WO2003058286A3 - Monolithic optical control components - Google Patents

Monolithic optical control components Download PDF

Info

Publication number
WO2003058286A3
WO2003058286A3 PCT/IL2003/000031 IL0300031W WO03058286A3 WO 2003058286 A3 WO2003058286 A3 WO 2003058286A3 IL 0300031 W IL0300031 W IL 0300031W WO 03058286 A3 WO03058286 A3 WO 03058286A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
actuators
attenuators
optical
components
Prior art date
Application number
PCT/IL2003/000031
Other languages
French (fr)
Other versions
WO2003058286A2 (en
Inventor
Dan Haronian
Ran Vered
Eitan Efron
Rahav Cohen
Original Assignee
Galayor Networks Inc
Dan Haronian
Ran Vered
Eitan Efron
Rahav Cohen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Galayor Networks Inc, Dan Haronian, Ran Vered, Eitan Efron, Rahav Cohen filed Critical Galayor Networks Inc
Priority to AU2003235773A priority Critical patent/AU2003235773A1/en
Publication of WO2003058286A2 publication Critical patent/WO2003058286A2/en
Publication of WO2003058286A3 publication Critical patent/WO2003058286A3/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3502Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/264Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3586Control or adjustment details, e.g. calibrating
    • G02B6/3588Control or adjustment details, e.g. calibrating of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35442D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/35481xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/35521x1 switch, e.g. on/off switch
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3594Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Abstract

Novel optical waveguide components, operated by means of micro-actuators which move suspended section of waveguides, and especially variable optical attenuators, and optical couplers. Methods are also described for aligning and latching the micro-actuators in two or three dimensions, such that settings of variable attenuators can be maintained. Such micro-actuators are also used for ensuring good alignment between the various waveguide and fiber ports in integrated optical circuits. Additional components based on micro-actuators include multi-pole switches, digital variable optical attenuators, receiver input protectors, and multifunctional line protection chips. The components and systems described can be executed in monolithic form, thus engendering significant cost and space savings. Furthermore, methods of substrate etching to obtain accurately vertical faces are also described.
PCT/IL2003/000031 2002-01-10 2003-01-10 Monolithic optical control components WO2003058286A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003235773A AU2003235773A1 (en) 2002-01-10 2003-01-10 Monolithic optical control components

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US34737602P 2002-01-10 2002-01-10
US60/347,376 2002-01-10
US36096102P 2002-02-28 2002-02-28
US60/360,961 2002-02-28
US38643102P 2002-06-07 2002-06-07
US60/386,431 2002-06-07
US40474302P 2002-08-21 2002-08-21
US60/404,743 2002-08-21

Publications (2)

Publication Number Publication Date
WO2003058286A2 WO2003058286A2 (en) 2003-07-17
WO2003058286A3 true WO2003058286A3 (en) 2005-06-23

Family

ID=27502753

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2003/000031 WO2003058286A2 (en) 2002-01-10 2003-01-10 Monolithic optical control components

Country Status (2)

Country Link
AU (1) AU2003235773A1 (en)
WO (1) WO2003058286A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6895161B2 (en) 2002-09-30 2005-05-17 Rosemount Inc. Variable optical attenuator
US7450812B2 (en) 2003-05-06 2008-11-11 Rosemount Inc. Compensated variable optical attenuator
US7197225B2 (en) 2003-05-06 2007-03-27 Rosemount Inc. Variable optical attenuator
US7177505B2 (en) 2004-03-04 2007-02-13 Rosemount Inc. MEMS-based actuator devices using electrets
US7642628B2 (en) 2005-01-11 2010-01-05 Rosemount Inc. MEMS packaging with improved reaction to temperature changes
US7298954B2 (en) * 2005-06-16 2007-11-20 Xerox Corporation Waveguide shuttle MEMS variable optical attenuator
JP5378376B2 (en) * 2007-07-16 2013-12-25 コーニング インコーポレイテッド Fine alignment using laser softened glass bumps

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931518A (en) * 1974-11-11 1976-01-06 Bell Telephone Laboratories, Incorporated Optical fiber power taps employing mode coupling means
US4013000A (en) * 1975-11-20 1977-03-22 Bell Telephone Laboratories, Incorporated Optical crossbar switching network
US4150870A (en) * 1976-07-23 1979-04-24 Thomson-Csf Adjustable distributor device for shared transmission of radiant energy
US5612815A (en) * 1995-01-10 1997-03-18 Commissariat A L'energie Atomique Optical device for optomechanical application
US6122084A (en) * 1998-03-03 2000-09-19 At&T Corp. High dynamic range free-space optical communication receiver
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931518A (en) * 1974-11-11 1976-01-06 Bell Telephone Laboratories, Incorporated Optical fiber power taps employing mode coupling means
US4013000A (en) * 1975-11-20 1977-03-22 Bell Telephone Laboratories, Incorporated Optical crossbar switching network
US4150870A (en) * 1976-07-23 1979-04-24 Thomson-Csf Adjustable distributor device for shared transmission of radiant energy
US5612815A (en) * 1995-01-10 1997-03-18 Commissariat A L'energie Atomique Optical device for optomechanical application
US6122084A (en) * 1998-03-03 2000-09-19 At&T Corp. High dynamic range free-space optical communication receiver
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus

Also Published As

Publication number Publication date
AU2003235773A8 (en) 2003-07-24
WO2003058286A2 (en) 2003-07-17
AU2003235773A1 (en) 2003-07-24

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