WO2003102679A1

WO2003102679A1 - Apparatus for inspecting flat panel display

Info

Publication number: WO2003102679A1
Application number: PCT/KR2002/001703
Authority: WO
Inventors: Jang-Ho Cho; Kyu-Sung Shin; Young-Chul Jang
Original assignee: Charm Engineering Co., Ltd.
Priority date: 2002-06-04
Filing date: 2002-09-10
Publication date: 2003-12-11
Also published as: KR20030094559A; AU2002335903A1; KR100489522B1

Abstract

The present invention relates to an apparatus for inspecting Flat Panel Display, which allows to reduce electricity consume as well as inspection time, while enhancing correctness of the inspection, and, in addition, allows to reduce the apparatus volume so that a substantial cut off in the investment costs required for construction of a clean room.

Description

APPARATUS FOR INSPECTING FLAT PANEL DISPLAY

Technical Field

The present invention relates generally to apparatuses for inspecting a flat panel display, and more particularly to an apparatus for inspecting a flat panel display, which can improve the reliability of the inspection of the flat panel display by increasing the precision of the inspection while reducing power consumption and shortening an inspection time.

Background Art

Generally, Flat Panel Displays (FPDs) are a term generally designating a variety of flat panel displays. FPDs are classified into Cathode Ray Tube (CRT) displays, Liquid Crystal Displays (LCDs) which will be described later, etc.

A CRT display is designed such that a panel and a funnel attached to each other in a front-back relation are made of glass and an electron gun is accommodated in a neck portion of the funnel. The CRT display has the advantage of high resolution, while it has the disadvantage of heavy weight.

Therefore, currently, with the development of display industries, the supply and demand for LCDs rather than CRTs has increased. Hereinafter, for convenience of description, flat panel displays are assumed to be LCDs, descriptions of which will be given later. Fig. 1 is a perspective view of a typical computer to which an LCD is applied. As shown in Fig. 1, the typical computer is designed so that a Random Access Memory (RAM), a disc driver, various cards including a graphic card, etc. are mounted on a main board on which a Central Processing Unit (CPU) is mounted. Further, the computer comprises a main body 110 on which a keyboard 110a for inputting predetermined information and the like are mounted, and a display unit 120 connected to the main body 110, outside the main board.

The display unit 120 comprises a panel 115 which is supported by a pair of housings 112a and 112b attached to each other in a front-back relation and on which images are displayed, and a backlight unit 118 arranged on the back of the panel 115 to transmit light to the panel 115. In this case, an LCD 1 is used as the panel 115.

As described later, the panel 115 to which the LCD 1 is applied is designed such that it cannot emit light by itself and adjusts a transmission rate of light. Therefore, in order to form a predetermined image on the panel 115, the backlight unit 118 that proj ects light to the panel 115 is required.

The LCD 1 employed in the panel 115 of Fig. 1 is described in detail below.

The LCD 1, as understood by its name, is designed to apply electrical and optical properties of liquid crystal, which is a mesomorphic phase between liquid and solid, to a display unit. The LCD 1 is a device in which liquid crystals, which are organic molecules having fluidity like liquid, are regularly arranged like crystal. The LCD 1 is implemented as a display unit using properties that such molecular arrangement varies depending on an external electric field. The LCD 1 has characteristics such as light weight, slim design, low power consumption, and low voltage driving, and is popularly used as a display unit of portable televisions, computers and the like.

The LCD 1 is different from other conventional display units in that it uses light inputted from the outside, especially, light of light sources of the backlight unit 118. Light comprises waves having a predetermined polarization. If vertically polarized waves reach a filter, light does not pass through the filter; while only if horizontally polarized waves reach the filter, light passes through the filter. In the LCD 1, liquid crystals are arranged in a predetermined direction by an electric field. In this case, the LCD 1 allows light comprising waves having a predetermined polarization to selectively pass therethrough. The LCD 1 is advantageous in that it can be manufactured to be small- sized and slim, and it can reduce power consumption. The liquid crystals, existing in an intermediate state between liquid and solid, transmit or intercept light according to the variation of a voltage and a temperature. Therefore, a voltage and a temperature of a specific part of the LCD 1 are adjusted to control the brightness of the LCD 1, thus enabling a desired image to be displayed on the LCD 1. Accordingly, the LCD 1 is profitably applied to thin, small-sized and low power devices, but unfit to realize a large size, implement full colors, improve contrast, and widen a viewing angle. A screen resolution of the LCD 1 signifies the number of pixels which can be represented horizontally and directly reflects a horizontal resolution. The number of pixels, which can be represented vertically, signifies a vertical resolution. Therefore, the LCD 1 with a resolution of XGA (1024x768) has a total of 1024 x 768 x 3 sub-pixels. The LCD 1 adopts two types of cell operation control. They are classified into a passive matrix type control and an active matrix type control according to driving methods.

