WO2003106952A3 - A micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure - Google Patents

A micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure Download PDF

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Publication number
WO2003106952A3
WO2003106952A3 PCT/US2003/019121 US0319121W WO03106952A3 WO 2003106952 A3 WO2003106952 A3 WO 2003106952A3 US 0319121 W US0319121 W US 0319121W WO 03106952 A3 WO03106952 A3 WO 03106952A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
transducer
relative
resonance frequency
absolute pressure
Prior art date
Application number
PCT/US2003/019121
Other languages
French (fr)
Other versions
WO2003106952A2 (en
Inventor
Michael Pedersen
Mehmet Ozgur
Michael A Huff
Original Assignee
Corp For Nat Res Initiatives
Michael Pedersen
Mehmet Ozgur
Michael A Huff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corp For Nat Res Initiatives, Michael Pedersen, Mehmet Ozgur, Michael A Huff filed Critical Corp For Nat Res Initiatives
Priority to AU2003253656A priority Critical patent/AU2003253656A1/en
Publication of WO2003106952A2 publication Critical patent/WO2003106952A2/en
Publication of WO2003106952A3 publication Critical patent/WO2003106952A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Abstract

A micro-mechanical pressure transducer (100) is disclosed in which a capacitive transducer structure is integrated with an inductor coil (105) to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field in the transducer (100). The capacitive transducer structure (100) comprises a conductive movable diaphragm (106), a fixed counter electrode (107), and a predetermined air gap (109) between said diaphragm (106) and electrode (107). The diaphragm (106) deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer (100).
PCT/US2003/019121 2002-06-18 2003-06-18 A micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure WO2003106952A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003253656A AU2003253656A1 (en) 2002-06-18 2003-06-18 A micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US38929202P 2002-06-18 2002-06-18
US60/389,292 2002-06-18
US10/462,811 US7024936B2 (en) 2002-06-18 2003-06-17 Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure
US10/462,811 2003-06-17

Publications (2)

Publication Number Publication Date
WO2003106952A2 WO2003106952A2 (en) 2003-12-24
WO2003106952A3 true WO2003106952A3 (en) 2005-05-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/019121 WO2003106952A2 (en) 2002-06-18 2003-06-18 A micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

Country Status (3)

Country Link
US (3) US7024936B2 (en)
AU (1) AU2003253656A1 (en)
WO (1) WO2003106952A2 (en)

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Also Published As

Publication number Publication date
AU2003253656A8 (en) 2003-12-31
US7188530B2 (en) 2007-03-13
AU2003253656A1 (en) 2003-12-31
US20050028601A1 (en) 2005-02-10
WO2003106952A2 (en) 2003-12-24
US20050103112A1 (en) 2005-05-19
US7017419B2 (en) 2006-03-28
US20040057589A1 (en) 2004-03-25
US7024936B2 (en) 2006-04-11

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