WO2005031799A2 - 露光装置、露光方法及びデバイス製造方法 - Google Patents
露光装置、露光方法及びデバイス製造方法 Download PDFInfo
- Publication number
- WO2005031799A2 WO2005031799A2 PCT/JP2004/014693 JP2004014693W WO2005031799A2 WO 2005031799 A2 WO2005031799 A2 WO 2005031799A2 JP 2004014693 W JP2004014693 W JP 2004014693W WO 2005031799 A2 WO2005031799 A2 WO 2005031799A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- optical system
- exposure
- liquid
- projection optical
- Prior art date
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
- G03F7/706—Aberration measurement
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
Abstract
Description
Claims
Priority Applications (22)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020167006334A KR101739711B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020067006005A KR101323396B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020177013519A KR20170058458A (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020127021591A KR101335736B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020137014763A KR101441840B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020147005637A KR101498437B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
EP04788458A EP1670043B1 (en) | 2003-09-29 | 2004-09-29 | Exposure apparatus, exposure method, and device manufacturing method |
KR1020157013859A KR101743378B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020137014762A KR101421398B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020117024402A KR101289918B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
KR1020147029481A KR101664642B1 (ko) | 2003-09-29 | 2004-09-29 | 노광장치, 노광방법 및 디바이스 제조방법 |
IL174296A IL174296A0 (en) | 2003-09-29 | 2006-03-13 | Exposure appartus, exposure method, and method for producing device |
US11/390,178 US8305552B2 (en) | 2003-09-29 | 2006-03-28 | Exposure apparatus, exposure method, and method for producing device |
US11/403,922 US8139198B2 (en) | 2003-09-29 | 2006-04-14 | Exposure apparatus, exposure method, and method for producing device |
HK06113781.0A HK1093119A1 (en) | 2003-09-29 | 2006-12-14 | Exposure apparatus, exposure method, and device manufacturing method |
US11/896,447 US8039807B2 (en) | 2003-09-29 | 2007-08-31 | Exposure apparatus, exposure method, and method for producing device |
US13/633,599 US8749759B2 (en) | 2003-09-29 | 2012-10-02 | Exposure apparatus, exposure method, and method for producing device |
IL231730A IL231730A (en) | 2003-09-29 | 2014-03-26 | Exposure facility and method of manufacturing the facility |
US14/268,356 US9513558B2 (en) | 2003-09-29 | 2014-05-02 | Exposure apparatus, exposure method, and method for producing device |
IL235090A IL235090A (en) | 2003-09-29 | 2014-10-07 | Exposure facility, method of exposure and method of manufacturing the facility |
US15/369,062 US10025194B2 (en) | 2003-09-29 | 2016-12-05 | Exposure apparatus, exposure method, and method for producing device |
US16/034,490 US20180348643A1 (en) | 2003-09-29 | 2018-07-13 | Exposure apparatus, exposure method, and method for producing device |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003338420 | 2003-09-29 | ||
JP2003-338420 | 2003-09-29 | ||
JP2003344938 | 2003-10-02 | ||
JP2003-344938 | 2003-10-02 | ||
JP2004-042931 | 2004-02-19 | ||
JP2004042931 | 2004-02-19 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/390,178 Continuation US8305552B2 (en) | 2003-09-29 | 2006-03-28 | Exposure apparatus, exposure method, and method for producing device |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005031799A2 true WO2005031799A2 (ja) | 2005-04-07 |
WO2005031799A3 WO2005031799A3 (ja) | 2005-06-23 |
Family
ID=34396843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/014693 WO2005031799A2 (ja) | 2003-09-29 | 2004-09-29 | 露光装置、露光方法及びデバイス製造方法 |
Country Status (8)
Country | Link |
---|---|
US (7) | US8305552B2 (ja) |
EP (6) | EP2312395B1 (ja) |
KR (10) | KR101335736B1 (ja) |
HK (3) | HK1093119A1 (ja) |
IL (3) | IL174296A0 (ja) |
SG (2) | SG131929A1 (ja) |
TW (6) | TWI525660B (ja) |
WO (1) | WO2005031799A2 (ja) |
Cited By (8)
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WO2005117075A1 (ja) * | 2004-05-26 | 2005-12-08 | Nikon Corporation | 較正方法、予測方法、露光方法、反射率較正方法及び反射率計測方法、露光装置、並びにデバイス製造方法 |
WO2006059720A1 (ja) * | 2004-12-02 | 2006-06-08 | Nikon Corporation | 露光装置、露光方法、及びデバイス製造方法 |
US7193232B2 (en) | 2002-11-12 | 2007-03-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method with substrate measurement not through liquid |
EP1780602A2 (en) * | 2005-10-21 | 2007-05-02 | Canon Kabushiki Kaisha | Apparatus and method for improving detected resolution and/or intensity of a sampled image |
US7768625B2 (en) | 2005-06-02 | 2010-08-03 | Canon Kabushiki Kaisha | Photo detector unit and exposure apparatus having the same |
US8542341B2 (en) * | 2005-01-12 | 2013-09-24 | Asml Netherlands B.V. | Exposure apparatus |
CN104321702A (zh) * | 2012-05-22 | 2015-01-28 | Asml荷兰有限公司 | 传感器、光刻设备以及器件制造方法 |
TWI699151B (zh) * | 2018-10-11 | 2020-07-11 | 大陸商名碩電腦(蘇州)有限公司 | 托盤 |
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CN100568101C (zh) | 2002-11-12 | 2009-12-09 | Asml荷兰有限公司 | 光刻装置和器件制造方法 |
US9482966B2 (en) | 2002-11-12 | 2016-11-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US10503084B2 (en) | 2002-11-12 | 2019-12-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
DE10261775A1 (de) | 2002-12-20 | 2004-07-01 | Carl Zeiss Smt Ag | Vorrichtung zur optischen Vermessung eines Abbildungssystems |
US7213963B2 (en) | 2003-06-09 | 2007-05-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
TWI467634B (zh) | 2003-06-13 | 2015-01-01 | 尼康股份有限公司 | An exposure method, a substrate stage, an exposure apparatus, and an element manufacturing method |
EP2466382B1 (en) * | 2003-07-08 | 2014-11-26 | Nikon Corporation | Wafer table for immersion lithography |
WO2005010960A1 (ja) * | 2003-07-25 | 2005-02-03 | Nikon Corporation | 投影光学系の検査方法および検査装置、ならびに投影光学系の製造方法 |
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TWI525660B (zh) | 2003-09-29 | 2016-03-11 | 尼康股份有限公司 | An exposure apparatus and an exposure method, and an element manufacturing method |
JP4513747B2 (ja) | 2003-10-31 | 2010-07-28 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
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