The passive matrix type control (TN, STN) simplifies the construction of LCD, because scan electrodes and signal electrodes are arranged in X and Y directions, respectively, and their intersecting points are used as display pixels.

For example, Twisted Nematic (TN) and STN (Super Twisted Nematic) LCDs belong to the passive matrix type. Further, the STN LCD is utilized for a high display density, while the TN LCD is utilized for a low display density.

The active matrix type control (Thin Film Transistor: TFT) is divided into a three-terminal device type control in which a TFT is arranged per display pixel, and a two-terminal device type control in which a device (diode) having non-linear characteristics with respect to a current and a voltage is arranged per display pixel. Since the active matrix type LCD directly drives respective pixels, it can display a screen with a high quality and is used in color display. In this way, in the LCD 1, predetermined pieces of coordinate information including scan electrodes and signal electrodes are provided. That is, as shown in Fig. 2, on the LCD 1, a plurality of contact pad groups 2a to 2d to which pieces of coordinate information including electrical signals are respectively inputted are formed. In this case, the contact pad groups 2a to 2d are each comprised of three pads, and are formed to be arranged in different directions.

The pieces of coordinate information of the LCD 1 are generally inputted to the LCD 1 through a process of forming the plural contact pad groups 2a to 2d to which pieces of predetermined coordinate information including electrical signals are respectively inputted when the LCD 1 is manufactured. A manufacturing company that manufactures a computer having the construction shown in Fig. 1 inspects coordinate information in LCDs provided from the LCD manufacturing company, and adopts only LCDs determined to be of good quality as the panel 115 of the display unit 120.

A conventional apparatus for inspecting a flat panel display is depicted in Fig. 3. The flat panel display inspection apparatus inspects open and short characteristics of predetermined coordinate information included in the LCD 1, for example, electrical signals. As shown in Fig. 3, the conventional flat panel display inspection apparatus comprises a pair of columns 130 spaced apart from each other by a predetermined interval, a connection bar 132 used to connect the pair of columns 130 to each other, a probe unit 140 fixed to the connection bar 132 to inspect coordinate information of the LCD 1, a stage 134 that supports the LCD 1 and is movable in at least X and Y directions, and a monitor unit (not shown) that outputs inspected information.

The probe unit 140 comprises a main body unit 140a and a probe card 140b. The main body unit 140a is fixed to the connection bar 132 and formed to be movable upwardly and downwardly. The probe card 140b is arranged at a lower portion of the main body unit 140a to inspect information of the LCD 1 while coming into contact with any of the plural contact pad groups 2a to 2d which are arranged on the LCD 1 and to which pieces of predetermined coordinate information including electrical signals are inputted. Three probe tips (not shown) are attached to the probe card 140b to correspondingly come into contact with three pads of each of the contact pad groups 2a to 2d on the LCD 1.

Therefore, if the LCD 1 to be inspected is seated on the stage 134 by a robot (not shown), the stage 134 moves in X and Y directions by predetermined distances so as to allow one arbitrarily selected group among the plural contact pad groups 2a to 2d on the LCD 1 to be inspected to be arranged vertically under the probe tips of the probe card 140b.

If the position of the LCD 1 to be inspected is determined by the movement of the stage 134 in X and Y directions, the probe card 140b moves downwardly by the operation of the main body unit 140a of the probe unit 140. At this time, the probe tips come into contact with any of the contact pad groups

2a to 2d formed on the LCD 1, such that the information of the LCD 1 is read. The information obtained by the probe tips is outputted to the monitor unit, such that it is determined whether electrical signals are shorted and opened, thus enabling the LCD 1 to be determined as good or defective. However, the conventional flat panel display inspection apparatus inspects short and open characteristics of electrical signals of the LCD while moving the LCD 1 to be inspected. Accordingly, if the LCD is enlarged, the stage must also be enlarged to correspond to the LCD and then must move in X and Y directions. In this case, the conventional flat panel display inspection apparatus is problematic in that, if the enlarged stage moves in X and Y directions, the moving range of the stage increases, the precision of the inspection decreases, an inspection time increases, and power consumption required to move the enlarged stage increases. Moreover, if the stage is enlarged, the flat panel display inspection apparatus itself must be enlarged, and a large clean room in which the enlarged flat panel display inspection apparatus will be installed must be constructed.

