WO2004048982A3 - Probe array and method of its manufacture - Google Patents

Probe array and method of its manufacture Download PDF

Info

Publication number
WO2004048982A3
WO2004048982A3 PCT/US2003/037611 US0337611W WO2004048982A3 WO 2004048982 A3 WO2004048982 A3 WO 2004048982A3 US 0337611 W US0337611 W US 0337611W WO 2004048982 A3 WO2004048982 A3 WO 2004048982A3
Authority
WO
WIPO (PCT)
Prior art keywords
probes
probe
substrate
layer
probe array
Prior art date
Application number
PCT/US2003/037611
Other languages
French (fr)
Other versions
WO2004048982A2 (en
Inventor
Gaetan L Mathieu
Benjamin N Eldridge
Gary W Grube
Original Assignee
Formfactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Formfactor Inc filed Critical Formfactor Inc
Priority to EP03790017A priority Critical patent/EP1565757A2/en
Priority to AU2003293027A priority patent/AU2003293027A1/en
Priority to JP2004555708A priority patent/JP2006507506A/en
Publication of WO2004048982A2 publication Critical patent/WO2004048982A2/en
Publication of WO2004048982A3 publication Critical patent/WO2004048982A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support

Abstract

A method of forming a probe array includes forming a layer of tip material (101) over a block of probe material. A first electron discharge machine (EDM) electrode (201) is positioned over the layer of tip material, the EDM electrode having a plurality of openings corresponding to a plurality of probes to be formed. Excess material from the layer of tip material and the block of probe material is removed to form the plurality of probes. A substrate having a plurality of through holes corresponding to the plurality of probes is positioned so that the probes penetrate the plurality of through holes. The substrate is bonded to the plurality of probes. Excess probe material is removed so as to planarize the substrate.
PCT/US2003/037611 2002-11-25 2003-11-24 Probe array and method of its manufacture WO2004048982A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP03790017A EP1565757A2 (en) 2002-11-25 2003-11-24 Probe array and method of its manufacture
AU2003293027A AU2003293027A1 (en) 2002-11-25 2003-11-24 Probe array and method of its manufacture
JP2004555708A JP2006507506A (en) 2002-11-25 2003-11-24 Probe array and manufacturing method thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/302,969 2002-11-25
US10/302,969 US7122760B2 (en) 2002-11-25 2002-11-25 Using electric discharge machining to manufacture probes

Publications (2)

Publication Number Publication Date
WO2004048982A2 WO2004048982A2 (en) 2004-06-10
WO2004048982A3 true WO2004048982A3 (en) 2004-11-04

Family

ID=32324899

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/037611 WO2004048982A2 (en) 2002-11-25 2003-11-24 Probe array and method of its manufacture

Country Status (7)

Country Link
US (3) US7122760B2 (en)
EP (1) EP1565757A2 (en)
JP (2) JP2006507506A (en)
KR (1) KR20050086803A (en)
CN (2) CN100406898C (en)
AU (1) AU2003293027A1 (en)
WO (1) WO2004048982A2 (en)

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JP2012145489A (en) * 2011-01-13 2012-08-02 Sankei Engineering:Kk Manufacturing method of inspection probe
KR102071841B1 (en) 2011-12-21 2020-01-31 더 리전트 오브 더 유니버시티 오브 캘리포니아 Interconnected corrugated carbon-based network
CA2866250C (en) 2012-03-05 2021-05-04 Maher F. El-Kady Capacitor with electrodes made of an interconnected corrugated carbon-based network
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US10211495B2 (en) 2014-06-16 2019-02-19 The Regents Of The University Of California Hybrid electrochemical cell
CN104345182B (en) * 2014-10-29 2017-06-27 华中科技大学 A kind of multistation test fixture
WO2016081638A1 (en) 2014-11-18 2016-05-26 The Regents Of The University Of California Porous interconnected corrugated carbon-based network (iccn) composite
CA3006997A1 (en) 2015-12-22 2017-06-29 The Regents Of The University Of California Cellular graphene films
AU2017209117B2 (en) 2016-01-22 2021-10-21 The Regents Of The University Of California High-voltage devices
CA3018568A1 (en) 2016-03-23 2017-09-28 The Regents Of The University Of California Devices and methods for high voltage and solar applications
US11097951B2 (en) 2016-06-24 2021-08-24 The Regents Of The University Of California Production of carbon-based oxide and reduced carbon-based oxide on a large scale
KR102535218B1 (en) 2016-08-31 2023-05-22 더 리전트 오브 더 유니버시티 오브 캘리포니아 Devices Including Carbon-Based Materials and Their Preparation
CN107243679B (en) * 2017-05-16 2019-04-26 深圳大学 Thin slice queue microelectrode micro EDM method and device
JP7277965B2 (en) 2017-07-14 2023-05-19 ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア A Simple Route from Carbon Nanodots to Highly Conductive Porous Graphene for Supercapacitor Applications
CN107838509B (en) * 2017-09-19 2019-06-18 南京航空航天大学 Array tube electrode preparation method for Electrolyzed Processing
US11828775B1 (en) 2020-05-13 2023-11-28 Microfabrica Inc. Vertical probe arrays and improved methods for making using temporary or permanent alignment structures for setting or maintaining probe-to-probe relationships
US11821918B1 (en) 2020-04-24 2023-11-21 Microfabrica Inc. Buckling beam probe arrays and methods for making such arrays including forming probes with lateral positions matching guide plate hole positions
US10938032B1 (en) 2019-09-27 2021-03-02 The Regents Of The University Of California Composite graphene energy storage methods, devices, and systems
US11921131B2 (en) * 2021-03-18 2024-03-05 Rohde & Schwarz Gmbh & Co. Kg Method for manufacturing a measurement probe, and measurement probe

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Also Published As

Publication number Publication date
JP2006507506A (en) 2006-03-02
KR20050086803A (en) 2005-08-30
US20070062913A1 (en) 2007-03-22
CN101308165A (en) 2008-11-19
CN1735810A (en) 2006-02-15
AU2003293027A1 (en) 2004-06-18
CN100406898C (en) 2008-07-30
EP1565757A2 (en) 2005-08-24
US20090139965A1 (en) 2009-06-04
JP2010107517A (en) 2010-05-13
US7488917B2 (en) 2009-02-10
US20040099641A1 (en) 2004-05-27
US7122760B2 (en) 2006-10-17
WO2004048982A2 (en) 2004-06-10

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