Dispositif selon l'une quelconque des revendications 1 à 3 caractérisé par le fait que les parois (6,7) délimitant l'espace de transfert (5) sont rendues solidaires d'un cadre coulissant (10).5. Device according to any one of claims 1 to 3 characterized in that the walls (6,7) delimiting the transfer space (5) are made integral with a sliding frame (10).
6. Dispositif selon l'une quelconque des revendications précédentes où la chambre de traitement (1 ) est fixe et l'espace de transfert (5) mobile.6. Device according to any one of the preceding claims, in which the treatment chamber (1) is fixed and the transfer space (5) mobile.
7. Dispositif selon l'une quelconque des revendications précédentes où la chambre de traitement (1 ) est mobile et l'espace de transfert (5) fixe.7. Device according to any one of the preceding claims, in which the treatment chamber (1) is mobile and the transfer space (5) fixed.
8. Méthode d'utilisation du dispositif selon l'une quelconque des revendications précédentes caractérisée par les étapes suivantes :8. Method of using the device according to any one of the preceding claims, characterized by the following steps:
- dépose d'un ou de plusieurs objets à traiter (3) sur une des parois (6,7) discontinues délimitant l'espace de transfert (5),- deposit of one or more objects to be treated (3) on one of the discontinuous walls (6,7) delimiting the transfer space (5),
- déplacement relatif desdites parois (6,7) et de l'espace de transfert (5) vers la chambre de traitement (1 ),- relative displacement of said walls (6,7) and of the transfer space (5) towards the treatment chamber (1),
- instauration optionnelle d'un vide lorsque les objets se trouvent dans ledit sas,- optional establishment of a vacuum when the objects are in said airlock,
- déplacement relatif desdites parois (6,7) et de l'espace de transfert (5) à l'intérieur de la chambre de traitement (1), - traitement du ou des objets (3),- relative displacement of said walls (6,7) and of the transfer space (5) inside the treatment chamber (1), - treatment of the object or objects (3),
- déplacement relatif desdites parois (6,7) et de l'espace de transfert (5) vers l'extérieur de la chambre de traitement (1),- relative displacement of said walls (6,7) and of the transfer space (5) towards the outside of the treatment chamber (1),
- retrait du ou des objets (3) de l'espace de transfert (5). - removal of the object (s) (3) from the transfer space (5).
PCT/CH2002/000698 2001-12-20 2002-12-16 Device for treating objects by plasma deposition WO2003054910A1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP20020782609 EP1459352A1 (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition
AU2002347187A AU2002347187A1 (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition
CA002469863A CA2469863A1 (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition
MXPA04005881A MXPA04005881A (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition.
BR0215166-9A BR0215166A (en) 2001-12-20 2002-12-16 Plasma Deposition Object Handling Device
US10/498,906 US20050028933A1 (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition
KR10-2004-7009529A KR20040070244A (en) 2001-12-20 2002-12-16 Device for treating objects by plasma deposition
JP2003555540A JP2005513269A (en) 2001-12-20 2002-12-16 Apparatus for processing objects by plasma deposition

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH2354/01 2001-12-20
CH23542001 2001-12-20

Publications (1)

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WO2003054910A1 true WO2003054910A1 (en) 2003-07-03

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EP (1) EP1459352A1 (en)
JP (1) JP2005513269A (en)
KR (1) KR20040070244A (en)
CN (1) CN1606793A (en)
AU (1) AU2002347187A1 (en)
BR (1) BR0215166A (en)
CA (1) CA2469863A1 (en)
MX (1) MXPA04005881A (en)
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WO (1) WO2003054910A1 (en)

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CN102203910B (en) * 2008-11-07 2014-12-10 Asm美国公司 Reaction chamber
CN109912228A (en) * 2017-12-12 2019-06-21 湘潭宏大真空技术股份有限公司 Transmission device for large-area glass magnetron sputtering film production line

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KR20040070244A (en) 2004-08-06
MXPA04005881A (en) 2005-05-16
JP2005513269A (en) 2005-05-12
AU2002347187A1 (en) 2003-07-09
RU2004122095A (en) 2005-03-27
CA2469863A1 (en) 2003-07-03
CN1606793A (en) 2005-04-13
EP1459352A1 (en) 2004-09-22
US20050028933A1 (en) 2005-02-10
BR0215166A (en) 2004-10-19

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