WO2004051350A1 - Micro-dispenser and method for manufacturing a color filter using the same - Google Patents

Micro-dispenser and method for manufacturing a color filter using the same Download PDF

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Publication number
WO2004051350A1
WO2004051350A1 PCT/KR2003/002646 KR0302646W WO2004051350A1 WO 2004051350 A1 WO2004051350 A1 WO 2004051350A1 KR 0302646 W KR0302646 W KR 0302646W WO 2004051350 A1 WO2004051350 A1 WO 2004051350A1
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WO
WIPO (PCT)
Prior art keywords
color
micro
solution
material solution
color material
Prior art date
Application number
PCT/KR2003/002646
Other languages
French (fr)
Inventor
Han-Su Park
Young-Jong Kwon
Original Assignee
Skytech International Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skytech International Co., Ltd. filed Critical Skytech International Co., Ltd.
Priority to AU2003283854A priority Critical patent/AU2003283854A1/en
Publication of WO2004051350A1 publication Critical patent/WO2004051350A1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography

Definitions

  • the present invention relates to a device for discharging any material on a substrate and a method for applying thereof, more specifically a micro-dispenser and method for manufacturing a color filter using the same.
  • display device such as a liquid crystal display device or EL device is used in display unit of electronic apparatus such as a mobile phone, a portable computer, etc. Also, a full color display is implemented on a flat display device.
  • the full color display on the liquid crystal display device is implemented by letting the light modulated by the liquid crystal layer through a color filter.
  • the color filter is formed by arranging color patterns of R (Red), G (Green) & B (Blue) on the surface of the substrate consisted of glass, plastic, etc.
  • the full color display on the EL device is implemented by arranging EL luminescence layers (color patterns) of R, G & B on the surface of the substrate consisted of glass, plastic, etc., maintaining the EL luminescence layer between a pair of electrodes to form a pixel, and controlling voltage applied to the electrode per each pixel to illuminate the pixel in desired colors.
  • the object of the present invention is to provide a micro-dispenser which can fundamentally solve the above problem when forming color patterns according to the photolithography method or the vacuum deposition method using a shadow mask. Also, the other object of the present invention is to provide a method for manufacturing a color filter using the micro-dispenser.
  • the micro -dispenser of the present invention provides a solution reservoir provided in a body and a solution is reserved therein; a micro-nozzle located in the lower part of said solution reservoir and configured to discharge the solution in said solution reservoir; a vibration plate located in the upper part of said solution reservoir; a piezo actuator located in the upper part of said vibration plate, and generating a vibration in response to an impression of a voltage; and a strain gage located between said vibration plate and said piezo actuator, said strain gage measuring a stress of the vibration which is transferred from said piezo actuator to control the discharge amount of the solution in said solution reservoir.
  • the micro-nozzle may comprise a plurality of minute holes not to discharge the solution below a predetermined stress.
  • the micro-nozzle may be constituted in the form of a circle, rectangular or polygon.
  • R-color material solution, G-color material solution or B-color material solution may be stored in the solution reservoir.
  • a method for manufacturing a color filter comprising separately forming a plurality of R-color patterns, G-color patterns and B-color patterns on a first column of a substrate using a head which comprises a plurality of micro-dispensers configured to separately discharge R-color material solution, G-color material solution and B-color material solution in the column direction; and forming a plurality of R-color patterns, G-color patterns and B-color patterns on a second to n-th column of the substrate (n is an integer) by moving said head as a predetermined width in the column or row direction.
  • the substrate may be consisted of glass or plastic.
  • R-color material solution, G-color material solution and B-color material solution respectively may flow in through the R-color material solution injection line, G-color material solution injection line and B-color material solution injection line installed in the head.
  • the micro-dispenser of the present invention comprises a piezo actuator, a strain gage, and a micro-nozzle so as to accurately control the discharge amount of the solution discharged. Furthermore, if the micro-dispenser of the present invention is applied to a method for manufacturing a color filter, the manufacturing cost can be reduced and the productivity can be increased.
  • Fig. 1 is a schematic sectional view of a micro-dispenser according to the present invention.
  • Fig. 2 is an enlarged plan view of the micro-nozzle of Fig. 1.
  • Fig. 3 is a drawing showing the process of forming a color pattern on the substrate using a head having the micro-dispenser of Fig. 1.
