WO2004090577A3 - Maintaining immersion fluid under a lithographic projection lens - Google Patents

Maintaining immersion fluid under a lithographic projection lens Download PDF

Info

Publication number
WO2004090577A3
WO2004090577A3 PCT/IB2004/001259 IB2004001259W WO2004090577A3 WO 2004090577 A3 WO2004090577 A3 WO 2004090577A3 IB 2004001259 W IB2004001259 W IB 2004001259W WO 2004090577 A3 WO2004090577 A3 WO 2004090577A3
Authority
WO
WIPO (PCT)
Prior art keywords
work piece
immersion fluid
projection lens
fluid under
lithographic projection
Prior art date
Application number
PCT/IB2004/001259
Other languages
French (fr)
Other versions
WO2004090577A2 (en
Inventor
Michael Binnard
Original Assignee
Nippon Kogaku Kk
Michael Binnard
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku Kk, Michael Binnard filed Critical Nippon Kogaku Kk
Priority to KR1020057019366A priority Critical patent/KR101159564B1/en
Priority to KR1020147017763A priority patent/KR101577555B1/en
Priority to EP04721260.0A priority patent/EP1616220B1/en
Priority to KR1020127006823A priority patent/KR101245031B1/en
Priority to KR1020157002445A priority patent/KR101612681B1/en
Priority to KR1020137013439A priority patent/KR101498405B1/en
Priority to KR1020117014237A priority patent/KR101225829B1/en
Priority to KR1020177000845A priority patent/KR101861493B1/en
Priority to KR1020117014234A priority patent/KR101178756B1/en
Priority to KR1020117014236A priority patent/KR101225884B1/en
Priority to JP2006506525A priority patent/JP4315198B2/en
Priority to KR1020147022733A priority patent/KR101533206B1/en
Priority to KR1020117031356A priority patent/KR101177332B1/en
Priority to KR1020187013961A priority patent/KR20180054929A/en
Priority to CN2004800097020A priority patent/CN101002140B/en
Priority to KR1020127006824A priority patent/KR101304105B1/en
Priority to KR1020147000451A priority patent/KR101475657B1/en
Priority to KR1020157029869A priority patent/KR101697896B1/en
Priority to TW102115386A priority patent/TWI437351B/en
Priority to TW096142837A priority patent/TWI382270B/en
Priority to TW093109873A priority patent/TWI342036B/en
Priority to TW101108066A priority patent/TWI425302B/en
Priority to TW104111404A priority patent/TWI545387B/en
Priority to TW096142836A priority patent/TWI346349B/en
Priority to TW096142839A priority patent/TWI346345B/en
Priority to TW103123289A priority patent/TWI545386B/en
Priority to TW104142913A priority patent/TWI578091B/en
Priority to TW101108065A priority patent/TWI397762B/en
Priority to TW106103664A priority patent/TWI614564B/en
Priority to TW107100503A priority patent/TWI648589B/en
Priority to TW100122561A priority patent/TWI372309B/en
Priority to TW102115385A priority patent/TWI486701B/en
Priority to TW100122562A priority patent/TWI364623B/en
Priority to TW100127308A priority patent/TW201144925A/en
Publication of WO2004090577A2 publication Critical patent/WO2004090577A2/en
Publication of WO2004090577A3 publication Critical patent/WO2004090577A3/en
Priority to IL170735A priority patent/IL170735A/en
Priority to US11/237,721 priority patent/US7372538B2/en
Priority to US11/259,061 priority patent/US7327435B2/en
Priority to HK06107939.3A priority patent/HK1087782A1/en
Priority to US11/785,539 priority patent/US9081298B2/en
Priority to US11/798,262 priority patent/US7545479B2/en
Priority to US11/812,925 priority patent/US8848168B2/en
Priority to US11/822,804 priority patent/US8514367B2/en
Priority to US11/882,837 priority patent/US8269944B2/en
Priority to US11/984,980 priority patent/US8035795B2/en
Priority to US12/662,471 priority patent/US8351019B2/en
Priority to US12/923,823 priority patent/US8879047B2/en
Priority to US12/923,822 priority patent/US8488100B2/en
Priority to IL209223A priority patent/IL209223A/en
Priority to IL209222A priority patent/IL209222A0/en
Priority to IL209224A priority patent/IL209224A/en
Priority to IL209439A priority patent/IL209439A/en
Priority to US13/944,487 priority patent/US9329493B2/en
Priority to US13/945,201 priority patent/US8634057B2/en
Priority to US13/945,407 priority patent/US8610875B2/en
Priority to US13/946,317 priority patent/US8848166B2/en
Priority to US14/734,783 priority patent/US9946163B2/en
Priority to US15/138,829 priority patent/US9500960B2/en
Priority to US15/950,619 priority patent/US20180231898A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G03F7/2055—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser for the production of printing plates; Exposure of liquid photohardening compositions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
    • G03F7/2063—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam for the production of exposure masks or reticles
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Abstract

