WO2003087859A1 - Probe for magnetic force microscopy and method of preparing such a probe - Google Patents

Probe for magnetic force microscopy and method of preparing such a probe Download PDF

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Publication number
WO2003087859A1
WO2003087859A1 PCT/NL2003/000193 NL0300193W WO03087859A1 WO 2003087859 A1 WO2003087859 A1 WO 2003087859A1 NL 0300193 W NL0300193 W NL 0300193W WO 03087859 A1 WO03087859 A1 WO 03087859A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
tip
milling
afm
ion beam
Prior art date
Application number
PCT/NL2003/000193
Other languages
French (fr)
Inventor
Gavin Nicholas Phillips
Leon Abelmann
Jacobus Christiaan Lodder
Original Assignee
Stichting Voor De Technische Wetenschappen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Voor De Technische Wetenschappen filed Critical Stichting Voor De Technische Wetenschappen
Priority to AU2003217076A priority Critical patent/AU2003217076A1/en
Publication of WO2003087859A1 publication Critical patent/WO2003087859A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G01R33/0385—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices in relation with magnetic force measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/08—MFM [Magnetic Force Microscopy] combined with AFM [Atomic Force Microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
    • G01Q60/54—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G01Q60/56—Probes with magnetic coating

Definitions

  • the invention relates to a method of preparing a probe for magnetic force microscopy starting from an Atomic Force Microscope (AFM) tip, comprising the steps of depositing a magnetic material on the AFM tip and forming the tip by milling with a focussed ion beam.
  • AFM Atomic Force Microscope
  • Such a method is known from US-A-6 121 771.
  • mag- netic material is deposited on the AFM tip.
  • the MFM probe prepared in this known manner has a length-width ratio of approximately 8:1 or higher. This ratio is hereafter referred to as the aspect ratio.
  • a disadvantage of the known method of preparing an MFM probe is that it requires each AFM tip to be milled individually after it has been removed from the wafer that served as basis for the AFM tip. This is laborious and is an impediment for series production. The known method further demands that the milling with the focussed ion beam takes place from at least three directions, which in respect of production is also complicated.
  • the method according to the invention is characterized in that the magnetic material is first deposited on the AFM tip, after which milling with the focussed ion beam is carried out.
  • This provides the advantage that firstly, milling with the focussed ion beam can be carried out while the AFM tip is part of a wafer. This greatly facilitates series production, while in addition simplifying the production process due to the fact that the magnetic material can be deposited on the AFM tip one-sided.
  • milling with the focussed ion beam is carried out one-sided.
  • the fact that during milling the AFM tips do not need to be removed from the wafer is both efficient and economical .
  • a further considerable advantage is that the MFM probes obtained are more robust than prior art probes .
  • the geometry of the probe can be controlled more easily, so that it is easier to guarantee a product of superior quality.
  • the invention is embodied in the probe for magnetic force microscopy, prepared by the above-described method.
  • the probe according to the invention is characterized in that the same has an aspect ratio higher than 50:1. Practice has shown that a value of 167:1 can be achieved.
  • a so-called MFM probe is prepared with a planar magnetic element provided on a conventional AFM (Atomic Force Microscope) probe, wherein the magnetic element has a high aspect ratio.
  • the probe is prepared by focussed ion beam milling of a thin magnetic film that was previously deposited on one or more faces of the pyramidal tip of the AFM probe . Focussed ion beam milling allows the controlled removal of the magnetic film layer such as to leave a magnetic element having a width and thickness in the nanometer range and a length in the micron range. For example, the length may be 8 microns, while the width may be approximately 50 nanometers.
  • the magnetic element of the probe according to the invention has a very effectively controllable stable magnetic structure, with the magnetic charge being concentrated at the two ends. This makes it possible to obtain MFM images at a high resolution. Compared with the reso- lution of images obtained with the MFM probes according to the prior art, the resolution obtained with the probe according to the invention was shown to be 40% higher.

Abstract

The invention relates to a method of preparing a probe for magnetic force microscopy starting from an Atomic Force Microscope (AFM) tip, comprising the steps of depositing a magnetic material on the (AFM) tip and forming the tip by milling with a focussed ion beam, wherein the magnetic material is first deposited on the (AFM) tip, after which milling with the focussed ion beam is carried out.