Disclosure of the Invention

Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide an apparatus for inspecting a flat panel display, which increases the precision of an inspection of the flat panel display while reducing power consumption and shortening an inspection time, thus improving the reliability of the inspection.

Another object of the present invention is to provide an apparatus for inspecting a flat panel display, which can remarkably reduce equipment investment costs required to construct a large clean room by miniaturizing the flat panel display inspection apparatus. In order to accomplish the above object, the present invention provides an apparatus for inspecting a flat panel display, the apparatus inspecting a liquid crystal display (LCD) on which a plurality of contact pad groups with pieces of predetermined coordinate information including electrical signals inputted thereto are formed, comprising an inspection table; a stage arranged on the inspection table for allowing the LCD to be inspected to be seated thereon; at least one probe unit having one or more probe tips for detecting predetermined information inputted to the contact pad groups while being in contact with the contact pad groups of the LCD seated on the stage; probe moving means arranged on the inspection table to move the probe unit in at least one direction so as to allow the probe tips attached to the probe unit to come into contact with the contact pad groups formed on the LCD to be inspected; and a monitor unit for outputting result values inspected by the probe tips coming into contact with the contact pad groups on the LCD.

Preferably, said stage is arranged to be rocked within a predetermined range of angles relative to a horizontal direction of a top surface of the inspection table. Preferably, the flat panel display inspection apparatus further comprises a plurality of horizontal adjusters arranged below four corners of a bottom of the inspection table to support the inspection table and adjust a height of the inspection table.

Preferably, the flat panel display inspection apparatus further comprises vibration absorbing means mounted in the inspection table to eliminate vibration which may be generated at said inspection table.

The probe moving means comprises an X axis moving unit for moving the probe unit parallelly with a loading direction of the LCD loaded on the stage; a Y axis moving unit for moving the probe unit along a transverse direction relative to the X axis moving unit; and at least one Z axis moving unit mounted on the probe unit to upwardly and downwardly move the probe tips on the Y axis moving unit.

The X axis moving unit comprises first and second X axis supports arranged to be spaced apart from each other along the transverse direction relative to the loading direction of the LCD which is loaded on the stage, and arranged to stand on a top surface of the inspection table; first and second X axis rail units arranged on the first and second X axis supports; at least one pair of X axis rail blocks formed in the shape of a dovetail to be slidably movable on the first and second X axis rail units; and X axis driving units for slidably moving the X axis rail blocks on the first and second X axis rail units.

Preferably, said X axis rail blocks are arranged at four corners of a rectangle around the stage.

The Y axis moving unit comprises first and second Y axis supports for each connecting each pair of X axis rail blocks; first and second Y axis rail units arranged on the first and second Y axis supports; Y axis rail blocks each having a first end coupled to any of the first and second Y axis rail units to be slidably movable, and a second end coupled to the probe unit; and Y axis driving units for slidably moving the Y axis rail blocks on the first and second Y axis rail units. Preferably, said Y axis rail blocks are arranged such that each pair of Y axis rail blocks are arranged on each of the first and second Y axis rail units.

The Z axis moving unit comprises a fixing unit coupled to each of the Y axis rail blocks; an operating unit connected to the fixing unit to be movable upwardly and downwardly relative to the fixing unit; and a Z axis driving unit for moving the operating unit upwardly and downwardly relative to the fixing unit.

The operating unit is mounted with at least one camera for taking a photograph of the LCD and sending the photograph to the monitor unit.

Preferably, said operating unit has a camera moving unit disposed between the operating unit and the camera to move the camera transversely relative to an elevating direction of the operating unit.

Further, said probe tips are respectively attached to a pair of probe cards detachably connected to lower portions of the operating unit, and said probe cards are connected to lower portions of the probe unit in different arrangement directions and formed as a single pair. In this case, said pair of probe cards arranged at the lower portions of the probe unit are first and second probe cards, and first and second probe tips attached to the first and second probe cards have end portions bent toward the LCD and are arranged to be orthogonal to each other.

