WO2004090558A3 - Test head positioning system and method - Google Patents

Test head positioning system and method Download PDF

Info

Publication number
WO2004090558A3
WO2004090558A3 PCT/US2004/009774 US2004009774W WO2004090558A3 WO 2004090558 A3 WO2004090558 A3 WO 2004090558A3 US 2004009774 W US2004009774 W US 2004009774W WO 2004090558 A3 WO2004090558 A3 WO 2004090558A3
Authority
WO
WIPO (PCT)
Prior art keywords
axis
load
positioning system
test head
head positioning
Prior art date
Application number
PCT/US2004/009774
Other languages
French (fr)
Other versions
WO2004090558A2 (en
Inventor
Christian Mueller
Original Assignee
Intest Ip Corp
Christian Mueller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Ip Corp, Christian Mueller filed Critical Intest Ip Corp
Priority to JP2006509493A priority Critical patent/JP5183061B2/en
Priority to EP04758607A priority patent/EP1618394A2/en
Priority to CN2004800088159A priority patent/CN1768271B/en
Priority to DE04758607T priority patent/DE04758607T1/en
Publication of WO2004090558A2 publication Critical patent/WO2004090558A2/en
Publication of WO2004090558A3 publication Critical patent/WO2004090558A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

An apparatus for supporting a load includes pneumatic units and couplers coupled to opposite sides of the load. The couplers move the load parallel to a first axis responsive to actuation of the pneumatic units. At least one of the couplers rotate the load about a second axis orthogonal to the first axis. The load is compliant along the first axis and about the second axis. At least one of the pneumatic units provides compliance along the first axis and about the second axis.
PCT/US2004/009774 2003-03-31 2004-03-31 Test head positioning system and method WO2004090558A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006509493A JP5183061B2 (en) 2003-03-31 2004-03-31 Test head positioning system and method
EP04758607A EP1618394A2 (en) 2003-03-31 2004-03-31 Test head positioning system and method
CN2004800088159A CN1768271B (en) 2003-03-31 2004-03-31 Test head positioning system and method
DE04758607T DE04758607T1 (en) 2003-03-31 2004-03-31 ADJUSTMENT DEVICE AND METHOD FOR TEST HEADS

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US45901903P 2003-03-31 2003-03-31
US60/459,019 2003-03-31
US10/813,362 2004-03-30
US10/813,362 US7235964B2 (en) 2003-03-31 2004-03-30 Test head positioning system and method

Publications (2)

Publication Number Publication Date
WO2004090558A2 WO2004090558A2 (en) 2004-10-21
WO2004090558A3 true WO2004090558A3 (en) 2005-05-19

Family

ID=33162197

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/009774 WO2004090558A2 (en) 2003-03-31 2004-03-31 Test head positioning system and method

Country Status (8)

Country Link
US (3) US7235964B2 (en)
EP (1) EP1618394A2 (en)
JP (2) JP5183061B2 (en)
KR (1) KR20050109615A (en)
CN (2) CN101806817B (en)
DE (1) DE04758607T1 (en)
SG (2) SG162618A1 (en)
WO (1) WO2004090558A2 (en)

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Also Published As

Publication number Publication date
JP2007524814A (en) 2007-08-30
JP2011149950A (en) 2011-08-04
CN1768271B (en) 2010-05-05
JP5564004B2 (en) 2014-07-30
US20080122432A1 (en) 2008-05-29
CN1768271A (en) 2006-05-03
SG158747A1 (en) 2010-02-26
DE04758607T1 (en) 2006-07-13
SG162618A1 (en) 2010-07-29
WO2004090558A2 (en) 2004-10-21
JP5183061B2 (en) 2013-04-17
CN101806817B (en) 2014-01-08
CN101806817A (en) 2010-08-18
EP1618394A2 (en) 2006-01-25
US20040227534A1 (en) 2004-11-18
US7728579B2 (en) 2010-06-01
US8035406B2 (en) 2011-10-11
US7235964B2 (en) 2007-06-26
US20100264907A1 (en) 2010-10-21
KR20050109615A (en) 2005-11-21

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