  • Fig. 4 is a perspective sectional view of the head of Fig. 3 in the row direction.
  • Fig. 5 is an enlarged sectional view of the micro-dispenser of Figs. 3 & 4.
  • Fig. 6 is a partial enlarged view of the micro-dispenser illustrated along the color solution injection line in the column direction.
  • Fig. 7 is a drawing showing a manufacturing method of a color pattern using the head having the micro-dispenser illustrated in Figs. 3 to 6.
  • Figs. 8A to 8C are drawings illustrating various embodiments of the color patterns manufactured on the substrate according to the method illustrated in Fig. 7.
  • Fig. 1 is a schematic sectional view of a micro-dispenser according to the present invention
  • Fig. 2 is an enlarged plan view of the micro-nozzle of Fig. 1.
  • the micro-dispenser 103 comprises a solution reservoir 13 provided in a body 11 with a predetermined space wherein solution, for example, the color material solution of R (Red), G (Green) and B (Blue) is injected from the outside.
  • solution for example, the color material solution of R, G and B is injected from the outside through a separate supply device and stored in the solution reservoir 13.
  • a micro-nozzle 15 capable of discharging the color material solution of for example, R, G and B.
  • the micro-nozzle 15 comprises a plurality of minute holes 17, and thus solution with viscosity, for example the color material solution is not discharged below a predetermined stress due to the surface tension.
  • the number of the holes 17 can be changed according to the purpose of their use.
  • the micro nozzle 15 can be manufactured in the form of a circle, rectangular or polygon.
  • the micro nozzle 15 can be constituted in a size identical to a later-described one color pattern. According to the present embodiment, the width and height of the micro nozzle 15 are 100 ⁇ m and 80 ⁇ m, respectively, but if necessary, can be changed.
  • the solution reservoir 13 At the upper part of the solution reservoir 13 is installed with a vibration plate 19, a strain gage 21, and a piezo actuator 23.
  • the strain gage 21 is positioned between the vibration plate 19 and the piezo actuator 23. If the voltage is applied to the piezo actuator 23, the piezo actuator 23 generates a vibration.
  • the vibration generated in this regard is delivered to the solution reservoir 13 via the strain gage 21 and the vibration plate 19 so as to serve as a stress to discharge the solution, for example the color material solution through the micro-nozzle 15.
  • the vibration is increased when passing through the vibration plate 19.
  • the piezo actuator 23 controls the amount of the applied voltage so as to control the intensity and frequency of the vibration.
  • the solution for example the color material solution within the solution reservoir 13 is not discharged.
  • the strain gage 21 can accurately measure how much stress is delivered to the solution reservoir 13 by the piezo actuator 23. If the stress delivered to the solution reservoir 13 is accurately measured, the amount of the solution, for example, the color material solution discharged can be delicately controlled based on such accurate measurement.
  • Fig. 3 is a drawing showing the process of forming a color pattern on the substrate using a head having the micro-dispenser of Fig. 1
  • Fig. 4 is a perspective sectional view of the head in the row direction of Fig. 3
  • Fig. 5 is an enlarged plan view of the micro-dispenser of Figs. 3 & 4
  • Fig. 6 is a partial enlarged view of the micro-dispenser illustrated along the predetermined color solution injection line in the column direction.
  • a head 101 used in the method for manufacturing the color filter of the present invention is illustrated in Fig. 3.
  • the head illustrated in Fig. 3 provides a plurality of micro-dispensers 103 of Fig. 1 at its lower part in the column direction.
  • Color material solution injection lines 105, 107, 109 injecting the color material solution of R, G and B are installed inside the head 101 in the column direction.
  • the reference numerals 105, 107 & 109 represent R-color material solution injection line, G-color material solution injection line, and B-color material solution injection line, respectively, and in the direction indicated with an arrow, R- color material solution, G-color material solution, and B-color material solution are injected.
  • the R-color material solution injection line 105, the G-color material solution injection line 107 and the B-color material solution injection line 109 do not intersect each other.
  • a substrate 111 consisted of plastic or glass is positioned.
  • the head 101 is shifted in predetermined intervals in the column or row direction so as to selectively discharge the color material solution of R, G and B on the substrate 111 by using the micro-dispenser 103. According to such selective discharge, a plurality of R-color patterns, G-color patterns or B-color patterns are arranged on the substrate in the column or row direction to form color filter patterns 113.
  • R-color material solution injection line 105, G-color material solution injection line 107, and B-color material solution injection line 109 are installed inside the head 101.