The first and second probe cards are capable of independently moving upwardly and downwardly on the operating unit.

Preferably, the flat panel display inspection apparatus further comprises a control unit for controlling said stage, said probe unit, said probe moving means, and said camera. Further, the flat panel display inspection apparatus further comprises a cabinet for covering said inspection table to define an external shape of the flat panel display inspection apparatus.

Brief Description of the Drawings

The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:

Fig. 1 is a perspective view of a typical computer to which an LCD is applied;

Fig. 2 is a plan view showing an LCD on which a plurality of contact pad groups with pieces of predetermined coordinate information including electrical signals inputted thereto are formed;

Fig. 3 is a perspective view of a conventional apparatus for inspecting a flat panel display;

Fig. 4 is a perspective view of an apparatus for inspecting a flat panel display according to the present invention; Fig. 5 is a partially enlarged perspective view of Fig. 4;

Fig. 6 is a partially enlarged perspective view of Fig. 5; Fig. 7 is an enlarged perspective view showing a lower portion of a probe unit of Fig. 4; and

Fig. 8 is a control block diagram of the flat panel display inspection apparatus according to the present invention.

Best Mode for Carrying Out the Invention

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. Components necessary for the present invention are described with reference to the above-described Figs. 1 to 3, in which the same reference numerals are used throughout the different drawings. An apparatus for inspecting a flat panel display according to the present invention is used to determine the quality of the LCD 1 by detecting information from the contact pad groups 2a to 2d which are arranged on the LCD 1 of Fig. 2 and to which pieces of predetermined coordinate information including electrical signals are inputted.

As shown in Figs. 4 and 5, the flat panel display inspection apparatus comprises a cabinet 10 defining an external shape of the flat panel display inspection apparatus, an inspection table 12 mounted in the cabinet 10, a stage 16 arranged on the inspection table 12 to allow the LCD 1 which will be inspected to be seated thereon, probe units 20 arranged above the stage 16, a probe moving means for moving the probe units 20 in at least one direction, and a monitor unit 32 for outputting the result values of inspection performed by probe tips of each of the probe units 20.

As shown in Fig. 4, the cabinet 10 is comprised of a plurality of unit sidewalls 10a to protect the inspection table 12 and the probe units 20 from the outside. When the flat panel display inspection apparatus is not used, the cabinet 10 can be closed.

The inspection table 12 is mounted in the cabinet 10 and is manufactured in the form of a surface plate. Although not shown in the drawing, a vibration absorbing means is mounted in the inspection table 12 to eliminate vibration which may be generated outside and inside the inspection table 12.

A plurality of horizontal adjusters 14 are arranged below four corners of a bottom of the inspection table 12 to support the inspection table 12. Each of the horizontal adjusters 14 horizontally supports the inspection table 12 and has height adjusting bolts 14a to adjust the height of the inspection table 12.

The stage 16 on which the LCD 1 to be inspected is seated is arranged to be rocked within a predetermined range of angles relative to a horizontal direction of the top surface of the inspection table 12. A reason for arranging the stage 16 to be rocked in this manner is to more precisely and rapidly correct a loading position of the LCD 1.

Therefore, if a loading angle of a robot that loads the LCD 1 on the inspection apparatus of the present invention can be precisely controlled, there is no need to arrange the stage 16 to be able to be rocked. Although rocking means is not shown, an oscillation device and the like can be used as the rocking means.

The probe moving means is mounted on the inspection table 12, and moves the probe units 20 in at least one direction to allow probe tips 21a and 22a, attached to each of the probe units 20, which will be described later, to come into contact with the contact pad groups 2a to 2d on the LCD 1 to be inspected. In this case, the term "one direction" represents any of X, Y and Z axis directions, as will be described later.

The probe moving means comprises an X axis moving unit 40 for moving the probe units 20 parallelly with a loading direction of the LCD 1 loaded on the stage 16, a Y axis moving unit 50 for moving the probe units 20 transversely relative to the X axis moving unit 40, and four Z axis moving units 60 each mounted on the probe units 20 to move the probe tips 21a and 22a upwardly and downwardly on the Y axis moving unit 50.

Since it is difficult to indicate a reference numeral of the probe moving means on the drawings, the reference numeral thereof is omitted hereinafter. Further, for movement in X, Y and Z axes, the probe moving means employs a Linear Motion (LM) guide construction in which a ball screw rotating by a motor is mounted to allow axes to move. Detailed description relating to the LM guide construction is omitted.

