WO2003090253A8 - Single axis manipulator with controlled compliance - Google Patents

Single axis manipulator with controlled compliance

Info

Publication number
WO2003090253A8
WO2003090253A8 PCT/US2003/011466 US0311466W WO03090253A8 WO 2003090253 A8 WO2003090253 A8 WO 2003090253A8 US 0311466 W US0311466 W US 0311466W WO 03090253 A8 WO03090253 A8 WO 03090253A8
Authority
WO
WIPO (PCT)
Prior art keywords
handling unit
material handling
tester
manipulator
single axis
Prior art date
Application number
PCT/US2003/011466
Other languages
French (fr)
Other versions
WO2003090253A2 (en
WO2003090253A3 (en
Inventor
Michael A Chiu
Neil R Bentley
Original Assignee
Teradyne Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teradyne Inc filed Critical Teradyne Inc
Priority to CN038086115A priority Critical patent/CN1646929B/en
Priority to AU2003221925A priority patent/AU2003221925A1/en
Priority to JP2003586912A priority patent/JP4443937B2/en
Priority to EP03718386A priority patent/EP1495484A2/en
Publication of WO2003090253A2 publication Critical patent/WO2003090253A2/en
Publication of WO2003090253A3 publication Critical patent/WO2003090253A3/en
Publication of WO2003090253A8 publication Critical patent/WO2003090253A8/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

A semiconductor test system that includes a tester (150), a material handling unit (100) and a manipulator that positions the tester relative to the material handling unit (100). The manipulator is in the form of a cart that can be wheeled to the material handling unit. The cart is attached to the material handling unit (100) to provide course positioning of the tester relative to the handling unit. Major motion of the test head is constrained to an axis perpendicular to the mating interface of the material handling unit. However, compliant motion, with up to six degrees of freedom, is possible in a complaint zone near the handler. In this way, alignment units on the tester and material handling unit can accurately control the final positioning of the tester relative to the material handling unit.
PCT/US2003/011466 2002-04-16 2003-04-14 Single axis manipulator with controlled compliance WO2003090253A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN038086115A CN1646929B (en) 2002-04-16 2003-04-14 Single axis manipulator with controlled compliance
AU2003221925A AU2003221925A1 (en) 2002-04-16 2003-04-14 Single axis manipulator with controlled compliance
JP2003586912A JP4443937B2 (en) 2002-04-16 2003-04-14 Automated test system with compliance for tester positioning and method of operating it
EP03718386A EP1495484A2 (en) 2002-04-16 2003-04-14 Single axis manipulator with controlled compliance

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US37306502P 2002-04-16 2002-04-16
US60/373,065 2002-04-16
US10/173,360 2002-06-17
US10/173,360 US6717432B2 (en) 2002-04-16 2002-06-17 Single axis manipulator with controlled compliance

Publications (3)

Publication Number Publication Date
WO2003090253A2 WO2003090253A2 (en) 2003-10-30
WO2003090253A3 WO2003090253A3 (en) 2003-12-18
WO2003090253A8 true WO2003090253A8 (en) 2004-02-12

Family

ID=28794037

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/011466 WO2003090253A2 (en) 2002-04-16 2003-04-14 Single axis manipulator with controlled compliance

Country Status (8)

Country Link
US (1) US6717432B2 (en)
EP (1) EP1495484A2 (en)
JP (1) JP4443937B2 (en)
CN (1) CN1646929B (en)
AU (1) AU2003221925A1 (en)
MY (1) MY126679A (en)
TW (1) TWI292198B (en)
WO (1) WO2003090253A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004008487B4 (en) * 2004-02-20 2007-01-04 Heigl, Helmuth, Dr. Handling device for positioning a test head
US20130200915A1 (en) * 2012-02-06 2013-08-08 Peter G. Panagas Test System with Test Trays and Automated Test Tray Handling
DE102013109055A1 (en) 2013-08-21 2015-02-26 Turbodynamics Gmbh Alignment device and handling device
US11169203B1 (en) 2018-09-26 2021-11-09 Teradyne, Inc. Determining a configuration of a test system
US11461222B2 (en) 2020-04-16 2022-10-04 Teradyne, Inc. Determining the complexity of a test program

