WO2005034180A3 - System and method for on-tool semiconductor simulation - Google Patents

System and method for on-tool semiconductor simulation Download PDF

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Publication number
WO2005034180A3
WO2005034180A3 PCT/US2004/028801 US2004028801W WO2005034180A3 WO 2005034180 A3 WO2005034180 A3 WO 2005034180A3 US 2004028801 W US2004028801 W US 2004028801W WO 2005034180 A3 WO2005034180 A3 WO 2005034180A3
Authority
WO
WIPO (PCT)
Prior art keywords
processing tool
semiconductor processing
process performed
principles
semiconductor simulation
Prior art date
Application number
PCT/US2004/028801
Other languages
French (fr)
Other versions
WO2005034180A2 (en
Inventor
Eric J Strang
Original Assignee
Tokyo Electron Ltd
Eric J Strang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Eric J Strang filed Critical Tokyo Electron Ltd
Priority to JP2006533873A priority Critical patent/JP4795957B2/en
Priority to EP04788575A priority patent/EP1668501A2/en
Publication of WO2005034180A2 publication Critical patent/WO2005034180A2/en
Publication of WO2005034180A3 publication Critical patent/WO2005034180A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/20—Design optimisation, verification or simulation
    • G06F30/23—Design optimisation, verification or simulation using finite element methods [FEM] or finite difference methods [FDM]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2111/00—Details relating to CAD techniques
    • G06F2111/08—Probabilistic or stochastic CAD

Abstract

A method, system and computer readable medium for controlling a process performed by a semiconductor processing tool (102) includes inputting data (104) relating to a process performed by the semiconductor processing tool (102), and inputting a first principles physical model (106) relating to the semiconductor processing tool (102). First principles simulation (108) is then performed using the input data (104) and the physical model (106) to provide a first principles simulation result, and the first principles simulation result is used to control the process performed by the semiconductor processing tool (102).
PCT/US2004/028801 2003-09-30 2004-09-20 System and method for on-tool semiconductor simulation WO2005034180A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006533873A JP4795957B2 (en) 2003-09-30 2004-09-20 A system and method using a first principle simulation for controlling a semiconductor manufacturing process.
EP04788575A EP1668501A2 (en) 2003-09-30 2004-09-20 System and method for on-tool semiconductor simulation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/673,507 2003-09-30
US10/673,507 US8073667B2 (en) 2003-09-30 2003-09-30 System and method for using first-principles simulation to control a semiconductor manufacturing process

Publications (2)

Publication Number Publication Date
WO2005034180A2 WO2005034180A2 (en) 2005-04-14
WO2005034180A3 true WO2005034180A3 (en) 2006-03-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/028801 WO2005034180A2 (en) 2003-09-30 2004-09-20 System and method for on-tool semiconductor simulation

Country Status (7)

Country Link
US (1) US8073667B2 (en)
EP (1) EP1668501A2 (en)
JP (1) JP4795957B2 (en)
KR (1) KR20060116192A (en)
CN (1) CN1867896A (en)
TW (1) TWI304527B (en)
WO (1) WO2005034180A2 (en)

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Also Published As

Publication number Publication date
CN1867896A (en) 2006-11-22
JP4795957B2 (en) 2011-10-19
US20050071038A1 (en) 2005-03-31
WO2005034180A2 (en) 2005-04-14
JP2007507886A (en) 2007-03-29
US8073667B2 (en) 2011-12-06
TW200523701A (en) 2005-07-16
TWI304527B (en) 2008-12-21
KR20060116192A (en) 2006-11-14
EP1668501A2 (en) 2006-06-14

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