The X axis moving unit 40 includes first and second X axis supports 41a and 41b that are arranged to be spaced apart from each other along the transverse direction relative to the loading direction of the LCD 1 which is loaded on the stage 16, and are arranged to stand on the top surface of the inspection table 12, first and second X axis rail units 42a and 42b arranged on the first and second X axis supports 41a and 41b, respectively, at least one pair of X axis rail blocks 43 formed in the shape of a dovetail to be slidably movable on the first and second X axis rail units 42a and 42b, and X axis driving units 44 for slidably moving the X axis rail blocks 43 on the first and second X axis rail units 42a and 42b.

In this case, the X axis rail blocks 43 can be implemented as a single pair. However, in this embodiment, the X axis rail blocks 43 are arranged at four corners of a rectangle around the stage 16 so as to improve the reliability of an inspection by increasing the precision thereof while shortening an inspection time.

The Y axis moving unit 50 comprises first and second Y axis supports 51a and 51b for connecting two pairs of X axis rail blocks 43, respectively, first and second Y axis rail units 52a and 52b arranged on the first and second Y axis supports 51a and 51b, respectively, Y axis rail blocks 53 each having one end coupled to the first or second Y axis rail units 52a or 52b to be slidably movable, and the other end coupled to each of the probe units 20, and Y axis driving units 54 for slidably moving the Y axis rail blocks 53 on the first and second Y axis rail units 52a and 52b.

In this case, each pair of Y axis rail blocks 53 are arranged on each of the first and second Y axis rail units 52a and 52b. Therefore, the number of probe units 20 connected to the Y axis rail blocks 53 is four in total. Each of the Z axis moving units 60 comprises a fixing unit 62 coupled to each of the Y axis rail blocks 53, an operating unit 64 connected to the fixing unit 62 to be movable upwardly and downwardly relative to the fixing unit 62, and a Z axis driving unit 66 for moving the operating unit 64 upwardly and downwardly relative to the fixing unit 62. The operating unit 64 of the probe moving means is equipped with a camera 70. The camera 70 is electrically connected to the monitor unit 32 to transmit an image signal obtained by photographing the LCD 1 to the monitor unit 32. Accordingly, an operator performs tasks, such as rocking of the stage 16 at a predetermined angle through a control unit (34 of Fig. 8), or control of the position of each probe unit 20 through the probe moving means while checking a partial image of the LCD 1 photographed by the camera 70.

As described above, the operator performs the loading of the LCD 1, the rocking of the stage 15, the position control of the probe units 20 through the probe moving means, etc., by controlling the control unit 34 while checking the monitor unit 32. However, all of these tasks can be performed in a fully automatic manner by a predetermined control program.

A camera moving unit 72 is disposed between the operating unit 64 and the camera 70 to move the camera 70 transversely relative to an elevating direction of the operating unit 64. As shown in Fig. 6, the camera moving unit

72 includes a transverse fixing block 72a, a transverse operating block 72b, and a camera drive motor 72c. The transverse fixing block 72a is fixed to the operating unit 64. The transverse operating block 72b is connected to the camera 70 and engaged with the transverse fixing block 72a in the form of a dovetail, and is movable transversely relative to the transverse fixing block 72a.

The camera drive motor 72c drives the transverse operating block 72b. At this time, the camera drive motor 72c is also controlled by the control unit 34.

Meanwhile, as shown in Figs. 6 and 7, first and second probe cards 21 and 22 are detachably connected to lower portions of each of the probe units 20. Further, first and second probe tips 21a and 22a are attached to the first and second probe cards 21 and 22, respectively, to detect predetermined information inputted to contact pad groups (2a to 2d of Fig. 2) while being in contact with the contact pad groups (2a to 2d of Fig. 2) of the LCD 1.

As described above with reference to Fig. 2, the contact pad groups (2a to 2d of Fig. 2) of the LCD 1 have different arrangement directions.

Accordingly, the first and second probe cards 21 and 22 are also arranged to have different arrangement directions (orthogonal directions) at lower portions of each of the probe units 20 so as to correspond to the different arrangement directions of the contact pad groups (2a to 2d of Fig. 2). The first and second probe cards 21 and 22 are fixed by clamps 2 Id and 22d, respectively.

