WO2005029552A3 - Sn-c structures prepared by plasma-enhanced chemical vapor deposition - Google Patents

Sn-c structures prepared by plasma-enhanced chemical vapor deposition Download PDF

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Publication number
WO2005029552A3
WO2005029552A3 PCT/US2004/030371 US2004030371W WO2005029552A3 WO 2005029552 A3 WO2005029552 A3 WO 2005029552A3 US 2004030371 W US2004030371 W US 2004030371W WO 2005029552 A3 WO2005029552 A3 WO 2005029552A3
Authority
WO
WIPO (PCT)
Prior art keywords
compositions
lithium
plasma
chemical vapor
enhanced chemical
Prior art date
Application number
PCT/US2004/030371
Other languages
French (fr)
Other versions
WO2005029552A2 (en
Inventor
Ping Liu
John A Turner
Original Assignee
Midwest Research Inst
Ping Liu
John A Turner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Midwest Research Inst, Ping Liu, John A Turner filed Critical Midwest Research Inst
Publication of WO2005029552A2 publication Critical patent/WO2005029552A2/en
Publication of WO2005029552A3 publication Critical patent/WO2005029552A3/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C13/00—Alloys based on tin
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0428—Chemical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Abstract

An exemplary depositing method includes use of a plasma-enhanced chemical vapor depostion (PECVD) technique to deposit various exemplary tin and carbon compositions onto a surface. Such compositions are optionally suitable for use as anodes for lithium-ion batteries. Method parameters such as electromagnetic energy or power and temperature (e.g., substrate temperature, etc.) can affect characteristics of deposited compositions. Various exemplary compositions allow for interaction between tin and lithium and carbon and lithium to thereby increase lithium storage capacity. Various exemplary compositions exhibit superior long term cycling stability and are suitable for use as an anode or an anode material.
PCT/US2004/030371 2003-09-17 2004-09-16 Sn-c structures prepared by plasma-enhanced chemical vapor deposition WO2005029552A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US50376503P 2003-09-17 2003-09-17
US60/503,765 2003-09-17

Publications (2)

Publication Number Publication Date
WO2005029552A2 WO2005029552A2 (en) 2005-03-31
WO2005029552A3 true WO2005029552A3 (en) 2005-09-09

Family

ID=34375395

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/030371 WO2005029552A2 (en) 2003-09-17 2004-09-16 Sn-c structures prepared by plasma-enhanced chemical vapor deposition

Country Status (1)

Country Link
WO (1) WO2005029552A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3428999A1 (en) * 2017-07-12 2019-01-16 Evonik Degussa GmbH Silicon-carbon composite powder

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020012845A1 (en) * 2000-06-16 2002-01-31 Wan-Uk Choi Negative active material for rechargeable lithium battery and method of preparing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020012845A1 (en) * 2000-06-16 2002-01-31 Wan-Uk Choi Negative active material for rechargeable lithium battery and method of preparing the same

Also Published As

Publication number Publication date
WO2005029552A2 (en) 2005-03-31

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