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5241870A (en) * 1991-07-22 1993-09-07 Intest Corporation Test head manipulator
US5506512A (en) * 1993-11-25 1996-04-09 Tokyo Electron Limited Transfer apparatus having an elevator and prober using the same
US5818219A (en) * 1994-11-24 1998-10-06 Advantest Corp. Semiconductor test system having test head connection apparatus
US5656942A (en) * 1995-07-21 1997-08-12 Electroglas, Inc. Prober and tester with contact interface for integrated circuits-containing wafer held docked in a vertical plane
CA2174784C (en) * 1996-04-23 1999-07-13 George Guozhen Zhong Automatic multi-probe pwb tester
US5949002A (en) * 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance
US6441607B1 (en) * 2000-12-01 2002-08-27 N&K Technology, Inc. Apparatus for docking a floating test stage in a terrestrial base

Also Published As

Publication number Publication date
US6717432B2 (en) 2004-04-06
WO2003090253A2 (en) 2003-10-30
WO2003090253A3 (en) 2003-12-18
TW200305963A (en) 2003-11-01
AU2003221925A8 (en) 2003-11-03
CN1646929B (en) 2010-05-12
JP2005523457A (en) 2005-08-04
EP1495484A2 (en) 2005-01-12
CN1646929A (en) 2005-07-27
MY126679A (en) 2006-10-31
JP4443937B2 (en) 2010-03-31
AU2003221925A1 (en) 2003-11-03
US20030193327A1 (en) 2003-10-16
TWI292198B (en) 2008-01-01

Similar Documents

Publication Publication Date Title
WO2007078721A3 (en) Test equipment positional control manipulator
WO2006076538A3 (en) System and method for remotely controlling docking station components
AU2001277758A1 (en) Optical element holding device
WO2010036501A3 (en) Orientation and presence detection for use in configuring operations of computing devices in docked environments
WO2005074362A3 (en) Robot docking station
MY140532A (en) Test head docking system and method
WO2005071351A3 (en) Robotic measuring system comprising an articulated supporting arm and an articulated measuring arm
WO2004003466A3 (en) Probe or stylus orientation
MY137975A (en) Proximity meniscus manifold
WO2004017387A3 (en) Vision system
EP1548597A4 (en) Device and method for providing data exchange and storage
SG142256A1 (en) Electronic device handler for a bonding apparatus
DE60212202D1 (en) CASE FOR RECORDING A VIDEO UNIT, WITH AN ELECTRONIC CONSOLE, SUCH AS, FOR EXAMPLE. VIDEO PLAYER OR GAME CONSOLE, AND AN INDEPENDENT DISPLAY DEVICE
FR2900857B1 (en) MANIPULATOR ROBOT
TW200707865A (en) Adapter, interface device with the adapter, and electronic component test apparatus
WO2003090253A8 (en) Single axis manipulator with controlled compliance
JP2007021691A (en) Hand for carrying ring and carrying device using the hand
WO2005093547A3 (en) Docking station
EP1886771A4 (en) Rotation center point calculating method, rotation axis calculating method, program creating method, operation method, and robot apparatus
AU2003245196A1 (en) A control system and method for controlling one or several manipulators
SE0202205D0 (en) Fastener
MY128910A (en) Test head actuation system with positoining and compliant modes
BR0317791A (en) Portable Electronic Device, Multimedia Device Interface, and Method for Coupling a Portable Electronic Device to a Multimedia Device
CN104108097A (en) Feeding and discharging mechanical arm system based on gesture control
SE0102217L (en) Device and method for creating an environment in a real environment for a creature for the creature

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
CFP Corrected version of a pamphlet front page

Free format text: PUBLISHED FIGURE REPLACED BY CORRECT FIGURE

WWE Wipo information: entry into national phase

Ref document number: 2003586912

Country of ref document: JP

WWE Wipo information: entry into national phase

Ref document number: 20038086115

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 2003718386

Country of ref document: EP

WWP Wipo information: published in national office

Ref document number: 2003718386

Country of ref document: EP