The first and second probe cards 21 and 22 are arranged to be orthogonal to each other, such that the first and second probe tips 21a and 22a attached to the first and second probe cards 21 and 22 are also arranged to be orthogonal to have different arrangement directions. End portions of the first and second probe tips

21a and 22a are downwardly bent to come into contact with the contact pad groups (2a to 2d of Fig. 2).

The first and second probe cards 21 and 22 arranged to be orthogonal to each other are independently movable upwardly and downwardly on the operating unit 64. That is, the first probe card 21 independently moves upwardly and downwardly by a first probe elevating unit 21b, and the second probe card 22 also independently moves upwardly and downwardly by a second probe elevating unit 22b, as shown in Fig. 7.

Therefore, any group (2a of Fig. 2) of the plural contact pad groups (2a to 2d of Fig. 2) shown in Fig. 2 is inspected by, for example, the first probe tip

21a of the first probe card 21 through the first probe elevating unit 21b. Further, another group (2b of Fig. 2) thereof can be inspected by, for example, the second probe tip 22a of the second probe card 22 through the second probe elevating unit

22b. Properly, result values inspected by the first and second probe tips 21a and 22a are outputted to the monitor unit 32.

In this case, the first and second probe elevating units 21b and 22b employ elevating cylinders 21c and 22c together with the LM guide, differently from the above-described construction employing a motor and a ball screw.

This is due to the fact that the first and second probe tips 21a and 22a reciprocate only between both end positions, that is, start and end positions, so it is more profitable to control the elevating cylinders compared to the motor.

An inspecting process of the flat panel display inspection apparatus having the above construction is described in detail.

An LCD 1 extracted from a cassette (not shown) accommodating a plurality of LCDs as an arbitrary sample is drawn out by a transfer robot and loaded on the stage 16 on the inspection table 12.

If the LCD 1 to be inspected is seated on the stage 16, the camera 70 is driven by the control unit 34 to output predetermined loading coordinates formed on the LCD 1 to the monitor. An inspection position of the LCD 1 is set while the stage 16 is rocked within a predetermined range of angles relative to a horizontal direction so as to allow the inspection apparatus to be arranged according to a condition in which the outputted loading coordinates are set.

If the position of the LCD 1 is set on the stage 16, the probe moving means is driven. That is, four X axis rail blocks 43 move in the X axis direction, respectively, on the first and second X axis rail units 42a and 42b by the X axis driving units 44. Further, four Y axis rail blocks 53 move in the Y axis direction, respectively, on the first and second Y axis rail units 52a and 52b by the Y axis driving units 54. In this way, if four probe units 20 move onto the respective contact pad groups (2a to 2d of Fig. 2) by the X axis moving unit 40 and the Y axis moving unit 50, each of the Z axis driving units 66 is operated. That is, the operating unit 64 moves downwardly relative to the fixing unit 62 by a predetermined height toward the LCD 1 to be inspected through the Z axis driving unit 66. If the operating unit 64 moves downwardly by a predetermined height, any of the first and second probe cards 21 and 22 moves downwardly by the operation of any of the first and second probe elevating units 21b and 22b, so a probe tip corresponding to the downwardly moving probe card comes into contact with a corresponding contact pad group. If the probe tip comes into contact with the contact pad group to detect predetermined information inputted to the contact pad group, the detected result value is outputted to the monitor unit 32, such that the quality of the LCD 1 is determined.

As described above, since the probe units 20 are constructed to be movable with respect to the LCD 1, the present invention can increase the precision of an inspection of the flat panel display while reducing power consumption and shortening an inspection time, thus increasing the reliability of the inspection. Further, the present invention can remarkably reduce equipment investment costs required to construct a large clean room by miniaturizing the flat panel display inspection apparatus.

Industrial Applicability

As described above, the present invention provides an apparatus for inspecting a flat panel display, which can increase the precision of an inspection of the flat panel display while reducing power consumption and shortening an inspection time, thus increasing the reliability of the inspection.

Further, the present invention is advantageous in that it can remarkably reduce equipment investment costs required to construct a large clean room by miniaturizing the flat panel display inspection apparatus.