  • the R-color material solution injection line 105, G-color material solution injection line 107, and B-color material solution injection line 109 do not intersect each other, and discharge each color material solution to a micro-dispenser 103 through separate injection lines. That is, G-color material injection line 107 uses the first drain line 115, R-color material solution injection line 105 uses the second drain line 117, and B-color material solution injection line 109 uses the third drain line 119 to discharge color material solution into the micro- dispenser 103.
  • Fig. 5 is an enlarged sectional view of the micro-dispenser of Figs. 3 and 4.
  • Fig. 6 is a partial enlarged view of the micro-dispenser which may discharge any one of the color material solution among R-color, G-color or B-color in the column direction of Fig. 3. That is, Fig. 6 is a drawing enlarging a part of the micro- dispenser along any one of the lines of the R-color material solution injection line 105, G-color material solution injection line 107 and B-color material solution injection line 109.
  • the discharge of color material solution using the micro-dispenser of Fig. 5 was already described in Fig. 1, and thus will not be described at this time.
  • the reference numerals which are identical to those of Fig. 1 are indicated g the same elements.
  • Fig. 7 is a drawing illustrating the method for manufacturing a color pattern using a head having the micro-dispenser illustrated in Figs. 3 to 6.
  • the reference numerals which are identical to those of Figs. 3 to 6 are indicated the same elements.
  • the micro-dispenser 103 located at the lower part of the head (101 of Fig. 3) is designed so that the R-color material solution, G-color material solution, and B- color material solution are installed separately in the column direction.
  • a color pattern is formed on a first column 121 of a substrate. Accordingly, on the first column of the substrate, a color pattern is formed wherein the R-color pattern, G-color pattern, and B-color pattern are repeated one after another in the column direction.
  • the head having a micro-dispenser 103 moves one step in the row direction as a predetermined width, and then moves one step to the left in the column direction as a predetermined width to form color patterns.
  • color patterns are formed wherein the G-color pattern, B-color pattern and R-color pattern are repeated one after another in the column direction.
  • the head having the micro-dispenser 103 moves one step in the row direction as a predetermined width, and then moves one step to the left in the column direction as a predetermined width to form color patterns. Accordingly, on the third column 125 of the substrate, color patterns are formed wherein the B-color pattern, R- color pattern and G-color pattern are repeated one after another in the column direction.
  • color patterns are formed on the forth column 127, the fifth column 129 and the sixth column 131.
  • the forth column 127 is color patterns formed by moving one step in the row direction and two steps to the right in the column direction after the formation of the color patterns of the third column 125.
  • the fifth column 129 is color patterns formed by moving one step in the row direction and one step to the left in the column direction after the formation of the color patterns of the forth column 127.
  • the sixth column 131 is color patterns formed by moving one step in the row direction and one step to the left in the column direction after the formation of the color patterns of the fifth column 129.
  • Figs. 8 A to 8C are drawings illustrating various embodiments of color patterns manufactured on the substrate according to the method illustrated in Fig. 7.
  • Fig. 8A illustrates color patterns in a stripe arrangement wherein the color patterns of the row direction are all the same color patterns.
  • Fig. 8B illustrates color patterns in a mosaic arrangement wherein R-color pattern, G-color pattern, and B- color pattern are repeated in the column direction and row direction.
  • Fig. 8C illustrates color patterns in a delta arrangement wherein the color pattern of any adjacent color patterns is R-color pattern, G-color pattern and B-color pattern.
  • the micro-dispenser of the present invention can accurately control the discharge amount of the discharged solution by comprising a piezo actuator, a strain gage and a micro-nozzle.
  • the manufacturing costs can be reduced and the productivity can be increased compared with the method for manufacturing color filters using conventional photolithography method or shadow mask.
  • the micro-nozzle of the micro-dispenser is designed to be the same size as that of the color pattern, and if the discharge amount can be accurately controlled by the strain gage, the manufacturing costs can be remarkably reduced and the productivity can be remarkably enhanced.
  • micro-dispenser of the present invention it will become possible to discharge a chemical solution in a micro-minute amount on a desired location on substrates such as glass or plastic, etc. not only in the field of semiconductor and flat panel display, but also in the field of medical science.

