WO2004075165B1 - Microfabricated ultrasonic transducers with bias polarity beam profile control - Google Patents

Microfabricated ultrasonic transducers with bias polarity beam profile control

Info

Publication number
WO2004075165B1
WO2004075165B1 PCT/US2004/002740 US2004002740W WO2004075165B1 WO 2004075165 B1 WO2004075165 B1 WO 2004075165B1 US 2004002740 W US2004002740 W US 2004002740W WO 2004075165 B1 WO2004075165 B1 WO 2004075165B1
Authority
WO
WIPO (PCT)
Prior art keywords
transducer
bias voltage
electrodes
pair
transducer apparatus
Prior art date
Application number
PCT/US2004/002740
Other languages
French (fr)
Other versions
WO2004075165A1 (en
Inventor
Christopher M W Daft
Paul A Wagner
Igal Ladabaum
Original Assignee
Sensant Corp
Christopher M W Daft
Paul A Wagner
Igal Ladabaum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensant Corp, Christopher M W Daft, Paul A Wagner, Igal Ladabaum filed Critical Sensant Corp
Priority to CN2004800072945A priority Critical patent/CN1833273B/en
Priority to JP2006503208A priority patent/JP4422718B2/en
Priority to EP04706549A priority patent/EP1593115B1/en
Priority to DE602004006232T priority patent/DE602004006232T2/en
Publication of WO2004075165A1 publication Critical patent/WO2004075165A1/en
Publication of WO2004075165B1 publication Critical patent/WO2004075165B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/34—Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52046—Techniques for image enhancement involving transmitter or receiver

Abstract

A capacitive microfabricated ultrasonic transducer with control of elevation phase through alternating bias polarity is disclosed. Such control of elevation phase results in simple ultrasonic probes with excellent slice thickness attributes. Furthermore, tight spatial variation of phase results in an effective way to achieve transmit aperture and apodization control. Further still, such capacitive microfabricated ultrasonic transducers can achieve elevation focus without the need of a lossy mechanical lens.