An apparatus and method for maintaining immersion fluid (212) in the gap adjacent the projection lens (16) during the exchange of a work piece (208) in a lithography machine (10) is disclosed. The apparatus and method includes an optical assembly (16) configured to project an image onto a work piece (208) and a stage assembly (202) including a work piece table (204) configured to support the work piece (208) adjacent the optical assembly (16). An environmental system (26) is provided to supply and remove an immersion fluid (212) from a gap between the optical assembly (16) and the work piece (208) on the stage assembly (202). After exposure of the work piece (208) is complete, an exchange system (216) removes the work piece (208) and replaces it with a second work piece. An immersion fluid containment system (214) is provided to maintain the immersion liquid (212) in the gap during removal of the first work piece (208) and replacement with the second work piece.
PCT/IB2004/001259 2003-04-11 2004-03-17 Maintaining immersion fluid under a lithographic projection lens WO2004090577A2 (en)

Priority Applications (58)

Application Number Priority Date Filing Date Title
KR1020057019366A KR101159564B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020147017763A KR101577555B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
EP04721260.0A EP1616220B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid under a lithographic projection lens
KR1020127006823A KR101245031B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020157002445A KR101612681B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020137013439A KR101498405B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020117014237A KR101225829B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020177000845A KR101861493B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020117014234A KR101178756B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020117014236A KR101225884B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
JP2006506525A JP4315198B2 (en) 2003-04-11 2004-03-17 Lithographic apparatus for maintaining immersion liquid under an optical assembly, immersion liquid maintenance method and device manufacturing method using them
KR1020147022733A KR101533206B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020117031356A KR101177332B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020187013961A KR20180054929A (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
CN2004800097020A CN101002140B (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens in a lithography machine
KR1020127006824A KR101304105B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020147000451A KR101475657B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
KR1020157029869A KR101697896B1 (en) 2003-04-11 2004-03-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW102115386A TWI437351B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus and immersion exposure method
TW096142837A TWI382270B (en) 2003-04-11 2004-04-09 Liquid immersion exposure apparatus and method and device manufacturing method
TW093109873A TWI342036B (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW101108066A TWI425302B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW104111404A TWI545387B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW096142836A TWI346349B (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW096142839A TWI346345B (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW103123289A TWI545386B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW104142913A TWI578091B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW101108065A TWI397762B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW106103664A TWI614564B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW107100503A TWI648589B (en) 2003-04-11 2004-04-09 Immersion lithography apparatus, immersion lithography method and device manufacturing method
TW100122561A TWI372309B (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW102115385A TWI486701B (en) 2003-04-11 2004-04-09 Immersion exposure apparatus, immersion exposure method and device manufacturing method
TW100122562A TWI364623B (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
TW100127308A TW201144925A (en) 2003-04-11 2004-04-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
IL170735A IL170735A (en) 2003-04-11 2005-09-07 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/237,721 US7372538B2 (en) 2003-04-11 2005-09-29 Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/259,061 US7327435B2 (en) 2003-04-11 2005-10-27 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
HK06107939.3A HK1087782A1 (en) 2003-04-11 2006-07-17 Apparatus and method for maintaining immersion fluid under a lithographic projection lens
US11/785,539 US9081298B2 (en) 2003-04-11 2007-04-18 Apparatus for maintaining immersion fluid in the gap under the projection lens during wafer exchange using a co-planar member in an immersion lithography machine
US11/798,262 US7545479B2 (en) 2003-04-11 2007-05-11 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/812,925 US8848168B2 (en) 2003-04-11 2007-06-22 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/822,804 US8514367B2 (en) 2003-04-11 2007-07-10 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/882,837 US8269944B2 (en) 2003-04-11 2007-08-06 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US11/984,980 US8035795B2 (en) 2003-04-11 2007-11-26 Apparatus and method for maintaining immersion fluid in the gap under the protection lens during wafer exchange in an immersion lithography machine
US12/662,471 US8351019B2 (en) 2003-04-11 2010-04-19 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US12/923,823 US8879047B2 (en) 2003-04-11 2010-10-08 Apparatus and method for maintaining immersion fluid in the gap under the projection lens using a pad member or second stage during wafer exchange in an immersion lithography machine
US12/923,822 US8488100B2 (en) 2003-04-11 2010-10-08 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
IL209223A IL209223A (en) 2003-04-11 2010-11-10 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
IL209222A IL209222A0 (en) 2003-04-11 2010-11-10 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
IL209224A IL209224A (en) 2003-04-11 2010-11-10 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
IL209439A IL209439A (en) 2003-04-11 2010-11-18 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US13/944,487 US9329493B2 (en) 2003-04-11 2013-07-17 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US13/945,201 US8634057B2 (en) 2003-04-11 2013-07-18 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US13/945,407 US8610875B2 (en) 2003-04-11 2013-07-18 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US13/946,317 US8848166B2 (en) 2003-04-11 2013-07-19 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US14/734,783 US9946163B2 (en) 2003-04-11 2015-06-09 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US15/138,829 US9500960B2 (en) 2003-04-11 2016-04-26 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine
US15/950,619 US20180231898A1 (en) 2003-04-11 2018-04-11 Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine

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