Abstract

The micro-dispenser of the present invention comprises a micro-nozzle located in the lower part of said solution reservoir and configured to discharge the solution in said solution reservoir; a vibration plate located in the upper part of said solution reservoir; a piezo actuator generating a vibration in response to an impression of a voltage; and a strain gage located between said vibration plate and said piezo actuator, said strain gage measuring a stress of the vibration which is transferred from said piezo actuator to control the discharge amount of the solution in said solution reservoir. The micro-dispenser of the present invention can accurately control the discharge amount of the discharged solution by comprising the piezo actuator, the strain gage and the micro-nozzle, and when applied to the method for manufacturing a color filter, the manufacture costs can be reduced and the productivity can be increased.

Description

MICRO-DISPENSER AND METHOD FOR MANUFACTURING A COLOR FILTER USING THE SAME
Technical Field The present invention relates to a device for discharging any material on a substrate and a method for applying thereof, more specifically a micro-dispenser and method for manufacturing a color filter using the same.
Background Art Generally, display device such as a liquid crystal display device or EL device is used in display unit of electronic apparatus such as a mobile phone, a portable computer, etc. Also, a full color display is implemented on a flat display device.
The full color display on the liquid crystal display device is implemented by letting the light modulated by the liquid crystal layer through a color filter. The color filter is formed by arranging color patterns of R (Red), G (Green) & B (Blue) on the surface of the substrate consisted of glass, plastic, etc. The full color display on the EL device is implemented by arranging EL luminescence layers (color patterns) of R, G & B on the surface of the substrate consisted of glass, plastic, etc., maintaining the EL luminescence layer between a pair of electrodes to form a pixel, and controlling voltage applied to the electrode per each pixel to illuminate the pixel in desired colors.
It is well-known that a conventional color patterns of R, G & B of the color filter in the liquid crystal display device or EL device are manufactured by using a photolithography method or a vacuum deposition method using a shadow mask. However, the photolithography method or the vacuum deposition method using a shadow mask is a very complicated in terms of process, and a large amount of color materials of R, G & B is consumed, which causes a problem of increase in manufacture cost.
Summary of the Invention
The object of the present invention is to provide a micro-dispenser which can fundamentally solve the above problem when forming color patterns according to the photolithography method or the vacuum deposition method using a shadow mask. Also, the other object of the present invention is to provide a method for manufacturing a color filter using the micro-dispenser.
In order to achieve the above objects, the micro -dispenser of the present invention provides a solution reservoir provided in a body and a solution is reserved therein; a micro-nozzle located in the lower part of said solution reservoir and configured to discharge the solution in said solution reservoir; a vibration plate located in the upper part of said solution reservoir; a piezo actuator located in the upper part of said vibration plate, and generating a vibration in response to an impression of a voltage; and a strain gage located between said vibration plate and said piezo actuator, said strain gage measuring a stress of the vibration which is transferred from said piezo actuator to control the discharge amount of the solution in said solution reservoir.
The micro-nozzle may comprise a plurality of minute holes not to discharge the solution below a predetermined stress. The micro-nozzle may be constituted in the form of a circle, rectangular or polygon. R-color material solution, G-color material solution or B-color material solution may be stored in the solution reservoir.
In order to achieve another object of the present invention, a method for manufacturing a color filter is provided comprising separately forming a plurality of R-color patterns, G-color patterns and B-color patterns on a first column of a substrate using a head which comprises a plurality of micro-dispensers configured to separately discharge R-color material solution, G-color material solution and B-color material solution in the column direction; and forming a plurality of R-color patterns, G-color patterns and B-color patterns on a second to n-th column of the substrate (n is an integer) by moving said head as a predetermined width in the column or row direction.
The substrate may be consisted of glass or plastic. R-color material solution, G-color material solution and B-color material solution respectively may flow in through the R-color material solution injection line, G-color material solution injection line and B-color material solution injection line installed in the head. The micro-dispenser of the present invention comprises a piezo actuator, a strain gage, and a micro-nozzle so as to accurately control the discharge amount of the solution discharged. Furthermore, if the micro-dispenser of the present invention is applied to a method for manufacturing a color filter, the manufacturing cost can be reduced and the productivity can be increased.
Brief Description of the Drawings
Fig. 1 is a schematic sectional view of a micro-dispenser according to the present invention.
Fig. 2 is an enlarged plan view of the micro-nozzle of Fig. 1. Fig. 3 is a drawing showing the process of forming a color pattern on the substrate using a head having the micro-dispenser of Fig. 1.
