WO2004059331A3 - Apparatus and method for limiting over travel in a probe card assembly - Google Patents

Apparatus and method for limiting over travel in a probe card assembly Download PDF

Info

Publication number
WO2004059331A3
WO2004059331A3 PCT/US2003/040316 US0340316W WO2004059331A3 WO 2004059331 A3 WO2004059331 A3 WO 2004059331A3 US 0340316 W US0340316 W US 0340316W WO 2004059331 A3 WO2004059331 A3 WO 2004059331A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe card
card assembly
over travel
limiting over
tested
Prior art date
Application number
PCT/US2003/040316
Other languages
French (fr)
Other versions
WO2004059331A2 (en
Inventor
Timothy E Cooper
Benjamin N Eldridge
Carl V Reynolds
Ravindra V Shenoy
Original Assignee
Formfactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Formfactor Inc filed Critical Formfactor Inc
Priority to AU2003301039A priority Critical patent/AU2003301039A1/en
Priority to EP03814150A priority patent/EP1576377A2/en
Priority to JP2004563736A priority patent/JP2006510028A/en
Publication of WO2004059331A2 publication Critical patent/WO2004059331A2/en
Publication of WO2004059331A3 publication Critical patent/WO2004059331A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.
PCT/US2003/040316 2002-12-16 2003-12-15 Apparatus and method for limiting over travel in a probe card assembly WO2004059331A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2003301039A AU2003301039A1 (en) 2002-12-16 2003-12-15 Apparatus and method for limiting over travel in a probe card assembly
EP03814150A EP1576377A2 (en) 2002-12-16 2003-12-15 Apparatus and method for limiting over travel in a probe card assembly
JP2004563736A JP2006510028A (en) 2002-12-16 2003-12-15 Apparatus and method for limiting overtravel in a probe card assembly

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/321,743 US7084650B2 (en) 2002-12-16 2002-12-16 Apparatus and method for limiting over travel in a probe card assembly
US10/321,743 2002-12-16

Publications (2)

Publication Number Publication Date
WO2004059331A2 WO2004059331A2 (en) 2004-07-15
WO2004059331A3 true WO2004059331A3 (en) 2004-12-02

Family

ID=32507122

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/040316 WO2004059331A2 (en) 2002-12-16 2003-12-15 Apparatus and method for limiting over travel in a probe card assembly

Country Status (8)

Country Link
US (3) US7084650B2 (en)
EP (1) EP1576377A2 (en)
JP (1) JP2006510028A (en)
KR (1) KR20050084326A (en)
CN (2) CN101140297A (en)
AU (1) AU2003301039A1 (en)
TW (1) TWI299088B (en)
WO (1) WO2004059331A2 (en)

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US7084650B2 (en) 2006-08-01
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US7482822B2 (en) 2009-01-27
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US20090134897A1 (en) 2009-05-28
TW200416400A (en) 2004-09-01

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