WO2004109410A3 - Method for data pre-population - Google Patents

Method for data pre-population Download PDF

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Publication number
WO2004109410A3
WO2004109410A3 PCT/US2004/014756 US2004014756W WO2004109410A3 WO 2004109410 A3 WO2004109410 A3 WO 2004109410A3 US 2004014756 W US2004014756 W US 2004014756W WO 2004109410 A3 WO2004109410 A3 WO 2004109410A3
Authority
WO
WIPO (PCT)
Prior art keywords
data
apc
population
apc system
data pre
Prior art date
Application number
PCT/US2004/014756
Other languages
French (fr)
Other versions
WO2004109410A2 (en
Inventor
James E Willis
Satoshi Harada
Edward C Hume Iii
James E Klekotka
Original Assignee
Tokyo Electron Ltd
James E Willis
Satoshi Harada
Edward C Hume Iii
James E Klekotka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, James E Willis, Satoshi Harada, Edward C Hume Iii, James E Klekotka filed Critical Tokyo Electron Ltd
Priority to JP2006532961A priority Critical patent/JP2007516497A/en
Publication of WO2004109410A2 publication Critical patent/WO2004109410A2/en
Publication of WO2004109410A3 publication Critical patent/WO2004109410A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31288—Archive collected data into history file
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.
PCT/US2004/014756 2003-05-30 2004-05-11 Method for data pre-population WO2004109410A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006532961A JP2007516497A (en) 2003-05-30 2004-05-11 Data presetting method.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47422603P 2003-05-30 2003-05-30
US60/474,226 2003-05-30

Publications (2)

Publication Number Publication Date
WO2004109410A2 WO2004109410A2 (en) 2004-12-16
WO2004109410A3 true WO2004109410A3 (en) 2005-11-10

Family

ID=33511592

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/014756 WO2004109410A2 (en) 2003-05-30 2004-05-11 Method for data pre-population

Country Status (6)

Country Link
US (1) US7437199B2 (en)
JP (1) JP2007516497A (en)
KR (1) KR101030104B1 (en)
CN (1) CN100582977C (en)
TW (1) TWI283817B (en)
WO (1) WO2004109410A2 (en)

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US8990375B2 (en) * 2012-08-31 2015-03-24 Facebook, Inc. Subscription groups in publish-subscribe system
TWI539298B (en) 2015-05-27 2016-06-21 國立成功大學 Metrology sampling method with sampling rate decision scheme and computer program product thereof
JP6956272B2 (en) * 2018-07-31 2021-11-02 株式会社Ｆｕｊｉ Trace support device
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KR20220092157A (en) * 2020-12-24 2022-07-01 세메스 주식회사 Controlling apparatus for controlliing operation of substrate processing apparatus

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Also Published As

Publication number Publication date
CN1795422A (en) 2006-06-28
KR20060023980A (en) 2006-03-15
US7437199B2 (en) 2008-10-14
WO2004109410A2 (en) 2004-12-16
TWI283817B (en) 2007-07-11
TW200426628A (en) 2004-12-01
US20040243256A1 (en) 2004-12-02
JP2007516497A (en) 2007-06-21
KR101030104B1 (en) 2011-04-20
CN100582977C (en) 2010-01-20

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