WO2004059331A2 - Apparatus and method for limiting over travel in a probe card assembly - Google Patents
Apparatus and method for limiting over travel in a probe card assembly Download PDFInfo
- Publication number
- WO2004059331A2 WO2004059331A2 PCT/US2003/040316 US0340316W WO2004059331A2 WO 2004059331 A2 WO2004059331 A2 WO 2004059331A2 US 0340316 W US0340316 W US 0340316W WO 2004059331 A2 WO2004059331 A2 WO 2004059331A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- probe card
- card assembly
- stop
- probes
- substrate
- Prior art date
Links
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03814150A EP1576377A2 (en) | 2002-12-16 | 2003-12-15 | Apparatus and method for limiting over travel in a probe card assembly |
AU2003301039A AU2003301039A1 (en) | 2002-12-16 | 2003-12-15 | Apparatus and method for limiting over travel in a probe card assembly |
JP2004563736A JP2006510028A (en) | 2002-12-16 | 2003-12-15 | Apparatus and method for limiting overtravel in a probe card assembly |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/321,743 US7084650B2 (en) | 2002-12-16 | 2002-12-16 | Apparatus and method for limiting over travel in a probe card assembly |
US10/321,743 | 2002-12-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004059331A2 true WO2004059331A2 (en) | 2004-07-15 |
WO2004059331A3 WO2004059331A3 (en) | 2004-12-02 |
Family
ID=32507122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/040316 WO2004059331A2 (en) | 2002-12-16 | 2003-12-15 | Apparatus and method for limiting over travel in a probe card assembly |
Country Status (8)
Country | Link |
---|---|
US (3) | US7084650B2 (en) |
EP (1) | EP1576377A2 (en) |
JP (1) | JP2006510028A (en) |
KR (1) | KR20050084326A (en) |
CN (2) | CN101140297A (en) |
AU (1) | AU2003301039A1 (en) |
TW (1) | TWI299088B (en) |
WO (1) | WO2004059331A2 (en) |
Families Citing this family (137)
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US20090134897A1 (en) | 2009-05-28 |
US7084650B2 (en) | 2006-08-01 |
CN101140297A (en) | 2008-03-12 |
CN1745308A (en) | 2006-03-08 |
JP2006510028A (en) | 2006-03-23 |
AU2003301039A1 (en) | 2004-07-22 |
TWI299088B (en) | 2008-07-21 |
CN100424513C (en) | 2008-10-08 |
US20060261827A1 (en) | 2006-11-23 |
EP1576377A2 (en) | 2005-09-21 |
TW200416400A (en) | 2004-09-01 |
US20040113640A1 (en) | 2004-06-17 |
KR20050084326A (en) | 2005-08-26 |
WO2004059331A3 (en) | 2004-12-02 |
US7482822B2 (en) | 2009-01-27 |
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