Claims

AMENDED CLAIMS
[received by the International Bureau on 06 September 2004 (06.09.04); original claims 1-46 replaced by amended claims 1-47 (8 pages)]
1 A transducer apparatus comprising a plurality of transducer cells, each transducer cell including a pair of electrodes, and a circuit adapted to apply one of a plurality of bias voltages to each pair of electrodes, wherein the plurality of bias voltages include a positive bias voltage and a negative bias voltage,
the positive bias voltage is applied as the one bias voltage to at least a first pair of electrodes, and
the negative bias voltage is applied as the one bias voltage to at least a second pair of electrodes
2 The transducer apparatus of claim 1, wherein each pair of electrodes includes a first electrode and a second electrode, and the circuit comprises a first connection node including the first electrode of each pair of electrodes,
a plurality of second connection nodes, each second connection node including the second electrode of at least one pair of electrodes, and
connecting circuitry adapted to couple the plurality of bias voltages between the first connection node and the plurality of second connection nodes
3 The transducer apparatus of claim 2, wherein the connecting circuitry comprises at least one of at least one multiplexer, at least one relay, at least one transistor, and hard-wiπng
24 4. The transducer apparatus of claim 3, wherein the connecting circuitry comprises: a plurality of bias voltage inputs connected to the plurality of bias voltages; a plurality of bias voltage outputs connected to the plurality of second connection nodes; and a selection input, the selection input connected to a designated bias voltage pattern.
5. The transducer apparatus of claim 4, further comprising selection circuitry adapted to identify the designated bias voltage pattern.
6. The transducer apparatus of claim 5, wherein the selection circuitry comprises: a memory unit, the memory unit including a look-up table containing at least one bias voltage pattern; and a means for pointing to the designated bias voltage pattern from within the look-up table.
7. The transducer apparatus of claim 6, wherein the memory unit is an erasable, programmable, read only memory (EPROM).
8. The transducer apparatus of claim 6, wherein: the at least one bias voltage pattern corresponds to a focal zone number; and the means for pointing includes a system generated focal zone number pointer.
9. The transducer apparatus of claim 1, wherein the positive bias voltage has an amplitude different than the negative bias voltage.
10. The transducer apparatus of claim 1, wherein the plurality of bias voltages are generated discretely and separately from the transducer element.
11. The transducer apparatus of claim 1, wherein the plurality of bias voltages are generated locally to the transducer element.
12. The transducer apparatus of claim 1, wherein the circuit varies, as a function of time, an amplitude and a polarity for at least one bias voltage of the plurality of bias voltages.
13. The transducer apparatus of claim 12, wherein the amplitude and the polarity are varied such that elevation focus in a range direction is different from that of a uniformly biased transducer element.
14. The transducer apparatus of claim 12, wherein the amplitude and the polarity are varied such that a center point of a peak elevation focus in an elevation direction is off-center to the transducer element in the elevation direction.
15. A transducer apparatus according to claim 1, further including: a plurality of transducer elements, each transducer element including a different one of the plurality of transducer cells
16. The transducer apparatus of claim 15, wherein: each pair of electrodes includes a first electrode and a second electrode; and the circuit comprises: a plurality of first connection nodes, each first connection node including the first electrodes of the plurality of transducer cells of at least one transducer element;
a plurality of second connection nodes, each second connection node including the second electrode of at least one transducer cell of each transducer element; and
connecting circuitry adapted to couple the plurality of bias voltages between the plurality of first connection nodes and the plurality of second connection nodes.
17. The transducer apparatus of claim 16, wherein the connecting circuitry comprises at least one of: at least one multiplexer; at least one relay;
26 at least one transistor; and hard-wiring.
18. The transducer apparatus of claim 17, wherein the connecting circuitry comprises: a plurality of bias voltage inputs connected to the plurality of bias voltages; a plurality of bias voltage outputs connected to the plurality of second connection nodes; and a selection input, the selection input connect to a designated bias voltage pattern.
19. The transducer apparatus of claim 18, further comprising selection circuitry adapted to identify the designated bias voltage pattern.
20. The transducer apparatus of claim 19, wherein the selection circuitry comprises: a memory unit, the memory unit including a look-up table containing at least one bias voltage pattern; and a means for pointing to the designated bias voltage pattern from within the look-up table.
21. The transducer apparatus of claim 20, wherein the memory unit is an erasable, programmable, read only memory (EPROM).
22. The transducer apparatus of claim 20, wherein: the at least one bias voltage pattern further includes a focal zone number; and the means for pointing includes a system generated focal zone number pointer.
23. The transducer apparatus of claim 22, wherein the system generated focal zone number pointer is inferred from a timing of an excitation voltage applied to each of the plurality of transducer elements.
24. The transducer apparatus of claim 15, wherein the positive bias voltage has an amplitude different than the negative bias voltage.
25. The transducer apparatus of claim 15, wherein the plurality of bias voltages are generated discretely and separately from the transducer element.
27
26. The transducer apparatus of claim 15, wherein the plurality of bias voltages are generated locally to the transducer element.
27. The transducer apparatus of claim 15, wherein the circuit varies, as a function of time, an amplitude and a polarity for at least one bias voltage of the plurality of bias voltages.
28. The transducer apparatus of claim 27, wherein the amplitude and the polarity are varied such that elevation focus in a range direction is different from that of a uniformly biased transducer array.
29. The transducer apparatus of claim 27, wherein the amplitude and the polarity are varied such that a center point of a peak elevation focus in an elevation direction is off-center to the transducer array in the elevation direction.
