WO2004010192A3 - Optical-ready substrates with optical waveguide circuits and microelectronic circuits - Google Patents

Optical-ready substrates with optical waveguide circuits and microelectronic circuits Download PDF

Info

Publication number
WO2004010192A3
WO2004010192A3 PCT/US2003/022687 US0322687W WO2004010192A3 WO 2004010192 A3 WO2004010192 A3 WO 2004010192A3 US 0322687 W US0322687 W US 0322687W WO 2004010192 A3 WO2004010192 A3 WO 2004010192A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical
circuits
optical waveguide
microelectronic
insulating layer
Prior art date
Application number
PCT/US2003/022687
Other languages
French (fr)
Other versions
WO2004010192A2 (en
Inventor
Lawrence C West
Dan Mayden
Samuel Broydo
Claes Bjorkman
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/280,492 external-priority patent/US7043106B2/en
Priority claimed from US10/280,505 external-priority patent/US7072534B2/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to EP03755727A priority Critical patent/EP1776610A2/en
Priority to AU2003273221A priority patent/AU2003273221A1/en
Publication of WO2004010192A2 publication Critical patent/WO2004010192A2/en
Publication of WO2004010192A3 publication Critical patent/WO2004010192A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4256—Details of housings
    • G02B6/4257—Details of housings having a supporting carrier or a mounting substrate or a mounting plate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Abstract

An article of manufacture comprising an optical-ready substrate (10) made of a first semiconductor layer (12), an insulating layer (14) on top of the first semiconductor layer, and a second semiconductor layer (16) on top of the insulating layer. An optical waveguide circuit (30) and photodetectors (32) are buried under the insulating layer. Electrical signals (33) are transferred via conducting lines (59) towards/from an microelectric circuit located on top of the substrate, and optical signals are coupled into/out of the optical waveguide circuit via mirrors (47).
PCT/US2003/022687 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits WO2004010192A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03755727A EP1776610A2 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits
AU2003273221A AU2003273221A1 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US39755202P 2002-07-22 2002-07-22
US60/397,552 2002-07-22
US10/280,492 US7043106B2 (en) 2002-07-22 2002-10-25 Optical ready wafers
US10/280,505 2002-10-25
US10/280,492 2002-10-25
US10/280,505 US7072534B2 (en) 2002-07-22 2002-10-25 Optical ready substrates

Publications (2)

Publication Number Publication Date
WO2004010192A2 WO2004010192A2 (en) 2004-01-29
WO2004010192A3 true WO2004010192A3 (en) 2004-04-22

Family

ID=30773468

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/022687 WO2004010192A2 (en) 2002-07-22 2003-07-21 Optical-ready substrates with optical waveguide circuits and microelectronic circuits

Country Status (3)

Country Link
EP (1) EP1776610A2 (en)
AU (1) AU2003273221A1 (en)
WO (1) WO2004010192A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016446A1 (en) * 2003-07-23 2005-01-27 Abbott John S. CaF2 lenses with reduced birefringence
FR2867898B1 (en) * 2004-03-17 2006-09-15 Commissariat Energie Atomique FABRICATION OF AN OPTICAL INTERCONNECTION LAYER ON AN ELECTRONIC CIRCUIT
JP2006053473A (en) * 2004-08-16 2006-02-23 Sony Corp Optical waveguide module and mounting structure thereof
US20070104441A1 (en) * 2005-11-08 2007-05-10 Massachusetts Institute Of Technology Laterally-integrated waveguide photodetector apparatus and related coupling methods
US7574090B2 (en) * 2006-05-12 2009-08-11 Toshiba America Electronic Components, Inc. Semiconductor device using buried oxide layer as optical wave guides
WO2010038871A1 (en) 2008-10-03 2010-04-08 ソニー株式会社 Semiconductor device
EP3141941B1 (en) * 2015-09-10 2019-11-27 ams AG Semiconductor device with photonic and electronic functionality and method for manufacturing a semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0661561A2 (en) * 1993-12-27 1995-07-05 Hitachi, Ltd. Integrated optical waveguide device
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001278105A1 (en) * 2000-08-04 2002-02-18 Amberwave Systems Corporation Silicon wafer with embedded optoelectronic material for monolithic oeic

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0661561A2 (en) * 1993-12-27 1995-07-05 Hitachi, Ltd. Integrated optical waveguide device
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
IRACE A ET AL: "FAST SILICON-ON-SILICON OPTOELECTRONIC ROUTER BASED ON A BMFET DEVICE", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 6, no. 1, January 2000 (2000-01-01), pages 14 - 18, XP000908296, ISSN: 1077-260X *
JALALI B ET AL: "ADVANCES IN SILICON-ON-INSULATOR OPTOELECTRONICS", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, IEEE SERVICE CENTER, US, vol. 4, no. 6, November 1998 (1998-11-01), pages 938 - 947, XP000801341, ISSN: 1077-260X *
SCHAUB J D ET AL: "HIGH-SPEED MONOLITHIC SILICON PHOTORECEIVERS ON HIGH RESISTIVITY AND SOI SUBSTRATES", JOURNAL OF LIGHTWAVE TECHNOLOGY, IEEE. NEW YORK, US, vol. 19, no. 2, February 2001 (2001-02-01), pages 272 - 278, XP000989395, ISSN: 0733-8724 *
See also references of EP1776610A2 *

Also Published As

Publication number Publication date
AU2003273221A8 (en) 2004-02-09
WO2004010192A2 (en) 2004-01-29
AU2003273221A1 (en) 2004-02-09
EP1776610A2 (en) 2007-04-25

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