Fig. 4 is a perspective sectional view of the head of Fig. 3 in the row direction. Fig. 5 is an enlarged sectional view of the micro-dispenser of Figs. 3 & 4.
Fig. 6 is a partial enlarged view of the micro-dispenser illustrated along the color solution injection line in the column direction.
Fig. 7 is a drawing showing a manufacturing method of a color pattern using the head having the micro-dispenser illustrated in Figs. 3 to 6. Figs. 8A to 8C are drawings illustrating various embodiments of the color patterns manufactured on the substrate according to the method illustrated in Fig. 7.
Embodiments
Hereinbelow, the embodiments of the present invention are described in detail according to the accompanying drawings. However, the embodiments of the present invention illustrated below can be chaged into various forms, and the scope of the present invention is not limited to the embodiments described hereinbelow. The embodiments of the present invention is rather provided in order to completely explain the present invention to a person having ordinary skill in the pertinent art. Fig. 1 is a schematic sectional view of a micro-dispenser according to the present invention, and Fig. 2 is an enlarged plan view of the micro-nozzle of Fig. 1.
The micro-dispenser 103 according to the present invention comprises a solution reservoir 13 provided in a body 11 with a predetermined space wherein solution, for example, the color material solution of R (Red), G (Green) and B (Blue) is injected from the outside. In other words, the solution, for example, the color material solution of R, G and B is injected from the outside through a separate supply device and stored in the solution reservoir 13.
At the lower part of the solution reservoir 13 is provided with a micro-nozzle 15 capable of discharging the color material solution of for example, R, G and B. The micro-nozzle 15 comprises a plurality of minute holes 17, and thus solution with viscosity, for example the color material solution is not discharged below a predetermined stress due to the surface tension. The number of the holes 17 can be changed according to the purpose of their use. The micro nozzle 15 can be manufactured in the form of a circle, rectangular or polygon. The micro nozzle 15 can be constituted in a size identical to a later-described one color pattern. According to the present embodiment, the width and height of the micro nozzle 15 are 100 μm and 80μm, respectively, but if necessary, can be changed.
At the upper part of the solution reservoir 13 is installed with a vibration plate 19, a strain gage 21, and a piezo actuator 23. Particularly, the strain gage 21 is positioned between the vibration plate 19 and the piezo actuator 23. If the voltage is applied to the piezo actuator 23, the piezo actuator 23 generates a vibration. The vibration generated in this regard is delivered to the solution reservoir 13 via the strain gage 21 and the vibration plate 19 so as to serve as a stress to discharge the solution, for example the color material solution through the micro-nozzle 15. The vibration is increased when passing through the vibration plate 19. The piezo actuator 23 controls the amount of the applied voltage so as to control the intensity and frequency of the vibration. Of course, if the voltage is not applied to the piezo actuator 23, the solution, for example the color material solution within the solution reservoir 13 is not discharged.
The strain gage 21 can accurately measure how much stress is delivered to the solution reservoir 13 by the piezo actuator 23. If the stress delivered to the solution reservoir 13 is accurately measured, the amount of the solution, for example, the color material solution discharged can be delicately controlled based on such accurate measurement.
Fig. 3 is a drawing showing the process of forming a color pattern on the substrate using a head having the micro-dispenser of Fig. 1, Fig. 4 is a perspective sectional view of the head in the row direction of Fig. 3, Fig. 5 is an enlarged plan view of the micro-dispenser of Figs. 3 & 4, and Fig. 6 is a partial enlarged view of the micro-dispenser illustrated along the predetermined color solution injection line in the column direction.
Referring to Fig. 3, a head 101 used in the method for manufacturing the color filter of the present invention is illustrated in Fig. 3. The head illustrated in Fig. 3 provides a plurality of micro-dispensers 103 of Fig. 1 at its lower part in the column direction. Color material solution injection lines 105, 107, 109 injecting the color material solution of R, G and B are installed inside the head 101 in the column direction. The reference numerals 105, 107 & 109 represent R-color material solution injection line, G-color material solution injection line, and B-color material solution injection line, respectively, and in the direction indicated with an arrow, R- color material solution, G-color material solution, and B-color material solution are injected. The R-color material solution injection line 105, the G-color material solution injection line 107 and the B-color material solution injection line 109 do not intersect each other. At the lower part of the head 101, a substrate 111 consisted of plastic or glass is positioned. The head 101 is shifted in predetermined intervals in the column or row direction so as to selectively discharge the color material solution of R, G and B on the substrate 111 by using the micro-dispenser 103. According to such selective discharge, a plurality of R-color patterns, G-color patterns or B-color patterns are arranged on the substrate in the column or row direction to form color filter patterns 113.