30. The transducer apparatus of claim 16, wherein: the plurality of transducer elements are adjacent to each other in an azimuth direction such that consecutively numbered transducer cells of a first transducer element are aligned in an elevation direction with like consecutively numbered transducer cells of all other transducer elements; and each second connection node includes a contiguous subset of the second electrodes of the consecutively numbered transducer cells of adjacent transducer elements.
31. The transducer apparatus of claim 30, wherein: the plurality of transducer elements include at least 36 transducer elements; each transducer element has a first width in the azimuth direction of at least one-half wavelength at a frequency of interest; each first connection node is connected to an RF channel of an ultrasound system; and the contiguous subset has a second width in the elevation direction of at least one-quarter wavelength at the frequency of interest.
28
32. A method of controlling a transducer array, the transducer array including a plurality of transducer elements, each transducer element including a plurality of transducer cells, each transducer cell including a pair of electrodes, comprising the step of: applying one of a plurality of bias voltages to each pair of electrodes, wherein: the plurality of bias voltages include a positive bias voltage and a negative bias voltage;
the positive bias voltage is applied as the one bias voltage to at least a first pair of electrodes; and
the negative bias voltage is applied as the one bias voltage to at least a second pair of electrodes.
33. The method of claim 32, further comprising the steps of: connecting a first electrode of each pair of electrodes of the plurality of transducer cells of at least one transducer element to form a plurality of first connection nodes; connecting a second electrode of each pair of electrodes of at least one transducer cell of each transducer element to form a plurality of second connection nodes, and coupling the plurality of bias voltages between the plurality of first connection nodes and the plurality of second connection nodes.
34. The method of claim 33, wherein the step of coupling uses a multiplexer.
35. The method of claim 33, wherein the step of coupling uses connecting circuitry comprising at least one of: at least one multiplexer; at least one relay; at least one transistor; and hard-wiring.
29
36. The method of claim 35, wherein using the connecting circuitry comprises: connecting the plurality of bias voltages to a plurality of bias voltage inputs of the multiplexer; connecting the plurality of second connection nodes to a plurality of bias voltage outputs of the multiplexer; and connecting a designated bias voltage pattern to a selection input of the multiplexer.
37. The method of claim 36, further comprising the step of identifying the designated bias voltage pattern.
38. The method of claim 37, wherein identifying the designated bias voltage pattern comprises: connecting a memory unit to the selection input, the memory unit including a look-up table containing at least one bias voltage pattern; and pointing to the designated bias voltage pattern from within the look-up table.
39. The method of claim 38, wherein the memory unit is an erasable, programmable, read only memory (EPROM).
40. The method of claim 38, wherein: the at least one bias voltage pattern further includes a focal zone number; and pointing includes using a system generated focal zone number pointer.
41. The method of claim 40, wherein the system generated focal zone number pointer is inferred from a timing of an excitation voltage applied to each of the plurality of transducer elements.
42. The method of claim 32, wherein the positive bias voltage has an amplitude different magnitude than the negative bias voltage.
43. The method of claim 32, wherein the step of applying the plurality of bias voltages varies, as a function of time, an amplitude and a polarity for at least one of the plurality of bias voltages.
30
44. The method of claim 43, wherein the amplitude and the polarity are varied such that an elevation focus in a range direction is different from that of a uniformly biased transducer array.
45. The method of claim 43, wherein the amplitude and the polarity are varied such that a center point of a peak elevation focus in an elevation direction is off-center to the transducer array in the elevation direction.
46. The method of claim 33, further comprising the steps of: aligning the plurality of transducer elements adjacent to each other in an azimuth direction such that consecutively numbered transducer cells of a first transducer element are aligned in an elevation direction with like consecutively numbered transducer cells of all other transducer elements; and including in each second connection node a contiguous subset of the second electrodes of the consecutively numbered transducer cells of adjacent transducer elements.
47. The method of claim 46, wherein: the plurality of transducer elements include at least 36 transducer elements; each transducer element has a first width in the azimuth direction of at least one-half wavelength at a frequency of interest; each first connection node is connected to an RF channel of an ultrasound system; and the contiguous subset has a second width in the elevation direction of at least one-quarter wavelength at the frequency of interest.
31
PCT/US2004/002740 2003-02-14 2004-01-29 Microfabricated ultrasonic transducers with bias polarity beam profile control WO2004075165A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2004800072945A CN1833273B (en) 2003-02-14 2004-01-29 Microfabricated ultrasonic transducers with bias polarity beam profile control
JP2006503208A JP4422718B2 (en) 2003-02-14 2004-01-29 Micromachined ultrasonic transducer with bias polar beam profile control
EP04706549A EP1593115B1 (en) 2003-02-14 2004-01-29 Microfabricated ultrasonic transducers with bias polarity beam profile control
DE602004006232T DE602004006232T2 (en) 2003-02-14 2004-01-29 MICRO-MADE ULTRASONIC TRANSDUCERS WITH BIAS POLARITY BEAM PROFILING CONTROL

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/367,106 2003-02-14
US10/367,106 US7087023B2 (en) 2003-02-14 2003-02-14 Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same

Publications (2)

Publication Number Publication Date
WO2004075165A1 WO2004075165A1 (en) 2004-09-02
WO2004075165B1 true WO2004075165B1 (en) 2006-04-27

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Country Status (6)

Country Link
US (1) US7087023B2 (en)
EP (1) EP1593115B1 (en)
JP (1) JP4422718B2 (en)
CN (1) CN1833273B (en)
DE (1) DE602004006232T2 (en)
WO (1) WO2004075165A1 (en)

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DE602004006232T2 (en) 2008-02-07
JP4422718B2 (en) 2010-02-24
CN1833273A (en) 2006-09-13
EP1593115A1 (en) 2005-11-09
CN1833273B (en) 2010-12-22
JP2006519556A (en) 2006-08-24
WO2004075165A1 (en) 2004-09-02
US7087023B2 (en) 2006-08-08
EP1593115B1 (en) 2007-05-02
US20040160144A1 (en) 2004-08-19

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