WO2004088764A8 - Ion beam method for removing an organic light emitting material - Google Patents

Ion beam method for removing an organic light emitting material

Info

Publication number
WO2004088764A8
WO2004088764A8 PCT/GB2004/001471 GB2004001471W WO2004088764A8 WO 2004088764 A8 WO2004088764 A8 WO 2004088764A8 GB 2004001471 W GB2004001471 W GB 2004001471W WO 2004088764 A8 WO2004088764 A8 WO 2004088764A8
Authority
WO
WIPO (PCT)
Prior art keywords
organic light
emitting material
light emitting
ion beam
beam method
Prior art date
Application number
PCT/GB2004/001471
Other languages
French (fr)
Other versions
WO2004088764A3 (en
WO2004088764A2 (en
Inventor
Alastair Robert Buckley
Georg Karl Hermann Bodammer
Carsten Giebeler
Original Assignee
Microemissive Displays Ltd
Alastair Robert Buckley
Georg Karl Hermann Bodammer
Carsten Giebeler
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microemissive Displays Ltd, Alastair Robert Buckley, Georg Karl Hermann Bodammer, Carsten Giebeler filed Critical Microemissive Displays Ltd
Priority to EP04725409A priority Critical patent/EP1609198A2/en
Priority to JP2006506089A priority patent/JP2006522443A/en
Priority to US10/551,647 priority patent/US7731860B2/en
Publication of WO2004088764A2 publication Critical patent/WO2004088764A2/en
Publication of WO2004088764A3 publication Critical patent/WO2004088764A3/en
Publication of WO2004088764A8 publication Critical patent/WO2004088764A8/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

A method of removing an organic, preferably polymeric, light-emitting material (4) from defined areas of a substrate (1) comprises the steps of arranging a shadow mask (5) to overlie the organic material other than in the defined areas, and applying a beam of ions (7) to the defined areas through the mask. The method is useful in forming organic light-emitting diode arrays.
PCT/GB2004/001471 2003-04-03 2004-04-02 Ion beam method for removing an organic light emitting material WO2004088764A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04725409A EP1609198A2 (en) 2003-04-03 2004-04-02 Ion beam method for removing an organic light emitting material.
JP2006506089A JP2006522443A (en) 2003-04-03 2004-04-02 Removing material from the substrate
US10/551,647 US7731860B2 (en) 2003-04-03 2004-04-02 Ion beam method for removing an organic light emitting material

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0307746.8A GB0307746D0 (en) 2003-04-03 2003-04-03 Removing a material from a substrate
GB0307746.8 2003-04-03

Publications (3)

Publication Number Publication Date
WO2004088764A2 WO2004088764A2 (en) 2004-10-14
WO2004088764A3 WO2004088764A3 (en) 2005-01-20
WO2004088764A8 true WO2004088764A8 (en) 2005-09-29

Family

ID=9956143

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/001471 WO2004088764A2 (en) 2003-04-03 2004-04-02 Ion beam method for removing an organic light emitting material

Country Status (5)

Country Link
US (1) US7731860B2 (en)
EP (1) EP1609198A2 (en)
JP (1) JP2006522443A (en)
GB (1) GB0307746D0 (en)
WO (1) WO2004088764A2 (en)

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* Cited by examiner, † Cited by third party
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JP4674848B2 (en) * 2004-11-09 2011-04-20 トッキ株式会社 Organic EL device manufacturing equipment
JP4379394B2 (en) * 2005-07-27 2009-12-09 セイコーエプソン株式会社 Mask and organic EL device manufacturing method
GB0605014D0 (en) * 2006-03-13 2006-04-19 Microemissive Displays Ltd Electroluminescent device
GB0622998D0 (en) * 2006-11-17 2006-12-27 Microemissive Displays Ltd Colour optoelectronic device
JP2010228066A (en) * 2009-03-27 2010-10-14 Kyushu Univ Production method of nano-dot
JP5899583B2 (en) * 2011-08-11 2016-04-06 株式会社ブイ・テクノロジー Vacuum deposition method, vacuum deposition apparatus, organic EL display device manufacturing method, and organic EL display apparatus
US20140342102A1 (en) * 2013-05-20 2014-11-20 Advantech Global, Ltd Small Feature Size Fabrication Using a Shadow Mask Deposition Process
DE102017119311B4 (en) * 2017-08-23 2019-03-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a multi-colored luminous component

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Also Published As

Publication number Publication date
JP2006522443A (en) 2006-09-28
EP1609198A2 (en) 2005-12-28
US7731860B2 (en) 2010-06-08
WO2004088764A3 (en) 2005-01-20
US20070077368A1 (en) 2007-04-05
WO2004088764A2 (en) 2004-10-14
GB0307746D0 (en) 2003-05-07

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