Referring to Fig. 4, R-color material solution injection line 105, G-color material solution injection line 107, and B-color material solution injection line 109 are installed inside the head 101. The R-color material solution injection line 105, G-color material solution injection line 107, and B-color material solution injection line 109 do not intersect each other, and discharge each color material solution to a micro-dispenser 103 through separate injection lines. That is, G-color material injection line 107 uses the first drain line 115, R-color material solution injection line 105 uses the second drain line 117, and B-color material solution injection line 109 uses the third drain line 119 to discharge color material solution into the micro- dispenser 103.
Fig. 5 is an enlarged sectional view of the micro-dispenser of Figs. 3 and 4. Fig. 6 is a partial enlarged view of the micro-dispenser which may discharge any one of the color material solution among R-color, G-color or B-color in the column direction of Fig. 3. That is, Fig. 6 is a drawing enlarging a part of the micro- dispenser along any one of the lines of the R-color material solution injection line 105, G-color material solution injection line 107 and B-color material solution injection line 109. The discharge of color material solution using the micro-dispenser of Fig. 5 was already described in Fig. 1, and thus will not be described at this time. In Figs. 5 and 6, the reference numerals which are identical to those of Fig. 1 are indicated g the same elements.
Fig. 7 is a drawing illustrating the method for manufacturing a color pattern using a head having the micro-dispenser illustrated in Figs. 3 to 6. In Fig. 7, the reference numerals which are identical to those of Figs. 3 to 6 are indicated the same elements.
The micro-dispenser 103 located at the lower part of the head (101 of Fig. 3) is designed so that the R-color material solution, G-color material solution, and B- color material solution are installed separately in the column direction. Using the head having the micro-dispenser 103 configured to as above, a color pattern is formed on a first column 121 of a substrate. Accordingly, on the first column of the substrate, a color pattern is formed wherein the R-color pattern, G-color pattern, and B-color pattern are repeated one after another in the column direction. Then, the head having a micro-dispenser 103 moves one step in the row direction as a predetermined width, and then moves one step to the left in the column direction as a predetermined width to form color patterns. Accordingly, on the second column 123 of the substrate, color patterns are formed wherein the G-color pattern, B-color pattern and R-color pattern are repeated one after another in the column direction.
Next, the head having the micro-dispenser 103 moves one step in the row direction as a predetermined width, and then moves one step to the left in the column direction as a predetermined width to form color patterns. Accordingly, on the third column 125 of the substrate, color patterns are formed wherein the B-color pattern, R- color pattern and G-color pattern are repeated one after another in the column direction.
Likewise, color patterns are formed on the forth column 127, the fifth column 129 and the sixth column 131. The forth column 127 is color patterns formed by moving one step in the row direction and two steps to the right in the column direction after the formation of the color patterns of the third column 125. The fifth column 129 is color patterns formed by moving one step in the row direction and one step to the left in the column direction after the formation of the color patterns of the forth column 127. The sixth column 131 is color patterns formed by moving one step in the row direction and one step to the left in the column direction after the formation of the color patterns of the fifth column 129. An explanation of the formation of the color patterns from the sixth column 131 to the n-th column (n is an integer) are omitted for the sake of convenience.
Figs. 8 A to 8C are drawings illustrating various embodiments of color patterns manufactured on the substrate according to the method illustrated in Fig. 7.
Fig. 8A illustrates color patterns in a stripe arrangement wherein the color patterns of the row direction are all the same color patterns. Fig. 8B illustrates color patterns in a mosaic arrangement wherein R-color pattern, G-color pattern, and B- color pattern are repeated in the column direction and row direction. Fig. 8C illustrates color patterns in a delta arrangement wherein the color pattern of any adjacent color patterns is R-color pattern, G-color pattern and B-color pattern.
Industrial Applicability
As stated above, the micro-dispenser of the present invention can accurately control the discharge amount of the discharged solution by comprising a piezo actuator, a strain gage and a micro-nozzle.
When the micro-dispenser of the present invention is applied to the method for manufacturing color filters, the manufacturing costs can be reduced and the productivity can be increased compared with the method for manufacturing color filters using conventional photolithography method or shadow mask.
In particular, in accordance with the method for manufacturing color filter of the present invention, if the micro-nozzle of the micro-dispenser is designed to be the same size as that of the color pattern, and if the discharge amount can be accurately controlled by the strain gage, the manufacturing costs can be remarkably reduced and the productivity can be remarkably enhanced.
Further, when using the micro-dispenser of the present invention, it will become possible to discharge a chemical solution in a micro-minute amount on a desired location on substrates such as glass or plastic, etc. not only in the field of semiconductor and flat panel display, but also in the field of medical science.