Description

PROBE FOR AGNETIC FORCE MICROSCOPY AND ETHOD OF PREPARING SUCH A PROBE
The invention relates to a method of preparing a probe for magnetic force microscopy starting from an Atomic Force Microscope (AFM) tip, comprising the steps of depositing a magnetic material on the AFM tip and forming the tip by milling with a focussed ion beam.
Such a method is known from US-A-6 121 771. In the known method one starts from an atomic force microscope tip or AFM tip, which is given the desired form by means of milling with a focussed ion beam. Subsequently mag- netic material is deposited on the AFM tip. The MFM probe prepared in this known manner has a length-width ratio of approximately 8:1 or higher. This ratio is hereafter referred to as the aspect ratio.
A disadvantage of the known method of preparing an MFM probe is that it requires each AFM tip to be milled individually after it has been removed from the wafer that served as basis for the AFM tip. This is laborious and is an impediment for series production. The known method further demands that the milling with the focussed ion beam takes place from at least three directions, which in respect of production is also complicated.
It is the object of the invention to provide a method of preparing MFM-probes that are simple and less costly to produce, while in addition being better suited for series production. Further advantages that can be achieved will be elucidated below.
The method according to the invention is characterized in that the magnetic material is first deposited on the AFM tip, after which milling with the focussed ion beam is carried out.
This provides the advantage that firstly, milling with the focussed ion beam can be carried out while the AFM tip is part of a wafer. This greatly facilitates series production, while in addition simplifying the production process due to the fact that the magnetic material can be deposited on the AFM tip one-sided.
It is also advantageous that milling with the focussed ion beam is carried out one-sided. The fact that during milling the AFM tips do not need to be removed from the wafer is both efficient and economical . These are further advantages that can be achieved because milling with the focussed ion beam can also take place one-sided. A further considerable advantage is that the MFM probes obtained are more robust than prior art probes . Generally speaking, the geometry of the probe can be controlled more easily, so that it is easier to guarantee a product of superior quality. Finally, the invention is embodied in the probe for magnetic force microscopy, prepared by the above-described method. The probe according to the invention is characterized in that the same has an aspect ratio higher than 50:1. Practice has shown that a value of 167:1 can be achieved.
Example
For high resolution magnetic force microscopy a so- called MFM probe is prepared with a planar magnetic element provided on a conventional AFM (Atomic Force Microscope) probe, wherein the magnetic element has a high aspect ratio. The probe is prepared by focussed ion beam milling of a thin magnetic film that was previously deposited on one or more faces of the pyramidal tip of the AFM probe . Focussed ion beam milling allows the controlled removal of the magnetic film layer such as to leave a magnetic element having a width and thickness in the nanometer range and a length in the micron range. For example, the length may be 8 microns, while the width may be approximately 50 nanometers. Thanks to this very high aspect ratio, the magnetic element of the probe according to the invention has a very effectively controllable stable magnetic structure, with the magnetic charge being concentrated at the two ends. This makes it possible to obtain MFM images at a high resolution. Compared with the reso- lution of images obtained with the MFM probes according to the prior art, the resolution obtained with the probe according to the invention was shown to be 40% higher.

Claims

1. A method of preparing a probe for magnetic force microscopy starting from an Atomic Force Microscope (AFM) tip, comprising the steps of depositing a magnetic material on the AFM tip and forming the tip by milling with a focussed ion beam, characterised in that the magnetic material is first deposited on the AFM tip, after which milling with the focussed ion beam is carried out .
2. A method according to claim 1, characterised in that the magnetic material can be deposited on the AFM tip one-sided.
3. A method according to claim 1 or 2 , characterised in that milling with the focussed ion beam is carried out while the AFM tip is part of a wafer.
4. A method according to claim 3, characterised in that milling with the focussed ion beam is carried out onesided.
5. A probe for magnetic force microscopy prepared in accordance with the method according to one of the claims 1- 4, characterised in that the same has an aspect ratio higher than 50:1.
PCT/NL2003/000193 2002-04-08 2003-03-17 Probe for magnetic force microscopy and method of preparing such a probe WO2003087859A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003217076A AU2003217076A1 (en) 2002-04-08 2003-03-17 Probe for magnetic force microscopy and method of preparing such a probe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1020327 2002-04-08
NL1020327A NL1020327C2 (en) 2002-04-08 2002-04-08 Probe for magnetic force microscopy, and method for manufacturing such a probe.

Publications (1)

Publication Number Publication Date
WO2003087859A1 true WO2003087859A1 (en) 2003-10-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2003/000193 WO2003087859A1 (en) 2002-04-08 2003-03-17 Probe for magnetic force microscopy and method of preparing such a probe

Country Status (3)

Country Link
AU (1) AU2003217076A1 (en)
NL (1) NL1020327C2 (en)
WO (1) WO2003087859A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0866341A2 (en) * 1997-03-20 1998-09-23 International Business Machines Corporation Alternating current magnetic force microscopy system with probe having integrated coil
US5844251A (en) * 1994-01-05 1998-12-01 Cornell Research Foundation, Inc. High aspect ratio probes with self-aligned control electrodes
US6159742A (en) * 1998-06-05 2000-12-12 President And Fellows Of Harvard College Nanometer-scale microscopy probes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5844251A (en) * 1994-01-05 1998-12-01 Cornell Research Foundation, Inc. High aspect ratio probes with self-aligned control electrodes
EP0866341A2 (en) * 1997-03-20 1998-09-23 International Business Machines Corporation Alternating current magnetic force microscopy system with probe having integrated coil
US6159742A (en) * 1998-06-05 2000-12-12 President And Fellows Of Harvard College Nanometer-scale microscopy probes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LEINENBACH P ET AL: "FABRICATION AND CHARACTERIZATION OF ADVANCED PROBES FOR MAGNETIC FORCE MICROSCOPY", APPLIED SURFACE SCIENCE, ELSEVIER, AMSTERDAM, NL, vol. 144/145, 1999, pages 492 - 496, XP000961378, ISSN: 0169-4332 *

Also Published As

Publication number Publication date
AU2003217076A1 (en) 2003-10-27
NL1020327C2 (en) 2003-10-13

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