Claims

1. An apparatus for inspecting a flat panel display, the apparatus inspecting a liquid crystal display (LCD) on which a plurality of contact pad groups with pieces of predetermined coordinate information including electrical signals inputted thereto are formed, comprising: an inspection table; a stage arranged on the inspection table for allowing the LCD to be inspected to be seated thereon; at least one probe unit having one or more probe tips for detecting predetermined .information inputted to the contact pad groups while being in contact with the contact pad groups of the LCD seated on the stage; probe moving means arranged on the inspection table to move the probe unit in at least one direction so as to allow the probe tips attached to the probe unit to come into contact with the contact pad groups formed on the LCD to be inspected; and a monitor unit for outputting result values inspected by the probe tips coming into contact with the contact pad groups on the LCD.

2. The flat panel display inspection apparatus according to claim 1, wherein said stage is arranged to be rocked within a predetermined range of angles relative to a horizontal direction of a top surface of the inspection table.

3. The flat panel display inspection apparatus according to claim 1, further comprising a plurality of horizontal adjusters arranged below four corners of a bottom of the inspection table to support the inspection table and adjust a height of the inspection table.

4. The flat panel display inspection apparatus according to claim 3, further comprising vibration absorbing means mounted in the inspection table to eliminate vibration which may be generated at said inspection table.

5. The flat panel display inspection apparatus according to claim 1, wherein said probe moving means comprises: an X axis moving unit for moving the probe unit parallelly with a loading direction of the LCD loaded on the stage; a Y axis moving unit for moving the probe unit along a transverse direction relative to the X axis moving unit; and at least one Z axis moving unit mounted on the probe unit to upwardly and downwardly move the probe tips on the Y axis moving unit.

6. The flat panel display inspection apparatus according to claim 5, wherein said X axis moving unit comprises: first and second X axis supports arranged to be spaced apart from each other along the transverse direction relative to the loading direction of the LCD which is loaded on the stage, and arranged to stand on a top surface of the inspection table; first and second X axis rail units arranged on the first and second X axis supports; at least one pair of X axis rail blocks formed in the shape of a dovetail to be slidably movable on the first and second X axis rail units; and

X axis driving units for slidably moving the X axis rail blocks on the first and second X axis rail units.

7. The flat panel display inspection apparatus according to claim 6, wherein said X axis rail blocks are arranged at four corners of a rectangle around the stage.

8. The flat panel display inspection apparatus according to claim 7, wherein said Y axis moving unit comprises: first and second Y axis supports for each connecting each pair of X axis rail blocks; first and second Y axis rail units arranged on the first and second Y axis supports;

Y axis rail blocks each having a first end coupled to any of the first and second Y axis rail units to be slidably movable, and a second end coupled to the probe unit; and Y axis driving units for slidably moving the Y axis rail blocks on the first and second Y axis rail units.

9. The flat panel display inspection apparatus according to claim 8, wherein said Y axis rail blocks are arranged such that each pair of Y axis rail blocks are arranged on each of the first and second Y axis rail units.

10. The flat panel display inspection apparatus according to claim 9, wherein said Z axis moving unit comprises: a fixing unit coupled to each of the Y axis rail blocks; an operating unit connected to the fixing unit to be movable upwardly and downwardly relative to the fixing unit; and a Z axis driving unit for moving the operating unit upwardly and downwardly relative to the fixing unit.

11. The flat panel display inspection apparatus according to claim 10, wherein said operating unit is mounted with at least one camera for taking a photograph of the LCD and sending the photograph to the monitor unit.

12. The flat panel display inspection apparatus according to claim 10, wherein said operating unit has a camera moving unit disposed between the operating unit and the camera to move the camera transversely relative to an elevating direction of the operating unit.

13. The flat panel display inspection apparatus according to claim 10, wherein: said probe tips are respectively attached to a pair of probe cards detachably connected to lower portions of the operating unit, and said probe cards are connected to lower portions of the probe unit in different arrangement directions and formed as a single pair.

14. The flat panel display inspection apparatus according to claim 13, wherein: said pair of probe cards arranged at the lower portions of the probe unit are first and second probe cards, and first and second probe tips attached to the first and second probe cards have end portions bent toward the LCD and are arranged to be orthogonal to each other.

15. The flat panel display inspection apparatus according to claim 14, wherein said first and second probe cards are capable of independently moving upwardly and downwardly on the operating unit.

16. The flat panel display inspection apparatus according to any of claims

1 to 15, further comprising a control unit for controlling said stage, said probe unit, said probe moving means, and said camera.

17. The flat panel display inspection apparatus according to claim 1, further comprising a cabinet for covering said inspection table to define an external shape of the flat panel display inspection apparatus.