WO2005050698A3 - System and method for on-tool semiconductor simulation - Google Patents

System and method for on-tool semiconductor simulation Download PDF

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Publication number
WO2005050698A3
WO2005050698A3 PCT/US2004/028804 US2004028804W WO2005050698A3 WO 2005050698 A3 WO2005050698 A3 WO 2005050698A3 US 2004028804 W US2004028804 W US 2004028804W WO 2005050698 A3 WO2005050698 A3 WO 2005050698A3
Authority
WO
WIPO (PCT)
Prior art keywords
processing tool
semiconductor processing
process performed
principles
simulation result
Prior art date
Application number
PCT/US2004/028804
Other languages
French (fr)
Other versions
WO2005050698A2 (en
Inventor
Eric J Strang
Original Assignee
Tokyo Electron Ltd
Eric J Strang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Eric J Strang filed Critical Tokyo Electron Ltd
Priority to JP2006533875A priority Critical patent/JP4955393B2/en
Publication of WO2005050698A2 publication Critical patent/WO2005050698A2/en
Publication of WO2005050698A3 publication Critical patent/WO2005050698A3/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Abstract

A method, system and computer readable medium for controlling a process performed by a semiconductor processing tool (802). The method includes inputting data relating to a process performed by the semiconductor processing tool (802), inputting a first principles physical model (804) relating to the semiconductor processing tool (802), performing first principles simulation using the input data and the physical model to provide a first principles simulation result. The first principles simulation result is used to build an empirical model (842), and at least one of the first principles simulation result and the empirical model (842) is selected to control the process performed by the semiconductor processing tool (802).
PCT/US2004/028804 2003-09-30 2004-09-22 System and method for on-tool semiconductor simulation WO2005050698A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006533875A JP4955393B2 (en) 2003-09-30 2004-09-22 A system and method using first principle simulation to control a semiconductor manufacturing process.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/673,467 2003-09-30
US10/673,467 US8036869B2 (en) 2003-09-30 2003-09-30 System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model

Publications (2)

Publication Number Publication Date
WO2005050698A2 WO2005050698A2 (en) 2005-06-02
WO2005050698A3 true WO2005050698A3 (en) 2006-01-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/028804 WO2005050698A2 (en) 2003-09-30 2004-09-22 System and method for on-tool semiconductor simulation

Country Status (4)

Country Link
US (1) US8036869B2 (en)
JP (1) JP4955393B2 (en)
TW (1) TWI309846B (en)
WO (1) WO2005050698A2 (en)

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Also Published As

Publication number Publication date
TW200532748A (en) 2005-10-01
JP4955393B2 (en) 2012-06-20
US8036869B2 (en) 2011-10-11
US20050071035A1 (en) 2005-03-31
WO2005050698A2 (en) 2005-06-02
JP2007507888A (en) 2007-03-29
TWI309846B (en) 2009-05-11

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