WO2003078303A3 - Fabrication process for optical mems device for fiber alignment and variable optical attenuation - Google Patents

Fabrication process for optical mems device for fiber alignment and variable optical attenuation Download PDF

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Publication number
WO2003078303A3
WO2003078303A3 PCT/CH2003/000159 CH0300159W WO03078303A3 WO 2003078303 A3 WO2003078303 A3 WO 2003078303A3 CH 0300159 W CH0300159 W CH 0300159W WO 03078303 A3 WO03078303 A3 WO 03078303A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical
fabrication process
groove
mems device
fiber alignment
Prior art date
Application number
PCT/CH2003/000159
Other languages
French (fr)
Other versions
WO2003078303A2 (en
Inventor
Robert Gaisch
Sophie Birling
Jean-Philippe Thiebaud
Pierre Cusin
Marc Alan Straub
Original Assignee
Colibrys S A
Robert Gaisch
Sophie Birling
Jean-Philippe Thiebaud
Pierre Cusin
Marc Alan Straub
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys S A, Robert Gaisch, Sophie Birling, Jean-Philippe Thiebaud, Pierre Cusin, Marc Alan Straub filed Critical Colibrys S A
Priority to AU2003206601A priority Critical patent/AU2003206601A1/en
Publication of WO2003078303A2 publication Critical patent/WO2003078303A2/en
Publication of WO2003078303A3 publication Critical patent/WO2003078303A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs

Abstract

Fabrication Process for an Optical MEMS Device for Fiber Alignment and Variable Optical Attenuation. According to one embodiment of the present invention, a method is provided for fabricating a variable optical attenuator. The method comprises forming a groove on a surface of a substrate for positioning an optical microstructure at least partially in the groove. Furthermore, the method comprises forming an overlayer structure interconnected to the substrate and extending at least partially over the groove for maintaining an optical microstructure in place against the groove. The method also comprises forming a micro-electro-mechanical mechanism on the substrate wherein the micro­electro-mechanical mechanism is movable for intercepting light from the optical microstructure
PCT/CH2003/000159 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation WO2003078303A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003206601A AU2003206601A1 (en) 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36447102P 2002-03-15 2002-03-15
US60/364,471 2002-03-15

Publications (2)

Publication Number Publication Date
WO2003078303A2 WO2003078303A2 (en) 2003-09-25
WO2003078303A3 true WO2003078303A3 (en) 2004-02-26

Family

ID=28041919

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2003/000159 WO2003078303A2 (en) 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation

Country Status (2)

Country Link
AU (1) AU2003206601A1 (en)
WO (1) WO2003078303A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11215762B2 (en) * 2018-08-15 2022-01-04 Advanced Semiconductor Engineering, Inc. Optical device package and method for manufacturing the same

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998007060A1 (en) * 1996-08-12 1998-02-19 Maynard Ronald S Hybrid optical multi-axis beam steering apparatus
WO1998012589A1 (en) * 1996-09-20 1998-03-26 Ascom Tech Ag A fiber optic circuit switch and a process for its production
US5742419A (en) * 1995-11-07 1998-04-21 The Board Of Trustees Of The Leland Stanford Junior Universtiy Miniature scanning confocal microscope
DE19644918A1 (en) * 1996-10-29 1998-04-30 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switch
WO2001057578A1 (en) * 2000-01-31 2001-08-09 Sercalo Microtechnology Ltd. Switching arrangement for a radiation guide
WO2002068319A2 (en) * 2001-02-27 2002-09-06 Litton Systems, Inc. Bi-stable micro-actuator and optical switch

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5742419A (en) * 1995-11-07 1998-04-21 The Board Of Trustees Of The Leland Stanford Junior Universtiy Miniature scanning confocal microscope
WO1998007060A1 (en) * 1996-08-12 1998-02-19 Maynard Ronald S Hybrid optical multi-axis beam steering apparatus
WO1998012589A1 (en) * 1996-09-20 1998-03-26 Ascom Tech Ag A fiber optic circuit switch and a process for its production
DE19644918A1 (en) * 1996-10-29 1998-04-30 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switch
WO2001057578A1 (en) * 2000-01-31 2001-08-09 Sercalo Microtechnology Ltd. Switching arrangement for a radiation guide
WO2002068319A2 (en) * 2001-02-27 2002-09-06 Litton Systems, Inc. Bi-stable micro-actuator and optical switch

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
MITA M ET AL: "An out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application", BROADBAND OPTICAL NETWORKS AND TECHNOLOGIES: AN EMERGING REALITY/OPTICAL MEMS/SMART PIXELS/ORGANIC OPTICS AND OPTOELECTRONICS. 1998 IEEE/LEOS SUMMER TOPICAL MEETINGS MONTEREY, CA, USA 20-24 JULY 1998, NEW YORK, NY, USA,IEEE, US, PAGE(S) II-33-II-34, ISBN: 0-7803-4953-9, XP010292522 *
NOELL W ET AL: "APPLICATIONS OF SOI-BASED OPTICAL MEMS", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 8, no. 1, January 2002 (2002-01-01), pages 148 - 154, XP001154956, ISSN: 1077-260X *
WENJUN LI ET AL: "Magnetically actuated MEMS variable optical attenuator", MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, NANJING, CHINA, 7-9 NOV. 2001, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 2001, SPIE-INT. SOC. OPT. ENG, USA, PAGE(S) 89 - 96, ISSN: 0277-786X, XP009019228 *

Also Published As

Publication number Publication date
AU2003206601A1 (en) 2003-09-29
AU2003206601A8 (en) 2003-09-29
WO2003078303A2 (en) 2003-09-25

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