WO2004099861A2 - Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers - Google Patents
Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers Download PDFInfo
- Publication number
- WO2004099861A2 WO2004099861A2 PCT/US2004/013163 US2004013163W WO2004099861A2 WO 2004099861 A2 WO2004099861 A2 WO 2004099861A2 US 2004013163 W US2004013163 W US 2004013163W WO 2004099861 A2 WO2004099861 A2 WO 2004099861A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reflector
- electronic device
- reflectors
- optical cavity
- pixel
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
- G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
- B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/06—Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04750866A EP1618427A2 (en) | 2003-04-30 | 2004-04-29 | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
JP2006513412A JP2006525554A (en) | 2003-04-30 | 2004-04-29 | Self-packaged optical interference display device having adsorption prevention bump, integrated microlens, and reflection / absorption layer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/428,247 | 2003-04-30 | ||
US10/428,247 US7370185B2 (en) | 2003-04-30 | 2003-04-30 | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004099861A2 true WO2004099861A2 (en) | 2004-11-18 |
WO2004099861A3 WO2004099861A3 (en) | 2005-05-06 |
Family
ID=33310360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/013163 WO2004099861A2 (en) | 2003-04-30 | 2004-04-29 | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
Country Status (7)
Country | Link |
---|---|
US (2) | US7370185B2 (en) |
EP (1) | EP1618427A2 (en) |
JP (1) | JP2006525554A (en) |
KR (1) | KR20060014384A (en) |
CN (1) | CN100359361C (en) |
TW (1) | TWI300875B (en) |
WO (1) | WO2004099861A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005073950A1 (en) * | 2004-01-22 | 2005-08-11 | Hewlett-Packard Development Company, L.P. | A charge control circuit |
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Also Published As
Publication number | Publication date |
---|---|
CN100359361C (en) | 2008-01-02 |
TWI300875B (en) | 2008-09-11 |
CN1781050A (en) | 2006-05-31 |
KR20060014384A (en) | 2006-02-15 |
US20040217919A1 (en) | 2004-11-04 |
TW200500771A (en) | 2005-01-01 |
US20070020948A1 (en) | 2007-01-25 |
US7441134B2 (en) | 2008-10-21 |
US7370185B2 (en) | 2008-05-06 |
WO2004099861A3 (en) | 2005-05-06 |
EP1618427A2 (en) | 2006-01-25 |
JP2006525554A (en) | 2006-11-09 |
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