Claims

What is claimed is:
1. A micro-dispenser comprising: a solution reservoir provided in a body and a solution is reserved therein; a micro-nozzle located in the lower part of said solution reservoir and configured to discharge the solution in said solution reservoir; a vibration plate located in the upper part of said solution reservoir; a piezo actuator located in the upper part of said vibration plate, and generating a vibration in response to an impression of a voltage; and a strain gage located between said vibration plate and said piezo actuator, said strain gage measuring a stress of the vibration which is transferred from said piezo actuator to control the discharge amount of the solution in said solution reservoir.
2. The micro-dispenser according to claim 1, wherein the micro-nozzle comprises a plurality of minute holes not to discharge the solution below a predetermined stress.
3. The micro-dispenser according to claim 1, wherein the micro-nozzle is constituted in the form of a circle, rectangular or polygon.
4. The micro-dispenser according to claim 1, wherein R-color material solution, G-color material solution or B-color material solution is stored in the solution reservoir.
5. A method for manufacturing a color filter comprising: separately forming a plurality of R-color patterns, G-color patterns and B- color patterns on a first column of a substrate using a head which comprises a plurality of micro-dispensers configured to separately discharge R-color material solution, G-color material solution and B-color material solution in the column direction; and forming a plurality of R-color patterns, G-color patterns and B-color patterns on a second to n-th column of the substrate (n is an integer) by moving said head as a predetermined width in the column or row direction.
6. The method for manufacturing a color filter according to claim 5, wherein the substrate is consisted of glass or plastic.
7. The method for manufacturing a color filter according to claim 5, wherein R- color material solution, G-color material solution and B-color material solution respectively flow in through the R-color material solution injection line, G-color material solution injection line and B-color material solution injection line installed in the head.
PCT/KR2003/002646 2002-12-04 2003-12-04 Micro-dispenser and method for manufacturing a color filter using the same WO2004051350A1 (en)

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CN110595602B (en) * 2019-04-26 2021-10-15 深圳市豪视智能科技有限公司 Vibration detection method and related product

Citations (3)

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EP0756932A2 (en) * 1995-07-31 1997-02-05 Canon Kabushiki Kaisha Color-filter manufacturing method and apparatus, color filter, display device, and apparatus having display device
US6290352B1 (en) * 1997-03-17 2001-09-18 Canon Kabushiki Kaisha Ink discharge density setting method, color filter manufacturing method, color filter, display device, and apparatus having display device
KR20020039614A (en) * 2000-11-21 2002-05-27 구사마 사부로 Methods and apparatuses for making color filter, liquid crystal device, and electro-luminescent device, and inkjet head controller, and a method for discharging material, and an apparatus for discharging material

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0756932A2 (en) * 1995-07-31 1997-02-05 Canon Kabushiki Kaisha Color-filter manufacturing method and apparatus, color filter, display device, and apparatus having display device
KR100203009B1 (en) * 1995-07-31 1999-06-15 미따라이 하지메 Color filter manufacturing method and apparatus color filter display device, and apparatus having display device
US6290352B1 (en) * 1997-03-17 2001-09-18 Canon Kabushiki Kaisha Ink discharge density setting method, color filter manufacturing method, color filter, display device, and apparatus having display device
KR20020039614A (en) * 2000-11-21 2002-05-27 구사마 사부로 Methods and apparatuses for making color filter, liquid crystal device, and electro-luminescent device, and inkjet head controller, and a method for discharging material, and an apparatus for discharging material

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